CN214612756U - Temperature regulating device for deposition furnace - Google Patents

Abstract

The utility model discloses a temperature regulating device for a sedimentation furnace, which comprises a furnace body and a heating device, wherein the bottom end of the furnace body is provided with a mounting groove, the inside of the mounting groove is fixedly connected with the heating device through a connecting bolt, the heating device consists of a carrier, a connecting ring, a sealing structure, a ceramic heat insulation plate, a heating plate and a preheating structure, the bottom outside the carrier is fixedly connected with the connecting ring, the side of the top end of the connecting ring is provided with an annular groove, the inside of the annular groove is movably provided with the sealing structure, the middle part of the top end of the carrier is provided with the groove, when the device is disassembled, a plurality of connecting bolts are screwed out, two ejector rods are pressed downwards, so that the device is ejected from the bottom end of the sedimentation furnace, the device is convenient to be taken down for maintenance, a clamping sealing ring can be inserted into a sealing groove during installation, and a jacking spring can jack the clamping sealing ring tightly, the sealing performance is improved, and the reaction gas can be preheated between the two heat conducting plates.

Description

Temperature regulating device for deposition furnace

Technical Field

The utility model belongs to the technical field of the sedimentation furnace heating, concretely relates to temperature regulation apparatus for sedimentation furnace.

Background

Chemical vapor deposition is a chemical technology, which is a method for generating a film by performing a chemical reaction on the surface of a substrate by using one or more gas-phase compounds or simple substances containing film elements. Chemical vapor deposition is a new technology for preparing inorganic materials, which is developed in recent decades, when chemical vapor deposition is used for production, a deposition furnace needs to be used, the temperature adjusting mechanism of the existing vertical deposition furnace is fixed at the bottom end of a furnace body and cannot be detached, and the inside of a temperature adjusting device contains various electrical components.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a temperature regulation apparatus for deposition furnace to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a temperature regulation apparatus for sedimentation furnace, includes furnace body and heating device, the mounting groove has been seted up to the bottom of furnace body, connecting bolt fixedly connected with heating device is passed through to the inside of mounting groove, heating device comprises carrier, go-between, seal structure, ceramic heat insulating board, hot plate and preheating structure, the bottom fixedly connected with go-between in the carrier outside, the annular groove has been seted up to the avris on go-between top, the inside activity of annular groove is provided with seal structure, the middle part on carrier top is seted up flutedly, the bottom fixedly connected with of recess preheats the structure, preheat the top fixedly connected with hot plate of structure, the bottom of carrier is inlayed and is equipped with ceramic heat insulating board.

Preferably, one side of the furnace body is fixedly connected with a power regulating switch, and the heating plate is electrically connected with an external power supply through the power regulating switch.

Preferably, the go-between comprises ring body, knock-out pin and connecting bolt, the knock-out pin has two, connecting bolt has a plurality of, logical groove has all been seted up at the both ends of ring body, two the inside that leads to the groove all rotates and is connected with the knock-out pin, threaded hole has a plurality of all around seted up of ring body avris, and it is a plurality of screw hole evenly distributed, a plurality of the equal threaded connection in inside of screw hole has connecting bolt.

Preferably, the ring body and the carrier are of an integrated structure.

Preferably, seal structure comprises top tight spring and joint sealing ring, the top tight spring has a plurality of, and is a plurality of the even fixed connection in bottom of top tight spring is in the bottom of annular groove, and is a plurality of the even fixed connection in top of top tight spring is in the bottom of joint sealing ring, the bottom sliding connection of joint sealing ring is in the inside of annular groove.

Preferably, preheat the structure and constitute by heat-conducting plate and intake pipe, the heat-conducting plate has two, two one side fixed connection of heat-conducting plate, two inlay between the heat-conducting plate and be equipped with the intake pipe.

Preferably, the air inlet pipe is in a curved line shape, one end of the air inlet pipe penetrates through the middle of the carrier to the outside of the bottom end of the carrier, and the other end of the air inlet pipe penetrates through one side of the carrier to the outside of the top end of the carrier.

Compared with the prior art, the beneficial effects of the utility model are that: this device is when dismantling, screw out a plurality of connecting bolt, and push down two knockout pins, thereby it is ejecting from the bottom of sedimentation furnace to install, be convenient for take off this device and maintain, inside the joint sealing ring can insert sealed draw-in groove during the installation, when screwing up connecting bolt, the top tight spring can push up the joint sealing ring, improve the leakproofness, let in reaction gas through the intake pipe to the inside of sedimentation furnace, reaction gas preheats between two heat-conducting plates, improve reaction gas's temperature, thereby can improve reaction efficiency, avoid reaction gas not preheating, directly let in the inside of sedimentation furnace, reduce the inside temperature of sedimentation furnace, the intake pipe of line shape can prolong reaction gas's preheating time, thereby improve and preheat the effect.

Drawings

Fig. 1 is a schematic view of the installation structure of the present invention;

fig. 2 is a front sectional view of the present invention;

fig. 3 is a bottom view of the present invention;

fig. 4 is a schematic perspective view of the present invention.

In the figure: 1. a furnace body; 2. a heating device; 21. a carrier; 22. a connecting ring; 221. a ring body; 222. a through groove; 223. ejecting the rod; 224. a threaded hole; 225. a connecting bolt; 23. a sealing structure; 231. the spring is tightly propped; 232. clamping a sealing ring; 24. a ceramic thermal baffle; 25. heating plates; 26. a preheating structure; 261. a heat conducting plate; 262. an air inlet pipe; 3. a power regulating switch.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Referring to fig. 1-4, the present invention provides the following technical solutions: the utility model provides a temperature regulation apparatus for deposition furnace, including furnace body 1 and heating device 2, the mounting groove has been seted up to furnace body 1's bottom, connecting bolt 225 fixedly connected with heating device 2 is passed through to the inside of mounting groove, heating device 2 is by carrier 21, go-between 22, seal structure 23, ceramic heat insulating board 24, hot plate 25 with preheat structure 26 and constitute, the bottom fixedly connected with go-between 22 in the carrier 21 outside, the annular groove has been seted up to the avris on go-between 22 top, the inside activity of annular groove is provided with seal structure 23, the middle part on carrier 21 top is seted up flutedly, the bottom fixedly connected with of recess preheats structure 26, the top fixedly connected with hot plate 25 of preheating structure 26, carrier 21's bottom is inlayed and is equipped with ceramic heat insulating board 24.

Preferably, one side fixedly connected with power regulating switch 3 of furnace body 1, hot plate 25 passes through power regulating switch 3 and external power supply electric connection, and through the power of power regulating switch 3 regulation hot plate 25 to adjust the temperature that generates heat of hot plate 25, and then adjust the inside temperature of deposition furnace.

Preferably, the connecting ring 22 is by ring body 221, knock-out pole 223 and connecting bolt 225 constitute, knock-out pole 223 has two, connecting bolt 225 has a plurality of, logical groove 222 has all been seted up at the both ends of ring body 221, two inside that lead to groove 222 all rotate and are connected with knock-out pole 223, threaded hole 224 has all around seted up of ring body 221 avris, threaded hole 224 has a plurality of, and a plurality of threaded hole 224 evenly distributed, the equal threaded connection in inside of a plurality of threaded hole 224 has connecting bolt 225, pass through connecting bolt 225 during the installation with device fixed connection in the bottom of sedimentation furnace, during the dismantlement, screw out a plurality of connecting bolt 225, and push down two knock-out poles 223, thereby ejecting the bottom of following the sedimentation furnace with the device, be convenient for take off this device.

Preferably, the ring body 221 and the carrier 21 are of an integrated structure, the integrated structure is convenient for integral casting and molding, and is firmer and less prone to cracking during use.

Preferably, seal structure 23 comprises top tight spring 231 and joint sealing ring 232, top tight spring 231 has a plurality of, the even fixed connection in annular groove's in bottom of a plurality of top tight springs 231, the even fixed connection in joint sealing ring 232's in top of a plurality of top tight springs 231, the inside at annular groove of bottom sliding connection of joint sealing ring 232, sealed draw-in groove has been seted up to the bottom at the sedimentation furnace that corresponds during the use, joint sealing ring 232 inserts inside sealed draw-in groove during the installation, when screwing up connecting bolt 225, top tight spring 231 can be tight joint sealing ring 232 top, improve the leakproofness.

Preferably, preheat structure 26 and comprise heat-conducting plate 261 and intake pipe 262, heat-conducting plate 261 has a plurality of, one side fixed connection of two heat-conducting plates 261, it is equipped with intake pipe 262 to inlay between two heat-conducting plates 261, during the use, let in reactant gas to the inside of deposition furnace through intake pipe 262, reactant gas preheats between two heat-conducting plates 261, improve reactant gas's temperature, thereby can improve reaction efficiency, avoid reactant gas not to preheat, directly let in the inside of deposition furnace, reduce the inside temperature of deposition furnace.

Preferably, the gas inlet pipe 262 is in a curved shape, one end of the gas inlet pipe 262 penetrates from the middle of the carrier 21 to the outside of the bottom end of the carrier 21, the other end of the gas inlet pipe 262 penetrates from one side of the carrier 21 to the outside of the top end of the carrier 21, and the curved gas inlet pipe 262 can prolong the preheating time of the reaction gas, thereby improving the preheating effect.

The utility model discloses a theory of operation and use flow: after the utility model is installed, the installation fixing and the safety protection of the utility model are firstly checked, then the utility model can be used, when in use, the power of the heating plate 25 is adjusted through the power adjusting switch 3, thereby the heating temperature of the heating plate 25 is adjusted, further the temperature inside the deposition furnace is adjusted, when in use, the device is fixedly connected at the bottom end of the deposition furnace through a plurality of connecting bolts 225, a sealing clamping groove is arranged at the bottom end of the deposition furnace, when in installation, the clamping sealing ring 232 can be inserted into the sealing clamping groove, when the connecting bolts 225 are screwed down, the clamping sealing ring 232 can be tightly pressed by the top-tightening spring 231, the sealing performance is improved, when in disassembly, a plurality of connecting bolts 225 are screwed out, and two ejector rods 223 are pressed downwards, thereby the device is ejected out from the bottom end of the deposition furnace, the device is convenient to take down, 221 and the carrier 21 are of an integral structure, the integral structure is convenient for integral casting and forming, and more firm during the use, difficult fracture lets in reactant gas to the inside of depositing furnace through intake pipe 262, and reactant gas preheats between two heat-conducting plates 261, improves reactant gas's temperature to can improve reaction efficiency, avoid reactant gas not to preheat, directly let in the inside of depositing furnace, reduce the inside temperature of depositing furnace, the intake pipe 262 of curved line shape can prolong reactant gas's preheating time, thereby improve and preheat the effect.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a temperature regulation apparatus for deposition furnace, includes furnace body (1) and heating device (2), its characterized in that: the mounting groove has been seted up to the bottom of furnace body (1), connecting bolt (225) fixedly connected with heating device (2) are passed through to the inside of mounting groove, heating device (2) comprise carrier (21), go-between (22), seal structure (23), ceramic heat insulating board (24), hot plate (25) and preheating structure (26), bottom fixedly connected with go-between (22) in carrier (21) outside, the annular groove has been seted up to the avris on go-between (22) top, the inside activity of annular groove is provided with seal structure (23), the middle part on carrier (21) top is seted up flutedly, the bottom fixedly connected with of recess preheats structure (26), preheat top fixedly connected with hot plate (25) of structure (26), the bottom of carrier (21) is inlayed and is equipped with ceramic heat insulating board (24).

2. The temperature adjusting apparatus for a deposition furnace according to claim 1, wherein: one side fixedly connected with power regulating switch (3) of furnace body (1), hot plate (25) are through power regulating switch (3) and external power electric connection.

3. The temperature adjusting apparatus for a deposition furnace according to claim 1, wherein: the go-between (22) comprises ring body (221), knock-out pole (223) and connecting bolt (225), knock-out pole (223) have two, connecting bolt (225) have a plurality of, logical groove (222), two have all been seted up at the both ends of ring body (221) the inside that leads to groove (222) all rotates and is connected with knock-out pole (223), threaded hole (224) have all been seted up all around of ring body (221) avris, threaded hole (224) have a plurality of, and a plurality of threaded hole (224) evenly distributed, a plurality of the equal threaded connection in inside of threaded hole (224) has connecting bolt (225).

4. The temperature adjusting apparatus for a deposition furnace according to claim 3, wherein: the ring body (221) and the carrier (21) are of an integrated structure.

5. The temperature adjusting apparatus for a deposition furnace according to claim 1, wherein: seal structure (23) comprise top tight spring (231) and joint sealing ring (232), top tight spring (231) have a plurality of, and are a plurality of the even fixed connection in bottom of top tight spring (231) is in the bottom of annular groove, and is a plurality of the even fixed connection in top of top tight spring (231) is in the bottom of joint sealing ring (232), the bottom sliding connection of joint sealing ring (232) is in the inside of annular groove.

6. The temperature adjusting apparatus for a deposition furnace according to claim 1, wherein: preheat structure (26) and constitute by heat-conducting plate (261) and intake pipe (262), heat-conducting plate (261) has two, two one side fixed connection of heat-conducting plate (261), two it is equipped with intake pipe (262) to inlay between heat-conducting plate (261).

7. The temperature adjusting apparatus for a deposition furnace according to claim 6, wherein: the air inlet pipe (262) is in a curved line shape, one end of the air inlet pipe (262) penetrates through the middle of the carrier (21) to the outside of the bottom end of the carrier (21), and the other end of the air inlet pipe (262) penetrates through one side of the carrier (21) to the outside of the top end of the carrier (21).

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