CN214361834U

CN214361834U - Electrode assembly structure of polycrystalline silicon growth furnace

Info

Publication number: CN214361834U
Application number: CN202022263696.0U
Authority: CN
Inventors: 徐昆仑; 洪钰; 莫修乾
Original assignee: Jiangsu Oriental Ruiji Energy Equipment Co ltd
Current assignee: Jiangsu Oriental Ruiji Energy Equipment Co ltd; Zhenjiang Dongfang Electric Heating Technology Co ltd
Priority date: 2020-10-12
Filing date: 2020-10-12
Publication date: 2021-10-08
Anticipated expiration: 2030-10-12

Abstract

The utility model discloses an electrode component structure of a polycrystalline silicon growth furnace. The electrode comprises an electrode seat, an electrode body, an insulating bush and an insulating seat sleeve, wherein the electrode body is sleeved with the insulating bush and the insulating seat sleeve and penetrates through the electrode seat, one end of the electrode body is sleeved with a ceramic pressure ring which is pressed on the outer end face of the insulating bush and provided with an outer ring groove, and the other end of the electrode body is sleeved with a pressing ring and then pressed on the outer end face of the insulating seat sleeve. The advantages are that: the ceramic pressure ring, the electrode body and the electrode seat can achieve the sealing effect, the electrode structure is simplified, the assembly, the disassembly and the replacement are convenient, the cleaning and the maintenance are convenient, and the service life of the electrode assembly is ensured to the greater extent; the dust accumulation phenomenon on the surface of the ceramic compression ring is effectively avoided, the workload of workers during disassembly and assembly cleaning is reduced, the problem of difficulty in cleaning the ceramic compression ring is solved, the service life of the ceramic compression ring is effectively prolonged, the creepage distance is increased, and the safety, the performance and the efficient work of electrode electrification can be effectively guaranteed.

Description

Electrode assembly structure of polycrystalline silicon growth furnace

Technical Field

The utility model relates to an electrode component applied to a polysilicon growth furnace, in particular to an electrode component structure of the polysilicon growth furnace.

Background

The electrode assembly is a necessary component of the polysilicon growth furnace, the existing electrode assembly generally comprises the electrode body, a ceramic pressure ring and other components, but the whole structure is quite complex, the sealing reliability is poor, and therefore, the assembly, the disassembly and the replacement are quite inconvenient, especially in the actual production of the polysilicon growth furnace, because the electrode assembly is a structure which needs to be disassembled and cleaned frequently, and the insulating ceramic pressure ring applied to the electrode assembly is mostly cylindrical, the problem of unclean cleaning caused by dust accumulation phenomenon frequently occurs in the actual production, and meanwhile, the limitation of the structural design makes the electrode assembly easy to arc under the condition of insufficient distance in height, and the safety is poor, so that the cylindrical insulating ceramic pressure ring is inconvenient to apply to the polysilicon growth furnace with larger equipment specification.

Disclosure of Invention

The to-be-solved technical problem of the utility model is to provide a polysilicon growth furnace electrode component structure that structural design is ingenious reasonable, sealing reliability is good, can effectively improve deposition phenomenon, increase of service life and security is high.

In order to solve the technical problem, the utility model discloses a polycrystalline silicon growth furnace electrode subassembly structure, including electrode holder, electrode body, insulating bush and insulating seat cover, electrode body suit insulating bush and insulating seat cover pass the electrode holder, and the one end cover of electrode body is equipped with the ceramic clamping ring who presses the outer terminal surface of having outer ring groove on insulating bush, behind the other one end suit clamp ring of electrode body and press on the outer terminal surface of insulating seat cover.

The end faces of the upper end and the lower end of the ceramic compression ring are provided with gasket grooves, and flat gaskets are arranged in the gasket grooves at the two ends of the ceramic compression ring.

The sealing structure is characterized in that a protrusion and a cavity which are matched with each other are arranged between contact surfaces of the insulating bush and the insulating sleeve, and an O-shaped ring I and an O-shaped ring II are arranged between the contact surfaces of the insulating bush and the insulating sleeve to form two sealing.

The electrode body is fixedly provided with a locking flange capable of pressing the compression ring.

And the electrode body is provided with a water inlet and outlet assembly positioned at one end of the electrode seat.

An outer sleeve is arranged outside the ceramic pressure ring, and a heat insulation ring matched with the outer sleeve is sleeved on the electrode body.

The electrode body is provided with a section of step surface positioned on one side of the ceramic pressure ring, the ceramic pressure ring is pressed between the step surface and the electrode holder, and the heat insulation ring is pressed on the step surface to limit the electrode body.

And the electrode body is provided with a graphite clamp positioned on one side of the ceramic pressure ring.

The invention has the advantages that:

through the insulating bush, the insulating seat cover and the locking structure which are in close fit with the electrode body and have special structures, the electrode body can be reliably locked and fastened, and through the structural design of the ceramic pressure ring and the gasket in fit with the electrode body, the insulating bush, the insulating seat cover and the ceramic pressure ring structure are mutually associated, so that the ceramic pressure ring, the electrode body and the electrode seat can achieve the sealing effect, the electrode structure is simplified, the assembly, the disassembly and the replacement are convenient, the cleaning and the maintenance are very convenient, and the service life of the electrode assembly is ensured to a greater extent; in addition, the circumferential surface of the ceramic compression ring is designed to be an inward concave surface, so that the phenomenon of dust deposition on the surface of the ceramic compression ring is avoided, the workload of workers during disassembly, assembly and cleaning is reduced, the problem of difficulty in cleaning the ceramic compression ring is solved, and the service life of the ceramic compression ring is effectively prolonged; and the creepage distance is increased, so that the safety, the performance and the efficient work of the electrode electrification can be effectively ensured.

Drawings

FIG. 1 is a schematic cross-sectional view of the electrode assembly structure of the polysilicon growth furnace of the present invention.

FIG. 1-Cooling Water Inlet and Outlet Assembly; 2-locking the bolt; 3-locking the flange; 4-spring pad; 5-a compression ring; 6-insulating seat cover; 7-O-shaped ring I; 8-O-shaped ring II; 9-flat gasket; 10-a ceramic pressure ring; 11-an insulating bush; 12-a thermal insulation ring; 13-an electrode body; 14-a graphite jig; 15-electrode holder.

Detailed Description

The structure of the electrode assembly of the polysilicon growth furnace of the present invention will be described in further detail with reference to the accompanying drawings and the detailed description.

As shown in the figure, the electrode assembly structure of the polysilicon growth furnace of the invention comprises an electrode body 13, an electrode holder 15, a ceramic pressure ring 10, an insulating bush 11, an insulating holder sleeve 6, a compression ring 5, a spring pad 4, a locking flange 3, a locking bolt 2 and the like, wherein the end faces of the upper end and the lower end of the ceramic pressure ring 10 are provided with gasket grooves, flat gaskets 9 can be arranged in the gasket grooves of the upper end and the lower end of the ceramic pressure ring 10, the electrode body 13 is sleeved with the insulating bush 11 and the insulating holder sleeve 6 and passes through the electrode holder 15, wherein the upper end, the lower end, the upper end (face), the lower end (face), the upper part, the lower part and the like in the embodiment refer to the orientation shown in figure 1, the middle upper part of the electrode body 13 is provided with a step face, the upper end face of the ceramic pressure ring 10 is contacted with the step face of the electrode body 13 after the electrode body 13 is sleeved with the ceramic pressure ring 10, the lower end face of the ceramic pressure ring 10 is contacted with the upper end face of the electrode holder 15, that is, the ceramic compression ring 10 is pressed between the step surface of the electrode holder 15 and the electrode holder 15, the lower end of the insulation bush 11 is provided with a necking section which can also be called as a bulge, the upper end of the insulation sleeve 6 is provided with a cavity matched with the insulation bush 11, that is, a contact surface of the insulation bush 11 and the insulation sleeve 6 is mutually matched and is provided with an O-shaped ring II 8 positioned between the top surface of the cavity and the outer side of the rear part of the necking section and an O-shaped ring I7 positioned between the end surface of the necking section and the inner bottom surface of the cavity when being installed, so as to form two seals, the lower end surface of the insulation sleeve 6 is provided with a flange section which can be limited on the lower end surface of the electrode holder 15, the compression ring 5 is provided with two pieces, the spring cushion 4 is arranged between the two compression rings, the lower end of the electrode body 13 is sleeved with the compression ring 5 and is pressed on the outer end surface of the flange section of the insulation sleeve 6, the electrode body 13 is provided with a section of external thread, the locking flange 3 is provided with an internal thread matched with the external thread of the electrode body 13, meanwhile, the locking flange 3 is not provided with a threaded hole in the upper row, the locking flange 3 is arranged on the electrode body 13 and is connected with the locking bolt 2 in series through the threaded hole, so that the locking bolt 2 can be used for compressing the compression ring 5, in addition, the outer circumferential surface of the ceramic compression ring 10 is provided with an outer ring groove, and the outer ring groove forms an inner concave surface, so that the dust accumulation phenomenon can be well avoided; the creepage distance of the ceramic compression ring is increased, the arc discharge phenomenon is effectively avoided, the current-carrying capacity of the electrode body and the insulation requirement of the electrode device are guaranteed to the maximum extent, the problem of dust accumulation of the ceramic compression ring during the production of polycrystalline silicon is avoided, the arc discharge phenomenon is avoided, and meanwhile, the structure is flexible to assemble and reliable to fix under the condition of meeting the use condition; and is convenient for disassembly, assembly, replacement and cleaning, and improves the use efficiency.

During assembly, flat gaskets 9 are placed in gasket grooves at the upper end and the lower end of a ceramic compression ring 10, the ceramic compression ring and an electrode body 13 penetrate through an electrode seat 15 together, an insulating bush 11 is sleeved outside the electrode body 13, an O-shaped ring I7 and an O-shaped ring II 8 are placed in the insulating bush, an insulating seat sleeve 6 is sleeved in the insulating seat sleeve 6 (the O-shaped ring I7 and the O-shaped ring II 8 are clamped between the insulating bush 11 and the insulating seat sleeve 6), a compression ring 5, a spring pad 4 and a locking flange 3 are sequentially sleeved in the insulating seat sleeve, the locking flange 3 is fixed with an external thread part of the electrode body 13 from an internal thread, a locking bolt 2 penetrates through a threaded hole of the locking flange 3 to act on the compression ring 5 and is transmitted to the whole electrode device to realize sealing of the flat gaskets 9, so that the whole electrode device is well connected with the electrode seat and the sealing performance is ensured; and the sealing is realized by the combined action of the locking flange 3 and the locking bolt 2, the ceramic pressure ring 10 and the flat gasket 9 between the electrode body 13 and the electrode seat 15 are more tightly pressed, namely: the flat gasket 9 is sealed by screwing the locking bolt more and more under stress, the lower end of the electrode body 13 is screwed into the water inlet and outlet assembly 1, the ceramic pressure ring 10 is externally provided with a jacket, the electrode body 13 is sleeved with a heat insulation ring 12 matched with the jacket, as can be seen from the figure, the heat insulation ring 12 is pressed on the step surface to limit the electrode body 13, the upper end of the electrode body 13 is sleeved with a graphite clamp 14, and the heat insulation ring 12 and the graphite clamp 14 are sleeved at the upper end, so that the assembly is completed; when the disassembly and assembly are cleaned, the locking bolt 2, the locking flange 3, the compression ring 5, the spring pad 4, the insulating seat sleeve 6, the O-shaped ring I7, the O-shaped ring II 8, the insulating bush 11, the ceramic compression ring 10 and the plain gasket 9 are sequentially disassembled, and then the electrode body 13 is drawn out to complete the disassembly.

Supplementary explanation:

1. the text description is carefully checked for correctness, modified with a red font if an error occurs, the blue font part description is checked for correctness, and modified with a red font if an error occurs.

Claims

1. The utility model provides a polycrystalline silicon growth furnace electrode subassembly structure which characterized in that: the electrode comprises an electrode seat (15), an electrode body (13), an insulating bush (11) and an insulating seat sleeve (6), wherein the electrode body (13) is sleeved with the insulating bush (11) and the insulating seat sleeve (6) and penetrates through the electrode seat (15), a ceramic press ring (10) with an outer annular groove and pressed on the outer end face of the insulating bush (11) is sleeved at one end of the electrode body (13), and a pressing ring (5) is sleeved at the other end of the electrode body (13) and then pressed on the outer end face of the insulating seat sleeve (6).

2. The polysilicon growth furnace electrode assembly structure as set forth in claim 1, wherein: the gasket ring is characterized in that gasket grooves are formed in the end faces of the upper end and the lower end of the ceramic compression ring (10), and flat gaskets (9) are arranged in the gasket grooves at the two ends of the ceramic compression ring (10).

3. The polysilicon growth furnace electrode assembly structure according to claim 1 or 2, wherein: bulges and cavities which are matched with each other are arranged between the contact surfaces of the insulating bush (11) and the insulating seat sleeve (6), and an O-shaped ring I (7) and an O-shaped ring II (8) are arranged between the contact surfaces of the insulating bush (11) and the insulating seat sleeve (6) to form two-way sealing.

4. The polysilicon growth furnace electrode assembly structure as set forth in claim 3, wherein: the electrode body (13) is fixedly provided with a locking flange (3) capable of pressing the compression ring (5).

5. The polysilicon growth furnace electrode assembly structure according to claim 1, 2 or 4, wherein: the electrode body (13) is provided with a water inlet and outlet assembly (1) which is positioned at one end of the electrode seat (15).

6. The polysilicon growth furnace electrode assembly structure as set forth in claim 5, wherein: an outer sleeve is arranged outside the ceramic pressure ring (10), and a heat insulation ring (12) matched with the outer sleeve is sleeved on the electrode body (13).

7. The polysilicon growth furnace electrode assembly structure as set forth in claim 6, wherein: the electrode body (13) is provided with a step surface located on one side of the ceramic pressure ring (10), the ceramic pressure ring (10) is pressed between the step surface and the electrode seat (15), and the heat insulation ring (12) is pressed on the step surface to limit the electrode body (13).

8. The polysilicon growth furnace electrode assembly structure according to claim 1, 2, 4, 6 or 7, wherein: and a graphite clamp (14) positioned on one side of the ceramic pressure ring (10) is arranged on the electrode body (13).