CN214271109U - Vertical crystal annealing furnace - Google Patents
Vertical crystal annealing furnace Download PDFInfo
- Publication number
- CN214271109U CN214271109U CN202120178316.5U CN202120178316U CN214271109U CN 214271109 U CN214271109 U CN 214271109U CN 202120178316 U CN202120178316 U CN 202120178316U CN 214271109 U CN214271109 U CN 214271109U
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- flange
- cooling flange
- water
- stainless steel
- room
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- 238000000137 annealing Methods 0.000 title claims abstract description 51
- 239000013078 crystal Substances 0.000 title claims abstract description 20
- 238000001816 cooling Methods 0.000 claims abstract description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000010453 quartz Substances 0.000 claims abstract description 38
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 22
- 239000010935 stainless steel Substances 0.000 claims abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 19
- 229920001973 fluoroelastomer Polymers 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 239000002775 capsule Substances 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 229920002449 FKM Polymers 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- ZRHANBBTXQZFSP-UHFFFAOYSA-M potassium;4-amino-3,5,6-trichloropyridine-2-carboxylate Chemical compound [K+].NC1=C(Cl)C(Cl)=NC(C([O-])=O)=C1Cl ZRHANBBTXQZFSP-UHFFFAOYSA-M 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Furnace Details (AREA)
Abstract
The utility model relates to a crystal production technical field discloses a vertical crystal annealing stove very much. The device comprises a PLC control system and a quartz tube annealing chamber, wherein a stainless steel transition chamber is connected above the quartz tube annealing chamber, a sealing cover matched with the stainless steel transition chamber is provided with a vacuumizing tube, the vacuumizing tube is connected with a vacuum pump, an upper water cooling flange is connected at the lower end of the stainless steel transition chamber, a lower water cooling flange is sleeved at the upper end of the quartz tube annealing chamber, the upper end of the quartz tube annealing chamber penetrates through the lower water cooling flange and then is bent outwards to form a flange, the flange is positioned between the upper water cooling flange and the lower water cooling flange, an annular groove is respectively formed in the lower end surface of the upper water cooling flange and the upper end surface of the lower water cooling flange, a fluororubber ring is arranged in the annular groove, and the thickness of. The utility model discloses can prevent that the quartz capsule annealing room from exploding and splitting to the cooling is fast, the energy can be saved.
Description
Technical Field
The utility model relates to a crystal production technical field, in particular to vertical crystal annealing furnace.
Background
The crystal material is widely applied to the fields of semiconductors, aviation, lasers, medical instruments and the like, and is vigilant about stress generated in the production process, annealing treatment needs to be carried out on the crystal for stress relief, annealing of the crystal can not only relieve stress, but also has the function of activating donor and acceptor impurities, namely, impurity atoms in gap positions are annealed to enable the impurity atoms to enter the substitution positions.
The existing annealing furnace is generally a quartz tube annealing furnace, and comprises a quartz tube annealing chamber and a transition chamber, wherein the transition chamber is matched with a sealing cover, and the annealing furnace has the following defects: 1, if the quartz tube is hard connected with the stainless steel transition chamber, the quartz tube is easy to crack; 2, cooling is needed after heating, and at present, natural cooling is relied on, so that the cooling speed is slow, and the production efficiency is low; 3 sealed lid direct receipt comes from the heat in the quartz capsule, leads to the sealing strip temperature very high, consequently causes operating personnel to scald easily, has the potential safety hazard, still can influence the heating effect after the sealed lid absorbs the heat simultaneously, influences rate of heating, causes the wasting of resources.
Disclosure of Invention
The utility model provides a safe and efficient vertical crystal annealing furnace for making up the defects of the prior art.
The utility model discloses a realize through following technical scheme:
the utility model provides a vertical crystal annealing furnace, includes PLC control system and quartz capsule annealing room, the stainless steel transition room is connected to quartz capsule annealing room top, the supporting sealed lid of stainless steel transition room, stainless steel transition room is equipped with the evacuation pipe, the vacuum pump is connected to the evacuation pipe, characterized by, water cooling flange is connected to stainless steel transition room lower extreme, water cooling flange has down on the quartz capsule annealing room pot head, the quartz capsule annealing room upper end is passed and is outwards bent out the flange after the water cooling flange down, the flange is located between water cooling flange and the lower water cooling flange, terminal surface and lower water cooling flange up end are opened respectively under the water cooling flange has an annular groove, are equipped with the fluororubber circle in the annular groove, the thickness of fluororubber circle is greater than the degree of depth of annular groove.
The upper water-cooling flange and the lower water-cooling flange are fixedly connected through bolts and nuts.
The inner surface of the sealing cover is provided with a reflecting screen.
The reflecting screen is made of mirror surface stainless steel.
The vacuum pump is characterized in that the vacuumizing pipe is connected with an inflation pipe, the inflation pipe is provided with a float flowmeter, the inflation pipe is connected with a gas tank filled with stable gas, and the vacuum pump and the float flowmeter are respectively and electrically connected with the PLC control system.
The property stabilizing gas is nitrogen or inert gas.
The utility model has the advantages that:
the utility model is provided with the upper water-cooling flange and the lower water-cooling flange, a flange of the quartz tube annealing chamber is arranged between the upper water-cooling flange and the lower water-cooling flange, the upper water-cooling flange and the lower water-cooling flange are respectively provided with the exposed fluororubber ring, the fluororubber ring is contacted with the flange of the quartz tube annealing chamber, and the two stainless steel flanges are not directly contacted with the quartz tube annealing chamber, thus avoiding the direct contact of the quartz tube and the stainless steel, avoiding the explosion of the quartz tube, eliminating the potential safety hazard and increasing the safety factor; 2, the reflecting screen is made of mirror stainless steel, so that heat can be isolated and reflected, on one hand, the sealing cover can be prevented from being in a high-temperature state, on the other hand, the heat can be reflected back to the quartz tube annealing chamber, the temperature in the quartz tube annealing chamber is more uniform, and the heat is fully utilized; 3 the gas tube and the gas tank connected with each other can play a role in cooling: the gases with stable properties in the gas tank are nitrogen or inert gases which are cool, so that the gases can not only pressurize the quartz tube annealing chamber, but also cool the quartz tube annealing chamber.
Drawings
The invention will be further described with reference to the accompanying drawings:
FIG. 1 is a perspective, partially cut-away, schematic structural view of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1.
In the figure, 1 outer shell, 2 quartz tube annealing chamber, 21 flange, 3 heat preservation material, 4 lower water cooling flanges, 5 upper water cooling flanges, 6 fluororubber ring, 7 stainless steel transition chamber, 8 evacuation tube, 9 vacuum pump, 10 gas-filled tube, 11 float flowmeter, 12 gas tank, 13 sealing cover, 14 reflecting screen, 15 connecting rod, 16 annular groove.
Detailed Description
The attached drawings are specific embodiments of the invention. As shown in figures 1 to 2, the vertical crystal annealing furnace comprises a shell 1, a quartz tube annealing chamber 2 is arranged in the shell 1, the outer part and the lower end of the quartz tube annealing chamber 2 are wrapped with heat preservation materials 3, the upper end of the quartz tube annealing chamber 2 is bent outwards to form a flange 21, a lower water-cooling flange 4 is sleeved on the quartz tube annealing chamber 2, the lower water-cooling flange 4 is positioned below the flange 21, a stainless steel transition chamber 7 is arranged above the quartz tube annealing chamber 2, the lower end of the stainless steel transition chamber 7 is provided with an upper water-cooling flange 5, the lower end surface of the upper water-cooling flange 5 and the upper end surface of the lower water-cooling flange 4 are respectively provided with a ring-shaped annular groove 16, a high-temperature resistant rubber ring such as a fluororubber ring 6 is arranged in the annular groove 16, the fluororubber ring 6 has a thickness larger than the depth of the annular groove 16, namely, the fluororubber ring 6 is inserted into the annular groove 16 and then protrudes out of the upper water-cooling flange 5 and the lower water-cooling flange 4, therefore, when the upper water-cooling flange 5 and the lower water-cooling flange 4 clamp the flange 21 in the middle, the upper water-cooling flange 5 and the lower water-cooling flange 4 are not contacted with the flange 21, and the quartz tube annealing chamber 2 is placed to be burst; the upper water-cooling flange 5 and the lower water-cooling flange 4 are fixedly connected through bolts and nuts. The cross-section of the viton ring 6 may be round or flat, as long as it can leak out of the annular groove 16.
The stainless steel transition chamber 7 is matched with a sealing cover 13, the inner surface of the sealing cover 13 is connected with a reflecting screen 14 through at least three connecting rods 15, the reflecting screen 14 can be made of quartz glass, but the quartz glass can only insulate heat and can not reflect heat, so that 316L stainless steel mirror glass is preferably used, not only can insulate heat, but also can reflect heat, and the temperature in the quartz tube annealing chamber 2 is more uniform.
The transition chamber is connected with a vacuumizing tube 8, and the vacuumizing tube 8 is connected with a vacuum pump 9; an inflation tube 10 is connected to the vacuum tube 8, a float flowmeter 11 is arranged on the inflation tube 10, and then the inflation tube 10 is connected with a gas tank 12 filled with stable gas, wherein the stable gas can be nitrogen, or inert gases such as helium, argon and the like.
The using process is as follows: putting a crystal to be annealed into the quartz tube annealing chamber 2, covering the sealing cover 13, then starting the PLC control system, starting the vacuum pump 9 to vacuumize, simultaneously starting to heat the quartz tube annealing chamber 2, and introducing water to cool the upper cold water flange and the lower cold water flange so as to prevent the fluororubber ring 6 from being baked and affecting the sealing property; after annealing is finished, the vacuum pump 9 stops working, the float flowmeter 11 is opened, nitrogen or helium and the like are introduced into the quartz tube annealing chamber 2, the sealing cover 13 can be opened after the temperature is reduced, and annealed crystals are taken out.
Other technical features than those described in the specification are known to those skilled in the art.
Claims (6)
1. The utility model provides a vertical crystal annealing furnace, includes PLC control system and quartz capsule annealing room (2), stainless steel transition room (7) is connected to quartz capsule annealing room (2) top, the supporting sealed lid (13) of stainless steel transition room (7), stainless steel transition room (7) are equipped with evacuation pipe (8), evacuation pipe (8) are connected vacuum pump (9), characterized by, water-cooling flange (5) is connected to stainless steel transition room (7) lower extreme, quartz capsule annealing room (2) pot head has down water-cooling flange (4), quartz capsule annealing room (2) upper end is passed down water-cooling flange (4) and is outwards bent out flange (21), flange (21) are located between water-cooling flange (5) and lower water-cooling flange (4), a ring channel (16) have been opened respectively to terminal surface and water-cooling flange (4) up end down under last water-cooling flange (5), a fluororubber ring (6) is arranged in the annular groove (16), and the thickness of the fluororubber ring (6) is larger than the depth of the annular groove (16).
2. The vertical crystal annealing furnace according to claim 1, wherein the upper water-cooled flange (5) and the lower water-cooled flange (4) are fixedly connected by bolts and nuts.
3. The vertical crystal annealing furnace according to claim 1, wherein the inner surface of the sealing cover (13) is provided with a reflecting screen (14).
4. The vertical crystal annealing furnace according to claim 3, wherein said reflecting screen (14) is a mirror stainless steel.
5. The vertical crystal annealing furnace according to claim 1, wherein the vacuum tube (8) is connected with an air charging tube (10), the air charging tube (10) is provided with a float flowmeter (11), the air charging tube (10) is connected with a gas tank (12) filled with stable gas, and the vacuum pump (9) and the float flowmeter (11) are respectively and electrically connected with a PLC control system.
6. The vertical crystal annealing furnace according to claim 5, wherein the property stabilizing gas is nitrogen or an inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120178316.5U CN214271109U (en) | 2021-01-22 | 2021-01-22 | Vertical crystal annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120178316.5U CN214271109U (en) | 2021-01-22 | 2021-01-22 | Vertical crystal annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214271109U true CN214271109U (en) | 2021-09-24 |
Family
ID=77764209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120178316.5U Active CN214271109U (en) | 2021-01-22 | 2021-01-22 | Vertical crystal annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214271109U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113957540A (en) * | 2021-11-01 | 2022-01-21 | 中国电子科技集团公司第四十八研究所 | Heat treatment device suitable for mercury cadmium telluride material |
-
2021
- 2021-01-22 CN CN202120178316.5U patent/CN214271109U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113957540A (en) * | 2021-11-01 | 2022-01-21 | 中国电子科技集团公司第四十八研究所 | Heat treatment device suitable for mercury cadmium telluride material |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 10-101, Jinan Changqing International Enterprise Port, No. 2222, South Section of Yuqing Road, Changqing District, Jinan City, Shandong Province, 250000 Patentee after: Shandong Jingsheng Electronic Technology Co.,Ltd. Address before: Room 1120, 49 Lishan Road, Lixia District, Jinan City, Shandong Province, 250013 Patentee before: Shandong Jingsheng Electronic Technology Co.,Ltd. |
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| CP03 | Change of name, title or address |