CN214345045U

CN214345045U - PECVD filter

Info

Publication number: CN214345045U
Application number: CN202023270869.8U
Authority: CN
Inventors: 钱元浦
Original assignee: Soloberg Filter Muffler Manufacturing Suzhou Co ltd
Current assignee: Soloberg Filter Muffler Manufacturing Suzhou Co ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2021-10-08
Anticipated expiration: 2030-12-30

Abstract

The utility model discloses a PECVD filter, including the ladle body, both ends are equipped with the toper pipe and the head of being connected with it respectively about the ladle body, be equipped with the filter core in the ladle body, be equipped with the filter core support in the middle of the filter core is inside, the filter core upper end is equipped with the filter core top cap, the filter core lower extreme is equipped with the filter core mounting panel, the ladle body both sides are equipped with the entrance point pipe fitting and the exit end pipe fitting of being connected with it respectively, the one end that the ladle body was kept away from to the entrance point pipe fitting is equipped with the product entrance point and the pressure relief valve of being connected with it respectively, the other end that the ladle body was kept away from to the exit end pipe fitting is equipped with the product exit end and the product blowback mouth of being connected with it. The utility model has the advantages that: the method has the advantages of protecting the vacuum pump greatly, protecting the vacuum pump equipment with higher price, improving the quality of PECVD, reducing a large amount of maintenance time, enhancing the function of corrosion resistance, not specially considering the difference between different equipment or processes of each family, and being approximate to a standardized selection.

Description

PECVD filter

Technical Field

The utility model relates to a filter technical field specifically is a PECVD filter.

Background

Because some technologies in the semiconductor industry are blocked, the domestic investment on semiconductors is increased. This is accompanied by an increasing demand for semiconductor wafers and, due to the demands of the process, equipment. At present, PECVD equipment has different equipment and attention points, is a dry vacuum pump which is suitable well, and also puts better requirements on the standardization of a filtering system.

The quantity of dust changes greatly on the equipment of some manufacturers due to the difference of sealing performance and the difference of applicable raw materials, and the problems of inconvenient filter element maintenance and short service life due to the difference of corrosivity exist, and the serious corrosion condition of the filter is caused.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a PECVD filter to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a PECVD filter, includes the ladle body, both ends are equipped with the toper pipe and the head of being connected with it respectively about the ladle body, be equipped with the filter core in the ladle body, be equipped with the filter core support in the middle of the filter core is inside, the filter core upper end is equipped with the filter core top cap, the filter core lower extreme is equipped with the filter core mounting panel, the ladle body both sides are equipped with the entrance point pipe fitting and the exit end pipe fitting of being connected with it respectively, the entrance point pipe fitting is kept away from the one end of ladle body is equipped with the product entrance point and the pressure relief valve of being connected with it respectively, the exit end pipe fitting is kept away from the other end of ladle body is equipped with the product exit end and the product blowback mouth of being connected with it.

Preferably, the other end of the conical pipe, which is far away from the barrel body, is provided with a first flange pipe and a product sewage outlet which are connected with the conical pipe.

Preferably, a plurality of mounting brackets are symmetrically arranged around the barrel body respectively.

Preferably, one side of the outlet end pipe fitting is connected with the product back flushing port through a second flange pipe.

Preferably, the inlet end pipe fitting and the outlet end pipe fitting are both provided with instrument openings.

Preferably, the ladle body is located the entrance end pipe fitting with a plurality of lugs are symmetrically equipped with respectively all around to the exit end pipe fitting upper end, the head upper end is also symmetrically equipped with two lugs, ladle body one side still is equipped with the data plate support.

Preferably, the barrel body and the end enclosure are fixedly connected with the M fastener through a plurality of O-shaped notch sealing flanges, O-shaped sealing rings and a top cover flange.

Preferably, the lower end of the filter element mounting plate is provided with a plurality of reinforcing ribs connected with the filter element mounting plate.

Preferably, the top end of the filter element support is connected with the filter element top cover through an M screw and an M sealing gasket.

Advantageous effects

The utility model provides a PECVD filter has played very big protection to the vacuum pump, has protected the higher vacuum pump equipment of price, improves PECVD's quality, has reduced a large amount of maintenance time simultaneously and has also strengthened the function of corrosion resistance, need not specially go to consider the difference between the different equipment of each family or the technology, is close to standardized selection.

Drawings

Fig. 1 is a schematic side view of the present invention;

fig. 2 is a schematic view of the structure of the present invention;

fig. 3 is a schematic top view of the present invention.

Reference numerals

1-a product drain outlet, 2-a first flange pipe, 3-a conical pipe, 4-a barrel body, 5-a mounting bracket, 6-an instrument opening, 7-a product outlet end, 8-an outlet end pipe, 9-a second flange pipe, 10-a product back-flushing opening, 11-an inlet end pipe, 12-a product inlet end, 13-a pressure relief valve, 14-a lifting lug, 15-a nameplate bracket, 16-O-shaped groove sealing flange, 17-O-shaped sealing ring, 18-a top cover flange, 19-M16 fastening piece, 20-an end enclosure, 21-, 22-a filter element mounting plate, 23-a filter element, 24-a filter element bracket, 25-a filter element top cover, 26-M12 screw and 27-M12 sealing gasket.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

Examples

As shown in fig. 1-3, a PECVD filter comprises a barrel 4, the upper and lower ends of the barrel 4 are respectively provided with a conical tube 3 and a sealing head 20 connected thereto, the barrel 4 is provided with a filter element 23, the middle inside the filter element 23 is provided with a filter element support 24, the upper end of the filter element 23 is provided with a filter element top cover 25, the lower end of the filter element 23 is provided with a filter element mounting plate 22, the two sides of the barrel 4 are respectively provided with an inlet end pipe 11 and an outlet end pipe 8 connected thereto, one end of the inlet end pipe 11 far away from the barrel 4 is respectively provided with a product inlet end 12 and a pressure relief valve 13 connected thereto, and the other end of the outlet end pipe 8 far away from the barrel 4 is provided with a product outlet end 7 and a product back flushing port 10 connected thereto.

Preferably, the other end of the conical pipe 3, which is far away from the barrel body 4, is provided with a first flange pipe 2 and a product sewage outlet 1 which are connected with the conical pipe.

Preferably, a plurality of mounting brackets 5 are symmetrically arranged around the barrel body 4.

Preferably, one side of the outlet pipe fitting 8 is connected with a product back-blowing opening 10 through a second flange pipe 9.

Preferably, the inlet pipe fitting 11 and the outlet pipe fitting 8 are both provided with instrument openings 6.

Preferably, the barrel 4 is provided with a plurality of lifting lugs 14 symmetrically around the upper ends of the inlet end pipe fitting 11 and the outlet end pipe fitting 8, the upper end of the sealing head 20 is also provided with two lifting lugs 14 symmetrically, and one side of the barrel 4 is also provided with a nameplate support 15.

Preferably, the barrel 4 and the sealing head 20 are fixedly connected with the M16 fastening piece 19 through a plurality of O-shaped notch sealing flanges 16, O-shaped sealing rings 17 and a top cover flange 18.

Preferably, the filter element mounting plate 22 is provided at a lower end thereof with a plurality of ribs 21 connected thereto.

Preferably, the cartridge holder 24 is attached at its top end to the cartridge top cover 25 by M12 screw 26 and M12 gasket 27.

Under the undetermined condition of technology at every turn, can avoid the pressure loss problem that the lectotype undersize leads to through online clearance, the effectual most material that removes in the technology of the filter core of 99% @0.3 micron of super, simultaneously because the characteristic after the PEFT spraying, the dust is not stained with, is favorable to reverse clearance.

The method is universal on the processes of most companies through basic anticorrosive spraying, and unnecessary stainless steel structures are avoided.

The volume and the size of each product can be adjusted according to the flow and the impurity amount in the process, the flow speed is reduced through calculation, the filtration is realized, the precision is improved, and meanwhile, the filter element utilization efficiency of the filter element is improved. From the final required result, the clean and dust-free discharge port at the rear end of the filter can be detected, and the pump body is not damaged by a very small amount of dust entering the pump body.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the content of the present invention within the protection scope of the present invention.

Claims

1. A PECVD filter comprising a barrel (4), characterized in that: both ends are equipped with conical duct (3) and head (20) of being connected with it respectively about ladle body (4), be equipped with filter core (23) in ladle body (4), be equipped with filter core support (24) in the middle of filter core (23) is inside, filter core (23) upper end is equipped with filter core top cap (25), filter core (23) lower extreme is equipped with filter core mounting panel (22), ladle body (4) both sides are equipped with entrance point pipe fitting (11) and exit end pipe fitting (8) of being connected with it respectively, entrance point pipe fitting (11) are kept away from the one end of ladle body (4) is equipped with product entrance point (12) and pressure relief valve (13) of being connected with it respectively, exit end pipe fitting (8) are kept away from the other end of ladle body (4) is equipped with product exit end (7) and product blowback mouth (10) of being connected with it.

2. A PECVD filter according to claim 1, characterized in that: the other end of the conical pipe (3) far away from the barrel body (4) is provided with a first flange pipe (2) and a product sewage outlet (1) which are connected with the conical pipe.

3. A PECVD filter according to claim 1, characterized in that: a plurality of mounting brackets (5) are symmetrically arranged on the periphery of the barrel body (4) respectively.

4. A PECVD filter according to claim 1, characterized in that: one side of the outlet end pipe fitting (8) is connected with the product back flushing port (10) through a second flange pipe (9).

5. A PECVD filter according to claim 1, characterized in that: the inlet end pipe fitting (11) and the outlet end pipe fitting (8) are both provided with instrument openings (6).

6. A PECVD filter according to claim 1, characterized in that: the ladle body (4) is located entrance end pipe fitting (11) with exit end pipe fitting (8) upper end is all around respectively the symmetry be equipped with a plurality of lugs (14), head (20) upper end also symmetry is equipped with two lugs (14), ladle body (4) one side still is equipped with data plate support (15).

7. A PECVD filter according to claim 1, characterized in that: the barrel body (4) and the end socket (20) are fixedly connected with an M16 fastener (19) through a plurality of O-shaped notch sealing flanges (16), O-shaped sealing rings (17) and a top cover flange (18).

8. A PECVD filter according to claim 1, characterized in that: the lower end of the filter element mounting plate (22) is provided with a plurality of reinforcing ribs (21) connected with the filter element mounting plate.

9. A PECVD filter according to claim 1, characterized in that: the top end of the filter element bracket (24) is connected with the filter element top cover (25) through an M12 screw (26) and an M12 sealing gasket (27).