CN214472360U - Tungsten cathode welding force testing device for ion source parts of ion implanter - Google Patents
Tungsten cathode welding force testing device for ion source parts of ion implanter Download PDFInfo
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- CN214472360U CN214472360U CN202120654022.5U CN202120654022U CN214472360U CN 214472360 U CN214472360 U CN 214472360U CN 202120654022 U CN202120654022 U CN 202120654022U CN 214472360 U CN214472360 U CN 214472360U
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Abstract
The utility model discloses an ion implanter ion source spare part's tungsten cathode welding power testing arrangement belongs to tungsten cathode welding power test technical field, including block, piston and pressure test main part, wherein the block inlay card is fixed at pressure test main part top, and movable mounting has the piston in the middle part of block and pressure test main part, and the piston upper end is connected with the ejector pin, and ejector pin slidable mounting is in the block, and the block upper end is equipped with the screw thread through-hole that is used for fixed part that awaits measuring, and pressure test main part middle part is equipped with the piston chamber, and piston slidable mounting is in the piston intracavity. The utility model discloses a piston pressure gauge produces pressure, makes pressure output slowly steady, can not produce proruption pressure to the test part, makes the part obtain the protection in the testing process, and the ejector pin is fixed the central point of putting at the part to the pressure impetus of test part simultaneously, makes the test more accurate, and threaded connection's block is easily changed, is applicable to different parts, has promoted the general purpose nature.
Description
Technical Field
The utility model relates to a tungsten cathode welding power test technical field specifically is a tungsten cathode welding power testing arrangement of ion implantation machine ion source spare part.
Background
In the manufacturing process of the tungsten cathode, firmness detection needs to be carried out on parts assembled in an interference fit mode or welded and formed mode, a rod is used for leading in the parts by the aid of an existing detection means, the rod is directly contacted with the assembled parts, then a pressure rod of a digital display spring pressure testing machine is pulled, downward pressure is applied to the rod, when the numerical value displayed by the digital display spring pressure testing machine reaches a standard value, if the parts are still intact, the parts are judged to be qualified, otherwise, the parts are judged to be unqualified, and when the pressure is tested, pressure points applying the pressure are not fixed, the pressure rod is manually pulled, the pressure is not uniform when the pressure acts on the parts, and the parts are damaged or test results are not accurate.
Therefore, it is desirable to provide a device for testing the welding force of the tungsten cathode of the ion source component of the ion implanter, which aims to solve the above problems.
Disclosure of Invention
The embodiment of the utility model provides a not enough to prior art exists, the utility model provides a tungsten cathode welding power testing arrangement of ion implantation machine ion source spare part to solve the problem among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a tungsten cathode welding power testing arrangement of ion implantation machine ion source spare part, includes block, piston and pressure test main part, and wherein the vertical inlay card of block is fixed at pressure test main part top, and block and pressure test main part middle part movable mounting have the piston, and the piston upper end is connected with the ejector pin that is used for upwards ejecting part that awaits measuring, and the screw thread through-hole that is used for fixed part that awaits measuring is seted up to the block upper end.
As a further scheme of the utility model, block, screw through-hole, ejector pin, piston and the equal coaxial setting of pressure test main part.
As a further scheme of the utility model, block lower extreme fixedly connected with screwed joint, the block passes through screwed joint and links to each other with the pressure test main part is fixed.
As the utility model discloses further scheme, the piston chamber has been seted up at pressure test main part middle part, and piston slidable mounting is at piston intracavity portion, piston and piston chamber clearance fit.
As a further scheme of the utility model, ejector pin slidable mounting is at the block middle part, ejector pin and block clearance fit.
To sum up, compared with the prior art, the embodiment of the utility model has the following beneficial effects:
the utility model discloses a piston pressure gauge produces pressure, behind piston pressure gauge conversion effort, the output of pressure becomes slowly, it is steady, can not produce proruptive pressure to the test part, make the part obtain the protection in the testing process, when the ejector pin makes piston motion in the pressure test main part, the ejector pin can guarantee the central point at the part to the pressure impetus of test part, it is more accurate to make the test, can play the guard action to the test part simultaneously, the block also is connected through screw thread and pressure test main part, consequently, change the block, just can be applicable to different parts, very big promotion the commonality.
To illustrate the structural features and functions of the present invention more clearly, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Drawings
Fig. 1 is an exploded schematic view of an embodiment of the present invention.
Fig. 2 is a schematic plan view of an embodiment of the present invention.
Fig. 3 is a schematic diagram of the overall structure of the embodiment of the present invention.
Reference numerals: the pressure measuring device comprises a cover cap 1, a threaded connector 2, a threaded through hole 3, a push rod 4, a piston 5, a pressure measuring main body 6, a piston cavity 7, a pin key 8, a pressure gauge connector 9 and a part to be measured 10.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The following detailed description is provided for the specific embodiments of the present invention.
Example 1
Referring to fig. 1 to 3, a tungsten cathode welding force testing device for ion source parts of an ion implanter comprises a cap 1, a piston 5 and a pressure testing main body 6, wherein the cap 1 is longitudinally fixed on the top of the pressure testing main body 6 in an embedded manner, the piston 5 is movably arranged in the middle of the cap 1 and the pressure testing main body 6, the upper end of the piston 5 is connected with a push rod 4 for pushing up a part to be tested 10, the push rod 4 is slidably arranged in the middle of the cap 1, the push rod 4 is in clearance fit with the cap 1, the upper end of the cap 1 is provided with a threaded through hole 3 for fixing the part to be tested 10, the cap 1, the threaded through hole 3, the push rod 4, the piston 5 and the pressure testing main body 6 are coaxially arranged, the lower end of the cap 1 is fixedly connected with a threaded joint 2, the cap 1 is fixedly connected with the pressure testing main body 6 through the threaded joint 2, the middle of the pressure testing main body 6 is provided with a piston cavity 7, the piston 5 is slidably arranged in the piston cavity 7, the piston 5 is in clearance fit with the piston cavity 7.
The utility model discloses a theory of operation is: firstly, in the installation process, the piston 5 is installed in the piston cavity 7 in a sliding mode, then the cap 1 is vertically downwards embedded on the pressure testing main body 6 in a clamping mode from the upper side, the ejector rod 4 penetrates through the middle of the cap 1, the pressure gauge joint 9 below the pressure testing main body 6 is connected with the power output end at the moment, after the installation is completed, the part 10 to be tested is fixedly installed inside the threaded through hole 3 through threads, then the piston 5 is driven to be upwards ejected through the pressure gauge joint 9, when the piston 5 longitudinally slides in the piston cavity 7, the ejector rod 4 fixedly connected with the upper side of the piston 5 and the part 10 to be tested in the threaded through hole 3 are in a coaxial state, and after the ejector rod 4 is ejected upwards, stable pressure is applied to the part 10 to be tested after the ejector rod 4 is in contact with the bottom of the part 10 to be tested.
Because the output of pressure becomes slowly, steadily, can not produce proruption pressure to the test part, make the part obtain the protection in the test process, and ejector pin 4 when doing piston motion in piston chamber 7, ejector pin 4 can guarantee at the central point of part to the pressure impetus of test part, can make the test more accurate, can play certain guard action to the part 10 that awaits measuring simultaneously, and because block 1 also is connected through screw thread and pressure test main part 6, consequently as long as through changing different block 1, just can make the device be applicable to different parts and test, the commonality of the device has effectively been promoted.
In the description of the present invention, it is to be understood that the terms "left side", "bottom", "right side", "top", "upper", "one side", "inner", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Furthermore, it should be noted that unless otherwise expressly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections; can be mechanically or electrically connected; the term "connected" refers to a connection between two elements or an interaction between two elements, and unless otherwise specifically defined, the term is used in the present invention to refer to the specific meaning of the term in the present invention.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. The utility model provides a tungsten cathode welding power testing arrangement of ion implantation machine ion source spare part, includes block (1), piston (5) and pressure test main part (6), its characterized in that, block (1) vertically inlays to be fixed at pressure test main part (6) top, and block (1) and pressure test main part (6) middle part movable mounting has piston (5), and piston (5) upper end is connected with ejector pin (4) that are used for upwards ejecting part (10) that await measuring, and screw thread through-hole (3) that are used for fixed part (10) that await measuring are seted up to block (1) upper end.
2. The apparatus for testing the welding force of the tungsten cathode of the ion source part of the ion implanter according to claim 1, wherein the cap (1), the threaded through hole (3), the ejector pin (4), the piston (5) and the pressure testing body (6) are coaxially arranged.
3. The apparatus for testing the welding force of the tungsten cathode of the ion source component of the ion implanter according to claim 2, characterized in that the lower end of the cap (1) is fixedly connected with a threaded joint (2), and the cap (1) is fixedly connected with the pressure testing body (6) through the threaded joint (2).
4. The device for testing the tungsten cathode welding force of the ion source part of the ion implanter according to claim 3, wherein the middle part of the pressure testing body (6) is provided with a piston cavity (7), the piston (5) is slidably arranged in the piston cavity (7), and the piston (5) is in clearance fit with the piston cavity (7).
5. The apparatus for testing the W-cathode welding force of the ion source parts of the ion implanter according to claim 2, wherein the ejector rod (4) is slidably installed in the middle of the cap (1), and the ejector rod (4) is in clearance fit with the cap (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120654022.5U CN214472360U (en) | 2021-03-31 | 2021-03-31 | Tungsten cathode welding force testing device for ion source parts of ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120654022.5U CN214472360U (en) | 2021-03-31 | 2021-03-31 | Tungsten cathode welding force testing device for ion source parts of ion implanter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214472360U true CN214472360U (en) | 2021-10-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120654022.5U Active CN214472360U (en) | 2021-03-31 | 2021-03-31 | Tungsten cathode welding force testing device for ion source parts of ion implanter |
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| Country | Link |
|---|---|
| CN (1) | CN214472360U (en) |
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2021
- 2021-03-31 CN CN202120654022.5U patent/CN214472360U/en active Active
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