CN214406551U - Building distributed energy supply system based on hydrogen fuel cell - Google Patents

Building distributed energy supply system based on hydrogen fuel cell Download PDF

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CN214406551U
CN214406551U CN202120418450.8U CN202120418450U CN214406551U CN 214406551 U CN214406551 U CN 214406551U CN 202120418450 U CN202120418450 U CN 202120418450U CN 214406551 U CN214406551 U CN 214406551U
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valve
heat exchanger
fuel cell
air
outlet
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刘凤国
赵楠楠
陈祖银
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Tianjin Chengjian University
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Tianjin Chengjian University
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells

Abstract

The utility model discloses a building distributing type energy supply system based on hydrogen fuel cell, it includes hydrogen fuel cell system, air source heat pump system and waste heat recovery system. The hydrogen fuel cell system generates electric energy for supplying power to buildings and driving a compressor of the air source heat pump system, and simultaneously recovers the waste heat of the fuel cell; the air source heat pump system comprises a refrigerant cycle, a water cycle and an auxiliary heat dissipation cycle, and the flow direction of the refrigerant is switched by a four-way reversing valve, so that a heating mode and a refrigerating mode of the heat pump system are respectively formed; the waste heat recovery system recovers the waste heat of the fuel cell, is used for providing domestic hot water, and is used as an auxiliary heat source of the air source heat pump system when the temperature is low in winter. The utility model discloses utilized fuel cell's electric power and waste heat, realized building power supply, refrigeration, heating and the purpose of supplying life hot water, energy utilization is rateed highly, accords with current energy saving and emission reduction policy demand, and social economic benefits is showing.

Description

Building distributed energy supply system based on hydrogen fuel cell
Technical Field
The utility model relates to a building distributed energy supply system, concretely relates to building distributed energy supply system based on hydrogen fuel cell.
Background
The main supply mode of energy in China is centralized development and utilization, the traditional centralized energy supply needs to adopt large-capacity equipment for centralized production, and then various available energy is delivered to a plurality of users in a large range through a delivery facility with specific use. However, with the improvement of energy structure optimization and cleaning targets in China, centralized energy supply cannot meet the requirements in the aspects of transmission loss, utilization efficiency, environmental pollution and the like. The distributed energy supply system is an open energy supply system, has the advantages of multiple functions and high energy utilization rate, reduces energy transmission cost and environmental pollution, and can meet multiple energy requirements of users.
The fuel cell is an electrochemical power generation device, directly converts chemical energy into electric energy without a heat engine process, is not limited by Carnot cycle, and is used in a novel green energy system due to high efficiency, cleanness, high reliability and good operability. The hydrogen fuel cell distributed energy supply system utilizes hydrogen and air to react in the fuel cell to generate electric energy, simultaneously realizes the utilization of reaction waste heat and provides combined supply service of heat and electric power. The electric energy generated by the fuel cell can provide domestic electricity for users after being processed, and can be used for driving a compressor of the air source heat pump system to work. The air source heat pump can supply cold to users in summer in a refrigerating operation mode, supply heat to users in a heating operation mode in winter, simultaneously recover waste heat of the fuel cell, and can supply life hot water to the users all year round while cooling the hydrogen fuel cell. A building distributed energy supply system based on the hydrogen fuel cell is established, the energy utilization capacity is improved, a diversified energy supply system is formed, and the development trend of a future energy system is shown.
Disclosure of Invention
The utility model provides a building distributing type energy supply system based on hydrogen fuel cell, but make full use of hydrogen fuel cell's electric energy and heat energy, nimble provide refrigeration, heating, power supply and life hot water to the user.
The building distributed energy supply system of the hydrogen fuel cell comprises a hydrogen fuel cell system, an air source heat pump system and a waste heat recovery system.
The hydrogen fuel cell system comprises a hydrogen supply pipeline, an air supply pipeline, a fuel cell, a storage battery and a direct current-alternating current converter; the hydrogen supply pipeline comprises a hydrogen storage tank, a pressure reducing valve, a manual stop valve, an explosion-proof electromagnetic valve and a hydrogen circulating pump; the air supply pipeline comprises an air filter, an air compressor, an intercooler and an air stop valve; the hydrogen supply pipeline and the air supply pipeline are both connected with the fuel cell, the hydrogen and the oxygen in the air react in the fuel cell to generate direct current, the reacted hydrogen is sent into the hydrogen supply pipeline again through the hydrogen circulating pump, and the reacted air exhaust gas is discharged into the air through the air stop valve; the storage battery stores direct current, and the direct current-alternating current converter converts the direct current into alternating current for supplying electricity to a building and driving a compressor of the air source heat pump system;
the air source heat pump system comprises a refrigerant cycle, a water cycle and an auxiliary heat dissipation cycle.
The refrigerant cycle comprises a compressor, a first shock absorption pipe, an oil separator, a four-way reversing valve, a plate heat exchanger, a first check valve, a second check valve, a third check valve, a fourth check valve, a liquid reservoir, a drying filter, a liquid supply electromagnetic valve, a liquid viewing mirror, an electronic expansion valve, a fin type heat exchanger, a gas-liquid separator and a second shock absorption pipe. The exhaust port of the compressor is connected with one end of the oil separator, the exhaust pipe of the compressor is provided with a first shock absorption pipe, and the lubricating oil separated by the oil separator returns to the compressor through an oil return pipe; under the heating mode, the other end of the oil separator is connected with a D pipe of an inlet of a four-way reversing valve, a C pipe of an outlet of the four-way reversing valve is connected with one end of a plate heat exchanger, the other end of the plate heat exchanger is connected with an outlet of a first one-way valve and an inlet of a third one-way valve, outlets of the third one-way valve and a fourth one-way valve are connected with one end of a liquid reservoir, the other end of the liquid reservoir is sequentially connected with a drying filter, a liquid supply electromagnetic valve and a liquid viewing mirror, the other end of the liquid viewing mirror is connected with an inlet of an electronic expansion valve, an outlet of the electronic expansion valve is connected with inlets of the first one-way valve and the second one-way valve, an outlet of the second one-way valve and an inlet of the fourth one-way valve are connected with one end of a fin type heat exchanger refrigerant unit, the other end of the fin type heat exchanger refrigerant unit is connected with an E pipe of the four-way reversing valve, an S pipe of the outlet of the four-way reversing valve is connected with an inlet of a gas-liquid separator, the second shock absorbing pipe is arranged on the air suction pipeline of the compressor; under the refrigeration mode, the other end of the oil separator is connected with a D pipe at the inlet of the four-way reversing valve, an E pipe at the outlet of the four-way reversing valve is connected with one end of a finned heat exchanger refrigerant unit, the other end of the finned heat exchanger refrigerant unit is connected with the outlet of the second one-way valve and the inlet of the fourth one-way valve, the outlets of the third one-way valve and the fourth one-way valve are connected with one end of a liquid reservoir, the other end of the liquid reservoir is sequentially connected with a drying filter, a liquid supply electromagnetic valve and a liquid viewing mirror, the other end of the liquid viewing mirror is connected with the inlet of an electronic expansion valve, the outlet of the electronic expansion valve is connected with the inlets of the first one-way valve and the second one-way valve, the outlet of the first one-way valve and the inlet of the third one-way valve are connected with one end of a plate heat exchanger, the other end of the plate heat exchanger is connected with a C pipe at the inlet of the four-way reversing valve, an S pipe at the outlet of the gas-liquid separator is connected with the air suction port of a compressor, the second shock absorbing pipe is installed on the air suction pipeline of the compressor.
The water circulation comprises an air conditioning water tank and an air conditioning circulating water pump, wherein the air conditioning water tank is connected with the plate heat exchanger through the air conditioning circulating water pump to form water circulation;
the auxiliary heat dissipation circulation comprises a heat dissipation heat exchanger, a third circulating water pump, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve and a fin type heat exchanger. The outlet of the heat dissipation heat exchanger is connected with the inlets of a second electromagnetic valve and a third electromagnetic valve, the outlet of the second electromagnetic valve is connected with the inlet of an auxiliary evaporation unit of the fin-type heat exchanger, the outlet of the third electromagnetic valve is connected with the inlet of a heat dissipation unit of the fin-type heat exchanger, the outlets of the auxiliary evaporation unit and the heat dissipation unit are connected with the inlet of a third circulating water pump, the outlet of the third circulating water pump is connected with the inlet of a first electromagnetic valve, and the outlet of the first electromagnetic valve is connected with the inlet of the heat dissipation heat exchanger;
the waste heat recovery system comprises a cooling liquid circulating pump, a waste heat recovery heat exchanger, a first circulating water pump, a waste heat water tank and a second circulating water pump; the cooling liquid circulating pump is connected with the fuel cell and the waste heat recovery heat exchanger, the waste heat water tank is connected with the waste heat recovery heat exchanger through the first circulating water pump, waste heat of the fuel cell is collected into the waste heat water tank, and water in the waste heat water tank is used for domestic hot water when the system runs all the year round.
Compared with the prior art, the utility model the advantage as follows with the effect:
(1) the utility model provides a building distributed energy supply system based on hydrogen fuel cell, which realizes an energy supply mode integrating refrigeration, heating, power supply and domestic hot water, and improves the energy utilization efficiency;
(2) the utility model provides a building distributing type energy supply system based on hydrogen fuel cell to the unreasonable problem of fuel cell waste heat utilization, has designed waste heat recovery system, and hydrogen fuel cell's waste heat can provide life hot water to the user all the year round to the recovery. In addition, when the temperature is lower in winter, the waste heat of the fuel cell can be used as an auxiliary heat source of the outdoor heat exchanger of the heat pump system.
Drawings
Fig. 1 is a flow chart of a building distributed energy supply system of a hydrogen fuel cell according to the present invention.
In the figure, the direction of the arrows indicates the flow direction of the fluid in the pipeline. Reference numerals: a hydrogen fuel cell system, an air source heat pump system, a waste heat recovery system, a fuel cell 1, a storage battery 2, a direct current-alternating current converter 3, a hydrogen storage tank 4, a pressure reducing valve 5, a manual stop valve 6, an explosion-proof electromagnetic valve 7, a hydrogen circulating pump 8, an air filter 9, an air compressor 10, an intercooler 11, an air stop valve 12, an electric network 13, a cooling liquid circulating pump 14, a waste heat recovery heat exchanger 15, a first circulating water pump 16, a waste heat water tank 17, a second circulating water pump 18, a heat dissipation heat exchanger 19, a third circulating water pump 20, a first electromagnetic valve 21, an air conditioning water tank 22, an air conditioning circulating water pump 23, 24-compressor, 25-shock tube I, 26-oil separator, 27-four-way reversing valve, 28-plate heat exchanger, 29-first one-way valve, 30-second one-way valve, 31-third one-way valve, 32-fourth one-way valve, 33-liquid reservoir, 34-drying filter, 35-liquid supply solenoid valve, 36-liquid viewing mirror, 37-electronic expansion valve, 38-fin heat exchanger, 39-second solenoid valve, 40-third solenoid valve, 41-gas-liquid separator and 42-shock tube II.
Detailed Description
The following description is made in detail with reference to fig. 1 and the embodiments.
The utility model provides a building distributing type energy supply system based on hydrogen fuel cell, including hydrogen fuel cell system (r), air source heat pump system (two), waste heat recovery system (three).
The hydrogen fuel cell system (1) comprises a hydrogen supply pipeline, an air supply pipeline, a fuel cell (1), a storage battery (2) and a direct current-alternating current converter (3); the hydrogen supply line, the air supply line, and the storage battery 2 are connected to the fuel cell 1.
The hydrogen supply pipeline supplies hydrogen, and comprises a hydrogen storage tank 4, a pressure reducing valve 5, a manual stop valve 6, an explosion-proof electromagnetic valve 7 and a hydrogen circulating pump 8; the hydrogen comes out from hydrogen storage tank 4, passes through relief pressure valve 5, manual stop valve 6 in proper order, and explosion-proof solenoid valve 7 gets into fuel cell 1, and fuel cell 1's hydrogen exit linkage hydrogen circulating pump 8, hydrogen circulating pump 8 pump the hydrogen that does not participate in the reaction into fuel cell 1 again.
The air supply pipeline supplies air, and comprises an air filter 9, an air compressor 10, an intercooler 11 and an air stop valve 12; air enters an air compressor 10 after being processed by an air filter 9, the air compressor 10 compresses the air and then enters an intercooler 11 for cooling, the air enters a fuel cell 1 after being cooled by the intercooler 11, an air outlet of the fuel cell 1 is connected with an air stop valve 12, and the air after reaction is exhausted and discharged into the air.
Hydrogen and oxygen in the air react in the fuel cell 1 to generate direct current, the generated electric energy is stored in the storage battery 2, the direct current in the storage battery 2 is converted into alternating current through the direct current-alternating current converter 3, and the converted electric energy is used for driving the compressor 24 on one hand and supplying power 13 to the building on the other hand;
the air source heat pump system comprises a refrigerant cycle, a water cycle and an auxiliary heat dissipation cycle;
specifically, the electric energy generated by the fuel cell 1 drives the compressor 24 to do work, the compressor 24 compresses the refrigerant into a high-temperature high-pressure gas state and sends the gas state into the oil separator 26, the oil separator 26 separates the lubricating oil mixed in the refrigerant and sends the lubricating oil back into the compressor 24 through an oil return pipe, and the refrigerant is discharged from an outlet of the oil separator 26. In the heating mode, the gaseous refrigerant discharged from the outlet of the oil separator 26 enters the plate heat exchanger 28 through the D-C pipeline of the four-way reversing valve 27, the heat carried by the refrigerant in the plate heat exchanger 28 is transferred to cooling water, the refrigerant is condensed into a high-pressure liquid state, the liquid refrigerant enters the liquid reservoir 33 through the third one-way valve 31, and after being discharged from the outlet of the liquid reservoir 33, the liquid refrigerant sequentially passes through the drying filter 34, the liquid supply solenoid valve 35, the liquid sight glass 36 and the electronic expansion valve 37, the refrigerant is throttled and depressurized in the electronic expansion valve 37, the high-pressure liquid state is changed into a low-temperature low-pressure liquid state, and then the low-temperature low-pressure liquid state enters the refrigerant unit 38(b) of the fin type heat exchanger 38 through the second one-way valve 30 (wherein 38(b) comprises two parts 38(b1) and 38(b2), the refrigerant absorbs the heat in the air in the refrigerant unit 38(b) and is gasified into a low-temperature low-pressure gas state, then enters the gas-liquid separator 41 through the E-S pipeline of the four-way reversing valve 27, and the refrigerant flows out of the gas-liquid separator 41 and then enters the suction port of the compressor 24, enters the next heating cycle, and repeats the cycle. In a refrigeration mode, gaseous refrigerant discharged from an outlet of the oil separator 26 enters a refrigerant unit 38(b) of the fin-type heat exchanger 38 through a D-E pipeline of the four-way reversing valve 27, heat carried by the high-temperature and high-pressure gaseous refrigerant in the refrigerant unit 38(b) is transferred to air and then condensed into high-pressure liquid refrigerant, the liquid refrigerant enters a liquid reservoir 33 through a fourth one-way valve 32, the liquid refrigerant is discharged from an outlet of the liquid reservoir 33 and then sequentially flows through a drying filter 34, a liquid supply electromagnetic valve 35, a liquid viewing mirror 36 and an electronic expansion valve 37, the refrigerant is throttled and decompressed in the electronic expansion valve 37, the high-pressure liquid state is changed into low-temperature and low-pressure liquid state, then the low-temperature and low-pressure liquid state enters the plate heat exchanger 28 through a first one-way valve 29, the refrigerant absorbs the heat of water in the air conditioning water tank 22 through the plate heat exchanger 28 and is gasified into low-temperature and low-pressure gas state, the low-temperature gaseous refrigerant enters a gas-liquid separator 41 through a C-S pipeline of the four-way reversing valve 27, and then is again drawn by the compressor 24 into the next refrigeration cycle, and so on.
In the water circulation, specifically, water in the air-conditioning water tank 22 is sent into the plate heat exchanger 28 through the circulating water pump 23, and the heat condensed by the gaseous refrigerant at the refrigerant circulation side is absorbed in the heating mode to supply heat for users; in the cooling mode, the water in the air-conditioning water tank 22 is cooled by the refrigerant on the refrigerant circulation side through the plate heat exchanger 28, and cools the user.
In the auxiliary heat dissipation cycle, specifically, during operation in summer, the antifreeze enters the heat dissipation heat exchanger 19 to carry away excess heat in the waste heat water tank 17, enters the heat dissipation units 38(c1) and 38(c2) of the fin heat exchanger 38 through the third electromagnetic valve 40, and releases the heat to the air; when the temperature is low in winter, the antifreeze enters the heat dissipation heat exchanger 19 to carry away the heat in the waste heat water tank 17, and enters the auxiliary evaporation units 38(a1) and 38(a2) of the fin type heat exchanger 38 through the second electromagnetic valve 39 to serve as an auxiliary heat source for refrigerant circulation.
The waste heat recovery system III comprises a waste heat recovery heat exchanger 15, a cooling liquid circulating pump 14, a first circulating water pump 16, a waste heat water tank 17 and a second circulating water pump 18, wherein the cooling liquid is continuously circulated through the cooling liquid circulating pump 14 to take out heat generated by the fuel cell 1 and cool the fuel cell 1, the antifreeze solution stores the absorbed heat of the fuel cell 1 in the waste heat water tank 17 through the waste heat recovery heat exchanger 15, and the water temperature in the waste heat water tank 17 rises to achieve the purpose of supplying domestic hot water for a user.
The utility model provides a building distributing type energy supply system based on hydrogen fuel cell can satisfy power supply, heating, cooling and supply life hot water demand.
The present invention and its embodiments have been described above schematically, without limitation. The embodiment shown in the drawings is only one embodiment of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art should be informed by the teachings of the present invention, the component shapes, the connection modes, the structural modes and the implementation modes similar to the technical scheme without the inventive design shall fall within the protection scope of the present invention.

Claims (1)

1. A building distributed energy supply system based on hydrogen fuel cells is characterized by comprising a hydrogen fuel cell system, an air source heat pump system and a waste heat recovery system;
the hydrogen fuel cell system comprises a hydrogen supply pipeline, an air supply pipeline, a fuel cell, a storage battery and a direct current-alternating current converter; the hydrogen supply pipeline comprises a hydrogen storage tank, a pressure reducing valve, a manual stop valve, an explosion-proof electromagnetic valve and a hydrogen circulating pump; the air supply pipeline comprises an air filter, an air compressor, an intercooler and an air stop valve; the hydrogen supply pipeline and the air supply pipeline are both connected with the fuel cell, the hydrogen and the oxygen in the air react in the fuel cell to generate direct current, the reacted hydrogen is sent into the hydrogen supply pipeline again through the hydrogen circulating pump, and the reacted air exhaust gas is discharged into the air through the air stop valve; the storage battery stores direct current, and the direct current-alternating current converter converts the direct current into alternating current for supplying electricity to a building and driving a compressor of the air source heat pump system;
the air source heat pump system comprises a refrigerant cycle, a water cycle and an auxiliary heat dissipation cycle;
the refrigerant cycle comprises a compressor, a first shock absorption pipe, an oil separator, a four-way reversing valve, a plate heat exchanger, a first one-way valve, a second one-way valve, a third one-way valve, a fourth one-way valve, a liquid reservoir, a drying filter, a liquid supply electromagnetic valve, a liquid viewing mirror, an electronic expansion valve, a fin type heat exchanger, a gas-liquid separator and a second shock absorption pipe; the exhaust port of the compressor is connected with one end of the oil separator, the exhaust pipe of the compressor is provided with a first shock absorption pipe, and the lubricating oil separated by the oil separator returns to the compressor through an oil return pipe; under the heating mode, the other end of the oil separator is connected with a D pipe of an inlet of a four-way reversing valve, a C pipe of an outlet of the four-way reversing valve is connected with one end of a plate heat exchanger, the other end of the plate heat exchanger is connected with an outlet of a first one-way valve and an inlet of a third one-way valve, outlets of the third one-way valve and a fourth one-way valve are connected with one end of a liquid reservoir, the other end of the liquid reservoir is sequentially connected with a drying filter, a liquid supply electromagnetic valve and a liquid viewing mirror, the other end of the liquid viewing mirror is connected with an inlet of an electronic expansion valve, an outlet of the electronic expansion valve is connected with inlets of the first one-way valve and the second one-way valve, an outlet of the second one-way valve and an inlet of the fourth one-way valve are connected with one end of a fin type heat exchanger refrigerant unit, the other end of the fin type heat exchanger refrigerant unit is connected with an E pipe of the four-way reversing valve, an S pipe of the outlet of the four-way reversing valve is connected with an inlet of a gas-liquid separator, the second shock absorbing pipe is arranged on the air suction pipeline of the compressor; under the refrigeration mode, the other end of the oil separator is connected with a D pipe at the inlet of the four-way reversing valve, an E pipe at the outlet of the four-way reversing valve is connected with one end of a finned heat exchanger refrigerant unit, the other end of the finned heat exchanger refrigerant unit is connected with the outlet of the second one-way valve and the inlet of the fourth one-way valve, the outlets of the third one-way valve and the fourth one-way valve are connected with one end of a liquid reservoir, the other end of the liquid reservoir is sequentially connected with a drying filter, a liquid supply electromagnetic valve and a liquid viewing mirror, the other end of the liquid viewing mirror is connected with the inlet of an electronic expansion valve, the outlet of the electronic expansion valve is connected with the inlets of the first one-way valve and the second one-way valve, the outlet of the first one-way valve and the inlet of the third one-way valve are connected with one end of a plate heat exchanger, the other end of the plate heat exchanger is connected with a C pipe at the inlet of the four-way reversing valve, an S pipe at the outlet of the gas-liquid separator is connected with the air suction port of a compressor, the second shock absorbing pipe is arranged on the air suction pipeline of the compressor;
the water circulation comprises an air conditioning water tank and an air conditioning circulating water pump, wherein the air conditioning water tank is connected with the plate heat exchanger through the air conditioning circulating water pump to form water circulation;
the auxiliary heat dissipation circulation comprises a heat dissipation heat exchanger, a third circulating water pump, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve and a fin type heat exchanger; the outlet of the heat dissipation heat exchanger is connected with the inlets of a second electromagnetic valve and a third electromagnetic valve, the outlet of the second electromagnetic valve is connected with the inlet of an auxiliary evaporation unit of the fin-type heat exchanger, the outlet of the third electromagnetic valve is connected with the inlet of a heat dissipation unit of the fin-type heat exchanger, the outlets of the auxiliary evaporation unit and the heat dissipation unit are connected with the inlet of a third circulating water pump, the outlet of the third circulating water pump is connected with the inlet of a first electromagnetic valve, and the outlet of the first electromagnetic valve is connected with the inlet of the heat dissipation heat exchanger;
the waste heat recovery system comprises a cooling liquid circulating pump, a waste heat recovery heat exchanger, a first circulating water pump, a waste heat water tank and a second circulating water pump; the cooling liquid circulating pump is connected with the fuel cell and the waste heat recovery heat exchanger, the waste heat water tank is connected with the waste heat recovery heat exchanger through the first circulating water pump to collect the waste heat of the fuel cell into the waste heat water tank, and the waste heat water tank is connected with the heat dissipation heat exchanger through the second circulating water pump.
CN202120418450.8U 2021-02-26 2021-02-26 Building distributed energy supply system based on hydrogen fuel cell Active CN214406551U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113915667A (en) * 2021-11-18 2022-01-11 上海交通大学 Fuel cell heat recovery and heat supply system based on total heat exchanger and heat pump technology
CN114719558A (en) * 2022-04-19 2022-07-08 江苏凌氢新能源科技有限公司 Hydrogen cooling and cooling integrated unit and control method
CN115129092A (en) * 2022-03-22 2022-09-30 无锡暖芯半导体科技有限公司 Temperature control system for semiconductor wafer manufacturing

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113915667A (en) * 2021-11-18 2022-01-11 上海交通大学 Fuel cell heat recovery and heat supply system based on total heat exchanger and heat pump technology
CN113915667B (en) * 2021-11-18 2022-08-09 上海交通大学 Fuel cell heat recovery and heat supply system based on total heat exchanger and heat pump technology
CN115129092A (en) * 2022-03-22 2022-09-30 无锡暖芯半导体科技有限公司 Temperature control system for semiconductor wafer manufacturing
CN115129092B (en) * 2022-03-22 2023-08-22 无锡暖芯半导体科技有限公司 Temperature control system for manufacturing semiconductor wafer
CN114719558A (en) * 2022-04-19 2022-07-08 江苏凌氢新能源科技有限公司 Hydrogen cooling and cooling integrated unit and control method

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