CN214623299U

CN214623299U - Exposure device based on LCOS chip

Info

Publication number: CN214623299U
Application number: CN202120655871.2U
Authority: CN
Inventors: 马建立; 甘新昌
Original assignee: Shenzhen Sunshine Laser & Electronics Technology Co ltd
Current assignee: Shenzhen Sunshine Laser & Electronics Technology Co ltd
Priority date: 2021-03-31
Filing date: 2021-03-31
Publication date: 2021-11-05
Anticipated expiration: 2031-03-31

Abstract

The utility model provides an exposure device based on LCOS chip, the device includes even light source, polarization beam splitter prism, first LCOS chip, second LCOS chip and imaging lens, first part pixel point in the first LCOS chip is with reflecting the polarization beam splitter prism after some light in P polarized light is modulated into S polarized light, first part pixel point in the second LCOS chip is with reflecting the polarization beam splitter prism after some light in S polarized light is modulated into P polarized light, the reflection is back to polarization beam splitter prism, S polarized light that first LCOS chip reflects back and P polarized light that the second LCOS chip reflects back pass through polarization beam splitter prism beam splitting interface respectively, form the polarization and close the beam after the coincidence, coaxial transmission gets into imaging lens. Therefore, the utility model discloses an exposure device makes the light homoenergetic of the P polarization direction that the light source obtained behind polarization beam splitting prism and S polarization direction obtain can obtain effectual utilization, has improved the utilization efficiency and the exposure intensity of light source luminous power, is favorable to making resolution ratio, luminous power, efficiency concurrently and obtains the best performance.

Description

Exposure device based on LCOS chip

Technical Field

The utility model relates to an exposure technology especially relates to an exposure device based on LCOS chip.

Background

The exposure machine is one of the key parts that 3D printed, circuit board photoetching was used always, and the resolution ratio of exposure machine is one of the important performance parameter of exposure machine, and for the resolution ratio that promotes the exposure machine, patent application 201810170660.2 discloses an exposure machine based on LCOS technique, and this exposure machine adopts the LCOS chip to replace the DMD chip that adopts in the conventional exposure machine, provides new thinking for promoting pixel resolution ratio. However, since the LCOS belongs to a polarization device, when the light source passes through the PBS (polarization beam splitter) during modulation, only light in one polarization direction is effectively utilized, and light in the other polarization direction is lost, that is, only half of the light power is effective, so that the light power utilization efficiency is low, and the efficiency of the whole device is low, thereby reducing the performance of two important parameters of the exposure intensity and the efficiency of the exposure machine.

It is to be noted that the information disclosed in the above background section is only for understanding the background of the present application and thus may include information that does not constitute prior art known to a person of ordinary skill in the art.

SUMMERY OF THE UTILITY MODEL

The main object of the present invention is to overcome the above-mentioned drawbacks of the background art, and to provide an exposure apparatus based on LCOS chip.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an exposure device based on LCOS chip, includes light source, polarization beam splitter prism, first LCOS chip, second LCOS chip and imaging lens, wherein the light source is the light source that equalizes, the light that the light source sent passes through form the P polarized light that propagates along first direction transmission behind the polarization beam splitter prism and the S polarized light that propagates along the second direction reflection, first LCOS chip sets up in the first direction, the second LCOS chip sets up in the second direction, first LCOS chip with the second LCOS chip for the optical path of light source keeps unanimous, wherein, first partial pixel point in the first LCOS chip will reflect back after modulating into S polarized light for a part in the P polarized light polarization beam splitter prism, second partial pixel point in the first LCOS chip will another part in the P polarized light keeps reflecting back for P polarized light the polarization beam splitter prism, the first part of pixel points in the second LCOS chip modulate one part of the S polarized light into P polarized light and then reflect the P polarized light to the polarization beam splitter prism, and the second part of pixel points in the second LCOS chip keep the other part of the S polarized light as S polarized light and reflect the S polarized light to the polarization beam splitter prism; and the S polarized light reflected by the first LCOS chip and the P polarized light reflected by the second LCOS chip respectively pass through the light splitting interface of the polarization beam splitter prism to form a polarization beam combination after being superposed, and the polarization beam combination is coaxially transmitted to enter the imaging lens.

Further:

the first part of pixel points in the first LCOS chip and the first part of pixel points in the second LCOS chip have the same corresponding coordinates on the respective chips, and the second part of pixel points in the first LCOS chip and the second part of pixel points in the second LCOS chip have the same corresponding coordinates on the respective chips.

And the first part of pixel points in the first LCOS chip and the first part of pixel points in the second LCOS chip are displayed in a reversed color mode, and the second part of pixel points in the first LCOS chip and the second part of pixel points in the second LCOS chip are displayed in a reversed color mode.

The first part of pixel points in the first LCOS chip display white, the second part of pixel points in the first LCOS chip display black, the first part of pixel points in the second LCOS chip display black, and the second part of pixel points in the second LCOS chip display white.

The first part of pixel points in the first LCOS chip and the first part of pixel points in the second LCOS chip are displayed in the same color, the second part of pixel points in the first LCOS chip and the second part of pixel points in the second LCOS chip are displayed in the same color, and the modulation directions of the first LCOS chip and the second LCOS chip to polarized light are opposite.

The first part of pixel points in the first LCOS chip display white, the second part of pixel points in the first LCOS chip display black, the first part of pixel points in the second LCOS chip display white, and the second part of pixel points in the second LCOS chip display black.

The light source is unpolarized light, and the unpolarized light is split into P-polarized light and S-polarized light by the polarization splitting prism.

The light source is polarized light, the polarization direction of the polarized light forms an included angle of 45 degrees with the polarization selection direction of the polarization beam splitter prism, and the polarized light emitted by the light source is decomposed into P polarized light and S polarized light by the polarization beam splitter prism.

The utility model discloses following beneficial effect has:

the utility model provides an exposure device based on LCOS chip, wherein, set up first LCOS chip on the first direction of polarization beam splitter transmission P polarized light, set up second LCOS chip on the second direction of polarization beam splitter reflection transmission S polarized light, and, first partial pixel point in the first LCOS chip will reflect back after some light in the P polarized light is modulated into S polarized light polarization beam prism, first partial pixel point in the second LCOS chip will reflect back after some light in the S polarized light is modulated into P polarized light polarization beam splitter prism, the S polarized light that first LCOS chip reflected back and the P polarized light that the second LCOS chip reflected back pass through respectively polarization beam splitter prism beam interface department, form polarization after the coincidence and close the bundle, coaxial transmission gets into imaging lens, from this, the utility model discloses an exposure device makes the light homoenergetic of the P polarization direction that the light source obtained behind PBS and S polarization direction obtain can obtain effectual utilization, has improved the luminous power utilization efficiency to exposure device' S efficiency and exposure intensity have been improved. The utility model discloses an exposure device can enough exert LCOS chip high resolution characteristics, and the light power of reuse light source again is favorable to making resolution ratio, light power, the three important parameter of efficiency obtain the best performance concurrently.

Drawings

Fig. 1 is a schematic structural view of an exposure apparatus based on an LCOS chip according to an embodiment of the present invention.

Detailed Description

The following describes embodiments of the present invention in detail. It should be emphasized that the following description is merely exemplary in nature and is not intended to limit the scope of the invention or its application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element. In addition, the connection may be for either a fixed or coupled or communicating function.

It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the embodiments of the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1, an embodiment of the present invention provides an exposure apparatus based on LCOS (liquid crystal on silicon) chips, including a light source 1, a polarization beam splitter 2(PBS), a first LCOS chip 3, a second LCOS chip 4 and an imaging lens 5, wherein the light source is a light equalizing source, light emitted from the light source 1 passes through the polarization beam splitter 2 to form P-polarized light transmitted along a first direction and S-polarized light transmitted along a second direction, the first LCOS chip 3 is disposed on the first direction, the second LCOS chip 4 is disposed on the second direction, the first LCOS chip 3 and the second LCOS chip 4 are kept consistent with respect to an optical path of the light source 1, a first portion of pixel points in the first LCOS chip 3 modulates a portion of light in the P-polarized light into S-polarized light and then reflects the S-polarized light back to the polarization beam splitter 2, the second part of pixel points in the first LCOS chip 3 keep the other part of the P-polarized light as P-polarized light and reflect back to the polarization beam splitter prism 2, the first part of pixel points in the second LCOS chip 4 modulate one part of the S-polarized light into P-polarized light and reflect back to the polarization beam splitter prism 2, and the second part of pixel points in the second LCOS chip 4 keep the other part of the S-polarized light as S-polarized light and reflect back to the polarization beam splitter prism 2; the S polarized light reflected by the first LCOS chip 3 and the P polarized light reflected by the second LCOS chip 4 respectively pass through the light splitting interface of the polarization beam splitter prism 2 to be superposed to form a polarization beam, and the polarization beam is coaxially transmitted to the imaging lens 5 and then projected to the exposure projection surface 6 through the imaging lens 5. In addition, the P-polarized light reflected by the first LCOS chip 3 is transmitted and transmitted through the PBS splitting surface and does not enter the imaging lens 5; the S-polarized light reflected by the second LCOS chip 4 is reflected and transmitted at the PBS splitting surface, and does not enter the imaging lens 5.

In the exposure device based on LCOS chip of the embodiment of the utility model, through set up first LCOS chip 3 on the first direction at polarization beam splitter 2 transmission propagation P polarized light, set up second LCOS chip 4 on the second direction at polarization beam splitter 2 reflection propagation S polarized light, and, first partial pixel point in first LCOS chip 3 will some light in the P polarized light is modulated into and is reflected back after the S polarized light polarization beam 2, first partial pixel point in second LCOS chip 4 will some light in the S polarized light is modulated into and is reflected back after the P polarized light polarization beam 2, the S polarized light that first LCOS chip 3 reflected back and the P polarized light that second LCOS chip 4 reflected back pass through respectively polarization beam splitter 2 light interface department forms polarization beam combination after the coincidence, coaxial transmission gets into imaging lens 5, therefore, the utility model discloses exposure device makes the light homoenergetic of the P polarization direction that light source 1 obtained behind PBS and S polarization direction obtain can obtain effectual utilization, has improved the utilization efficiency of light source luminous power to exposure device' S efficiency and exposure intensity have been improved. The utility model discloses an exposure device can enough exert LCOS chip high resolution characteristics, and the light power of reuse light source again can obtain resolution ratio, light power, the three important parameter of efficiency obtains the best performance concurrently.

In a preferred embodiment, the coordinates of the first partial pixel points in the first LCOS chip 3 and the corresponding coordinates of the first partial pixel points in the second LCOS chip 4 on the respective chips are the same, and the coordinates of the second partial pixel points in the first LCOS chip 3 and the corresponding coordinates of the second partial pixel points in the second LCOS chip 4 on the respective chips are the same.

In an embodiment, the first partial pixel points in the first LCOS chip 3 and the first partial pixel points in the second LCOS chip 4 are displayed in a reversed color, and the second partial pixel points in the first LCOS chip 3 and the second partial pixel points in the second LCOS chip 4 are displayed in a reversed color.

In a further preferred embodiment, the first part of the pixels in the first LCOS chip 3 display white, the second part of the pixels in the first LCOS chip 3 display black, the first part of the pixels in the second LCOS chip 4 display black, and the second part of the pixels in the second LCOS chip 4 display white.

In another embodiment, a first portion of the pixels in the first LCOS chip 3 and a first portion of the pixels in the second LCOS chip 4 are displayed in the same color, a second portion of the pixels in the first LCOS chip 3 and a second portion of the pixels in the second LCOS chip 4 are displayed in the same color, and the first LCOS chip 3 and the second LCOS chip 4 modulate polarized light in opposite directions.

In a further preferred embodiment, the first part of the pixels in the first LCOS chip 3 display white, the second part of the pixels in the first LCOS chip 3 display black, the first part of the pixels in the second LCOS chip 4 display white, and the second part of the pixels in the second LCOS chip 4 display black.

In some embodiments, the light source 1 may be unpolarized light, which is split into P-polarized light and S-polarized light by the polarization splitting prism 2.

In other embodiments, the light source 1 may also be polarized light, a polarization direction of the polarized light forms an included angle of 45 ° with a polarization selection direction of the polarization splitting prism 2, and the polarization splitting prism 2 splits the polarized light emitted from the light source 1 into P-polarized light and S-polarized light.

In a preferred embodiment, the light source 1 is a fly-eye lens light equalizing light source or a light guide plate light equalizing light source.

Specific embodiments of the present invention are described further below.

As shown in fig. 1, the LCOS chip-based exposure apparatus includes a light source 1, a polarization beam splitter prism 2(PBS), a first LCOS chip 3, a second LCOS chip 4, and an imaging lens 5. The light source may generally use unpolarized light, and the polarization splitting prism may split the unpolarized light into P-polarized light and S-polarized light. And for the polarized light source, the selectable polarization direction and the polarization selection direction of the polarization splitting prism form an included angle of 45 degrees, and the polarized light is split into P polarized light and S polarized light in the mode. The light source is preferably a homogeneous light source. The light source can be a fly-eye lens light source or a light guide plate light source.

The first LCOS chip 3 and the second LCOS chip 4 are the same chip. The optical path lengths of the first LCOS chip 3 and the second LCOS chip 4 with respect to the light source 1 are kept uniform. After light emitted by the light source 1 is reflected by the first LCOS chip 3 and the second LCOS chip 4, images modulated by the first LCOS chip 3 and the second LCOS chip 4 are combined at the splitting surface of the PBS, and the combined image is imaged to the exposure projection surface 6 through the imaging lens 5.

The P-polarized light transmitted by the polarization beam splitter prism 2 is subjected to image modulation by the first LCOS chip 3, the light reflected by a part of the pixel points of the first LCOS chip 3 is S-polarized light, and the light reflected by another part of the pixel points of the first LCOS chip 3 is P-polarized light. The S polarized light reflected by the polarization splitting prism 2 is subjected to image modulation by the second LCOS chip 4, the light reflected by a part of the pixel points of the second LCOS chip 4 is P polarized light, and the light reflected by another part of the pixel points of the second LCOS chip 4 is S polarized light.

In one embodiment, the first LCOS chip 3 and the second LCOS chip 4 are controlled to display color inversion, that is, for a pixel point on the first LCOS chip 3 that needs to display white, a pixel point on the second LCOS chip 4 at the same coordinate displays a black point; and for the pixel point which needs to display black on the first LCOS chip 3, the pixel point at the same coordinate position on the second LCOS chip 4 displays a white point.

In this embodiment, the positions of the reflected lights of the pixels with the same coordinates on the first LCOS chip 3 and the second LCOS chip 4 are overlapped when the reflected lights pass through the PBS. After P polarized light received by white pixel points on the first LCOS chip 3 is subjected to image modulation through the first LCOS chip 3, the reflected light becomes S polarized light and is reflected and transmitted along the PBS light splitting interface; after the S polarized light received by the black pixel points with the same coordinate on the second LCOS chip 4 is subjected to image modulation by the second LCOS chip 4, the reflected light changes the polarization state to become P polarized light, and the P polarized light is transmitted and transmitted along the PBS light splitting interface. Therefore, the S-polarized light and the P-polarized light reflected by the pixels with the same coordinates on the two chips (the white pixels on the first LCOS chip 3 and the corresponding black pixels on the second LCOS chip 4) respectively pass through the PBS light splitting interface and propagate towards the imaging lens 5, and the S-polarized light and the P-polarized light form a polarization beam after being superposed and coaxially propagate into the imaging lens 5.

On the other hand, the black pixel point of the first LCOS chip 3 does not change the polarization state of the received P-polarized light, and the reflected P-polarized light is transmitted and transmitted through the PBS light splitting surface; after the S polarized light received by the white pixel points of the second LCOS chip 4 and the first LCOS chip 3 at the same coordinate is subjected to image modulation by the second LCOS chip 4, the reflected light does not change the polarization state, and is still the S polarized light, so that the light is reflected and transmitted at the PBS splitting surface, and therefore, the reflected light of the pixel points (the black pixel point on the first LCOS chip 3 and the corresponding white pixel point on the second LCOS chip 4) at the same coordinate position of the two chips does not enter the imaging lens 5.

In another embodiment, the first LCOS chip 3 and the second LCOS chip 4 have the same size and pixel property, and the first LCOS chip 3 and the second LCOS chip 4 are controlled to display in the same color, that is, for a pixel point on the first LCOS chip 3 that needs to display white, a pixel point on the second LCOS chip 4 at the same coordinate also displays white; for the pixel point needing to display black on the first LCOS chip 3, the pixel point at the same coordinate on the second LCOS chip 4 also displays black, but the modulation directions of the liquid crystal of the first LCOS chip 3 and the liquid crystal of the second LCOS chip 4 to the polarized light are opposite, so that the first LCOS chip 3 and the chip can be controlled by the same signal, and two opposite polarization states can be obtained on the same pixel point.

In this embodiment, the positions of the reflected lights of the pixels with the same coordinates on the first LCOS chip 3 and the second LCOS chip 4 are overlapped when the reflected lights pass through the PBS. After P polarized light received by white pixel points on the first LCOS chip 3 is subjected to image modulation through the first LCOS chip 3, the reflected light becomes S polarized light and is reflected and transmitted along the PBS light splitting interface; after the S polarized light received by the white pixel points with the same coordinate on the second LCOS chip 4 is subjected to image modulation by the second LCOS chip 4, the reflected light changes the polarization state to become P polarized light, and the P polarized light is transmitted and transmitted along the PBS light splitting interface. Therefore, the S-polarized light and the P-polarized light reflected by the white pixel points at the same coordinate position on the first LCOS chip 3 and the second LCOS chip 4 respectively propagate towards the imaging lens 5 through the PBS light splitting interface, and the S-polarized light and the P-polarized light form a polarization beam after being superposed and coaxially propagate into the imaging lens 5.

On the other hand, the black pixel point of the first LCOS chip 3 does not change the polarization state of the received P-polarized light, and the reflected P-polarized light is transmitted and transmitted through the PBS light splitting surface; and after the S polarized light received by the black pixel points of the second LCOS chip 4 and the first LCOS chip 3 with the same coordinates is subjected to image modulation by the second LCOS chip 4, the reflected light does not change the polarization state and is still the S polarized light, so that the light is reflected and transmitted at the PBS beam splitting surface, and therefore, the reflected light of the black pixel points at the same positions of the two chips does not enter the imaging lens 5.

The background section of the present invention may contain background information related to the problems or the environment of the present invention and is not necessarily descriptive of the prior art. Accordingly, the inclusion in the background section is not an admission of prior art by the applicant.

The foregoing is a more detailed description of the present invention, taken in conjunction with the specific/preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. For those skilled in the art to which the invention pertains, a plurality of alternatives or modifications can be made to the described embodiments without departing from the concept of the invention, and these alternatives or modifications should be considered as belonging to the protection scope of the invention. In the description herein, references to the description of the term "one embodiment," "some embodiments," "preferred embodiments," "an example," "a specific example," or "some examples" or the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction. Although the embodiments of the present invention and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the scope of the claims.

Claims

1. The utility model provides an exposure device based on LCOS chip, its characterized in that includes light source, polarization beam splitter prism, first LCOS chip, second LCOS chip and imaging lens, wherein the light source is the homogeneous light source, the light that the light source sent passes through form behind the polarization beam splitter prism along the P polarized light of first direction transmission propagation and along the S polarized light of second direction reflection propagation, first LCOS chip sets up on the first direction, the second LCOS chip sets up on the second direction, first LCOS chip with the second LCOS chip for the optical path of light source keeps unanimous, wherein, first part pixel point in the first LCOS chip will be reflected back to the polarization beam splitter prism after some light in the P polarized light is modulated into S polarized light, second part pixel point in the first LCOS chip will another part light in the P polarized light keeps being the P polarized light reflection back to the polarization beam splitter prism, the first part of pixel points in the second LCOS chip modulate one part of the S polarized light into P polarized light and then reflect the P polarized light to the polarization beam splitter prism, and the second part of pixel points in the second LCOS chip keep the other part of the S polarized light as S polarized light and reflect the S polarized light to the polarization beam splitter prism; and the S polarized light reflected by the first LCOS chip and the P polarized light reflected by the second LCOS chip respectively pass through the light splitting interface of the polarization beam splitter prism to form a polarization beam combination after being superposed, and the polarization beam combination is coaxially transmitted to enter the imaging lens.

2. The LCOS chip-based exposure apparatus of claim 1, wherein the first portion of pixels in the first LCOS chip and the first portion of pixels in the second LCOS chip have the same coordinates on their respective chips, and the second portion of pixels in the first LCOS chip and the second portion of pixels in the second LCOS chip have the same coordinates on their respective chips.

3. The LCOS chip-based exposure apparatus of claim 2, wherein the first portion of the pixels of the first LCOS chip and the first portion of the pixels of the second LCOS chip are displayed in a reversed color, and the second portion of the pixels of the first LCOS chip and the second portion of the pixels of the second LCOS chip are displayed in a reversed color.

4. The LCOS chip-based exposure apparatus of claim 3, wherein a first portion of the pixels in the first LCOS chip is displayed white, a second portion of the pixels in the first LCOS chip is displayed black, a first portion of the pixels in the second LCOS chip is displayed black, and a second portion of the pixels in the second LCOS chip is displayed white.

5. The LCOS chip-based exposure apparatus of claim 2, wherein a first portion of the pixels in the first LCOS chip and a first portion of the pixels in the second LCOS chip are displayed in the same color, a second portion of the pixels in the first LCOS chip and a second portion of the pixels in the second LCOS chip are displayed in the same color, and the first LCOS chip and the second LCOS chip modulate the polarized light in opposite directions.

6. The LCOS chip-based exposure apparatus of claim 5, wherein a first portion of the pixels in the first LCOS chip is displayed in white, a second portion of the pixels in the first LCOS chip is displayed in black, the first portion of the pixels in the second LCOS chip is displayed in white, and the second portion of the pixels in the second LCOS chip is displayed in black.

7. The LCOS chip-based exposure apparatus of any one of claims 1 through 6, wherein the light source is unpolarized light, and the unpolarized light is split into P-polarized light and S-polarized light by the polarization splitting prism.

8. The LCOS chip based exposure apparatus according to any of the claims 1 to 6, wherein the light source is polarized light with a polarization direction making an angle of 45 ° with a polarization selection direction of a polarization beam splitter prism, and the polarization beam emitted from the light source is split into P-polarized light and S-polarized light by the polarization beam splitter prism.