CN214449280U - Electronic part internal shielding film composite equipment - Google Patents
Electronic part internal shielding film composite equipment Download PDFInfo
- Publication number
- CN214449280U CN214449280U CN202022727408.2U CN202022727408U CN214449280U CN 214449280 U CN214449280 U CN 214449280U CN 202022727408 U CN202022727408 U CN 202022727408U CN 214449280 U CN214449280 U CN 214449280U
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- Prior art keywords
- workbench
- frame
- shielding film
- roller
- control switch
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- 239000002131 composite material Substances 0.000 title claims description 26
- 230000008093 supporting effect Effects 0.000 claims abstract description 28
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 17
- 238000010073 coating (rubber) Methods 0.000 claims abstract description 11
- 239000003292 glue Substances 0.000 claims description 34
- 238000003825 pressing Methods 0.000 claims description 18
- 238000005485 electric heating Methods 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 9
- 238000013329 compounding Methods 0.000 claims description 7
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 4
- 230000002146 bilateral effect Effects 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 18
- 238000003892 spreading Methods 0.000 description 10
- 230000007480 spreading Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The utility model discloses a shielding film compound device in an electronic component, which comprises a workbench, a gluing structure and a compound structure; a working plate table: the middle part of the upper surface of the workbench is provided with a groove, the interior of the groove is rotationally connected with uniformly distributed conveying rollers through bearings, an output shaft of a conveying motor arranged at the left end of the front side surface of the workbench is fixedly connected with the front end of the leftmost conveying roller, the rear ends of the conveying rollers all extend to the rear side of the workbench, belt pulleys are arranged at the end heads, two adjacent belt pulleys are driven through belts, supporting rods are symmetrically arranged at four corners of the upper surface of the workbench, and a top plate is arranged between the inner side surfaces of the upper ends of the four supporting rods; this inside shielding film equipment complex of electronic part can accomplish the rubber coating work to the complex film automatically, presses to hold spacingly to two-layer complex film in transportation process, makes its adhesion firmly together, guarantees the quality of combined operation, has alleviateed personnel's work burden, and automated production efficiency is higher.
Description
Technical Field
The utility model relates to an electron shielding film technical field specifically is an inside shielding film equipment complex of electron part.
Background
The electronic shielding film is also called EMI protective film, or wave-absorbing material. The electromagnetic interference is weakened or eliminated for the internal circuit by pressing on the non-adhesive copper-clad plate or the covering film after punching. The EMI shielding film is composed of a highly conductive adhesive layer with an insulating layer, and the FPC _ EMI shielding film has good flexibility, good grounding conductivity and good shielding effect. FTP is being widely used in mobile phone hubs and camera modules, which require less interference. The electromagnetic shielding method is applied to line electromagnetic shielding of consumer electronic products (smart phones, tablet computers, touch panels, digital cameras, liquid crystal televisions and the like). With the attention to electromagnetic interference, the material is widely applied to the FPC industry at present. At present, the compound work of the electronic shielding film generally needs personnel to manually glue, then two layers of composite films are laminated and adhered together through laminating equipment, the work load of the personnel is heavy, and the quality of the compound work cannot be guaranteed due to the uncertainty of manual operation, so that the compound equipment for the shielding film in the electronic part is designed to solve the problems.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome current defect, provide an inside shielding film equipment complex of electron part, can accomplish the rubber coating work to the complex film automatically, press the two-layer complex film in transportation process and hold spacingly, make its adhesion firmly together, guarantee the quality of combined work, need not personnel and participate in, alleviateed personnel's work burden, and automated production efficiency is higher, can effectively solve the problem in the background art.
In order to achieve the above object, the utility model provides a following technical scheme: a shielding film compounding device in an electronic part comprises a workbench, a gluing structure and a compounding structure;
a working plate table: the middle part of the upper surface of the workbench is provided with a groove, the interior of the groove is rotationally connected with uniformly distributed conveying rollers through bearings, a conveying motor output shaft arranged at the left end of the front side surface of the workbench is fixedly connected with the front end of the leftmost conveying roller, the rear end of each conveying roller extends to the rear side of the workbench, belt pulleys are arranged at the ends of the conveying rollers, two adjacent belt pulleys are driven through a belt, supporting rods are symmetrically arranged at four corners of the upper surface of the workbench, a top plate is arranged between the inner side surfaces of the upper ends of the four supporting rods, a traction roller is rotationally connected in a notch on the left side of the top plate through a bearing, and a traction motor output shaft arranged at the left end of the front side surface of the top plate is fixedly connected with the front end of the traction roller;
gluing structure: the upper surface of the top plate is provided with a groove;
the composite structure is as follows: the bottom surface is arranged on the top plate;
wherein: still include the control switch group, the control switch group sets up in the leading flank middle part of workstation, and external power source is connected to the input electricity of control switch group, and the equal electricity of input of conveying motor and traction motor connects the output of control switch group, can accomplish the rubber coating work to the complex film automatically, and it is spacing to press to hold two-layer complex film in transportation process, makes its adhesion firmly together, guarantees the quality of combined operation, need not personnel's participation, has alleviateed personnel's work burden, and automated production efficiency is higher.
Further, the rubber coating structure includes rubber coating frame, jacking seat, knock-out roll, jacking spring, glue spreader and stores up gluey frame, the upper surface middle part of roof is arranged in to the rubber coating frame, and the vertical sliding connection in inside of rubber coating frame has the jacking seat, and the inside of jacking seat is connected with evenly distributed's knock-out roll through the round pin rotation, and the symmetry is equipped with the jacking spring between the bottom surface four corners of jacking seat and the upper surface of roof, is connected with the glue spreader through the round pin rotation in the opening at rubber coating frame upper surface middle part, and the upper surface of rubber coating frame is equipped with stores up gluey frame, can accomplish the rubber coating work to the complex film automatically.
Further, composite construction includes electric putter, pressure holder, compression roller, guide bar and supporting spring, electric putter sets up in the bottom surface center department of roof, electric putter's flexible end downside end department is equipped with the pressure holder, the inside of pressure holder is connected with evenly distributed's compression roller through the round pin hub rotation, the bottom surface of roof is equipped with bilateral symmetry's guide bar, the guide bar with press the slide opening sliding connection that holds the upper surface of a correspondence, be equipped with supporting spring between the extension board upper surface of guide bar bottom and the bottom surface of pressure holder, the outside of guide bar is located to the supporting spring cover, electric putter's input electricity connection control switch group's output can press and hold spacingly to two-layer complex film, make its firm adhesion together, guarantee the quality of combined operation.
Furthermore, the electric heating wire is arranged inside the glue storage frame, and the input end of the electric heating wire is electrically connected with the output end of the control switch group, so that the glue in the glue storage frame can be prevented from being solidified.
Furthermore, bottom supporting feet are symmetrically arranged at four corners of the bottom surface of the workbench, so that a supporting effect can be provided for an upper structure, and the stability of a working environment is ensured.
Compared with the prior art, the beneficial effects of the utility model are that: the internal shielding film composite equipment for the electronic part has the following advantages:
1. the bottom sprag foot can provide the supporting role for the top structure, guarantee operational environment's stability, place the upper surface at the conveying roller and the upper surface of apical lamella with two-layer complex film respectively through outside fixing device, and the complex film with the upper strata is walked around the complex film of carry over pinch rolls and lower floor and is aligned the laminating, regulation and control through control switch group, electric putter stretches downwards, promote to press and hold the frame and push down, make compression roller and conveying roller cooperation press and hold two-layer complex film, avoid the complex film off tracking, guide bar and supporting spring can provide the supporting role for pressing and holding the frame, guarantee the stability of structure.
2. The conveying motor rotates and drives the leftmost conveying roller to rotate clockwise afterwards, because two adjacent belt pulleys pass through belt transmission, can make all conveying rollers carry the complex film of lower floor to the right, traction motor drives the carry over pinch rolls anticlockwise simultaneously, the complex film that drives the upper strata carries right, the jacking seat receives the effect of jacking spring to produce an ascending thrust, make the upper complex film on the carry over pinch rolls contact with the glue spreader, along with carrying going on of work, the glue spreader rotates by the influence of transmission power, the glue that will store up the inside preparation in advance of gluey frame is paintd on the upper surface of upper complex film, along with carrying on carrying out the compound work of efficient completion electronic shielding membrane of work, electric heating wire circular telegram is with electric energy conversion heat energy, can avoid storing up the glue solidification of gluing in the frame, further guarantee the quality of follow-up compound work.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the rear view internal cross-section structure of the present invention;
FIG. 3 is a schematic view of the in-plane cross-sectional structure of the present invention;
fig. 4 is an enlarged schematic view of the a position of the present invention.
In the figure: 1 workbench, 2 grooves, 3 conveying rollers, 4 conveying motors, 5 belt pulleys, 6 belts, 7 control switch sets, 8 gluing structures, 81 gluing frames, 82 jacking seats, 83 jacking rollers, 84 jacking springs, 85 gluing rollers, 86 glue storage frames, 9 composite structures, 91 electric push rods, 92 pressing and holding frames, 93 pressing rollers, 94 guide rods, 95 supporting springs, 10 supporting rods, 11 top plates, 12 traction rollers, 13 traction motors, 14 electric heating wires and 15 bottom supporting feet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: the equipment for compounding the shielding film inside the electronic part comprises a workbench 1, a gluing structure 8 and a compound structure 9;
work bench 1: the middle part of the upper surface of the worktable is provided with a groove 2, the inner part of the groove 2 is rotationally connected with evenly distributed conveying rollers 3 through a bearing, the output shaft of a conveying motor 4 arranged at the left end of the front side surface of the worktable 1 is fixedly connected with the front end of the leftmost conveying roller 3, the rear end of each conveying roller 3 extends to the rear side of the worktable 1 and is provided with a belt pulley 5 at the end, two adjacent belt pulleys 5 are driven through a belt 6, four supporting rods 10 are symmetrically arranged at four corners of the upper surface of the worktable 1, a top plate 11 is arranged between the inner side surfaces of the upper ends of the four supporting rods 10, a traction roller 12 is rotationally connected in a gap at the left side of the top plate 11 through a bearing, the output shaft of a traction motor 13 arranged at the left end of the front side surface of the top plate 11 is fixedly connected with the front end of the traction roller 12, then the conveying motor 4 operates to drive the leftmost conveying rollers 3 to rotate clockwise, and the two adjacent belt pulleys 5 are driven through the belt 6, all the conveying rollers 3 can convey the lower composite film to the right, and meanwhile, the traction motor 13 drives the traction roller 12 to rotate anticlockwise so as to drive the upper composite film to be conveyed to the right;
gluing structure 8: the glue spreading structure 8 comprises a glue spreading frame 81, a jacking seat 82, a jacking roller 83, jacking springs 84, glue spreading rollers 85 and a glue storage frame 86, the glue spreading frame 81 is arranged in the middle of the upper surface of the top plate 11, the jacking seat 82 is vertically and slidably connected with the inside of the glue spreading frame 81, the jacking rollers 83 which are uniformly distributed are rotatably connected with the inside of the jacking seat 82 through pin shafts, the jacking springs 84 are symmetrically arranged between four corners of the bottom surface of the jacking seat 82 and the upper surface of the top plate 11, the glue spreading rollers 85 are rotatably connected in openings in the middle of the upper surface of the glue spreading frame 81 through pin shafts, the glue storage frame 86 is arranged on the upper surface of the glue spreading frame 81, the jacking seat 82 generates upward thrust under the action of the jacking springs 84, so that an upper-layer composite film on the jacking roller 83 is in contact with the glue spreading rollers 85, the glue spreading rollers 85 rotate under the influence of transmission force along with the progress of conveying work, glue storage frame 86 is spread on the upper surface of the upper-layer composite film in advance, the compound work of the electronic shielding film is efficiently completed along with the conveying work;
the composite structure 9: the composite structure 9 comprises an electric push rod 91, a pressing frame 92, a press roller 93, a guide rod 94 and a support spring 95, the electric push rod 91 is arranged at the center of the bottom surface of the top plate 11, the pressing frame 92 is arranged at the lower end of the telescopic end of the electric push rod 91, the pressing frame 92 is rotatably connected with the inside of the pressing frame 92 through a pin shaft and is uniformly distributed with the press roller 93, the guide rod 94 is arranged at the bottom surface of the top plate 11 in bilateral symmetry, the guide rod 94 is in sliding connection with a sliding hole corresponding to the upper surface of the pressing frame 92, the support spring 95 is arranged between the upper surface of an extension plate at the bottom end of the guide rod 94 and the bottom surface of the pressing frame 92, the support spring 95 is sleeved outside the guide rod 94, the input end of the electric push rod 91 is electrically connected with the output end of the control switch group 7, two layers of composite films are respectively placed on the upper surface of the conveying roller 3 and the upper surface of the top roller 83 through an external fixing device, and the upper layer of the composite film is aligned and attached with the lower layer of the composite film by bypassing the traction roller 12, by controlling the regulation and control of the switch group 7, the electric push rod 91 extends downwards to push the pressing and holding frame 92 to press downwards, so that the press roller 93 is matched with the conveying roller 3 to press and hold the two layers of composite films, and the guide rod 94 and the support spring 95 can provide a support effect for the pressing and holding frame 92 to ensure the stability of the structure;
wherein: the automatic control device is characterized by further comprising a control switch group 7, wherein the control switch group 7 is arranged in the middle of the front side face of the workbench 1, an input end of the control switch group 7 is electrically connected with an external power supply, and input ends of the conveying motor 4 and the traction motor 13 are electrically connected with an output end of the control switch group 7.
Wherein: the electric heating wire 14 is arranged in the glue storage frame 86, the input end of the electric heating wire 14 is electrically connected with the output end of the control switch group 7, the electric heating wire 14 is electrified to convert electric energy into heat energy, so that the glue in the glue storage frame 86 can be prevented from being solidified, and the quality of subsequent composite work is further ensured.
Wherein: bottom bracing feet 15 are symmetrically arranged at four corners of the bottom surface of the workbench 1, and the bottom bracing feet 15 can provide a supporting function for the upper structure, so that the stability of the working environment is ensured.
When in use: the bottom supporting feet 15 can provide a supporting function for the upper structure, the stability of the working environment is ensured, two layers of composite films are respectively placed on the upper surface of the conveying roller 3 and the upper surface of the top roller 83 through an external fixing device, the upper layer of composite film is aligned and attached with the lower layer of composite film by bypassing the traction roller 12, through the regulation and control of the control switch group 7, the electric push rod 91 extends downwards to push the pressing and holding frame 92 to press and hold the two layers of composite films by matching the press roller 93 with the conveying roller 3, the guide rod 94 and the supporting spring 95 can provide a supporting function for the pressing and holding frame 92 to ensure the stability of the structure, then the conveying motor 4 operates to drive the leftmost conveying roller 3 to rotate clockwise, as the adjacent two belt pulleys 5 are driven through the belt 6, all the conveying rollers 3 can convey the lower layer of composite film rightwards, and the traction motor 13 drives the traction roller 12 to rotate anticlockwise, drive the complex film on upper strata and carry right, jacking seat 82 receives jacking spring 84's effect to produce an ascending thrust, make upper complex film and glue spreader 85 contact on the top roll 83, along with carrying going on of work, glue spreader 85 receives the influence of driving force and rotates, glue that will store up the inside preparation in advance of frame 86 is paintd the upper surface of upper complex film, along with carrying on the compound work of efficient completion electron shielding membrane of work, electric heating wire 14 circular telegram is with electric energy conversion heat energy, can avoid storing up the glue solidification in the frame 86 of gluing, further guarantee follow-up compound work's quality.
It is to be noted that, in the embodiment, the conveying motor 4 and the traction motor 13 are both selected from a 5IK150RGU-CF speed-regulating motor manufactured by wapont electromechanical limited, eastern guan, the electric push rod 91 is selected from a 38STG-200 electric push rod manufactured by mitsung electromechanical limited, wenzhou, the electric heating wire 14 is selected from an electric heating wire manufactured by santha alloy electric appliance limited in a model number of Cr27AL7Mo2, and the control switch group 7 controls the conveying motor 4, the traction motor 13, the electric push rod 91 and the electric heating wire 14 to work by adopting a method commonly used in the prior art.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an inside shielding film equipment complex of electron part which characterized in that: comprises a working plate table (1), a gluing structure (8) and a composite structure (9);
work bench (1): the middle part of the upper surface of the workbench is provided with a groove (2), the interior of the groove (2) is rotatably connected with conveying rollers (3) which are uniformly distributed through bearings, the output shaft of a conveying motor (4) arranged at the left end of the front side of the workbench (1) is fixedly connected with the front end of the leftmost conveying roller (3), the rear ends of the conveying rollers (3) all extend to the rear side of the workbench (1) and are provided with belt pulleys (5) at the ends, two adjacent belt pulleys (5) are driven through a belt (6), supporting rods (10) are symmetrically arranged at four corners of the upper surface of the workbench (1), a top plate (11) is arranged between the inner side surfaces of the upper ends of the four supporting rods (10), a traction roller (12) is rotatably connected in a gap at the left side of the top plate (11) through a bearing, and the output shaft of a traction motor (13) arranged at the left end of the front side of the top plate (11) is fixedly connected with the front end of the traction roller (12);
gluing structure (8): is arranged on the upper surface of the top plate (11);
composite structure (9): is arranged on the bottom surface of the top plate (11);
wherein: the automatic control device is characterized by further comprising a control switch group (7), wherein the control switch group (7) is arranged in the middle of the front side face of the workbench (1), an external power supply is electrically connected with the input end of the control switch group (7), and the input ends of the conveying motor (4) and the traction motor (13) are electrically connected with the output end of the control switch group (7).
2. An electronic part internal shielding film compounding device according to claim 1, wherein: rubber coating structure (8) are including gluing frame (81), jacking seat (82), apical roller (83), jacking spring (84), glue spreader (85) and store up gluey frame (86), gluing frame (81) sets up in the upper surface middle part of roof (11), and the vertical sliding connection in inside of gluing frame (81) has jacking seat (82), and the inside of jacking seat (82) rotates through the round pin axle to be connected with evenly distributed apical roller (83), and the symmetry is equipped with jacking spring (84) between the bottom surface four corners of jacking seat (82) and the upper surface of roof (11), and it has glue spreader (85) to rotate through the round pin axle in the opening at gluing frame (81) upper surface middle part, and the upper surface of gluing frame (81) is equipped with stores up gluey frame (86).
3. An electronic part internal shielding film compounding device according to claim 1, wherein: the composite structure (9) comprises an electric push rod (91), a pressing frame (92), a pressing roller (93), a guide rod (94) and a supporting spring (95), electric putter (91) set up in the bottom surface center department of roof (11), electric putter's (91) flexible end downside end department is equipped with pressure support (92), the inside of pressing support (92) is connected with evenly distributed's compression roller (93) through the round pin hub rotation, the bottom surface of roof (11) is equipped with bilateral symmetry's guide bar (94), guide bar (94) and the sliding hole sliding connection who presses support (92) upper surface to correspond, be equipped with supporting spring (95) between the extension board upper surface of guide bar (94) bottom and the bottom surface of pressing support (92), the outside of guide bar (94) is located to supporting spring (95) cover, the output of electric putter's (91) input electricity connection control switch group (7).
4. An electronic part internal shielding film compounding device according to claim 2, wherein: an electric heating wire (14) is arranged inside the glue storage frame (86), and the input end of the electric heating wire (14) is electrically connected with the output end of the control switch group (7).
5. An electronic part internal shielding film compounding device according to claim 1, wherein: bottom supporting feet (15) are symmetrically arranged at four corners of the bottom surface of the working plate table (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022727408.2U CN214449280U (en) | 2020-11-23 | 2020-11-23 | Electronic part internal shielding film composite equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022727408.2U CN214449280U (en) | 2020-11-23 | 2020-11-23 | Electronic part internal shielding film composite equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214449280U true CN214449280U (en) | 2021-10-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022727408.2U Expired - Fee Related CN214449280U (en) | 2020-11-23 | 2020-11-23 | Electronic part internal shielding film composite equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214449280U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114311928A (en) * | 2022-01-08 | 2022-04-12 | 和爱电磁兼容科技(安徽)有限公司 | Metal shielding layer laminating equipment for wave-absorbing material |
| CN115625582A (en) * | 2022-12-20 | 2023-01-20 | 高邑县福隆陶瓷有限责任公司 | Ceramic floor tile polishing equipment and polishing method thereof |
-
2020
- 2020-11-23 CN CN202022727408.2U patent/CN214449280U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114311928A (en) * | 2022-01-08 | 2022-04-12 | 和爱电磁兼容科技(安徽)有限公司 | Metal shielding layer laminating equipment for wave-absorbing material |
| CN114311928B (en) * | 2022-01-08 | 2023-12-26 | 和爱电磁兼容科技(安徽)有限公司 | Metal shielding layer laminating equipment for wave absorbing material |
| CN115625582A (en) * | 2022-12-20 | 2023-01-20 | 高邑县福隆陶瓷有限责任公司 | Ceramic floor tile polishing equipment and polishing method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211022 |
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| CF01 | Termination of patent right due to non-payment of annual fee |