CN214373550U

CN214373550U - Ultrapure water sampler

Info

Publication number: CN214373550U
Application number: CN202120367091.8U
Authority: CN
Inventors: 王超
Original assignee: Nexchip Semiconductor Corp
Current assignee: Nexchip Semiconductor Corp
Priority date: 2021-02-09
Filing date: 2021-02-09
Publication date: 2021-10-08
Anticipated expiration: 2031-02-09

Abstract

The utility model provides an ultrapure water sampler, include: sampling a bottle; one end of the liquid inlet pipe is positioned outside the sampling bottle, and the other end of the liquid inlet pipe is positioned in the sampling bottle so as to supply ultrapure water to the sampling bottle; the flow guide structure is positioned in the sampling bottle and comprises a plurality of arc-shaped flow guide pipes, one ends of the flow guide pipes are communicated with one ends of the liquid inlet pipes positioned in the sampling bottle, and the other ends of the flow guide pipes extend outwards in an arc shape; and one end of the liquid outlet pipe is positioned outside the sampling bottle, and the other end of the liquid outlet pipe is positioned in the sampling bottle so as to discharge ultrapure water in the sampling bottle. The utility model provides an among the prior art ultrapure water sample success rate low with the problem of sample inefficiency.

Description

Ultrapure water sampler

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to an ultrapure water sampler.

Background

Ultrapure water is a very high purity water and is widely used in semiconductor production. In the production and use links of ultrapure water, the water quality of the ultrapure water needs to be sampled and detected, the detection content comprises the detection of the resistivity of the ultrapure water, the contents of bacteria, particles and ultramicro elements, the ultrapure water contains trace impurities, the trace impurities need to be controlled in an extremely low range, and the ultrapure water exceeding the specification can cause unpredictable influence on the yield of products.

In the process of producing and using ultrapure water, the detection and sampling of the ultrapure water need to be carried out by using a special sampler. However, the conventional ultrapure water sampler has low sampling success rate and inaccurate detection, or has long sampling time and causes serious waste of ultrapure water.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an ultrapure water sampler to solve among the prior art ultrapure water sample success rate low with the low problem of sampling efficiency.

In order to achieve the above object, the utility model provides an ultrapure water sampler, include:

sampling a bottle;

one end of the liquid inlet pipe is positioned outside the sampling bottle, and the other end of the liquid inlet pipe is positioned in the sampling bottle so as to supply ultrapure water to the sampling bottle;

the flow guide structure is positioned in the sampling bottle and comprises a plurality of arc-shaped flow guide pipes, one ends of the flow guide pipes are communicated with one ends of the liquid inlet pipes positioned in the sampling bottle, and the other ends of the flow guide pipes extend outwards in an arc shape;

and one end of the liquid outlet pipe is positioned outside the sampling bottle, and the other end of the liquid outlet pipe is positioned in the sampling bottle so as to discharge ultrapure water in the sampling bottle.

Optionally, one end of each of the plurality of flow guide pipes extending outward is located on a virtual circle, and the direction of the water flow flowing out of each of the flow guide pipes is tangent to the virtual circle.

Optionally, the plurality of flow guide pipes are curved in an arc shape in a clockwise or counterclockwise direction.

Optionally, the flow guiding structure has an outer shell, and the flow guiding pipe is located in the outer shell.

Optionally, a limiting assembly is further disposed in the housing, and is used for limiting the position of each flow guide pipe.

Optionally, the limiting assembly comprises a plurality of limiting grooves which are circumferentially distributed, and each guiding pipe is clamped into the corresponding limiting groove.

Optionally, one end of the liquid inlet pipe in the sampling bottle is lower than one end of the liquid outlet pipe in the sampling bottle.

Optionally, a liquid inlet valve is arranged on the liquid inlet pipe and is positioned outside the sampling bottle;

and/or a liquid outlet valve is arranged on the liquid outlet pipe and is positioned outside the sampling bottle.

Optionally, the sampling bottle has an opening, ultrapure water sampler still includes the bottle lid, the bottle lid with the sealed cooperation of opening, the feed liquor pipe reaches the drain pipe all passes the bottle lid stretches into in the sampling bottle.

Optionally, the flow guide structure is detachably connected with the liquid inlet pipe; or the flow guide structure and the liquid inlet pipe are of an integrated structure.

The utility model provides an ultrapure water sampler, set up a water conservancy diversion structure in the sampling bottle, include a plurality of curved honeycomb ducts in the water conservancy diversion structure, the one end of honeycomb duct communicates with the one end that the feed liquor pipe is located the sampling bottle, the other end of honeycomb duct is the arc and extends outward, ultrapure water flows into the water conservancy diversion structure through the feed liquor pipe, because a plurality of honeycomb ducts are the arc and extend outward, so that the ultrapure water that flows out from a plurality of honeycomb ducts can form the rivers of vortex form, the inner wall of sampling bottle can be washed better to the rivers of vortex form, pass through the drain pipe with unnecessary ultrapure water and discharge again, make the sampling bottle can obtain good washing, avoid washing thoroughly to influence the accuracy that ultrapure water detected, in order to improve ultrapure water sampling success rate; and the swirl water flow has stronger washing effect, and when the sampling bottle is washed, a large amount of ultrapure water and longer washing time are not needed, so that the ultrapure water sampling efficiency is improved, and the ultrapure water waste is avoided.

Drawings

FIG. 1A is a schematic view showing the construction of an ultrapure water sampler;

FIG. 1B is a schematic view showing another ultrapure water sampler;

fig. 2 is a schematic structural diagram of an ultrapure water sampler according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a flow guiding structure in an ultrapure water sampler according to an embodiment of the present invention;

wherein the reference numerals are:

100-a sampling box; 110-an air inlet; 120-gas outlet; 130. 103, 203-liquid inlet pipe; 140. 101, 201-sampling bottle; 102. 202-bottle cap; 104. 204-a liquid outlet pipe; 105. 206-liquid inlet valve; 106. 207-a liquid outlet valve; d-dead angle region; 205-a flow directing structure; 301-draft tube.

Detailed Description

FIG. 1A is a schematic view showing the structure of an ultrapure water sampler. Referring to fig. 1A, the sampling box 100 is provided with an air inlet 110, an air outlet 120 and a liquid inlet 130, nitrogen is introduced into the air inlet 110 before the ultrapure water is sampled, so that the sampling box 100 is filled with nitrogen, and the excess nitrogen is discharged from the air outlet 120 to maintain a clean environment in the sampling box 100. And (3) introducing the ultrapure water pipe into the liquid inlet pipe 130, opening the sampling box 100, putting the sampling bottle 140 into the sampling box 100, and opening the valve of the ultrapure water pipe to introduce the ultrapure water into the sampling bottle 140. The method is complicated in operation, manual operation is needed during ultrapure water sampling, the ultrapure water obtained by sampling is easily polluted, the ultrapure water sampling success rate is low, and the ultrapure water detection accuracy is influenced.

FIG. 1B is a schematic view showing another ultrapure water sampler. Referring to fig. 1B, the sampling bottle 101 has an opening, a bottle cap 102 is disposed at the opening, the bottle cap 102 is hermetically matched with the sampling bottle 101, the liquid inlet pipe 103 and the liquid outlet pipe 104 penetrate through the bottle cap 102 and extend into the sampling bottle 101, and the liquid inlet valve 105 and the liquid outlet valve 106 are respectively disposed on the liquid inlet pipe 103 and the liquid outlet pipe 104 and located outside the sampling bottle 101. Ultrapure water flows into the sampling bottle 101 from the liquid inlet pipe 103, and after the sampling bottle 101 is filled, excess ultrapure water flows out from the liquid outlet pipe 104 until the cleaning of the sampling bottle 101 and the sampling of ultrapure water are completed. However, because the diameter of the opening of the sampling bottle 101 is large, and the diameters of the liquid inlet pipe 103 and the liquid outlet pipe 104 are small, when the water flow of the ultrapure water flowing in is small, the sampling bottle 101 cannot be effectively cleaned; when the ultrapure water flowing into is too fast, a dead angle area D is formed at the top of the sampling bottle 101, the dead angle area D is far away from the liquid outlet pipe 104, a vortex is formed in the dead angle area D, the ultrapure water with impurities in the vortex is difficult to enter the liquid outlet pipe 104 for discharging, so that the impurities in the dead angle area D need to be washed for a long time to be washed and discharged, and the method can cause the low ultrapure water sampling efficiency and the waste of ultrapure water.

Based on this, the utility model provides an ultrapure water sampler, set up a water conservancy diversion structure in the sampling bottle, include a plurality of curved honeycomb ducts in the water conservancy diversion structure, the one end and the one end intercommunication that the feed liquor pipe is located the sampling bottle of honeycomb duct, the other end of honeycomb duct is the arc and outwards extends, ultrapure water flows in the water conservancy diversion structure through the feed liquor pipe, because a plurality of honeycomb ducts are the arc and outwards extend, so that the ultrapure water that flows out from a plurality of honeycomb ducts can form the rivers of vortex form, the inner wall of sampling bottle can be washed better to the rivers of vortex form, pass through the drain pipe with unnecessary ultrapure water and discharge again, make the sampling bottle can obtain good washing, avoid washing the accuracy that thoroughly influences ultrapure water detection, in order to improve ultrapure water sampling success rate; and the swirl water flow has stronger washing effect, and when the sampling bottle is washed, a large amount of ultrapure water and longer washing time are not needed, so that the ultrapure water sampling efficiency is improved, and the ultrapure water waste is avoided.

The following description of the embodiments of the present invention will be described in more detail with reference to the drawings. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

Fig. 2 is a schematic structural diagram of an ultrapure water sampler provided in this embodiment, and fig. 3 is a schematic structural diagram of a flow guide structure in the ultrapure water sampler provided in this embodiment. Referring to fig. 2 and 3, the present invention provides an ultrapure water sampler for improving ultrapure water sampling efficiency and sampling success rate, comprising: sampling bottle 201, bottle lid 202, feed liquor pipe 203, drain pipe 204, water conservancy diversion structure 205, feed liquor valve 206 and drain valve 207.

The sampling bottle 201 is used for containing ultrapure water, an opening is formed in the sampling bottle 201, and the bottle cap 202 is arranged at the opening and is in sealing fit with the opening, so that the ultrapure water is prevented from being polluted by the outside. One end of the liquid inlet pipe 203 is positioned outside the sampling bottle 201, the end is the input end of the liquid inlet pipe 203, and the input end of the liquid inlet pipe 203 is used for being connected with an ultrapure water pipe; the other end of the liquid inlet pipe 203 is positioned in the sampling bottle 201, in particular, the other end of the liquid inlet pipe 203 penetrates through the bottle cap 202 and extends into the sampling bottle 201, and the end is the output end of the liquid inlet pipe 203. One end of the liquid outlet pipe 204 is positioned outside the sampling bottle 201, and the end is an output end of the liquid outlet pipe 204 and is used for discharging redundant ultrapure water in the sampling bottle 201; the other end of the liquid outlet pipe 204 is located in the sampling bottle 201, and specifically, the other end of the liquid outlet pipe 204 passes through the bottle cap 202 and extends into the sampling bottle 201, and this end is an input end of the liquid outlet pipe 204. The end of the liquid inlet pipe 203 in the sampling bottle 201 is lower than the end of the liquid outlet pipe 204 in the sampling bottle 201, in this embodiment, it is preferable that the end of the liquid inlet pipe 203 in the sampling bottle 201 is close to the bottom of the sampling bottle 201, and the end of the liquid outlet pipe 204 in the sampling bottle 201 is close to the top of the sampling bottle 201, in order to make the sampling bottle 201 as full as possible of ultrapure water and make the ultrapure water after cleaning be discharged in time, but not limited thereto.

In this embodiment, the diameter of the opening is larger than the sum of the diameters of the liquid inlet pipe 203 and the liquid outlet pipe 204, so as to prevent the ultrapure water from leaking or prevent the ultrapure water from being polluted by air particles.

Further, a liquid inlet valve 206 is arranged on the liquid inlet pipe 203, the liquid inlet valve 206 is positioned outside the sampling bottle 201, and the liquid inlet valve 206 controls the on-off of the liquid inlet pipe 203, specifically controls whether ultrapure water can flow into the sampling bottle 201. The liquid outlet pipe 204 is provided with a liquid outlet valve 207, the liquid outlet valve 207 is positioned outside the sampling bottle 201, and the on-off of the liquid outlet pipe 204 is controlled through the liquid outlet valve 207, specifically, whether ultrapure water in the sampling bottle 201 can flow out of the sampling bottle 201 is controlled. When ultrapure water sampling or cleaning of the sampling bottle 201 is required, the liquid inlet valve 206 and the liquid outlet valve 207 are opened, and ultrapure water is injected into the sampling bottle 201; when the sampling or cleaning is completed, the liquid inlet valve 206 and the liquid outlet valve 207 are closed to stop the injection, and the contamination of the sampled ultrapure water by air particles can be prevented. In this embodiment, both the liquid inlet pipe 203 and the liquid outlet pipe 204 are provided with a valve, but not limited thereto, and the liquid inlet pipe 203 may be provided with a liquid inlet valve 206, and the liquid outlet pipe 204 may not be provided with a liquid outlet valve 207.

The flow guide structure 205 is located in the sampling bottle 201 and is arranged at one end of the liquid inlet pipe 203 located in the sampling bottle, and ultrapure water sequentially flows into the sampling bottle 201 through the liquid inlet pipe 203 and the flow guide structure 205. The flow guiding structure 205 has a housing, and in the present embodiment, the flow guiding structure 205 is cylindrical, but is not limited thereto, and may be other shapes, such as rectangular, etc.

Flow guide structure 205 includes a plurality of curved honeycomb ducts 301, a plurality of curved honeycomb ducts 301 are located the shell, the one end intercommunication that the one end of honeycomb duct 301 all is located sampling bottle 201 with feed liquor pipe 203, the other end of honeycomb duct 301 is the arc and outwards extends, a plurality of honeycomb ducts 301 are clockwise or anticlockwise arc crooked, a plurality of honeycomb ducts 301's the unanimous clockwise or anticlockwise that is of crooked direction promptly to make a plurality of honeycomb ducts 301 constitute the fan form. In this embodiment, the outwardly extending end of the flow guide tube 301 is led out from the extending direction of the flow guide structure 205, and the flow guide tubes 301 are circumferentially distributed around the liquid inlet tube 203 and the bending directions of the flow guide tubes 301 are the same, so that the water flow flowing out of the flow guide tube 301 is vortex-shaped. In fig. 3, the flow duct 301 is shown by lines, and in practice the flow duct 301 should have a certain width.

Further, in this embodiment, the ends of the plurality of flow conduits 301 extending outward are located on a virtual circle, the direction of the water flow flowing out of each flow conduit 301 is tangent to the virtual circle, since the flow guide structure 205 is cylindrical in this embodiment, that is, the end of the flow conduit 301 extending outward is led out along the tangential direction of the extension of the flow guide structure 205, and the direction of the water flow flowing out of each flow conduit 301 is tangent to the extension of the flow guide structure 205. When ultrapure water flows into the sampling bottle 201 through the liquid inlet pipe 203 and the flow guide pipe 301, the flow direction of the water flowing out of each flow guide pipe 301 is tangent to the extension of the flow guide structure 205, so that the ultrapure water flow is vortex-shaped, the water flow vortex formed by guiding out the outward extending end of the flow guide pipe 301 along the extension tangential direction of the flow guide structure 205 is large, the sampling bottle 201 can be well cleaned by using a large washing force, the sampling success rate of the ultrapure water is improved, and the problem that the accuracy of ultrapure water detection is not completely influenced by the incomplete cleaning is avoided. In addition, the swirl-shaped water flow washing effect is better, and when the sampling bottle 201 is washed, a large amount of ultrapure water and longer washing time are not needed, so that the ultrapure water sampling efficiency is improved, and the ultrapure water waste is avoided. In fig. 3, only 4 draft tubes 301 are shown, but the number is not limited to 4, and may be 3, 5, or 6, and the number of the draft tubes 301 is related to the size of the vortex, and the number of the draft tubes 301 is determined according to the actual situation; the direction indicated by the arrow in fig. 3 is a direction in which the flow guide pipe 301 is led out along the tangential line of the extension of the flow guide structure 205, and is also a direction of water flowing out of each flow guide pipe 301.

In the present embodiment, the duct 301 is preferably semi-arc-shaped, but the duct 301 may have other shapes. In this embodiment, the outwardly extending end of the flow guide tube 301 is led out along the tangential direction of the extension of the flow guide structure 205, but not limited thereto, the outwardly extending end of the flow guide tube 301 may also be led out along any direction that is not perpendicular to the extension of the flow guide structure 205, that is, the outwardly extending ends of the flow guide tubes 301 are located on a virtual circle, and an included angle between the water flow direction flowing out of each flow guide tube 301 and the tangential direction of the virtual circle is smaller than 90 degrees. It should be noted that the outward extending end of the flow guide pipe 301 is related to the formed vortex along the outward extending direction of the flow guide structure 205, and if the outward extending end of the flow guide pipe 301 is perpendicular to the outward extending direction of the flow guide structure 205, the vortex cannot be formed.

Furthermore, a limiting assembly (not shown in the figure) is further disposed in the housing of the flow guide structure 205, and the limiting assembly is used for limiting the position of each flow guide pipe 301, so as to prevent the flow guide pipe 301 from moving in the working process and being unable to guide water flow out according to a set direction. In this embodiment, the limiting assembly includes a plurality of limiting grooves, the plurality of limiting grooves are circumferentially distributed, each flow guide tube 301 is inserted into the corresponding limiting groove, the width of each limiting groove is equal to the diameter of the flow guide tube 301, so that each flow guide tube 301 is inserted into the corresponding limiting groove to limit the position of each flow guide tube 301, but the limiting assembly is not limited thereto, and may also have other structures for limiting the position of the flow guide tube 301.

Further, the flow guiding structure 205 and the liquid inlet pipe 203 are a detachable connection structure or an integrated structure.

In this embodiment, the sampling step of the ultrapure water sampler is: firstly, connecting an ultrapure water pipe with a liquid inlet pipe 203, and opening a liquid inlet valve 203 and a liquid outlet 204; ultrapure water sequentially flows into the sampling bottle 201 through the liquid inlet 203 and the flow guide structure 205, the ultrapure water flowing into the sampling bottle 201 is vortex-shaped due to the action of the flow guide pipe 203, the vortex-shaped water flow continuously washes the inner wall of the sampling bottle 201, and after the ultrapure water in the sampling bottle 201 is filled, redundant ultrapure water is discharged through the liquid outlet pipe 204; after a period of time of rinsing, the liquid inlet valve 203 and the liquid outlet valve 204 are closed, and sampling of ultrapure water is completed.

To sum up, the utility model provides an ultrapure water sampler, set up a water conservancy diversion structure in the sampling bottle, include a plurality of curved honeycomb ducts in the water conservancy diversion structure, the one end of honeycomb duct communicates with the one end that the feed liquor pipe is located the sampling bottle, the other end of honeycomb duct is the arc and outwards extends, ultrapure water flows in the water conservancy diversion structure through the feed liquor pipe, because a plurality of honeycomb ducts are the arc and outwards extend, so that the ultrapure water that flows out from a plurality of honeycomb ducts can form the rivers of vortex form, the inner wall of sampling bottle can be washed better to the rivers of vortex form, pass through the drain pipe with unnecessary ultrapure water and discharge again, make the sampling bottle can obtain good washing, avoid washing the accuracy that thoroughly influences ultrapure water detection, in order to improve ultrapure water sampling success rate; and the swirl water flow has stronger washing effect, and when the sampling bottle is washed, a large amount of ultrapure water and longer washing time are not needed, so that the ultrapure water sampling efficiency is improved, and the ultrapure water waste is avoided.

The above description is only for the preferred embodiment of the present invention, and does not limit the present invention. Any technical personnel who belongs to the technical field, in the scope that does not deviate from the technical scheme of the utility model, to the technical scheme and the technical content that the utility model discloses expose do the change such as the equivalent replacement of any form or modification, all belong to the content that does not break away from the technical scheme of the utility model, still belong to within the scope of protection of the utility model.

Claims

1. An ultrapure water sampler, comprising:

sampling a bottle;

2. The ultrapure water sampler of claim 1, wherein the outwardly extending ends of the plurality of flow tubes are positioned on a virtual circle, and wherein the direction of the water flow in each flow tube is tangential to the virtual circle.

3. The ultrapure water sampler of claim 2, wherein the plurality of flow tubes are arcuately curved in a clockwise or counterclockwise direction.

4. The ultrapure water sampler of claim 1, wherein the flow guide structure has a housing, the flow guide being located within the housing.

5. The ultrapure water sampler of claim 4, wherein a limiting assembly is further disposed within the housing for limiting the position of each of the flow conduits.

6. The ultrapure water sampler of claim 5, wherein the limiting component comprises a plurality of limiting grooves, the plurality of limiting grooves are circumferentially distributed, and each flow guide pipe is clamped into the corresponding limiting groove.

7. The ultrapure water sampler of claim 1, wherein the end of the inlet tube within the sample bottle is lower than the end of the outlet tube within the sample bottle.

8. The ultrapure water sampler of claim 1, wherein a liquid inlet valve is disposed on the liquid inlet pipe, the liquid inlet valve being located outside the sampling bottle;

9. The ultrapure water sampler of claim 1, wherein the sampling bottle has an opening, the ultrapure water sampler further comprising a bottle cap sealingly engaged with the opening, the liquid inlet tube and the liquid outlet tube both extending through the bottle cap into the sampling bottle.

10. The ultrapure water sampler of claim 1, wherein the flow guide structure is removably connected to the liquid inlet pipe; or the flow guide structure and the liquid inlet pipe are of an integrated structure.