CN214271040U - Two-dimensional material chemical deposition cooling system - Google Patents
Two-dimensional material chemical deposition cooling system Download PDFInfo
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- CN214271040U CN214271040U CN202022809643.4U CN202022809643U CN214271040U CN 214271040 U CN214271040 U CN 214271040U CN 202022809643 U CN202022809643 U CN 202022809643U CN 214271040 U CN214271040 U CN 214271040U
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Abstract
The utility model relates to a two-dimensional material chemical deposition cooling system, it includes refrigerator, heating module fixed plate, cooling disc hole, heating module, heat sensor, first tee bend, second tee bend, cooling medium output person in charge, cooling medium input person in charge, cooling coil, cooling medium input branch pipe and cooling medium output branch pipe. The utility model discloses can effectively cool off heating module fixed plate, avoid because heating module fixed plate high temperature leads to mechanical structure to take place to warp, guaranteed two-dimensional material chemical deposition process's normal operating.
Description
Technical Field
The utility model belongs to the technical field of two-dimensional material chemical deposition technique and specifically relates to a two-dimensional material chemical deposition cooling system.
Background
As the temperature of the CVD furnace body is too high in the vapor deposition process, the temperature of a heating module fixing plate which is vertically arranged is too high, so that the mechanical structure is deformed, the mechanical parts cannot normally operate, and the growth of a CVD system is influenced finally.
Disclosure of Invention
The utility model aims at overcoming the not enough of existence among the prior art, provide a simple structure and can carry out effective refrigerated two-dimensional material chemical deposition cooling system to heating module fixed plate.
According to the technical scheme provided by the utility model, two-dimensional material chemical deposition cooling system, including refrigerator, heating module fixed plate, cooling coil hole, heating module, heat sensor, first tee bend, second tee bend, cooling medium output main pipe, cooling medium input main pipe, cooling coil, cooling medium input branch pipe and cooling medium output branch pipe;
the heating module fixing plate is vertically arranged, a refrigerating machine is arranged on the outer side of the heating module fixing plate, a cooling medium is arranged in the refrigerating machine, a heating module is fixed on the front side of the heating module fixing plate, a heat sensor is mounted on the heating module fixing plate and connected with the refrigerating machine, a cooling coil is arranged on the back side of the heating module fixing plate, and a cooling coil hole is formed in the heating module fixing plate;
the outlet of the refrigerator is connected with the inlet of the cooling medium output main pipe, the outlet of the cooling medium output main pipe is connected with the inlet of a first tee joint, the first outlet of the first tee joint is connected with the inlet of the cooling coil pipe, and the outlet of the cooling coil pipe is connected with the first inlet of a second tee joint;
the second outlet of the first tee joint is connected with the inlet of the cooling medium input branch pipe, the outlet of the cooling medium input branch pipe is connected with the inlet of the cooling disc hole, the outlet of the cooling disc hole is connected with the inlet of the cooling medium output branch pipe, and the outlet of the cooling medium output branch pipe is connected with the second inlet of the second tee joint;
the outlet of the second tee joint is connected with the inlet of the cooling medium input main pipe, and the outlet of the cooling medium input main pipe is connected with the inlet of the refrigerating machine.
Preferably, two or more heating modules are fixed to the front surface of the heating module fixing plate.
Preferably, the cooling medium is a gaseous cooling medium or a liquid cooling medium.
Preferably, the inlet of the cooling disc hole is arranged above, and the outlet of the cooling disc hole is arranged below.
Preferably, the inlet of the cooling coil is arranged above and the outlet thereof is arranged below.
The utility model discloses can effectively cool off heating module fixed plate, avoid because heating module fixed plate high temperature leads to mechanical structure to take place to warp, guaranteed two-dimensional material chemical deposition process's normal operating. The utility model discloses with low costs, simple structure, simple manufacture, be convenient for processing, the cooling is fast, the installation is permanent with dismantlement modularization and life-span.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The present invention will be further described with reference to the following specific embodiments.
A two-dimensional material chemical deposition cooling system comprises a refrigerator 1, a heating module fixing plate 2, a cooling disc hole 21, a heating module 3, a heat sensor 4, a first tee joint 5, a second tee joint 6, a cooling medium output main pipe 71, a cooling medium input main pipe 72, a cooling coil 73, a cooling medium input branch pipe 74 and a cooling medium output branch pipe 75;
the heating module fixing plate 2 is vertically arranged, a refrigerator 1 is arranged on the outer side of the heating module fixing plate 2, a cooling medium is arranged in the refrigerator 1, a heating module 3 is fixed on the front side of the heating module fixing plate 2, a heat sensor 4 is installed on the heating module fixing plate 2, the heat sensor 4 is connected with the refrigerator 1, a cooling coil 73 is arranged on the back side of the heating module fixing plate 2, and a cooling coil hole 21 is arranged in the heating module fixing plate 2;
the outlet of the refrigerator 1 is connected with the inlet of a cooling medium output main pipe 71, the outlet of the cooling medium output main pipe 71 is connected with the inlet of a first tee joint 5, the first outlet of the first tee joint 5 is connected with the inlet of a cooling coil 73, and the outlet of the cooling coil 73 is connected with the first inlet of a second tee joint 6;
a second outlet of the first tee joint 5 is connected with an inlet of a cooling medium input branch pipe 74, an outlet of the cooling medium input branch pipe 74 is connected with an inlet of a cooling disc hole 21, an outlet of the cooling disc hole 21 is connected with an inlet of a cooling medium output branch pipe 75, and an outlet of the cooling medium output branch pipe 75 is connected with a second inlet of the second tee joint 6;
the outlet of the second tee joint 6 is connected with the inlet of the cooling medium input main pipe 72, and the outlet of the cooling medium input main pipe 72 is connected with the inlet of the refrigerator 1.
Two or more heating modules 3 are fixed to the front surface of the heating module fixing plate 2.
The cooling medium is gaseous cooling medium or liquid cooling medium.
The inlet of the cooling plate hole 21 is arranged above and the outlet thereof is arranged below.
The inlet of the cooling coil 73 is arranged above and its outlet below.
The utility model discloses the during operation, when heat sensor 4 detected heating module fixed plate 2's temperature and exceeded the setting value, 1 starts of refrigerator, with coolant output and flow through the coolant output be responsible for 71 with first tee bend 5 after enter into cooling coil 73 and cooling pan hole 21 in, cool off heating module fixed plate 2, coolant flows through cooling coil 73 and cooling pan hole 21 after the temperature rise, be responsible for 72 input refrigerator 1 through second tee bend 6 and coolant input, export again after cooling through refrigerator 1.
The utility model discloses at the during operation, preferably set up the fan at the rear of heating module fixed plate 2, the fan can not only blow away the steam around the heating module fixed plate 2, can also avoid the coolant output to be responsible for 71, the coolant input is responsible for 72, cooling coil 73, coolant input branch pipe 74 and coolant output branch pipe 75 production condensation bead.
Claims (5)
1. A two-dimensional material chemical deposition cooling system comprises a refrigerating machine (1), a heating module fixing plate (2), a cooling disc hole (21), a heating module (3), a heat sensor (4), a first tee joint (5), a second tee joint (6), a cooling medium output main pipe (71), a cooling medium input main pipe (72), a cooling coil pipe (73), a cooling medium input branch pipe (74) and a cooling medium output branch pipe (75);
the method is characterized in that: the heating module fixing plate (2) is vertically arranged, a refrigerating machine (1) is arranged on the outer side of the heating module fixing plate (2), a cooling medium is arranged in the refrigerating machine (1), a heating module (3) is fixed on the front side of the heating module fixing plate (2), a heat sensor (4) is installed on the heating module fixing plate (2), the heat sensor (4) is connected with the refrigerating machine (1), a cooling coil (73) is arranged on the back side of the heating module fixing plate (2), and a cooling disc hole (21) is formed in the heating module fixing plate (2);
the outlet of the refrigerator (1) is connected with the inlet of the cooling medium output main pipe (71), the outlet of the cooling medium output main pipe (71) is connected with the inlet of a first tee joint (5), the first outlet of the first tee joint (5) is connected with the inlet of a cooling coil (73), and the outlet of the cooling coil (73) is connected with the first inlet of a second tee joint (6);
a second outlet of the first tee joint (5) is connected with an inlet of a cooling medium input branch pipe (74), an outlet of the cooling medium input branch pipe (74) is connected with an inlet of a cooling disc hole (21), an outlet of the cooling disc hole (21) is connected with an inlet of a cooling medium output branch pipe (75), and an outlet of the cooling medium output branch pipe (75) is connected with a second inlet of the second tee joint (6);
the outlet of the second tee joint (6) is connected with the inlet of the cooling medium input main pipe (72), and the outlet of the cooling medium input main pipe (72) is connected with the inlet of the refrigerator (1).
2. The two-dimensional material chemical deposition cooling system of claim 1, wherein: two or more heating modules (3) are fixed on the front surface of the heating module fixing plate (2).
3. The two-dimensional material chemical deposition cooling system of claim 1, wherein: the cooling medium is gaseous cooling medium or liquid cooling medium.
4. The two-dimensional material chemical deposition cooling system of claim 1, wherein: the inlet of the cooling disc hole (21) is arranged above, and the outlet of the cooling disc hole is arranged below.
5. The two-dimensional material chemical deposition cooling system of claim 1, wherein: the inlet of the cooling coil (73) is arranged above and the outlet thereof is arranged below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022809643.4U CN214271040U (en) | 2020-11-27 | 2020-11-27 | Two-dimensional material chemical deposition cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022809643.4U CN214271040U (en) | 2020-11-27 | 2020-11-27 | Two-dimensional material chemical deposition cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214271040U true CN214271040U (en) | 2021-09-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202022809643.4U Active CN214271040U (en) | 2020-11-27 | 2020-11-27 | Two-dimensional material chemical deposition cooling system |
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| CN (1) | CN214271040U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112481605A (en) * | 2020-11-27 | 2021-03-12 | 无锡费曼科技有限公司 | Two-dimensional material chemical deposition cooling system |
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2020
- 2020-11-27 CN CN202022809643.4U patent/CN214271040U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112481605A (en) * | 2020-11-27 | 2021-03-12 | 无锡费曼科技有限公司 | Two-dimensional material chemical deposition cooling system |
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