CN214346342U - Semiconductor is with convenient clear special gas reaction unit - Google Patents
Semiconductor is with convenient clear special gas reaction unit Download PDFInfo
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- CN214346342U CN214346342U CN202023071133.8U CN202023071133U CN214346342U CN 214346342 U CN214346342 U CN 214346342U CN 202023071133 U CN202023071133 U CN 202023071133U CN 214346342 U CN214346342 U CN 214346342U
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- placing box
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Abstract
The utility model relates to the technical field of special gas reaction devices, and discloses a special gas reaction device convenient for cleaning for semiconductors, which comprises a gas reaction tube, wherein the top of the gas reaction tube is provided with a motor placing box mounting hole, one side of the motor placing box mounting hole is provided with a mounting thread positioned on the inner wall of the gas reaction tube, the top of the mounting thread is bonded with a rubber ring, one side of the rubber ring is detachably provided with a first reaction tube cover, the device can be detached through the front and rear tube covers and the reaction device, the device can be detached after being used through the design, the gas reaction tube cover of the device can be installed in a rotating way, the placing box fixing frame is installed through the mounting holes arranged on the two sides of the placing box fixing frame and the fixing holes on the two sides of the motor placing box by using screws, and the connection part of the device is provided with a sealing device, the device is very simple to install through the design.
Description
Technical Field
The utility model relates to a special gas reaction unit technical field specifically is a semiconductor is with convenient clear special gas reaction unit.
Background
The present invention relates to a doping gas, and more particularly to a gas doping source used in a doping process, which is called a doping gas, and a semiconductor special gas reaction device used in the prior art is a general integrated device, generates substances on an inner surface layer after being used for a long time, and is not beneficial to cleaning.
The prior art has the following problems:
1. the existing semiconductor special gas reaction device is generally an integrated device, and a layer of substance is adhered to the surface layer in the device after long-time use, so that the cleaning is not facilitated.
2. The existing semiconductor special gas reaction device is generally an integrated device or a more precise detachable device, but has the problem of complicated structure and inconvenient installation.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The utility model provides a not enough to prior art, the utility model provides a semiconductor is with convenient clear special gas reaction unit possesses advantages such as being convenient for clean, simple structure and easy installation, has solved the problem that is not convenient for clean, the structure is complicated and difficult installation.
(II) technical scheme
In order to realize the above-mentioned semiconductor with convenient clear special gaseous reaction unit purpose, the utility model provides a following technical scheme: a special gas reaction device convenient to clean for semiconductors comprises a gas reaction tube, wherein a motor placing box mounting hole is formed in the top of the gas reaction tube, a mounting thread located on the inner wall of the gas reaction tube is formed in one side of the motor placing box mounting hole, a rubber ring is arranged at the top of the mounting thread in a bonding mode, a first reaction tube cover is detachably arranged on one side of the rubber ring, a first closed thread is formed in one side of the first reaction tube cover, a gas injection tube located on the other side of the first reaction tube cover is welded and mounted on one side of the first closed thread, a gas injection tube valve is fixedly mounted at the top of the gas injection tube, a second reaction tube cover located on the other side of the gas reaction tube is detachably mounted on one side of the gas injection tube valve, a gas outlet tube is welded and mounted on one side of the second reaction tube cover, and a gas outlet tube valve is fixedly mounted at the top of the gas outlet tube, the top of the gas outlet pipe valve is detachably provided with a motor placing box positioned at the top of the gas reaction pipe, the top of the motor placing box is welded with a motor, the bottom of the motor is welded with a rotating rod, the bottom of the rotating rod is welded with a fan blade, one side of the fan blade is clamped with a storage battery positioned at one side of the rotating rod, one side of the storage battery is provided with a charging port, the top of the charging port is movably provided with a motor starting key positioned at the top of the motor placing box, one side of the motor starting key is provided with a fixing hole positioned at one side of the motor placing box, the bottom of the fixing hole is detachably provided with a placing box fixing frame positioned at the bottom of the motor placing box, one side of the placing box fixing frame is welded with a fixing arm, one side of the fixing arm is provided with a reaction pipe fixing groove positioned at the top of the placing box fixing frame, and the inside of the reaction pipe fixing groove is provided with a mounting hole positioned at the inner wall of the fixing arm, the inside demountable installation of mounting hole has the screw rod.
Preferably, the motor placing box mounting hole formed in the top of the gas reaction tube is slightly larger than the length of the motor placing box, and mounting threads and rubber rings are arranged at two ends of the gas reaction tube.
Preferably, the first reaction tube cover and the second reaction tube cover are consistent and are provided with first closing threads, and the first closing threads are matched with the mounting threads.
Preferably, the motor that box top set up is placed to the motor is connected with the bull stick lug that its bottom set up, and the battery of bull stick one side installation passes through the power cord and is connected with the motor, and the motor is placed the length of box and is unanimous with the diameter length of gas reaction pipe.
Preferably, the placing box fixing frame is installed at the bottom of the gas reaction tube, and the diameter of the reaction tube fixing groove formed in the placing box fixing frame is consistent with the diameter and the length of the gas reaction tube.
Preferably, the mounting hole is matched with fixing holes formed in two sides of the motor placing box, and the length of the inside of the placing box fixing frame is consistent with the length of the motor placing box.
Compared with the prior art, the utility model provides a semiconductor is with convenient clear special gas reaction unit possesses following beneficial effect:
1. this semiconductor is with convenient clear special gas reaction unit places devices such as box through installation gas reaction pipe, first reaction tube cap, second reaction tube cap, motor, has reached the clear purpose of being convenient for, and this device is through before the installation, after should tube cap and reaction unit, and all can dismantle, makes this device dismantle the washing after using through this design.
2. This semiconductor is with convenient clear special gas reaction unit, through installing gas reaction pipe, the installation screw thread, place box mount, devices such as fixed orifices, the purpose of simple structure and easy installation has been reached, the rotatory mode of gas reaction tube cap accessible of this device is installed, the fixed orifices that the box both sides were placed through the mounting hole that its both sides were seted up and motor to place the box mount uses the screw rod to install, and the junction of this device all is equipped with sealing device, it is very simple to make this device installation through above design.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the gas reaction tube according to the present invention;
FIG. 3 is a schematic view of the mounting structure of the motor placing box of the present invention;
FIG. 4 is a schematic view of the internal structure of the motor placing box of the present invention;
FIG. 5 is a schematic view of the structure of the motor placing box of the present invention;
FIG. 6 is a schematic view of the structure of the motor fixing frame of the present invention
Wherein: 1. a gas reaction tube; 2. a motor placing box mounting hole; 3. installing threads; 4. a rubber ring; 5. a first reaction tube cover; 6. a first closed thread; 7. a gas injection pipe; 8. a gas injection pipe valve; 9. a second reaction tube cover; 10. an air outlet pipe; 11. an outlet valve; 12. a motor placing box; 13. a motor; 14. A rotating rod; 15. a fan blade; 16. a storage battery; 17. a charging port; 18. a motor start key; 19. a fixing hole; 20. a placing box fixing frame; 21. a fixed arm; 22. a reaction tube fixing groove; 23. mounting holes; 24. a screw.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-6, a special gas reaction device for semiconductor convenient cleaning, includes a gas reaction tube 1, a motor placing box mounting hole 2 provided at the top of the gas reaction tube 1 is slightly longer than a motor placing box 12, and both ends of the gas reaction tube 1 are provided with a mounting screw thread 3 and a rubber ring 4, the top of the gas reaction tube 1 is provided with a motor placing box mounting hole 2, one side of the motor placing box mounting hole 2 is provided with a mounting screw thread 3 located on the inner wall of the gas reaction tube 1, the top of the mounting screw thread 3 is adhered with a rubber ring 4, one side of the rubber ring 4 is detachably provided with a first reaction tube cover 5, the first reaction tube cover 5 is consistent with a second reaction tube cover 9 and is provided with a first closing screw thread 6, the first closing screw thread 6 is identical with the mounting screw thread 3, one side of the first reaction tube cover 5 is provided with a first closing screw thread 6, a gas injection pipe 7 positioned at the other side of the first reaction pipe cover 5 is welded and installed at one side of the first closed thread 6, a gas injection pipe valve 8 is fixedly installed at the top of the gas injection pipe 7, a second reaction pipe cover 9 positioned at the other side of the gas reaction pipe 1 is detachably installed at one side of the gas injection pipe valve 8, a gas outlet pipe 10 is welded and installed at one side of the second reaction pipe cover 9, a gas outlet pipe valve 11 is fixedly installed at the top of the gas outlet pipe 10, a motor placing box 12 positioned at the top of the gas reaction pipe 1 is detachably installed at the top of the gas outlet pipe valve 11, a motor 13 arranged at the top of the motor placing box 12 is directly connected with a rotating rod 14 arranged at the bottom of the motor placing box 12, a storage battery 16 installed at one side of the rotating rod 14 is connected with the motor 13 through a power line, the length of the motor placing box 12 is consistent with the diameter length of the gas reaction pipe 1, and the motor 13 is welded and installed at the top of the motor placing box 12, a rotating rod 14 is welded and installed at the bottom of a motor 13, a fan blade 15 is welded and installed at the bottom of the rotating rod 14, a storage battery 16 located at one side of the rotating rod 14 is installed at one side of the fan blade 15 in a clamping mode, a charging port 17 is formed at one side of the storage battery 16, a motor starting key 18 located at the top of a motor placing box 12 is movably installed at the top of the charging port 17, a fixing hole 19 located at one side of the motor placing box 12 is formed at one side of the motor starting key 18, a placing box fixing frame 20 located at the bottom of the motor placing box 12 is detachably installed at the bottom of the fixing hole 19, the placing box fixing frame 20 is installed at the bottom of the gas reaction tube 1, a reaction tube fixing groove 22 formed in the placing box fixing frame 20 is consistent in diameter and length with the gas reaction tube 1, a fixing arm 21 is welded and installed at one side of the placing box fixing frame 20, a reaction tube fixing groove 22 located at the top of the placing box fixing frame 20 is formed at one side of the fixing arm 21, the inside of reaction tube fixed slot 22 is seted up and is located the mounting hole 23 of fixed arm 21 inner wall, and mounting hole 23 is identical with the fixed orifices 19 that the box 12 both sides were seted up are placed to the motor, and places the inside length of box mount 20 and the length that the box 12 was placed to the motor unanimously, and the inside demountable installation of mounting hole 23 has screw rod 24.
When in use, the gas reaction tube 1 is placed in the reaction tube fixing groove 22 in the placing box fixing frame 20, the motor placing box 12 is placed in the motor placing box mounting hole 2 formed at the top of the gas reaction tube 1, the fixing holes 19 formed at two sides of the motor placing box 12 and the mounting holes 23 formed at two sides of the placing box fixing frame 20 are fixed by using the screw rods 24, finally, the first reaction tube cover 5 is installed at the mounting thread 3 at the left side of the gas reaction tube 1 in a rotating manner, the second reaction tube cover 9 is also installed at the right side of the gas reaction tube 1 in a rotating manner, the installation of the device is completed through the operations, when in use, the air in the device is pumped out through the air outlet pipe 10, the valve 11 of the air outlet pipe is closed after the air is pumped out, gas to be reacted is injected through the gas injection pipe 7, the gas injection pipe valve 8 is closed after the gas is injected, and the gas injection pipe can work by starting the gas injection pipe through the motor starting key 18.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A semiconductor is with convenient clear special gas reaction unit, includes gas reaction pipe (1), its characterized in that: the gas reaction tube comprises a gas reaction tube (1), a motor, a box mounting hole (2), a rubber ring (4), a first reaction tube cover (5), a first closed thread (6), a gas injection tube (7), a gas injection tube valve (8), a second reaction tube cover (9), a gas outlet tube (10), a gas inlet tube valve (8), a gas inlet tube valve (9), a gas reaction tube valve (1), a gas outlet tube (10), a rubber ring (4), a rubber ring (3), a rubber ring (4), a first reaction tube cover (5), a first closed thread (6), a gas injection tube (7), a second reaction tube cover (9), a rubber ring (6), a rubber ring (4), a gas injection tube valve (7), a gas inlet tube valve (8) and a gas outlet tube (10), the gas outlet pipe comprises a gas outlet pipe valve (11) and is characterized in that a gas outlet pipe valve (11) is fixedly installed at the top of the gas outlet pipe (10), a motor placing box (12) positioned at the top of a gas reaction pipe (1) is detachably installed at the top of the gas outlet pipe valve (11), a motor (13) is installed at the top of the motor placing box (12), a rotating rod (14) is installed at the bottom of the motor (13), fan blades (15) are installed at the bottom of the rotating rod (14) in a welding mode, a storage battery (16) positioned at one side of the rotating rod (14) is installed at one side of each fan blade (15) in a clamping mode, a charging port (17) is formed in one side of each storage battery (16), a motor starting key (18) positioned at the top of the motor placing box (12) is movably installed at the top of the charging port (17), a fixing hole (19) positioned at one side of the motor placing box (12) is formed in one side of each motor starting key (18), the bottom demountable installation of fixed orifices (19) has the box mount (20) of placing that is located the motor and places box (12) bottom, one side welded mounting who places box mount (20) has fixed arm (21), reaction tube fixed slot (22) that are located and place box mount (20) top are seted up to one side of fixed arm (21), mounting hole (23) that are located fixed arm (21) inner wall are seted up to the inside of reaction tube fixed slot (22), the inside demountable installation of mounting hole (23) has screw rod (24).
2. A special gas reaction apparatus for semiconductor use which is easy to clean according to claim 1, wherein: the motor placing box mounting hole (2) formed in the top of the gas reaction tube (1) is slightly larger than the length of the motor placing box (12), and mounting threads (3) and rubber rings (4) are arranged at two ends of the gas reaction tube (1).
3. A special gas reaction apparatus for semiconductor use which is easy to clean according to claim 1, wherein: the first reaction tube cover (5) and the second reaction tube cover (9) are consistent and are provided with first closed threads (6), and the first closed threads (6) are matched with the mounting threads (3).
4. A special gas reaction apparatus for semiconductor use which is easy to clean according to claim 1, wherein: motor (13) that box (12) top was placed to the motor set up rather than bull stick (14) lug connection that the bottom set up, the battery (16) of bull stick (14) one side installation are connected with motor (13) through the power cord, and the motor is placed the length of box (12) and is unanimous with the diameter length of gas reaction pipe (1).
5. A special gas reaction apparatus for semiconductor use which is easy to clean according to claim 1, wherein: the placing box fixing frame (20) is installed at the bottom of the gas reaction tube (1), and the diameter of a reaction tube fixing groove (22) formed in the placing box fixing frame (20) is consistent with the diameter and the length of the gas reaction tube (1).
6. A special gas reaction apparatus for semiconductor use which is easy to clean according to claim 1, wherein: the mounting holes (23) are matched with fixing holes (19) formed in two sides of the motor placing box (12), and the length of the inside of the placing box fixing frame (20) is consistent with that of the motor placing box (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023071133.8U CN214346342U (en) | 2020-12-18 | 2020-12-18 | Semiconductor is with convenient clear special gas reaction unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023071133.8U CN214346342U (en) | 2020-12-18 | 2020-12-18 | Semiconductor is with convenient clear special gas reaction unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214346342U true CN214346342U (en) | 2021-10-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023071133.8U Active CN214346342U (en) | 2020-12-18 | 2020-12-18 | Semiconductor is with convenient clear special gas reaction unit |
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| Country | Link |
|---|---|
| CN (1) | CN214346342U (en) |
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2020
- 2020-12-18 CN CN202023071133.8U patent/CN214346342U/en active Active
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