CN214300455U

CN214300455U - Novel lower heat-preservation cylinder structure for single crystal furnace

Info

Publication number: CN214300455U
Application number: CN202023237569.XU
Authority: CN
Inventors: 申富强; 申富胜
Original assignee: Anton Reyna New Materials Jiangsu Co ltd
Current assignee: Anton Reyna New Materials Jiangsu Co ltd
Priority date: 2020-12-29
Filing date: 2020-12-29
Publication date: 2021-09-28
Anticipated expiration: 2030-12-29

Abstract

The utility model provides a novel heat preservation section of thick bamboo structure down for single crystal growing furnace, the below position department of the lateral wall of a heat preservation section of thick bamboo is provided with a plurality of exhaust openings down, each exhaust opening department is provided with the connecting piece that connects exhaust opening both sides, the connecting piece sets up on the inside wall of a heat preservation section of thick bamboo down, the connecting piece sets up to shape of a hoof semi-ring structure spare. The utility model is provided with the connecting piece made of carbon material at the position of the exhaust opening, and the connecting piece is fixedly connected with the exhaust opening through the carbon bolt, so that the overall structural strength of the lower heat-preserving cylinder can be obviously improved; the structure improves the service life of the lower heat-insulating cylinder by more than 1 time, and reduces the use cost.

Description

Novel lower heat-preservation cylinder structure for single crystal furnace

Technical Field

The utility model belongs to the technical field of a heat preservation section of thick bamboo for single crystal growing furnace, concretely relates to novel single crystal growing furnace is with a lower heat preservation section of thick bamboo structure.

Background

The single crystal furnace is main equipment for producing monocrystalline silicon by adopting a Czochralski method. The single crystal furnace is provided with a heat preservation cylinder which is an important component of a thermal field in the single crystal furnace and is made of graphite, a carbon felt with a certain thickness is wrapped on the outer side surface of the heat preservation cylinder to preserve the heat of the thermal field in the single crystal furnace, and the heat preservation cylinder is divided into an upper heat preservation cylinder, a middle heat preservation cylinder and a lower heat preservation cylinder according to different positions of the thermal field.

The lower heat-preserving cylinder is arranged at a position close to the bottom of the single crystal furnace and positioned at the lower part of the thermal field, the side wall of the lower heat-preserving cylinder needs to be provided with exhaust holes, high-temperature airflow in the thermal field needs to be continuously exhausted from the exhaust holes, however, the overall structural strength is greatly reduced due to the arrangement of the exhaust holes, and the position of the opening is easy to break due to the most serious corrosion.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a novel lower heat preservation cylinder structure for single crystal growing furnace to solve the problem that proposes in the background art.

In order to achieve the above object, the utility model provides a novel heat preservation section of thick bamboo structure down for single crystal growing furnace, the below position department of the lateral wall of a heat preservation section of thick bamboo is provided with a plurality of exhaust openings down, each exhaust opening department is provided with the connecting piece that connects exhaust opening both sides, the connecting piece sets up on the inside wall of a heat preservation section of thick bamboo down, the connecting piece sets up to shape of a hoof semi-ring structure spare.

Furthermore, two ends of the connecting piece are fixed at two sides of the exhaust opening of the lower heat-insulating cylinder through carbon-carbon bolts.

Furthermore, the lower heat-insulating cylinder comprises a cylinder body, and an upper end hoop, a middle hoop and a lower end hoop which are arranged at the upper, middle and lower positions of the cylinder body.

Preferably, longitudinal reinforcing ribs are arranged between the upper end hoop and the middle hoop and between the middle hoop and the lower end hoop.

Preferably, the thicknesses of the upper end hoop, the middle hoop and the lower end hoop are all 4 mm.

Furthermore, the thickness of the horseshoe-shaped semi-ring structural member is 20mm, and the height of the horseshoe-shaped semi-ring structural member is 16 mm.

Furthermore, the distance between the horseshoe-shaped semi-ring structural member and the lower edge of the lower end hoop of the lower heat-insulating barrel is 6 mm.

Further, the radian of the horseshoe-shaped semi-ring structural member is 51.5 degrees.

Further, the outer diameter of the lower heat-preservation cylinder is 910mm, the inner diameter of the lower heat-preservation cylinder is 880mm, and the height of the lower heat-preservation cylinder is 297 mm.

Furthermore, the horseshoe-shaped semi-ring structural member is a carbon-carbon material connecting piece.

The utility model discloses an above-mentioned technical scheme's beneficial effect as follows: the utility model is provided with the connecting piece made of carbon material at the position of the exhaust opening, and the connecting piece is fixedly connected with the exhaust opening through the carbon bolt, so that the overall structural strength of the lower heat-preserving cylinder can be obviously improved; the structure improves the service life of the lower heat-insulating cylinder by more than 1 time, and reduces the use cost.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a top view of the present invention;

fig. 3 is a front view of the present invention;

FIG. 4 is an enlarged view of the portion I of FIG. 3;

fig. 5 is an enlarged view of the structure of part ii in fig. 3.

Description of reference numerals: 1. a lower heat-preserving cylinder; 2. an exhaust opening; 3. a connecting member; 4. an upper end hoop; 5. an intermediate hoop; 6. and a lower end hoop.

Detailed Description

In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-4, a lower heat-insulating cylinder structure for a novel single crystal furnace is provided, a plurality of exhaust openings 2 are arranged at a lower position of a side wall of a lower heat-insulating cylinder 1, a connecting member 3 connected with two sides of each exhaust opening 2 is arranged at each exhaust opening 2, the connecting member 3 is arranged on an inner side wall of the lower heat-insulating cylinder 1, and the connecting member 3 is a horseshoe-shaped semi-ring structural member. The utility model is provided with the connecting piece 3 made of carbon material at the position of the exhaust opening 2, and is fixedly connected with the exhaust opening 2 through the carbon bolt, thereby obviously increasing the overall structural strength of the lower heat-preserving cylinder; the structure improves the service life of the lower heat-insulating cylinder 1 by more than 1 time, and reduces the use cost.

In a further embodiment, two ends of the connecting piece 3 are fixed at two sides of the exhaust opening 2 of the lower heat-insulating cylinder 1 through carbon-carbon bolts, preferably, threaded holes are arranged at two ends of the connecting piece 3, which are in contact with the inside of the lower heat-insulating cylinder 1, and holes for the carbon-carbon bolts to pass through are arranged on the lower heat-insulating cylinder 1, so that the connecting mode is simple, and the existing lower heat-insulating cylinder 1 is easily improved.

In a further embodiment, the lower thermal insulation barrel 1 includes a barrel body, and an upper end hoop 4, a middle hoop 5 and a lower end hoop 5 which are arranged at upper, middle and lower positions of the barrel body, and by arranging the upper end hoop 4, the middle hoop 5 and the lower end hoop 6, the overall stability can be improved.

Preferably, longitudinal reinforcing ribs (not shown in the figure) are arranged between the upper end hoop 4 and the middle hoop 5 and between the middle hoop 5 and the lower end hoop 6, so that the overall stability can be greatly improved.

Preferably, the thicknesses of the upper end hoop 4, the middle hoop 5 and the lower end hoop 6 are all 4mm

. In a further embodiment, the thickness of the horseshoe-shaped half ring structure is 20mm and the height of the horseshoe-shaped half ring structure is 16 mm.

In a further embodiment, the distance between the horseshoe-shaped half ring structure and the lower edge of the lower end hoop 6 is 6 mm.

In a further embodiment, the arc of the horseshoe-shaped half-ring structure is 51.5 °.

In a further embodiment, the lower insulating cylinder 1 has an outer diameter of 910mm, an inner diameter of 880mm and a height of 297 mm.

In a further embodiment, the horseshoe-shaped half-ring structure is a carbon-carbon material connector 3.

The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a novel heat preservation section of thick bamboo structure down for single crystal growing furnace, the below position department of the lateral wall of heat preservation section of thick bamboo is provided with a plurality of exhaust openings down, its characterized in that, each exhaust opening department is provided with the connecting piece that connects exhaust opening both sides, the connecting piece sets up on the inside wall of heat preservation section of thick bamboo down, the connecting piece sets up to horseshoe-shaped semi-ring structure spare.

2. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 1, wherein two ends of the connecting piece are fixed at two sides of an exhaust opening of the lower heat-preserving cylinder through carbon-carbon bolts.

3. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 1, wherein the lower heat-preserving cylinder comprises a cylinder body, and an upper end hoop, a middle hoop and a lower end hoop which are arranged at upper, middle and lower positions of the cylinder body.

4. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 3, wherein the thicknesses of the upper end hoop, the middle hoop and the lower end hoop are all 4 mm.

5. The novel lower heat preservation cylinder structure for the single crystal furnace as claimed in claim 3, wherein longitudinal reinforcing ribs are arranged between the upper end hoop and the middle hoop and between the middle hoop and the lower end hoop.

6. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 1, wherein the thickness of the horseshoe-shaped half-ring structural member is 20mm, and the height of the horseshoe-shaped half-ring structural member is 16 mm.

7. The novel lower heat-preserving cylinder structure for the single crystal growing furnace as claimed in claim 1, wherein the distance between the horseshoe-shaped half-ring structural member and the lower edge of the lower end hoop of the lower heat-preserving cylinder is 6 mm.

8. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 1, wherein the arc degree of the horseshoe-shaped semi-ring structural member is 51.5 °.

9. The novel lower heat-preserving cylinder structure for the single crystal furnace as claimed in claim 1, wherein the lower heat-preserving cylinder has an outer diameter of 910mm, an inner diameter of 880mm and a height of 297 mm.

10. The novel lower heat preservation cylinder structure for the single crystal furnace as claimed in claim 1, wherein the horseshoe-shaped semi-ring structural member is a carbon-carbon material connector.