CN214252008U - Automatic adjusting device for sample position of terahertz three-dimensional tomography system - Google Patents
Automatic adjusting device for sample position of terahertz three-dimensional tomography system Download PDFInfo
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- CN214252008U CN214252008U CN202022935644.3U CN202022935644U CN214252008U CN 214252008 U CN214252008 U CN 214252008U CN 202022935644 U CN202022935644 U CN 202022935644U CN 214252008 U CN214252008 U CN 214252008U
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Abstract
The utility model discloses a terahertz three-dimensional tomography system sample position automatic regulating device, which comprises an emission light path unit, a detection light path unit, a visible laser range finder and a lifting translation platform; the transmission light path unit fixed end and the detection light path unit fixed end are rotatably connected to the rotating shaft, the visible laser range finder is fixed on an angle bisection line of an included angle formed by an optical axis of the transmission light path unit and an optical axis of the detection light path unit, laser emitted by the visible laser range finder is on the same plane with the optical axis of the transmission light path unit and the optical axis of the detection light path unit, a sample is fixed on the upper surface of the lifting translation table, the lifting translation table is moved left and right or back and forth, laser spots emitted by the visible laser range finder fall on the surface of a sample to be detected, the visible laser range finder can detect the distance from the visible laser range finder to the upper surface of the sample, the lifting translation table is adjusted based on the distance detected by the visible laser range finder, the sample is placed at an optimal sample placement point, and imaging with the maximum signal to noise ratio is realized.
Description
The technical field is as follows:
the utility model belongs to terahertz time domain spectroscopy system field now, concretely relates to terahertz three-dimensional tomography system sample position automatic regulating apparatus now.
Background art:
the terahertz time-domain spectral imaging measurement technology is an emerging hot research field in recent decades, typical terahertz waves refer to electromagnetic waves with the frequency of 0.1-10THz (corresponding to the wavelength of 30 μm-3mm), a section of electromagnetic spectrum between microwaves and infrared rays, and due to weak acting force (hydrogen bonds and van der Waals force) between/in nonpolar macromolecules, skeleton vibration, dipole rotation and the like, the terahertz time-domain spectral imaging measurement technology and the terahertz three-dimensional tomography technology are just in the THz spectrum range, and terahertz pulse signals have good time resolution, so that the terahertz time-domain spectral imaging technology and the terahertz three-dimensional tomography technology are rapidly applied in multiple fields in recent years. Based on the technical advantages of the terahertz time-domain spectroscopy technology, the rapid terahertz time-domain spectroscopy detection technology can rapidly measure the spectral characteristic information and the substance penetration information of the substance to be detected, has wide application in the fields of property research of semiconductor materials and over-temperature superconducting materials, tomography imaging technology, genetic inspection, chemical and biological inspection, broadband communication and the like, and is an effective measurement means in the aspects of substance thickness detection, substance component analysis, substance layering information measurement, terahertz three-dimensional tomography imaging and the like.
The terahertz time-domain spectroscopy system based on the photoconductive antenna is the most effective terahertz spectral imaging product at present. The basic principle is as follows: the optical fiber femtosecond laser device emits two beams of femtosecond laser, one beam is used as pump light and is transmitted to a photoconductive emission antenna through an optical fiber, broadband terahertz waves are generated under the action of bias voltage, and the terahertz waves carry three-dimensional chromatographic signals of a test sample in a reflection mode and enter a terahertz detection antenna; the detection light passes through the rapid optical delay line, and the terahertz spectrum information carrying the sample information is subjected to three-dimensional tomography on the sample by the spectrum analysis technology.
The output spectrum frequency of the terahertz time-domain spectroscopy system is 0.1-4THz, the output spectrum is located in a wave band which can not be directly observed by human eyes, the beam waist position of terahertz waves has the highest imaging signal to noise ratio in the process of carrying out reflection imaging on a sample to be tested, and because the position of a focused light spot of the terahertz waves can not be visually observed, the spatial position of a substance to be tested needs to be manually debugged every time the position of the sample is changed in the process of imaging an irregular sample, so that a large amount of manpower and material resources are wasted, and the existence of accidental errors in the testing process is increased.
The utility model has the following contents:
the utility model aims to overcome the shortcoming that prior art exists, seek to design terahertz three-dimensional tomography system sample position automatic regulating apparatus now, it utilizes the defect that terahertz facula can not effectively focus on the sample surface when the irregular object is measured to the visible light instruction terahertz time domain spectroscopy system among the laser range finder, can realize the device of the object automatic regulation height that awaits measuring through automatic control system through this set system, the device carries out real-time regulation to the position of the sample that awaits measuring on line through laser range finder's real-time position information feedback, guarantee terahertz three-dimensional tomography system's SNR, realize the formation of image at the optimization.
In order to achieve the purpose, the utility model relates to a terahertz three-dimensional tomography system sample position automatic regulating apparatus, which comprises an emission light path unit, a detection light path unit, a visible laser range finder and a lifting translation platform; the fixed end of the emission light path unit and the fixed end of the detection light path unit are both rotationally connected on a rotating shaft, the visible laser range finder is fixed on an angle bisection line of an included angle formed by an optical axis of the emission light path unit and an optical axis of the detection light path unit, laser emitted by the visible laser range finder, the optical axis of the emission light path unit and the optical axis of the detection light path unit are on the same plane (called as a plane A), the laser emitted by the visible laser range finder, the optical axis of the emission light path unit and the optical axis of the detection light path unit are intersected at one point, the intersection point is an optimal sample placement point, the upper surface of the lifting translation table is perpendicular to the plane, meanwhile, laser emitted by the visible laser range finder is also perpendicular to the upper surface of the lifting translation table, a sample is fixed on the upper surface of the lifting translation table, the lifting translation table is moved left and right or back and forth, so that the laser emitted by the visible laser range finder falls on the surface of the sample to be detected, and the visible laser range finder can detect the distance from the upper surface of the sample, the lifting translation table is adjusted based on the distance detected by the visible laser range finder, so that the sample is placed at the optimal sample placement point, and the imaging of the maximum signal-to-noise ratio is realized.
Specifically, the utility model relates to a terahertz is three-dimensional tomography system sample position automatic regulating apparatus now still includes real-time feedback system, and real-time feedback system is connected with visible light laser range finder, lift translation platform respectively.
The utility model relates to a terahertz is three-dimensional tomography system sample position automatic regulating apparatus now, still include the circular arc scale, the circular arc scale is on a parallel with the plane sets up, and the circular arc scale centre of a circle is fixed in the pivot.
Preferably, the scales on the circular arc scale are symmetrically arranged, the scales are gradually increased from 0 to two sides along the symmetrical axis of the circular arc scale, and the emission light path unit and the detection light path unit are symmetrically arranged along the symmetrical axis of the circular arc scale.
Furthermore, a screw rod is fixedly arranged along the angular bisector, one end of the screw rod is rotationally connected with the stepping motor, a sliding block is in threaded connection with the screw rod, one end of a connecting rod of the emission light path unit is rotationally connected with the moving end of the emission light path unit, one end of a connecting rod of the detection light path unit is rotationally connected with the moving end of the detection light path unit, and the other end of the connecting rod of the emission light path unit and the other end of the connecting rod of the detection light path unit are hinged on the sliding block to form a parallelogram.
The terahertz emission antenna, the first collimating lens and the first focusing lens are integrated in a lens cone, the lens cone formed by the emission light path unit is fixed on the rotation rod of the emission light path unit, the fixed end of the rotation rod of the emission light path unit is rotatably connected with a rotating shaft, a connecting rod of the emission light path unit is rotatably connected with the movable end of the rotation rod of the emission light path unit, the movable end of the rotation rod of the emission light path unit is in a pointer shape, the rotation rod of the emission light path unit is arranged close to an arc scale and can directly indicate the scale on the arc scale to obtain the size of an included angle between the emission light path unit and the angle bisector, and the detection light path unit comprises a second collimating lens, a terahertz detection antenna and a detection light path unit rotation rod, second focusing lens, second collimating lens and terahertz detection antenna integration are in a lens cone, the integrated lens cone of detection light path unit is fixed on detection light path unit dwang, detection light path unit dwang stiff end rotates with the pivot to be connected, it connects and moves the end at detection light path unit dwang to detect light path unit connecting rod rotation, it is the pointer form to detect light path unit dwang removal end, it is close to the setting of circular arc scale to detect light path unit dwang, can the scale on the direct indication circular arc scale, the contained angle size between detection light path unit and the angular bisector is obtained.
Preferably, the visible laser range finder is fixed on the screw rod between the stepping motor and the slide block in order not to cause interference to other structures.
Specifically, the visible laser range finder is fixed on the upper portion of the adjusting frame through the two-axis adjusting frame, the adjusting frame is fixed on the screw rod, the two-axis adjusting frame is used for adjusting pitching and deflection, and the adjusting frame is an existing lifting rod.
The laser range finder is an instrument for accurately measuring the distance of a target to be measured by utilizing the time delay of pulse laser, the visible laser range finder not only has the advantages of accurate measurement distance, small size of a focusing light spot, high monochromaticity and the like, but also has the advantages that high brightness can be easily observed by human eyes, the position of the focusing light spot of a terahertz signal can be effectively indicated through the adjustment of the device, the automatic adjustment of the placement position of the sample to be measured can be effectively realized by combining the angle information of the terahertz reflection signal and the ranging information of the laser range finder, finally, the imaging position of the sample to be measured is adjusted to the light spot focusing position of a terahertz time-domain spectroscopy system, and the system can image the sample with high signal to noise ratio.
Compared with the prior art, the utility model following beneficial effect has:
1. the fixed ends of the emission light path unit and the detection light path unit are fixed, so that the focal positions of the emission light path and the detection light path are ensured to be unchanged, a theoretical basis is provided for distance measurement, the automatic adjustment of the position of a sample is realized, an operator can conveniently test the sample, the probability of random errors of test data caused by improper manual operation is reduced, and the test accuracy is improved;
2. firstly, a four-linkage structure comprising an emission light path unit, a detection light path unit, an emission light path unit connecting rod and a detection light path unit connecting rod is constructed, and axial symmetry adjustment of the emission light path unit and the detection light path unit is realized under the drive of a stepping motor
Description of the drawings:
fig. 1 is the utility model relates to a terahertz is three-dimensional tomography system sample position automatic regulating apparatus stereogram now.
Fig. 2 is a schematic structural diagram (including a real-time feedback system) of an automatic adjusting device for the sample position of the terahertz three-dimensional tomography system according to the present invention.
Fig. 3 is the utility model relates to a terahertz is three-dimensional tomography system sample position automatic regulating apparatus plan view now.
The specific implementation mode is as follows:
the present invention will be further described with reference to the following specific embodiments and accompanying drawings.
Example 1:
the automatic adjusting device for the sample position of the terahertz three-dimensional tomography system comprises an emission light path unit 2, a detection light path unit 3, a visible laser range finder 8 and a lifting translation table 9; the fixed end of the emission light path unit 2 and the fixed end of the detection light path unit 3 are rotatably connected on a rotating shaft 13, the visible laser range finder 8 is fixed on an angle bisection line of an included angle formed by the optical axis of the emission light path unit 2 and the optical axis of the detection light path unit 3, and the laser emitted by the visible laser range finder 8, the optical axis of the emission light path unit 2 and the optical axis of the detection light path unit 3 are on the same plane (called plane A), namely the laser emitted by the visible laser range finder 8, the optical axis of the emission light path unit 2 and the optical axis of the detection light path unit 3 are intersected at one point, the intersection point is an optimal placement point of a sample, the upper surface of the lifting translation table 9 is vertical to the plane (plane A), the laser emitted by the visible laser range finder 8 is also vertical to the upper surface of the lifting translation table 9, the sample is fixed on the upper surface of the lifting translation table 9, the lifting translation table 9 is moved left and right or back and forth, so that a laser spot emitted by the visible laser range finder 8 falls on the surface of the sample to be detected, the visible laser range finder 8 can detect the distance from the visible laser range finder 8 to the upper surface of the sample, and the lifting translation table 9 is adjusted based on the distance detected by the visible laser range finder 8, so that the sample is placed at the optimal sample placement point, and the imaging of the maximum signal-to-noise ratio is realized.
Specifically, the distance from the visible laser range finder 8 to the upper surface of the sample is d, which is directly measured by the visible laser range finder 8, and d ═ d1+ d2, d2 is the distance from the visible laser range finder 8 to the optimum sample placement point (intersection), which is a known quantity, and d1 is the distance from the upper surface of the sample to the optimum sample placement point (intersection), which is the displacement of the elevation translation stage 9.
Specifically, the automatic adjusting device for the sample position of the terahertz three-dimensional tomography system according to the embodiment further includes a real-time feedback system 14, the real-time feedback system 14 is respectively connected to the visible light laser range finder 8 and the lifting translation stage 9, and is configured to read the distance d sent by the visible light laser range finder 8 in real time, control the lifting translation stage 9 to move upward if d is greater than d2, and control the lifting translation stage 9 to move downward if d is less than d2 until d is d 2. The lifting translation platform is an existing electric lifting translation platform, can accurately and automatically control lifting displacement, and can move in the front, back, left and right directions.
In the use, constantly adjust the contained angle between emission light path unit 2 and the detection light path unit 3 according to actual conditions needs, for the adjustment of the angle of the convenience, the accurate angle of reading out, the three-dimensional tomography system sample position automatic regulating apparatus of terahertz that this embodiment relates to still includes circular arc scale 10, and circular arc scale 10 sets up in a parallel with plane A, and the circular arc scale 10 centre of a circle is fixed on pivot 13. The movable end of the emission light path unit 2 and the detection light path unit 3 is rotated, the included angle between the emission light path unit 2 and the detection light path unit 3 is adjusted, and the included angle is determined in real time through the scales on the circular arc ruler 10.
Preferably, the scales on the circular arc scale 10 are symmetrically arranged, and gradually increase from 0 to two sides along the symmetrical axis of the circular arc scale, and the emission light path unit 2 and the detection light path unit 3 are symmetrically arranged along the symmetrical axis of the circular arc scale, so that the emission light path unit 2 and the detection light path unit 3 can move synchronously.
Further, in order to ensure that the visible laser range finder 8 is always fixed on an angular bisector of an included angle formed by an optical axis of the emission optical path unit 2 and an optical axis of the detection optical path unit 3 in the angle adjustment process, a screw 12 is fixedly arranged along the angular bisector, one end of the screw 12 is rotatably connected with the stepping motor 1, a slider 11 is in threaded connection with the screw 12, one end of an emission optical path unit connecting rod 4 is rotatably connected with a moving end of the emission optical path unit 2, one end of a detection optical path unit connecting rod 6 is rotatably connected with a moving end of the detection optical path unit 2, the other end of the emission optical path unit connecting rod 4 is hinged on the slider 11 with the other end of the detection optical path unit connecting rod 6, the lengths of the emission optical path unit 2 and the detection optical path unit 3 are equal, and the lengths of the emission optical path unit connecting rod and the detection optical path unit connecting rod are equal. The stepping motor 1 drives the screw 12 to rotate, and further synchronously adjusts the angles between the optical axis of the emission light path unit 2 and the angular bisector and between the optical axis of the detection light path unit 3 and the angular bisector through the emission light path unit connecting rod 4 and the detection light path unit connecting rod 6, so that the included angle between the optical axis of the emission light path unit 2 and the optical axis of the detection light path unit 3 is rotated at 0-180 degrees.
Emission light path unit 2 includes terahertz emitting antenna, first collimation lens, first focusing lens and emission light path unit dwang 5, terahertz emitting antenna, first collimation lens and first focusing lens are integrated in a lens cone, the lens cone that emission light path unit 2 is constituteed is fixed on emission light path unit dwang 5, emission light path unit dwang 5 stiff end rotates with pivot 13 and is connected, emission light path unit connecting rod 4 rotates to be connected and removes the end at emission light path unit dwang 5, emission light path unit dwang 5 removes the end and is for indicating the needle form, emission light path unit dwang 5 is close to circular arc scale 10 and sets up, can directly indicate the scale on the circular arc scale 10, obtain the contained angle size between emission light path unit 2 and the angular bisector. The same reason, survey light path unit 3 includes second focusing lens, second collimating lens, terahertz detection antenna and survey light path unit dwang 7, second focusing lens, second collimating lens and terahertz detection antenna are integrated in a lens cone, the integrated lens cone of survey light path unit is fixed on surveying light path unit dwang 7, survey light path unit dwang 7 stiff end and pivot 13 rotate to be connected, survey light path unit connecting rod 6 rotates to be connected and moves the end at survey light path unit dwang 7, survey light path unit dwang 7 and move the end and be the pointer form, survey light path unit dwang 7 is close to circular arc scale 10 and sets up, can the scale on the direct indication circular arc scale 10, obtain the contained angle size between survey light path unit 3 and the angular bisector. The integrated arrangement facilitates the synchronous adjustment of the heights of the optical elements of the emission light path unit 2 or the detection light path unit 3.
Preferably, the visible laser range finder 8 is fixed on the screw 12 between the stepping motor 1 and the slider 11 in order not to interfere with other structures. Specifically, the visible laser range finder 8 is fixed on the upper portion of an adjusting frame 13 through a two-axis adjusting frame, the adjusting frame 13 is fixed on a screw 12, the two-axis adjusting frame is used for adjusting pitching and yawing, and the adjusting frame 13 is specifically an existing lifting rod, so that height adjustment is achieved.
The automatic adjustment method for the sample position of the terahertz three-dimensional tomography system, which is related by the embodiment, specifically comprises the following steps:
(1) adjusting the adjusting frame 13 and the biaxial adjusting frame to enable the laser emitted by the visible laser range finder 8 to intersect with the optical axis of the emission light path unit 2 and the optical axis of the detection light path unit 3 at one point;
(2) placing a sample on the upper surface of the lifting translation table 9, starting the visible laser range finder 8, moving the lifting translation table back and forth and left and right according to the position of a light spot to enable the light spot to fall on the sample to be measured, measuring the distance d between the visible laser range finder 8 and the upper surface of the sample, and sending the value to the real-time feedback system 14;
(3) if d is larger than d2, the lifting translation table 9 is moved upwards, d is smaller than d2, and the lifting translation table 9 is moved downwards until d is d2, so that the adjustment is completed.
Claims (8)
1. A terahertz three-dimensional tomography system sample position automatic regulating device is characterized by comprising an emission light path unit, a detection light path unit, a visible laser range finder and a lifting translation table; the fixed end of the emission light path unit and the fixed end of the detection light path unit are rotatably connected on a rotating shaft, the visible laser range finder is fixed on an angle bisection line of an included angle formed by an optical axis of the emission light path unit and an optical axis of the detection light path unit, laser emitted by the visible laser range finder, the optical axis of the emission light path unit and the optical axis of the detection light path unit are on the same plane, the laser emitted by the visible laser range finder, the optical axis of the emission light path unit and the optical axis of the detection light path unit are intersected at a point, the intersection point is a best placement point of a sample, the upper surface of the lifting translation table is vertical to the plane, meanwhile, laser emitted by the visible laser range finder is also vertical to the upper surface of the lifting translation table, the sample is fixed on the upper surface of the lifting translation table, the lifting translation table is moved left and right or back and forth, laser spots emitted by the visible laser range finder fall on the surface of the sample to be detected, and the visible laser range finder can detect the distance from the upper surface of the sample, the lifting translation table is adjusted based on the distance detected by the visible laser range finder, so that the sample is placed at the optimal sample placement point, and the imaging of the maximum signal-to-noise ratio is realized.
2. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system as claimed in claim 1, further comprising a real-time feedback system, wherein the real-time feedback system is respectively connected with the visible laser range finder and the lifting translation stage.
3. The automatic terahertz three-dimensional tomography system sample position adjusting device as claimed in claim 2, further comprising an arc scale, wherein the arc scale is arranged parallel to the plane, and the center of the arc scale is fixed on the rotating shaft.
4. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system as claimed in claim 3, wherein the scales on the circular arc scale are symmetrically arranged, the scales gradually increase from 0 to 0 from the symmetrical axis of the circular arc scale, and the emission light path unit and the detection light path unit are symmetrically arranged with the symmetrical axis of the circular arc scale.
5. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system as claimed in claim 4, wherein a screw is fixedly arranged along the angular bisector, one end of the screw is rotatably connected with the stepping motor, a slide block is screwed on the screw, one end of the transmitting optical path unit connecting rod is rotatably connected with the movable end of the transmitting optical path unit, one end of the detecting optical path unit connecting rod is rotatably connected with the movable end of the detecting optical path unit, and the other end of the transmitting optical path unit connecting rod and the other end of the detecting optical path unit connecting rod are hinged on the slide block to form a parallelogram.
6. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system according to claim 5, wherein the transmitting optical path unit comprises a terahertz transmitting antenna, a first collimating lens, a first focusing lens and a rotating rod of the transmitting optical path unit, the terahertz transmitting antenna, the first collimating lens and the first focusing lens are integrated into a lens barrel, the lens barrel composed of the transmitting optical path unit is fixed on the rotating rod of the transmitting optical path unit, the fixed end of the rotating rod of the transmitting optical path unit is rotatably connected with the rotating shaft, the connecting rod of the transmitting optical path unit is rotatably connected with the movable end of the rotating rod of the transmitting optical path unit, the movable end of the rotating rod of the transmitting optical path unit is in a pointer shape, the rotating rod of the transmitting optical path unit is arranged close to the circular arc ruler, and can directly indicate the scale on the circular arc ruler, so as to obtain the size of the included angle between the transmitting optical path unit and the angular bisector, and the same way, survey light path unit includes second focusing lens, second collimating lens, terahertz detection antenna and survey light path unit dwang, second focusing lens, second collimating lens and terahertz detection antenna are integrated in a lens cone, the integrated lens cone of survey light path unit is fixed on surveying light path unit dwang, survey light path unit dwang stiff end and pivot are rotated and are connected, survey light path unit connecting rod rotates and connects and remove the end at surveying light path unit dwang, it is the pointer form to survey light path unit dwang removal end, it is close to the circular arc scale setting to survey light path unit dwang, can directly indicate the scale on the circular arc scale, obtain the contained angle size between survey light path unit and the angular bisector.
7. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system as claimed in claim 6, wherein the visible laser range finder is fixed on a screw rod between the stepping motor and the slide block.
8. The automatic adjusting device for the sample position of the terahertz three-dimensional tomography system as claimed in claim 7, wherein the visible laser range finder is fixed on the upper part of an adjusting frame through a two-axis adjusting frame, the adjusting frame is fixed on a screw rod, the two-axis adjusting frame is used for adjusting pitching and yawing, and the adjusting frame is an existing lifting rod.
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