CN214506792U

CN214506792U - High-cleanness speed-multiplying motor mechanism

Info

Publication number: CN214506792U
Application number: CN202122279279.XU
Authority: CN
Inventors: 魏猛; 王阳; 张茂峰
Original assignee: Shenyang Tdsemi Co ltd
Current assignee: Shenyang Tdsemi Co ltd
Priority date: 2021-09-22
Filing date: 2021-09-22
Publication date: 2021-10-26
Anticipated expiration: 2031-09-22

Abstract

The utility model discloses a high clean doubly fast motor mechanism belongs to doubly fast motor structure field, including base plate and high-speed motor, the surperficial bottom bolt of base plate has the mounting bracket, be equipped with high rotational speed main shaft actuating mechanism between base plate and the mounting bracket, high rotational speed main shaft actuating mechanism includes main shaft, mount pad, back to bearing and location bearing, the embedded surface of installing at the base plate of mount pad, the embedded back to bearing that is equipped with of inner wall of mount pad, main shaft movable mounting is to back to in the bearing, the high-speed motor bolt is to the bottom surface of mounting bracket, just the cooperation is installed on high-speed motor and the main shaft and is hanged out dirt doubly fast mechanism lowly. The utility model discloses can effectively be applied to and all require high semiconductor field very much to cleanliness factor, vibration, speed and noise, integration that simultaneously can be very convenient improves the process standard in the semiconductor board, improves the finished product yield.

Description

High-cleanness speed-multiplying motor mechanism

Technical Field

The utility model relates to a doubly fast motor structure field specifically is high clean doubly fast motor mechanism.

Background

At present common doubly fast motor mechanism general structure is comparatively complicated, needs comparatively loaded down with trivial details step and semiconductor board to cooperate in concrete assembly use, still need to ensure to transport the whole resistance to compression shockproof effect in the working process in order to ensure technological standard, and whole realization effect is not good enough.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a high clean doubly fast motor mechanism can effectively be applied to and all require high semiconductor field very much to cleanliness factor, vibration, speed and noise, and integration that simultaneously can be very convenient improves the process standard in the semiconductor board, improves the finished product yield.

The utility model provides a following technical scheme: the high-cleanness speed-multiplying motor mechanism comprises a substrate and a high-speed motor, wherein a mounting frame is bolted to the bottom of the surface of the substrate, a high-rotation-speed spindle executing mechanism is assembled between the substrate and the mounting frame, the high-rotation-speed spindle executing mechanism comprises a spindle, a mounting seat, back-to-back bearings and a positioning bearing, the mounting seat is installed on the surface of the substrate in an embedded mode, the back-to-back bearings are assembled on the inner wall of the mounting seat in an embedded mode, and the spindle is movably installed in the back-to-back bearings;

the high-speed motor is bolted to the bottom surface of the mounting frame, and the low-dust-emission speed-multiplying mechanism is installed on the high-speed motor and the spindle in a matched mode.

Preferably, the low-dust-generation speed multiplying mechanism comprises a first driving wheel, a second driving wheel and a flexible belt, the first driving wheel is connected to the surface of the spindle in a key mode, the second driving wheel is connected with the output end of the high-speed motor in a key mode through the key, and the first driving wheel and the second driving wheel are connected through the flexible belt in a transmission mode.

Preferably, the positioning bearing is embedded and mounted on one side surface of the mounting frame, and one end of the main shaft is movably mounted in the positioning bearing.

Preferably, the peripheral surface of the substrate is sequentially and uniformly provided with mounting holes.

Preferably, the surface of the substrate between the high-speed motor and the spindle is provided with an open slot.

Preferably, the surface of the base plate on one side of the open slot is bolted with a reinforcing plate, and the reinforcing plate is of an integrated structure made of steel structure materials.

Preferably, the surface of the base plate on both sides of the opening groove and the surface of the main shaft side are respectively provided with a second damper block.

Preferably, an open slot is formed in the surface of the mounting seat on one side of the first driving wheel, an auxiliary supporting rod is bolted to the surface of the mounting seat at the open slot, and the other end of the auxiliary supporting rod is bolted to the surface of the mounting frame.

Preferably, the shell surface of the high-speed motor is symmetrically bolted with connecting pieces, and the two connecting pieces are respectively inserted into the bottom surface of the mounting frame in an embedded manner.

Preferably, the bottom surface of base plate passes through coupling mechanism cooperation and first snubber block fixed connection, the bottom of first snubber block passes through the cooperation of auxiliary connection subassembly and the fixed surface connection of mounting bracket.

Preferably, coupling mechanism includes mount, recess, link, internal frame and trip, the mount bolt connects to the bottom surface of base plate, the bilateral symmetry formula of mount is seted up flutedly, the embedded side surface of installing to the link of first snubber block, the surface bolt of link has connect the internal frame, the both ends integrated into one piece of internal frame has the trip, the internal frame corresponds the grafting through two trip cooperations and the recess that sets up on the mount.

Preferably, auxiliary connection subassembly includes connecting seat, connecting rod and protruding piece, the embedded surface that sets up at the connecting seat in bottom of first snubber block, the bottom surface bonding of connecting seat has the connecting rod, the surface of connecting rod evenly is equipped with protruding piece in proper order, the connecting rod pegs graft to the surface of mounting bracket through the cooperation of protruding piece, just the tip of connecting rod runs through the mounting bracket.

The utility model discloses a technological effect and advantage:

1. the utility model discloses mainly by high speed motor, low dust-emitting is fast mechanism doubly and high rotational speed main shaft actuating mechanism three major parts are constituteed, can effectively be applied to and all require high semiconductor field very much to cleanliness factor, vibration, speed and noise, integration that simultaneously can be very convenient improves process standard in the semiconductor board, improves the finished product yield.

2. Through the optimization to inner structure, utilize the flexonics mode to make high rotational speed main shaft actuating mechanism and the low speed mechanism that doubly send out dirt to carry out the correlation, when reaching the improvement terminal speed, reduce vibration and noise for high rotational speed main shaft actuating mechanism moves more fast and steadily.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the connection structure of the low dust-generating speed-multiplying mechanism and the high-speed spindle actuator of the present invention;

FIG. 3 is a schematic structural view of a first damper mounting portion of the present invention;

fig. 4 is a schematic structural diagram of a part marked a in fig. 3.

Description of reference numerals: 1. a substrate; 2. a high-speed motor; 3. a low dust-generating speed-multiplying mechanism; 4. a high-speed spindle actuator; 5. a main shaft; 6. a mounting seat; 7. back to the bearing; 8. a mounting frame; 9. positioning the bearing; 10. a first drive pulley; 11. a second transmission wheel; 12. a flexible belt; 13. a first damper block; 14. a second damper block; 15. mounting holes; 16. a reinforcing plate; 17. an auxiliary strut; 18. a connecting member; 19. a connecting mechanism; 191. a fixed mount; 192. a groove; 193. a connecting frame; 194. an inner frame; 195. a hook is clamped; 20. a connecting seat; 21. a connecting rod; 211. and (4) a convex block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a doubly fast motor mechanism of high clean as shown in fig. 1-4, including base plate 1 and high-speed motor 2, base plate 1's surperficial bottom bolt joint has mounting bracket 8, is equipped with high rotational speed main shaft actuating mechanism 4 between base plate 1 and the mounting bracket 8, and high rotational speed main shaft actuating mechanism 4 includes main shaft 5, mount pad 6, back to bearing 7 and location bearing 9, and 6 embedded installations on base plate 1's surface of mount pad, the embedded back to bearing 7 that is equipped with of inner wall of mount pad 6, 5 movable mounting of main shaft to back to in the bearing 7.

The positioning bearing 9 is embedded and installed on one side surface of the installation frame 8, and one end of the main shaft 5 is movably installed in the positioning bearing 9. Utilize locating bearing 9 cooperation mounting bracket 8 to assemble to make locating bearing 9 can provide the outrigger to the tip of main shaft 5, avoid main shaft 5 to rotate the in-process and appear rocking easily.

The peripheral surface of the substrate 1 is sequentially and uniformly provided with mounting holes 15. The mounting holes 15 are provided to facilitate the surface of the base plate 1 to be fitted with other fasteners for mounting work. An open slot is arranged on the surface of the substrate 1 between the high-speed motor 2 and the main shaft 5. The intervention is easy to carry out, and the subsequent maintenance is convenient to carry out. The surface of the base plate 1 at one side of the open slot is bolted with a reinforcing plate 16, and the reinforcing plate 16 is an integrated structure made of steel structural materials. The reinforcing plate 16 further ensures the strength and rigidity of the surface of the substrate 1, and can improve the compression and impact resistance of the whole structure.

The high-speed motor 2 is bolted to the bottom surface of the mounting frame 8, and the low-dust-generation speed-multiplying mechanism 3 is installed on the high-speed motor 2 and the spindle 5 in a matched mode. The low-dust-generation speed multiplying mechanism 3 comprises a first driving wheel 10, a second driving wheel 11 and a flexible belt 12, wherein the first driving wheel 10 is connected to the surface of the spindle 5 in a key mode, the second driving wheel 11 is connected with the output end key of the high-speed motor 2 in a key mode through the key, and the first driving wheel 10 is in transmission connection with the second driving wheel 11 through the flexible belt 12. The basic transmission effect is achieved, the high-speed motor 2 is used for driving the second transmission wheel 11 to match the flexible belt 12 to drive the first transmission wheel 10, the spindle 5 can work effectively, and the overall action is simple and easy to achieve.

An open slot is formed in the surface of the mounting seat 6 on one side of the first driving wheel 10, an auxiliary supporting rod 17 is bolted to the surface of the mounting seat 6 at the open slot, and the other end of the auxiliary supporting rod 17 is bolted to the surface of the mounting frame 8. The auxiliary support rod 17 is used for further correlating the structure between the mounting seat 6 and the mounting frame 8, so as to play an auxiliary fixing effect, and the structure of the transmission connection area of the first transmission wheel 10, the second transmission wheel 11 and the flexible belt 12 is safer. The shell surface of the high-speed motor 2 is symmetrically bolted with connecting pieces 18, and the two connecting pieces 18 are respectively inserted into the bottom surface of the mounting rack 8 in an embedded manner. The auxiliary fixing effect is achieved, and the installation stability of the high-speed motor 2 is further ensured.

The surface of the base plate 1 on both sides of the open groove and the surface on one side of the main shaft 5 are respectively provided with a second damper block 14. The shock absorption block structure is arranged to provide good shock absorption and pressure resistance effects for the high-rotation-speed spindle actuating mechanism 4 and the low-dust-generation speed multiplying mechanism 3 when the substrate 1 is matched with other equipment for assembly. A first damper 13 is mounted between one side of the mounting bracket 8 and the base plate 1, and one end of the first damper 13 is inserted through the surface of the mounting bracket 8. The lower part of the high-rotating-speed spindle actuating mechanism 4 is semicircular, so that the flexible belt 12 can move conveniently, and the support rod is used for supporting the high-rotating-speed spindle actuating mechanism 4.

The bottom surface of the base plate 1 is matched and fixedly connected with the first damping block 13 through a connecting mechanism 19, and the bottom of the first damping block 13 is matched and fixedly connected with the surface of the mounting frame 8 through an auxiliary connecting assembly. The connecting mechanism 19 comprises a fixing frame 191, a groove 192, a connecting frame 193, an inner frame 194 and clamping hooks 195, the fixing frame 191 is bolted to the bottom surface of the substrate 1, the grooves 192 are symmetrically formed in two sides of the fixing frame 191, the first shock absorption block 13 is installed on one side surface of the connecting frame 193 in an embedded mode, the inner frame 194 is bolted to the surface of the connecting frame 193 in a bolted mode, the clamping hooks 195 are integrally formed at two ends of the inner frame 194, and the inner frame 194 is correspondingly plugged with the grooves 192 formed in the fixing frame 191 through the matching of the two clamping hooks 195. Supplementary coupling assembling includes connecting seat 20, connecting rod 21 and protruding piece 211, and the embedded surface that sets up at connecting seat 20 in bottom of first snubber block 13, and the bottom surface bonding of connecting seat 20 has connecting rod 21, and connecting rod 21's surface evenly is equipped with protruding piece 211 in proper order, and connecting rod 21 is inserted to the surface of mounting bracket 8 through the cooperation of protruding piece 211, and the tip of connecting rod 21 runs through mounting bracket 8.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. High clean doubly fast motor mechanism, including base plate (1) and high-speed motor (2), its characterized in that: the surface bottom of the substrate (1) is bolted with a mounting rack (8), a high-rotation-speed spindle actuator (4) is assembled between the substrate (1) and the mounting rack (8), the high-rotation-speed spindle actuator (4) comprises a spindle (5), a mounting seat (6), a back-to-back bearing (7) and a positioning bearing (9), the mounting seat (6) is embedded in the surface of the substrate (1), the back-to-back bearing (7) is embedded in the inner wall of the mounting seat (6), and the spindle (5) is movably mounted in the back-to-back bearing (7);

the high-speed motor (2) is bolted to the bottom surface of the mounting frame (8), and the low-dust-generation speed-multiplying mechanism (3) is installed on the high-speed motor (2) and the main shaft (5) in a matched mode.

2. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: low dust-generating speed-multiplying mechanism (3) comprises a first driving wheel (10), a second driving wheel (11) and a flexible belt (12), the first driving wheel (10) is in key connection with the surface of a main shaft (5), the second driving wheel (11) is in key connection with the output end of a high-speed motor (2) through a key, and the first driving wheel (10) is in transmission connection with the second driving wheel (11) through the flexible belt (12).

3. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: the positioning bearing (9) is embedded and installed on one side surface of the installation frame (8), and one end of the main shaft (5) is movably installed in the positioning bearing (9).

4. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: the peripheral surface of the base plate (1) is sequentially and uniformly provided with mounting holes (15).

5. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: an open slot is formed in the surface of the substrate (1) between the high-speed motor (2) and the spindle (5).

6. The high-cleanliness multiple-speed motor mechanism according to claim 5, wherein: the surface of the base plate (1) on one side of the open slot is bolted with a reinforcing plate (16), and the reinforcing plate (16) is of an integrated structure made of steel structure materials.

7. The high-cleanliness multiple-speed motor mechanism according to claim 5, wherein: and the surfaces of the two sides of the open slot of the substrate (1) and the surface of one side of the main shaft (5) are respectively provided with a second damping block (14).

8. The high-cleanliness multiple-speed motor mechanism according to claim 2, wherein: the open slot has been seted up on the surface of mount pad (6) one side at first drive wheel (10), just mount pad (6) have bolted auxiliary strut (17) on the surface of open slot department, the other end bolt of auxiliary strut (17) connects to the surface of mounting bracket (8).

9. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: the shell surface of the high-speed motor (2) is symmetrically bolted with connecting pieces (18), and the two connecting pieces (18) are respectively inserted into the bottom surface of the mounting rack (8) in an embedded manner.

10. The high-cleanliness multiple-speed motor mechanism according to claim 1, wherein: the bottom surface of base plate (1) passes through coupling mechanism (19) cooperation and first snubber block (13) fixed connection, the bottom of first snubber block (13) passes through the surface fixed connection of auxiliary connection subassembly cooperation and mounting bracket (8).

11. The high-cleanliness multiple-speed motor mechanism according to claim 10, wherein: coupling mechanism (19) are including mount (191), recess (192), link (193), internal frame (194) and trip (195), the bottom surface of mount (191) bolt to base plate (1), recess (192) are seted up to the bilateral symmetry formula of mount (191), embedded one side surface of installing to link (193) of first snubber block (13), the surface bolt of link (193) has internal frame (194), the both ends integrated into one piece of internal frame (194) has trip (195), internal frame (194) correspond the grafting through two trip (195) cooperations and recess (192) that set up on mount (191).

12. The high-cleanliness multiple-speed motor mechanism according to claim 10, wherein: supplementary coupling assembling includes connecting seat (20), connecting rod (21) and protruding piece (211), the embedded surface that sets up at connecting seat (20) in bottom of first snubber block (13), the bottom surface bonding of connecting seat (20) has connecting rod (21), the surface of connecting rod (21) evenly is equipped with protruding piece (211) in proper order, connecting rod (21) are pegged graft to the surface of mounting bracket (8) through protruding piece (211) cooperation, just mounting bracket (8) are run through to the tip of connecting rod (21).