CN214583655U - Spectrum chip and spectrum device comprising same - Google Patents

Spectrum chip and spectrum device comprising same Download PDF

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Publication number
CN214583655U
CN214583655U CN202120349238.0U CN202120349238U CN214583655U CN 214583655 U CN214583655 U CN 214583655U CN 202120349238 U CN202120349238 U CN 202120349238U CN 214583655 U CN214583655 U CN 214583655U
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chip
regions
light
filter film
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石洋
贾雁鹏
关黎明
丁振敏
刘阳
孙常库
孟铁军
张大伟
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Quantaeye Beijing Technology Co ltd
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Quantaeye Beijing Technology Co ltd
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Abstract

The utility model relates to a spectrum chip and contain spectrum chip's spectrum device, this spectrum chip includes: a filter film for splitting light from an incident light source; the light filtering film is arranged on the substrate; and a chip target surface, wherein one side of the substrate, provided with the filter film, is attached to the chip target surface, the chip target surface is used for receiving the light transmitted by the filter film and outputting a signal which is used as the intensity of the light transmitted by the filter film, and the signal is used for obtaining the detection result of the spectrum chip. The utility model discloses a spectrum chip can be used for the spectral detection to can protect the filtering film not destroyed and pollute and can filtering interfering signal to a certain extent through the basement that sets up, can improve the life-span of spectrum chip and improve the detection precision from this.

Description

Spectrum chip and spectrum device comprising same
Technical Field
The utility model relates to the field of optical technology, especially, relate to a spectrum chip and spectrum device who contains spectrum chip.
Background
In the related art, spectrometers typically employ a multichannel array sensor that improves the uniformity of the spatial distribution of intensity of light through complex optical structures such as microlens arrays, apertures, diffusers, fly-eye uniformizers, and the like.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a spectrum chip and spectrum device who contains spectrum chip.
In order to solve the above technical problem, according to the utility model discloses an embodiment provides a spectrum chip, it includes:
a filter film for splitting light from an incident light source;
the light filtering film is arranged on the substrate; and
the chip target surface is attached to one side, provided with the light filtering film, of the substrate, and is used for receiving the light transmitted by the light filtering film and outputting a signal serving as the intensity of the light transmitted by the light filtering film, and the signal is used for obtaining the detection result of the spectrum chip.
For the above spectrum chip, in one possible implementation, the filter film includes:
the first region is provided with quantum dots and is positioned at a first position of the light filtering film, which corresponds to a first substrate position of the substrate; and
a second region located at a second position of the filter film corresponding to a second substrate position of the substrate, wherein the first position is different from the second position.
For the above spectrum chip, in a possible implementation manner, the second region is not distributed with quantum dots.
For the above spectrum chip, in a possible implementation manner, the second region includes a non-light-transmitting structure capable of blocking light and preventing all light from being transmitted, and a light-transmitting structure capable of transmitting a predetermined amount of light.
For the above-mentioned spectrum chip, in a possible implementation manner, at least one second region is arranged around at least one first region.
For the above-described spectroscopic chip, in one possible implementation,
at least one second region is arranged at a corresponding position of at least one side of four sides of a circumscribed rectangle spaced from at least one first region by a corresponding distance; and/or
At least one of the second regions is disposed at a corresponding position of at least one vertex of four vertices of a circumscribed rectangle spaced apart from at least one of the first regions by a corresponding distance.
For the above-mentioned spectrum chip, in a possible implementation manner, a block composed of at least one first region is surrounded by a plurality of second regions.
For the above-mentioned spectrum chip, in a possible implementation manner, a block composed of at least one second region is surrounded by a plurality of first regions.
For the above-described spectroscopic chip, in one possible implementation, a plurality of the second regions are arranged continuously and/or non-uniformly.
For the above-mentioned spectroscopic chip, in one possible implementation, the shape of the first region and/or the second region comprises at least one of a rectangle, a circle, a strip, a diamond, a polygon.
For the above-mentioned spectrum chip, in a possible implementation manner, the shape of the first region is the same as the shape of the second region, or the shape of the first region is different from the shape of the second region.
For the above-mentioned spectrum chip, in a possible implementation manner, the size of the first region is the same as that of the second region, or the size of the first region is different from that of the second region.
For the above-mentioned spectrum chip, in one possible implementation, the sizes and/or shapes of the first regions are the same as each other; or
The sizes and/or shapes of the first areas are different from each other; or
The sizes and/or shapes of the first regions belonging to the same group are the same as each other, and the sizes and/or shapes of the first regions belonging to different groups are different from each other.
In order to solve the above technical problem, according to another embodiment of the present invention, a spectroscopy apparatus is provided, which includes the above spectroscopy chip.
The utility model discloses a spectrum chip can be used for the spectral detection to can protect the filtering film not destroyed and pollute and can filtering interfering signal to a certain extent through the basement that sets up, can improve the life-span of spectrum chip and improve the detection precision from this.
Other features and aspects of the present invention will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate exemplary embodiments, features, and aspects of the present invention and, together with the description, serve to explain the principles of the invention.
Fig. 1 is a block diagram of a spectroscopy chip according to an embodiment of the invention;
FIGS. 2a-2r are schematic layout views of a first region and a second region according to an embodiment of the present invention;
fig. 3 is a block diagram of a spectroscopy apparatus according to an embodiment of the present invention.
Detailed Description
Various exemplary embodiments, features and aspects of the present invention will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present invention. It will be understood by those skilled in the art that the present invention may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present invention.
Fig. 1 shows a structure diagram of a spectrum chip according to an embodiment of the present invention, and as shown in fig. 1, the spectrum chip (also called spectrum sensor) 100 may include:
a filter film 110 for splitting light from an incident light source (e.g., a light source entering the spectrum chip 100);
the substrate 120, the filter film 110 is disposed on the substrate 120; and
a chip target surface 130, a side of the substrate 120 on which the filter film 110 is disposed being attached to the chip target surface 130, the chip target surface 130 being configured to receive the light transmitted from the filter film 110 and output a signal as an intensity of the light transmitted from the filter film 110, the signal being used to obtain a detection result of the spectrum chip 100.
In the embodiment, the filter film 110 splits the light from the incident light source to achieve the spectrum detection function of the spectrum chip, and the thickness of the filter film 110 includes but is not limited to no greater than 0.5mm, for example, the thickness of the filter film 110 may be 0.3mm, 0.4mm, 0.31mm, 0.12mm, etc., it should be understood that the filter film 110 is different from filter glass.
In one possible implementation, the filtering material may be directly printed on the substrate 120 to form the filtering film 110, in which case, the filtering film 110 may be referred to as a filtering layer, and it is not necessary to form the filtering film 110 in advance and then place the formed filtering film 110 on the substrate 120. The filter material may for example comprise quantum dots with different light absorption and emission characteristics.
In one possible implementation manner, instead of forming the filtering film 110 on the substrate 120 by printing, the filtering film 110 may be formed first and then the formed filtering film 110 is disposed on the substrate 120.
The chip target surface 130 receives and outputs a detection signal, which is a signal of the intensity of the light transmitted from the optical filter film 110; the substrate 120 serves to protect the filter film 110 from damage and contamination, and it should be understood that the substrate 120 may also filter out optical signals that interfere with detection.
In one implementation, the substrate 120 may be formed of a material including, but not limited to, quartz glass or a highly light transmissive plastic such as PET, PC, PS, etc., a light filtering material, and the like. Among them, different usage scenarios have different requirements on the optical performance of the material of the substrate 120, and generally require that the transmittance of the substrate 120 in the usage wavelength range is greater than 90%.
As shown in fig. 1, the substrate 120 and the filter film 110 are fixed by a glue layer 140, and the filter film 110 and the chip target surface 130 are fixed by a glue layer 150. In other words, the glue layers 140 and 150 may be used to fix the substrate 120 and the filter film 110, and the filter film 110 and the chip target 130, respectively. In addition, the glue layers 140 and 150 can protect the filter film 110 from aging and degeneration, and can prevent the filter film 110 from aging and degeneration.
It should be understood that the encapsulation may also be achieved by coating an encapsulation material on the exposed surface of the substrate 120, filling an inert gas, and adhering a material having good light transmittance such as a cover glass, PS, PMMA, PC, etc. to the chip holder (sensor base holder), and a spectrum chip after encapsulation may be obtained.
The utility model discloses a spectrum chip can be used for the spectral detection to can protect the filtering film not destroyed and pollute and can filtering interfering signal to a certain extent through the basement that sets up, can improve the life-span of spectrum chip and improve the detection precision from this.
In one implementation, the filter film 110 may include:
the first region is provided with quantum dots and is positioned at a first position of the light filtering film, which corresponds to a first substrate position of the substrate; and
a second region located at a second position of the filter film corresponding to a second substrate position of the substrate, wherein the first position is different from the second position.
In one implementation, the second region is not populated with quantum dots.
In this embodiment, the filter film 110 may be divided into a first region and a second region, the quantum dots may be disposed in the first region, and the second region may be a transparent region where the quantum dots are not disposed, and the incident light from the light source irradiates the first region and the second region. It should be understood that the chip target surface 130 receives the light transmitted from the first region and outputs a first signal as the intensity of the light transmitted from the first region, and receives the light transmitted from the second region and outputs a second signal as the intensity of the light transmitted from the second region, and the detection result of the spectroscopic chip 100 is based on the first signal and the second signal.
The utility model discloses an except arranging the first region of laying the quantum dot in the first position department of filter film 110, still arrange the second region of not laying the quantum dot in the second position department of filter film 110, therefore, chip target surface 130 detectable is from the intensity of the first region light that transmits that distributes in the first position department of filter film 110 and output the first signal that corresponds with this intensity, chip target surface 130 still can detect from the intensity of the second region light that transmits that distributes in the second position department of filter film 110 and output the second signal that corresponds with this intensity, usable this second signal carries out intensity spatial distribution's correction, in order to eliminate the spectral measurement error that leads to because intensity spatial distribution.
In one implementation, the second region includes a non-light-transmitting structure that can block light such that all light is not transmitted and a light-transmitting structure that can transmit a predetermined amount of light.
In this embodiment, the non-light-transmitting structure capable of blocking light and preventing all light from being transmitted may be referred to as a non-light-transmitting portion, which refers to a blank region prepared without using a through hole or highly transparent quartz glass, and the second region may be a non-light-transmitting structure, in which case, the chip target surface 130 may receive only light transmitted from the first region and output a first signal as the intensity of the light transmitted from the first region, and since the second region is a non-light-transmitting structure, the chip target surface 130 may not receive light transmitted from the second region and may naturally not output a second signal as the intensity of the light transmitted from the second region, and accordingly, the detection result of the spectrum chip 100 is based only on the first signal and not based on the second signal. In this case, the second region may be used to filter out stray light.
Of course, the second region may also be a light-transmitting structure capable of transmitting a predetermined amount of light, and the second region includes, for example, but not limited to, a semi-light-transmitting portion in the related art. In this case, the second signal corresponding to the intensity of the light transmitted from the second region can be used for correction of the intensity spatial distribution, so that the spectral measurement error due to the intensity spatial distribution can be eliminated.
Of course, it is also possible to provide a part of the second region as a non-light-transmitting structure and another part of the second region as a light-transmitting structure.
In one implementation, at least one second area is arranged around at least one first area.
In this embodiment, at least one second region may be arranged around at least one first region, for example, in the layout manner shown in fig. 2a and 2b to be described later.
In one implementation, at least one of the second regions is provided at a corresponding position on at least one of four sides of a circumscribed rectangle spaced a corresponding distance from at least one of the first regions, such as the layout shown in fig. 2c and 2f to be described below; and/or at least one of said second regions is provided at a respective position of at least one of the four vertices of the circumscribed rectangle spaced from at least one of said first regions by a respective distance, such as in the arrangements shown in fig. 2d-2e to be described below.
In one implementation, a block of at least one of the first regions is surrounded by a plurality of the second regions, such as the layout shown in fig. 2a and 2b to be described below.
In one implementation, a tile of at least one of the second regions is surrounded by a plurality of the first regions, such as the layouts shown in FIGS. 2i-2l and 2m-2q, which will be described below.
In one implementation, a plurality of the second regions are arranged in series, such as the layout shown in fig. 2j-2m and 2p to be described below; and/or a plurality of said second regions are arranged non-uniformly, for example as in fig. 2a and 2m to be described below.
2a-2f, the black block/black circle represents the first area, and the blank block represents the second area; in fig. 2i-2r, the hatched blocks/stripes represent the first area and the blank blocks/stripes represent the second area.
In one implementation, the shape of the first region and/or the second region includes at least one of a rectangle, a circle, a strip, a diamond, a polygon.
In one implementation, the shape of the first region is the same as the shape of the second region, or the shape of the first region is different from the shape of the second region.
In one implementation, the size of the first area is the same as the size of the second area, or the size of the first area is different from the size of the second area.
In one implementation, the sizes and/or shapes of the first regions are the same as each other; or
The sizes and/or shapes of the first areas are different from each other; or
The sizes and/or shapes of the first regions belonging to the same group are the same as each other, and the sizes and/or shapes of the first regions belonging to different groups are different from each other.
In this embodiment, the shape of the first region may include, but is not limited to, any one or more of the following: the shape of the first region included in the same filter film may be the same shape of the aforementioned shapes, or may be at least one of the aforementioned shapes. For example, assuming that the first regions included in the same optical filter film are divided into a first group and a second group, the shapes of all the first regions belonging to the first group are a first shape and the shapes of all the first regions belonging to the second group are a second shape, the first shape may be the same as the second shape, and of course, the first shape may be different from the second shape.
Similarly, the shape of the second region may also include, but is not limited to, any one or more of the following: the shape of the second region included in the same filter film may be the same shape of the aforementioned shapes, or may be at least one of the aforementioned shapes. For example, assuming that the second regions included in the same filter film are divided into a third group and a fourth group, the shapes of all the second regions belonging to the third group are the third shape and the shapes of all the second regions belonging to the fourth group are the fourth shape, the third shape may be the same as the fourth shape, and of course, the third shape may be different from the fourth shape.
In addition, it should be understood that the first region and the second region included in the same filter film may have the same or different shapes. For example, at least one of the first shape and the second shape may be the same as at least one of the third shape and the fourth shape, or both the first shape and the second shape may be different from both the third shape and the fourth shape, respectively.
In this embodiment, the sizes of the first regions included in the same filter film may be equal or different, and correspondingly, the sizes of the second regions may be equal or different, and the sizes of the first regions and the second regions included in the same filter film may be equal or different. The description about the dimensions is similar to that about the shapes and will not be repeated here.
In one implementation, the arrangement of the first region and the second region includes, but is not limited to: the first area is arranged at two sides of the second area according to a preset rule; the second areas are arranged between, at two sides and/or at the periphery of the first areas according to a preset rule; the first regions are arranged at corresponding positions throughout the first region according to a predetermined rule and the second regions are arranged at remaining positions throughout the first region according to a predetermined rule, for example, the first regions are arranged at the left side throughout the first region according to a predetermined rule and the second regions are arranged at the right side throughout the first region according to a predetermined rule; the first areas with the first quantity and the first areas with the second quantity are respectively positioned at two sides of the second areas with the third quantity, and the first areas at the two sides are symmetrically arranged; the first areas of the first quantity and the first areas of the second quantity are respectively positioned at two sides of the second areas of the third quantity, and the first areas at the two sides are arranged in a mirror image mode.
Because the filtering film of spectrum chip is including laying the first region of quantum dot and not laying the second region of quantum dot, consequently, the utility model discloses a spectrum chip can come to rectify the signal of the intensity of the light that the first region transmits out based on the signal of the intensity of the light that transmits out from the second region to can effectively eliminate because the spectral detection error that intensity spatial distribution leads to, can improve spectral resolution from this.
In one possible implementation, the layout of the first and second regions is determined according to information related to the correction of the spatial distribution of the intensity of the incident light source and/or the dimensions of the chip target surface and the filter film.
In this embodiment, the layout of the first region and the second region may be determined (or selected) based on information related to the correction of the spatial distribution of intensity, such as the correction accuracy and/or the size of the target surface of the chip and the filter film.
In one possible implementation, the first regions and the second regions are laid out in a layout manner in which a first number of second regions of corresponding size and shape are arranged in first corresponding positions and a second number of first regions of corresponding size and shape are arranged in second corresponding positions, so that the correction accuracy of the spectral chip thus fabricated satisfies a correction threshold under the condition that the sizes of the chip target surface and the filter film are satisfied.
In the present embodiment, the number, shape, size, and position of the second regions are determined in accordance with the correction accuracy and the sizes of the chip target surface and the filter film, and the second regions are laid out in such a manner that the determined number of second regions having the determined size and shape are disposed at the determined positions, and accordingly, the number, shape, size, and position of the first regions are determined in accordance with the correction accuracy and the sizes of the chip target surface and the filter film, and the determined number of first regions having the determined size and shape are disposed at the determined positions. A specific example can be seen in fig. 2g, wherein the dashed blank block in fig. 2g represents the second area and the shaded block represents the first area.
Therefore, the number, the shape, the size and the position of the first area and the second area can be selected at will according to actual needs, and the number, the shape, the size and the position of the first area and the second area are not limited, so that the customized spectrum chip can be realized.
In a possible implementation, in the presence of a light spot, a greater number and/or a greater size of second regions are provided at the edge of the light spot than inside the light spot; and/or providing a greater number and/or size of second regions at locations where the spots overlap than at locations where the spots do not overlap.
In this embodiment, the layout manner of the second region may be determined according to the condition of the light spots, for example, the layout manner of the second region corresponding to each light spot is determined for each light spot; in the case where a plurality of light spots exist, some more second regions are provided at the edges of the respective light spots, some more second regions are provided at positions where the light spots overlap, and the second regions are reduced in the other regions. Specific example referring to fig. 2h, as shown in fig. 2h, there are two spots of spot 1 and spot 2, and there are overlapping areas of spot 1 and spot 2, the second area is provided as much as possible in the overlapping area, and the second area is provided as much as possible at the edge of the non-overlapping area of spot 1 and spot 2.
Therefore, the area of the chip target can be utilized to the maximum extent, and the utilization rate of the spectrum chip can be improved; in addition, the design can be targeted according to different light spot conditions.
In one possible implementation, in a case where the intensity spatial distribution of the incident light source is uniform, if the entire filter film includes a plurality of rectangular blocks, the first region and the second region are laid out in a layout manner in which the rectangular blocks at the respective positions are set as the second region, the rectangular blocks at the remaining positions are set as the first region, and the set second regions are uniformly distributed in the plurality of rectangular blocks.
It should be understood that uniform distribution means that the spatial distribution of the irradiance across the target surface of the wafer has a relative standard deviation of no greater than 5%, in one implementation, uniform distribution means that the spatial distribution of the irradiance across the target surface of the wafer has a relative standard deviation of no greater than 3%, and in another implementation, uniform distribution means that the spatial distribution of the irradiance across the target surface of the wafer has a relative standard deviation of no greater than 1%.
In this embodiment, under the condition that the intensity of the incident light source is uniformly distributed in space, the whole filter film is assumed to include M × N rectangular blocks, and the position of each rectangular block is ai,jWherein i denotes a row number and j denotes a column number, i ═ 1,2, … MAnd j is 1,2, … N, where M and N are positive integers, the rectangular tiles at the corresponding positions may be set as the second region and the rectangular tiles at the remaining positions may be set as the first region, and the set second regions are uniformly distributed among the M × N rectangular tiles.
In one possible implementation, M equals 5 and N equals 7. As shown in fig. 2a, the black rectangular area corresponds to the first area, the blank rectangular area corresponds to the second area, the filter film is divided into 35 rectangular areas of 5 × 7, and the positions of the 35 rectangular areas are ai,jWherein i is 1,2, … 5, j is 1,2, … 7, position a1,1、A1,4、A1,7、A2,2、A2,6、A3,1、A3,4、A3,7、A4,2、A4,6、A5,1、A5,4And A5,7The rectangular blocks are set as the second area, and the rest position is A1,2、A1,3、A1,5、A1,6、A2,1、A2,3、A2,4、A2,5、A2,7、A3,2、A3,3、A3,5、A3,6、A4,1、A4,3、A4,4、A4,5、A4,7、A5,2、A5,3、A5,5And A5,6The rectangular blocks are respectively set as the first areas.
For the layout mode shown in fig. 2a, the whole filtering film is divided into a plurality of adjacent rectangular blocks, a rectangular block set uniformly distributed on the whole filtering film in a certain proportion (number) is selected, each rectangular block in the set is respectively set as a second area, and each rectangular block outside the set is respectively set as a first area.
In one possible implementation, M equals 7 and N equals 7. As shown in fig. 2b, the black rectangular area corresponds to the first area, the blank rectangular area corresponds to the second area, the filter film is divided into 49 rectangular areas of 7 × 7, and the corresponding positions of the 49 rectangular areas are ai,jWherein i is 1,2, … 7, j is 1,2, … 7, position a2,2、A2,3、A2,5、A2,6、A3,2、A3,3、A3,5、A3,6、A5,2、A5,3、A5,5、A5,6、A6,2、A6,3、A6,5And A6,6The rectangular blocks are set as the first area and the rest position is A1,1、A1,2、A1,3、A1,4、A1,5、A1,6、A1,7、A2,1、A2,4、A2,7、A3,1、A3,4、A3,7、A4,1、A4,2、A4,3、A4,4、A4,5、A4,6、A4,7、A5,1、A5,4、A5,7、A6,1、A6,4、A6,7、A7,1、A7,2、A7,3、A7,4、A7,5、A7,6And A7,7The rectangular blocks are respectively set as second areas.
For the layout shown in fig. 2b, the whole filter film is divided into "tian" grids, four rectangular blocks in the "tian" grids are set as the first areas, and each rectangular block on the "tian" word line is set as the second area.
Compared with the layout shown in fig. 2a, the layout shown in fig. 2b has a higher blank ratio, i.e., the ratio of the second region in the whole filter film is higher, and accordingly, the utilization rate of the target surface of the chip is lower.
In one possible implementation, in a case where the spatial distribution of the intensity of the incident light source is not uniform, if the entire filter film includes a plurality of rectangular blocks, the first region and the second region are laid out in a layout manner in which the rectangular blocks are set as the first region and the second region is set in the gap between the rectangular blocks.
In the present embodiment, in the case where the intensity spatial distribution of the incident light source is not uniform, assuming that the entire filter film includes a plurality of rectangular blocks, the rectangular blocks may be set as the first regions and the second regions may be set in the gaps between the rectangular blocks.
In one possible implementation, M equals 5 and N equals 7. As shown in fig. 2c, the black rectangular block corresponds to a first area, the blank rectangular block corresponds to a second area, the filter film is divided into 35 rectangular blocks of 5 × 7, each of the 35 rectangular blocks is set as the first area, and one second area is respectively set at four side positions of a circumscribed rectangle spaced apart from the respective rectangular blocks by a corresponding distance. For the layout shown in fig. 2c, sufficient space is reserved between the first regions.
In one possible implementation, M equals 5 and N equals 7. As shown in fig. 2d, the black circular block corresponds to a first area, the blank rectangular block corresponds to a second area, the filter film is divided into 35 circular blocks of 5 × 7, each of the 35 circular blocks is set as the first area, and one second area is respectively set at four corner positions of a circumscribed rectangle spaced apart from each circular block by a corresponding distance. For the layout shown in fig. 2d, enough space is reserved at the four corners of the first area.
In one possible implementation, M equals 5 and N equals 7. As shown in fig. 2e, the black rectangular block corresponds to a first area, the blank rectangular block corresponds to a second area, the filter film is divided into 35 rectangular blocks of 5 × 7, each of the 35 rectangular blocks is set as the first area, and one second area is respectively set at four side positions and four corner positions of a circumscribed rectangle spaced apart from each rectangular block by a corresponding distance. For the layout shown in fig. 2e, enough gaps are reserved between the four corners of the first area and the first area.
In the present embodiment, in the case where the required spectral resolution is lower than the threshold, assuming that the entire filter film is divided into a plurality of bands, the band at the corresponding position may be set as the first region and at least one second region may be set at the corresponding position of four sides of a circumscribed rectangle spaced apart from the band by a corresponding distance.
In one possible implementation, M equals 2 and N equals 9. As shown in fig. 2f, the black stripe corresponds to a first area, the blank rectangular block corresponds to a second area, the filter film is divided into 18 stripes of 2 × 9, each of the 18 stripes is set as the first area, and two second areas are respectively provided at symmetrical positions of two long sides of a circumscribed rectangle spaced apart from the respective stripes by a corresponding distance, and one second area is provided at a position of at least one short side of the circumscribed rectangle. For the layout shown in fig. 2f, the first regions and the second regions are arranged alternately.
In the present embodiment, in the case where the required spectral resolution is lower than the threshold value, the stripe-shaped first regions are used, and the stripe-shaped first regions may be arranged in accordance with a predetermined rule at corresponding positions of the filter film, while the second regions may be arranged at remaining positions of the filter film.
In one possible implementation, it is considered that making small blocks of filter film uniform at the pixel level is very difficult in process and time consuming. Thus, in some application scenarios where too high a spectral resolution is not required, e.g. application scenarios where the spectral resolution is below a threshold value, a strip-type first region with easier processing may be used. For the stripe-type first region, a layout manner such as shown in fig. 2f and 2r may be adopted. Of course, the stripe-shaped first region may be used only for a part of the first region on the same filter film, for example, the layout shown in fig. 2 m.
In a possible implementation manner, considering that the same object has different imaging under quantum dot stripes with different wavelengths, which may affect image stitching using different quantum dot stripes, one quantum dot stripe cannot sweep over two side surfaces (two sides along the sweeping direction) of the three-dimensional object through one sweeping, so that for the three-dimensional object, a situation of spectrum information loss may occur. Therefore, the utility model discloses use the second region and solve the problem that three-dimensional object spectrum lacked through the strip arrangement mode of difference.
By the second region, it makes the stitching algorithm more robust; the problem that the spectral information of the three-dimensional object is not complete due to deficiency can be solved by using the same quantum dot strips on the two sides of the target surface of the chip.
It should be understood that the second region and the first region can be combined at will, and the present invention can also adopt other layout ways, limited by space, and the present invention is not expanded in detail.
Fig. 3 shows a block diagram of a spectroscopy apparatus according to an embodiment of the present invention. As shown in fig. 3, the spectroscopy apparatus 300 may include the spectroscopy chip 100, wherein the description of the spectroscopy chip 100 can refer to the detailed description above, and the description thereof is omitted here.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (14)

1. A spectroscopy chip, comprising:
a filter film for splitting light from an incident light source;
the light filtering film is arranged on the substrate; and
the chip target surface is attached to one side, provided with the light filtering film, of the substrate, and is used for receiving the light transmitted by the light filtering film and outputting a signal serving as the intensity of the light transmitted by the light filtering film, and the signal is used for obtaining the detection result of the spectrum chip.
2. The spectroscopy chip of claim 1, wherein the filter film comprises:
the first region is provided with quantum dots and is positioned at a first position of the light filtering film, which corresponds to a first substrate position of the substrate; and
a second region located at a second position of the filter film corresponding to a second substrate position of the substrate, wherein the first position is different from the second position.
3. The spectroscopy chip of claim 2, wherein the second region is free of quantum dots.
4. The spectroscopy chip of claim 2, wherein the second region comprises a non-light transmissive structure capable of blocking light from transmitting all light and a light transmissive structure capable of transmitting a predetermined amount of light.
5. The spectroscopy chip of claim 2, wherein at least one of the second regions is disposed around at least one of the first regions.
6. The spectroscopy chip of claim 3,
at least one second region is arranged at a corresponding position of at least one side of four sides of a circumscribed rectangle spaced from at least one first region by a corresponding distance; and/or
At least one of the second regions is disposed at a corresponding position of at least one vertex of four vertices of a circumscribed rectangle spaced apart from at least one of the first regions by a corresponding distance.
7. The spectroscopy chip of claim 2, wherein a block of at least one of the first regions is surrounded by a plurality of the second regions.
8. The spectroscopy chip of claim 2, wherein a block of at least one of the second regions is surrounded by a plurality of the first regions.
9. The spectroscopy chip of claim 2, wherein the plurality of second regions are arranged continuously and/or non-uniformly.
10. The spectroscopy chip of any one of claims 2-9, wherein the shape of the first region and/or the second region comprises at least one of a rectangle, a circle, a strip, a diamond, a polygon.
11. The spectroscopy chip of claim 10, wherein the shape of the first region is the same as the shape of the second region or the shape of the first region is different from the shape of the second region.
12. The spectroscopy chip of any one of claims 2-9 and 11, wherein the first region is the same size as the second region or the first region is different size than the second region.
13. The spectroscopy chip of any one of claims 2-9 and 11,
the sizes and/or shapes of the first areas are the same with each other; or
The sizes and/or shapes of the first areas are different from each other; or
The sizes and/or shapes of the first regions belonging to the same group are the same as each other, and the sizes and/or shapes of the first regions belonging to different groups are different from each other.
14. A spectroscopic assembly comprising a spectroscopic chip according to any one of claims 1 to 13.
CN202120349238.0U 2021-02-07 2021-02-07 Spectrum chip and spectrum device comprising same Active CN214583655U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114354512A (en) * 2021-12-14 2022-04-15 之江实验室 Quantum dot thin film spectrum detection instrument and application method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114354512A (en) * 2021-12-14 2022-04-15 之江实验室 Quantum dot thin film spectrum detection instrument and application method thereof

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