CN214307887U

CN214307887U - Vacuum nitrogen oven for semiconductor equipment parts

Info

Publication number: CN214307887U
Application number: CN202022949369.0U
Authority: CN
Inventors: 黎纠
Original assignee: Dijing Semiconductor Technology Suzhou Co ltd
Current assignee: Dijing Semiconductor Technology Suzhou Co ltd
Priority date: 2020-12-08
Filing date: 2020-12-08
Publication date: 2021-09-28
Anticipated expiration: 2030-12-08

Abstract

The utility model relates to a vacuum nitrogen gas oven for semiconductor equipment spare part belongs to oven technical field, and it includes the oven, the inside drying chamber that is equipped with of oven, the drying chamber is provided with the chamber door with outside intercommunication, set up first cavity, second cavity and third cavity in the oven inner wall, first cavity is seted up in the bottom of oven, the second cavity is seted up in the inner wall both sides of oven, the third cavity is seted up in upper portion in the box. The device can rotate and heat the workpiece in the oven through the supporting plate, so that the workpiece is heated more uniformly; the hot gas can be stirred through the second fan blade ventilating pipe, so that the hot gas is uniformly distributed and is beneficial to uniform heating; in the cooling stage, through second driving motor and first flabellum, can carry out the local cooling, when the work piece needs whole synchronous heat dissipation, launch condenser tube and carry out quick effectual whole heat dissipation.

Description

Vacuum nitrogen oven for semiconductor equipment parts

Technical Field

The utility model relates to an oven technical field, more specifically relate to a vacuum nitrogen gas oven for semiconductor equipment spare part.

Background

The existing vacuum oven has the problems of low drying efficiency and low drying quality, the air temperature in the oven is not uniform in the drying process, and the cooling process is slow after the drying is finished.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum nitrogen gas oven for semiconductor equipment spare part for solve the current lower problem of vacuum oven drying efficiency and drying quality who proposes in the above-mentioned background art, and the gas temperature is inhomogeneous in the stoving in-process oven, the slow problem of cooling process after the stoving finishes.

In order to achieve the above object, the utility model provides a following technical scheme: a vacuum nitrogen oven for semiconductor equipment parts comprises an oven, wherein a drying chamber is arranged in the oven, a door is arranged on the drying chamber and communicated with the outside, a first cavity, a second cavity and a third cavity are arranged in the inner wall of the oven, the first cavity is arranged at the bottom of the oven, the second cavity is arranged on two sides of the inner wall of the oven, and the third cavity is arranged at the upper part in the oven; a first driving motor is arranged in the first cavity, an output shaft of the first driving motor is fixedly connected with a supporting plate, the upper part of the supporting plate is fixedly connected with a net-shaped annular plate, a second driving motor is fixedly arranged in the second cavity, an output shaft of the second driving motor is fixedly connected with first fan blades, the first fan blades are placed in a fourth cavity arranged in the oven, a third driving motor is fixedly arranged in the third cavity, an output shaft of the third driving motor is fixedly connected with second fan blades, the second fan blades are placed in an installation box fixedly connected with the inside of the oven, a rotating cavity is arranged in the installation box, a plurality of ventilation openings are arranged at the bottom end of the rotating cavity at equal intervals, the bottom ends of the ventilation openings are connected with ventilation pipes, and the three ventilation pipes are in a group and are inclined at different angles; the lower side of the drying chamber is communicated with a vacuum pipeline and a nitrogen pipeline which are arranged in the drying oven in a penetrating mode.

Furthermore, the lower end of the supporting plate is fixedly connected with a supporting rod in a matching manner, the bottom end of the supporting rod is concave, a sliding groove matched with the inner concave opening at the bottom end of the supporting rod is circumferentially arranged on the inner wall of the bottom of the baking oven in a surrounding manner, and a ball is placed between the inner concave opening and the sliding groove and used for stably supporting the supporting plate in the rotating process; the sliding groove is arranged outside the first chamber.

Furthermore, an electric telescopic rod is arranged on the outer side of the sliding groove, the electric telescopic rod is embedded in a fifth cavity inside the oven, a cooling water pipe is fixedly connected to the upper end of the electric telescopic rod, the two ends of the cooling water pipe are divided into a water inlet end and a water outlet end, the bottom ends of the water inlet end and the water outlet end are connected with a pipeline communicated with the outside, and the pipeline is located on the inner side of the drying chamber and can be contracted to be matched with the telescopic work of the electric telescopic rod.

Compared with the prior art, the utility model has the advantages of: the device can rotate and heat the workpiece in the drying chamber in the oven through the rotatable supporting plate, so that the workpiece is heated more uniformly; moreover, the second fan blades and the ventilation pipes arranged at different inclination angles can stir the hot gas in the drying chamber, so that the hot gas is uniformly distributed, and the workpieces are more favorably and uniformly heated in the initial heating stage; in the cooling stage, the second driving motor and the first fan blade are matched, so that the part at a specific height can be locally cooled, the net-shaped ring plate can cut the blown wind, the blown wind is more uniform, and the concentration of wind power is avoided; when the workpiece needs to be integrally and synchronously radiated, the cooling water pipe is started to carry out quick and effective integral radiation.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic diagram of the external structure of the present invention.

The reference numbers in the figures illustrate:

1-drying oven, 2-second chamber, 3-second driving motor, 4-fourth chamber, 5-first fan blade, 6-third chamber, 7-third driving motor, 8-second fan blade, 9-box door, 10-rotating chamber, 11-mounting box, 12-ventilation opening, 13-ventilation pipe, 14-supporting plate, 15-reticular annular plate, 16-supporting rod, 17-cooling water pipe, 18-pipeline, 19-first driving motor, 20-first chamber, 21-ball, 22-sliding groove, 23-fifth chamber, 24-electric telescopic rod, 25-drying chamber, 26-water outlet end, 27-water inlet end, 28-vacuum pipeline and 29-nitrogen pipeline.

Detailed Description

The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top/bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "provided", "sleeved/connected", "connected", and the like are to be understood in a broad sense, such as "connected", which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example 1:

referring to fig. 1-2, the present invention provides an embodiment of a vacuum nitrogen oven for semiconductor device components: the oven comprises an oven 1, wherein a drying chamber 25 is arranged inside the oven 1, a door 9 is arranged on the drying chamber 25 and communicated with the outside, a first cavity 20, a second cavity 2 and a third cavity 6 are arranged in the inner wall of the oven 1, the first cavity 20 is arranged at the bottom of the oven 1, the second cavity 2 is arranged at two sides of the inner wall of the oven 1, and the third cavity 6 is arranged at the upper part of the oven 1; a first driving motor 19 is arranged in the first chamber 20, and an output shaft of the driving motor 19 is fixedly connected with a supporting plate 14; the lower end of the supporting plate 14 is fixedly connected with a supporting rod 16 in a matching manner, the bottom end of the supporting rod 16 is concave, a sliding groove 22 matched with the concave opening at the bottom end of the supporting rod 16 is formed in the inner wall of the bottom of the oven 1 in a surrounding manner, and a ball 21 is placed between the inner concave opening and the sliding groove 22 and used for stable supporting in the rotating process of the supporting plate 14; an electric telescopic rod 24 is arranged outside the sliding groove 22, the electric telescopic rod 24 is embedded in a fifth chamber 23 inside the oven 1, the upper end of the electric telescopic rod 24 is fixedly connected with a cooling water pipe 17, two ends of the cooling water pipe 17 are divided into a water inlet end 27 and a water outlet end 26, the bottom ends of the water inlet end 27 and the water outlet end 26 are connected with a pipeline 18 communicated with the outside, and the pipeline 18 is positioned in the drying chamber 25 and can be contracted to be matched with the telescopic work of the electric telescopic rod 24; the sliding groove 22 is arranged outside the first chamber 20; a netted annular plate 15 is fixedly connected to the upper portion of the supporting plate 14, a second driving motor 3 is fixedly arranged in the second chamber 2, an output shaft of the second driving motor 3 is fixedly connected with a first fan blade 5, the first fan blade 5 is placed in a fourth chamber 4 arranged in the oven 1, a third driving motor 7 is fixedly arranged in the third chamber 6, an output shaft of the third driving motor 7 is fixedly connected with a second fan blade 8, the second fan blade 8 is placed in an installation box 11 fixedly connected with the inside of the oven 1, a rotating chamber 10 is arranged in the installation box 11, a plurality of ventilation openings 12 are equidistantly arranged at the bottom end of the rotating chamber 10, the bottom ends of the ventilation openings 12 are connected with ventilation pipes 13, and the ventilation pipes 13 are grouped and inclined at different angles; the lower side of the drying chamber 25 is communicated with a vacuum pipeline 28 and a nitrogen pipeline 29 which penetrate through the drying oven 1.

The device can rotate and heat the workpiece in the drying chamber in the oven through the rotatable supporting plate, so that the workpiece is heated more uniformly; moreover, the second fan blades and the ventilation pipes arranged at different inclination angles can stir the hot gas in the drying chamber, so that the hot gas is uniformly distributed, and the workpieces are more favorably and uniformly heated in the initial heating stage; in the cooling stage, the second driving motor and the first fan blade are matched, so that the part at a specific height can be locally cooled, the net-shaped ring plate can cut the blown wind, the blown wind is more uniform, and the concentration of wind power is avoided; when the workpiece needs to be integrally and synchronously radiated, the cooling water pipe is started to carry out quick and effective integral radiation.

The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.

Claims

1. A vacuum nitrogen oven for semiconductor equipment parts is characterized by comprising an oven, wherein a drying chamber is arranged in the oven, a door is arranged on the drying chamber and communicated with the outside of the oven, a first cavity, a second cavity and a third cavity are arranged in the inner wall of the oven, the first cavity is arranged at the bottom of the oven, the second cavity is arranged at two sides of the inner wall of the oven, and the third cavity is arranged at the upper part in the oven; a first driving motor is arranged in the first cavity, an output shaft of the first driving motor is fixedly connected with a supporting plate, the upper part of the supporting plate is fixedly connected with a net-shaped annular plate, a second driving motor is fixedly arranged in the second cavity, an output shaft of the second driving motor is fixedly connected with first fan blades, the first fan blades are placed in a fourth cavity arranged in the oven, a third driving motor is fixedly arranged in the third cavity, an output shaft of the third driving motor is fixedly connected with second fan blades, the second fan blades are placed in an installation box fixedly connected with the inside of the oven, a rotating cavity is arranged in the installation box, a plurality of ventilation openings are arranged at the bottom end of the rotating cavity at equal intervals, the bottom ends of the ventilation openings are connected with ventilation pipes, and the three ventilation pipes are in a group and are inclined at different angles; the lower side of the drying chamber is communicated with a vacuum pipeline and a nitrogen pipeline which are arranged in the drying oven in a penetrating mode.

2. A vacuum nitrogen oven for semiconductor device components and parts according to claim 1, wherein: the lower end of the supporting plate is fixedly connected with a supporting rod in a matching manner, the bottom end of the supporting rod is concave, a sliding groove matched with the concave opening at the bottom end of the supporting rod is circumferentially arranged on the inner wall of the bottom of the baking oven in a surrounding manner, and a ball is arranged between the inner concave opening and the sliding groove; the sliding groove is arranged outside the first chamber.

3. A vacuum nitrogen oven for semiconductor device components and parts according to claim 2, characterized in that: the oven is characterized in that an electric telescopic rod is arranged on the outer side of the sliding groove, the electric telescopic rod is embedded in a fifth cavity inside the oven, a cooling water pipe is fixedly connected to the upper end of the electric telescopic rod, the two ends of the cooling water pipe are divided into a water inlet end and a water outlet end, and the bottom ends of the water inlet end and the water outlet end are connected with a pipeline communicated with the outside.