CN214278633U - Vacuum arm for photoetching machine - Google Patents
Vacuum arm for photoetching machine Download PDFInfo
- Publication number
- CN214278633U CN214278633U CN202120288441.1U CN202120288441U CN214278633U CN 214278633 U CN214278633 U CN 214278633U CN 202120288441 U CN202120288441 U CN 202120288441U CN 214278633 U CN214278633 U CN 214278633U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- arm body
- screw thread
- arm
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model discloses a vacuum arm for lithography machine, which comprises an arm body, vacuum chucks and a horizontal positioning pin group, wherein the arm body is of a cuboid structure, the surface of the arm body is provided with three thread through holes which are distributed in a triangular manner, a steel wire thread sleeve is embedded in the middle position of the arm body, the surface of the arm body is also provided with two thread blind holes which are distributed symmetrically, the left side surface of the arm body is provided with a vacuum inlet which is communicated with the thread blind hole on the left part, the left side surface of the arm body is also provided with a vacuum channel, the side surface of the arm body is also provided with two via holes which are respectively corresponding to the two thread blind holes, each thread blind hole is fixedly connected with one vacuum chuck in a threaded manner, the horizontal positioning pin group is matched and connected with the thread through holes, the vacuum arm is convenient to disassemble, the two vacuum chucks are more balanced when in work, and can simultaneously suck wafers, the operation is stable, compared with the original imported, the cost is low, the performance is good, and the domestic substitution can be realized.
Description
Technical Field
The utility model belongs to semiconductor production facility field specifically relates to a vacuum arm for lithography machine.
Background
The lithography machine is one of the core equipments for chip manufacturing, in the semiconductor manufacturing process, a vacuum arm component on the lithography machine is required to perform the picking and transferring actions of the wafer, the vacuum arm generally consists of an arm, two suckers and positioning pins on the arm, the prior vacuum arm has the design defect that the position of a vacuum inlet is right above a sucking disc and is directly communicated with the sucking discs, so that when the two sucking discs suck a wafer, the suction force of the two suckers is not balanced, the two suckers cannot act simultaneously, the operation is unstable, the suckers belong to consumable parts, the wafer is not easy to be replaced after being worn, the positioning pin needs to be adjusted repeatedly after the sucker is replaced, so that the arm contacts the wafer in a horizontal position, and because the sucking disc is too flat, it is very difficult and waste time to adjust to the best contact position with the wafer, and this vacuum arm is imported abroad, and the delivery period is long, has disconnected goods risk, and the price is expensive.
Therefore, a new vacuum arm is needed to absorb the wafer, so that the operation is more stable and the adjustment is convenient.
SUMMERY OF THE UTILITY MODEL
For overcoming the not enough of above-mentioned prior art, the utility model provides a vacuum arm for lithography machine through the design to its structure for two sucking discs can absorb the wafer simultaneously, and job stabilization, it is convenient to adjust, and it is convenient to change.
In order to realize the purpose, the utility model discloses a technical scheme is:
the utility model provides a vacuum arm for lithography machine, includes arm body, vacuum chuck, horizontal location round pin group, the arm body is the cuboid structure, and its surface is equipped with the three screw thread through-hole that is triangular distribution, two of them the screw thread through-hole is located the left part of arm body, and another screw thread through-hole is located the right part of arm body, the arm body intermediate position is inlayed and is had a steel wire swivel nut, the surface of arm body still is equipped with two screw thread blind holes of symmetric distribution, the left surface of arm body is equipped with a vacuum inlet, vacuum inlet link up with the screw thread blind hole of left part, the left surface of arm body still is equipped with a vacuum channel, the vacuum channel runs through the arm body along the axial, the side of arm body still is equipped with two conducting holes corresponding with two screw thread blind holes respectively, every conducting hole link up vacuum channel in proper order, The screw thread blind hole, every the equal screw thread fixedly connected with vacuum chuck of screw thread blind hole, horizontal locating pin group includes three horizontal locating pin, horizontal locating pin is the swizzle, every the equal screw-thread fit of screw thread through-hole is connected with a horizontal locating pin.
Preferably, the vacuum inlet, the vacuum channel and the end of the through hole are provided with internal threads with certain depths.
Preferably, the bottom ends of the three horizontal positioning pins are on the same horizontal plane.
The utility model has the advantages that:
1. the utility model discloses a horizontal positioning pin adopts the bikini design for the arm body adjusts the level more easily, and vacuum chuck and arm body threaded connection change more conveniently.
2. The utility model discloses a vacuum inlet sets up in the side of arm body, and two vacuum chuck switch on through vacuum channel, make two vacuum chuck at the during operation, and the vacuum is more balanced, can absorb the wafer simultaneously, and work is more stable.
3. The utility model discloses a steel wire swivel nut links to each other with lithography machine main part, and it is convenient to dismantle, and the replacement is easy, and vacuum chuck adopts the fixed mode of screw thread installation, and convenient and fast is changed in the installation, and is stable firm, and this vacuum arm, with original import compare, with low costs, high quality can realize the replacement of localization.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a cross-sectional view taken along line A-A of the present invention;
the reference symbols shown in the figures are: 1-arm body, 2-vacuum sucker, 3-horizontal positioning pin, 4-threaded through hole, 5-steel wire thread insert, 6-threaded blind hole, 7-vacuum inlet, 8-vacuum channel, 9-via hole and 10-internal thread.
Detailed Description
The following describes the present design in detail with reference to the accompanying drawings.
As shown in figures 1-2, a vacuum arm for lithography machine comprises an arm body 1, a vacuum chuck 2, and a horizontal dowel pin set, wherein the arm body 1 is a cuboid structure, three threaded through holes 4 distributed in a triangular shape are arranged on the surface of the arm body 1, two threaded through holes 4 are arranged on the left part of the arm body 1, the other threaded through hole 4 is arranged on the right part of the arm body 1, a steel wire thread sleeve 5 is embedded in the middle of the arm body 1, two threaded blind holes 6 distributed symmetrically are also arranged on the surface of the arm body 1, a vacuum inlet 7 is arranged on the left side surface of the arm body 1, the vacuum inlet 7 is communicated with the threaded blind hole 6 on the left part, a vacuum channel 8 is also arranged on the left side surface of the arm body 1, the vacuum channel 8 axially penetrates through the arm body 1, two through holes 9 corresponding to the two threaded blind holes 6 are also arranged on the side surface of the arm body 1, every conducting hole 9 link up vacuum channel 8, screw thread blind hole 6 in proper order, and every screw thread blind hole 6 and 2 screw thread fixed connection of vacuum chuck, horizontal locating pin group include three horizontal locating pin 3, and horizontal locating pin 3 is the swizzle, and the equal screw-thread fit of every screw thread through-hole 4 is connected with a horizontal locating pin 3.
The vacuum inlet 7 is connected with a vacuum pipeline connector through the internal thread 10, and the ends of the vacuum channel 8 and the via hole 9 are screwed and sealed by a pin shaft.
Wherein, the bottom end parts of the three horizontal positioning pins 3 are on the same horizontal plane.
Examples
The utility model discloses during the application, screw up in the screw thread blind hole 6 with vacuum chuck 2, vacuum inlet 7 passes through internal thread 10 and connects the vacuum pipeline joint, vacuum channel 8 all uses the round pin axle to screw up sealedly with the tip of conducting hole 9, imbed arm body 1's intermediate position with steel wire swivel nut 5, manipulator threaded connection through steel wire swivel nut 5 and lithography machine, twist into screw thread through-hole 4 with horizontal positioning pin 3 in, adjust the height of three horizontal positioning pin 3 and make arm body 1 level, arm body 1 can be with horizontal position contact wafer, vacuum pipeline forms the negative pressure, the vacuum inlet 7 that the negative pressure switches on through, vacuum channel 8, screw thread blind hole 6, until vacuum chuck 2, when making two vacuum chuck 2 contact wafers, produce absorbent effect to the wafer.
Claims (3)
1. The utility model provides a vacuum arm for lithography machine, its characterized in that, includes arm body, vacuum chuck, horizontal location round pin group, the arm body is the cuboid structure, and its surface is equipped with the three screw thread through-hole that is triangular distribution, wherein two the screw thread through-hole is located the left part of arm body, and another screw thread through-hole is located the right part of arm body, arm body intermediate position is inlayed and is had a steel wire swivel nut, the surface of arm body still is equipped with two screw thread blind holes of symmetric distribution, the left surface of arm body is equipped with a vacuum inlet, vacuum inlet link up with the screw thread blind hole of left part, the left surface of arm body still is equipped with a vacuum channel, vacuum channel runs through the arm body along the axial, the side of arm body still is equipped with two conducting holes corresponding with two screw thread blind holes respectively, every conducting hole link up vacuum channel in proper order, The screw thread blind hole, every the equal screw thread fixedly connected with vacuum chuck of screw thread blind hole, horizontal locating pin group includes three horizontal locating pin, horizontal locating pin is the swizzle, every the equal screw-thread fit of screw thread through-hole is connected with a horizontal locating pin.
2. A vacuum arm for lithography machine according to claim 1, wherein the vacuum inlet, the vacuum channel and the end of the through hole are provided with a female screw with a certain depth.
3. The vacuum arm as claimed in claim 1, wherein the bottom ends of the three horizontal positioning pins are located on the same horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120288441.1U CN214278633U (en) | 2021-02-02 | 2021-02-02 | Vacuum arm for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120288441.1U CN214278633U (en) | 2021-02-02 | 2021-02-02 | Vacuum arm for photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214278633U true CN214278633U (en) | 2021-09-24 |
Family
ID=77770669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120288441.1U Active CN214278633U (en) | 2021-02-02 | 2021-02-02 | Vacuum arm for photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214278633U (en) |
-
2021
- 2021-02-02 CN CN202120288441.1U patent/CN214278633U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104400016A (en) | Automatic material clamping mechanical gripper for vertical lathe | |
| CN214278633U (en) | Vacuum arm for photoetching machine | |
| CN202963353U (en) | Sucking disc device for picking-up device | |
| CN201511139U (en) | Adjustable thimble with elastic end surface | |
| CN202684444U (en) | Pipe locating device and welding machine applying same | |
| CN204277506U (en) | The flat clamp for machining of a kind of roller carrier shaft groove | |
| CN203656116U (en) | Gear pair mechanism for eliminating microgap in bi-direction adjustment mode | |
| CN203636140U (en) | High-precision rotating back-tapering mechanism for orifice electrosparking | |
| CN204430882U (en) | Small-sized business car executor lid milling boring jig | |
| CN201313183Y (en) | Adjustable large-diameter hole boring tool | |
| CN202239984U (en) | Sleeving device for gear grinding shaft of worm grinding wheel gear grinding machine | |
| CN203611032U (en) | Clamp at middle end of lathe welding end root valve body | |
| CN203650241U (en) | Universal grinding tool for magnetic shoes | |
| CN202513770U (en) | Rotor commutator pressing tooling | |
| CN204449525U (en) | A kind of tap holder with screw tap protection | |
| CN204253577U (en) | A kind of central shaft | |
| CN204771218U (en) | Automatic welding machine graduation platform | |
| CN205254490U (en) | Positive mechanism is led in automation of using on bushing press | |
| TWI571538B (en) | Electroplating fixture conductive device | |
| CN103567694A (en) | Pipe fitting positioning device and welding machine applying same | |
| CN208772997U (en) | Milling brasses oil line tooling | |
| CN210936751U (en) | Connector bending and stamping die | |
| CN212266835U (en) | Paper cup mould assembly body | |
| CN205496638U (en) | Round pin axle drilling mould | |
| CN202861799U (en) | Joint drilling locating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |