CN214249909U - Clean room air treatment unit for silicon carbide semiconductor production - Google Patents
Clean room air treatment unit for silicon carbide semiconductor production Download PDFInfo
- Publication number
- CN214249909U CN214249909U CN202023247533.XU CN202023247533U CN214249909U CN 214249909 U CN214249909 U CN 214249909U CN 202023247533 U CN202023247533 U CN 202023247533U CN 214249909 U CN214249909 U CN 214249909U
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- Prior art keywords
- fixedly connected
- unit body
- dust screen
- net
- semiconductor production
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 12
- 239000000428 dust Substances 0.000 claims abstract description 50
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 21
- 230000001954 sterilising effect Effects 0.000 claims abstract description 21
- 238000004659 sterilization and disinfection Methods 0.000 claims abstract description 21
- 230000006835 compression Effects 0.000 claims abstract description 14
- 238000007906 compression Methods 0.000 claims abstract description 14
- 238000004887 air purification Methods 0.000 abstract description 3
- 230000000249 desinfective effect Effects 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
Abstract
The utility model belongs to the technical field of air purification processing unit, especially, be a toilet's air treatment unit is used in carborundum semiconductor production, including the unit body, the inner wall sliding connection of unit body has the active carbon net of disinfecting, the inner wall sliding connection of unit body has first dust screen, the inner wall sliding connection of unit body has the second dust screen, the equal fixedly connected with arm-tie in top of active carbon net of disinfecting, first dust screen and second dust screen, the fixed box of top fixedly connected with of unit body. The utility model discloses a setting of pull rod makes the pull rod when pulling to both sides, drives the limiting plate and to both sides compression telescopic link and compression spring, takes the inserted bar out in the sleeve, makes inserted bar and arm-tie separation, and cooperation active carbon sterilization net, first dust screen, second dust screen and unit body sliding connection to can take active carbon sterilization net, first dust screen, second dust screen out.
Description
Technical Field
The utility model relates to an air purification handles unit technical field, specifically is a toilet's air treatment unit is used in carborundum semiconductor production.
Background
The air handling unit is a centralized air handling system, it originates from the centralized setting of the apparatus, the forced hot wind heating and ventilating system of the heated air is distributed through the air hose, the basic centralized system is a whole air single area system, as Chinese application patent number is: CN201820236845.4, the utility model discloses an air purification handles unit, including the guard box, the top fixedly connected with casing of guard box, the top fixedly connected with second motor of casing inner chamber, the output fixedly connected with carousel of second motor, the bottom fixedly connected with dead lever on carousel surface, the surperficial cover of dead lever is equipped with the transmission frame, the inner wall of transmission frame and the sliding surface connection of dead lever, the top fixedly connected with slide bar of transmission frame.
The prior air treatment unit has the following problems:
1. the sterilization net is generally fixedly connected with the unit, and when the sterilization net is damaged, the sterilization net is inconvenient to disassemble for maintenance or replacement;
2. the air can be simply treated, and dust in the air is not conveniently removed, so that the air quality is influenced.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Not enough to prior art, the utility model provides a carborundum semiconductor production is with air treatment unit of toilet has solved prior art, and inconvenient dismantles and inconvenient dust to in the air the problem of getting rid of the net that disinfects.
(II) technical scheme
In order to achieve the above object, the utility model provides a following technical scheme: a clean room air treatment unit for silicon carbide semiconductor production comprises a unit body, wherein an active carbon sterilization net is slidably connected to the inner wall of the unit body, a first dustproof net is slidably connected to the inner wall of the unit body, a second dustproof net is slidably connected to the inner wall of the unit body, pull plates are fixedly connected to the tops of the active carbon sterilization net, the first dustproof net and the second dustproof net, a fixing box is fixedly connected to the top of the unit body, a pull rod is slidably connected to the inner wall of the fixing box, a limiting plate is fixedly connected to one end of the pull rod, a telescopic rod is fixedly connected between the fixing box and the limiting plate, a compression spring is sleeved on the outer surface of the telescopic rod, two ends of the compression spring are fixedly connected with the fixing box and the limiting plate respectively, an inserting rod is fixedly connected to one side of the limiting plate, and a straight plate is fixedly connected to the top of the unit body, one side fixedly connected with sleeve of straight board, inserted bar and sleeve sliding connection.
As an optimal technical scheme of the utility model, the mounting groove has been seted up to the inner wall of unit body, the quantity of mounting groove is three, and is three the mounting groove disinfects net, first dust screen, second dust screen sliding connection with active carbon respectively.
As an optimal technical scheme of the utility model, the sliding door has been seted up through the hinge in the front of unit body, one side fixedly connected with handle of sliding door.
As an optimal technical scheme of the utility model, the one end fixedly connected with pull head of pull rod, the outer fixed surface of pull head is connected with anti-skidding cover.
As a preferred technical scheme of the utility model, the inner wall fixedly connected with gag lever post of fixed box, gag lever post and limiting plate sliding connection.
As a preferred technical scheme of the utility model, the air intake has been seted up to one side of unit body, the air outlet has been seted up to the opposite side of unit body.
(III) advantageous effects
Compared with the prior art, the utility model provides a carborundum semiconductor production is with toilet's air treatment unit possesses following beneficial effect:
1. this air treatment unit of toilet for silicon carbide semiconductor production, setting through the pull rod, when making the pull rod stimulate to both sides, drive limiting plate to both sides compression telescopic link and compression spring, take the inserted bar out from the sleeve, make inserted bar and arm-tie separation, the cooperation active carbon net of disinfecting, first dust screen, second dust screen and unit body sliding connection, thereby can disinfect the active carbon net, first dust screen, the second dust screen is taken out, when it damages, be convenient for dismantle it, change or maintain.
2. This silicon carbide semiconductor production is with air treatment unit of toilet disinfects the net through active carbon, disinfects to the air, and the reinforcing air quality cooperates first dust screen, and the dust in the deaerate of being convenient for makes the air quality effect better, utilizes the second dust screen, further gets rid of the dust in the air.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a top view of the present invention;
fig. 3 is an enlarged view of a structure in fig. 2 according to the present invention.
In the figure: 1. a unit body; 2. an active carbon sterilization net; 3. a first dust screen; 4. a second dust screen; 5. a fixing box; 6. a pull rod; 7. a limiting plate; 8. a telescopic rod; 9. a compression spring; 10. inserting a rod; 11. a straight plate; 12. a sleeve; 13. mounting grooves; 14. sliding the door; 15. a slider; 16. a limiting rod; 17. an air inlet; 18. an air outlet; 19. and (5) pulling the plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
Referring to fig. 1-3, the present invention provides the following technical solutions: a clean room air treatment unit for silicon carbide semiconductor production comprises a unit body 1, wherein the inner wall of the unit body 1 is slidably connected with an active carbon sterilization net 2, the inner wall of the unit body 1 is slidably connected with a first dust screen 3, the inner wall of the unit body 1 is slidably connected with a second dust screen 4, the tops of the active carbon sterilization net 2, the first dust screen 3 and the second dust screen 4 are fixedly connected with a pull plate 19, the top of the unit body 1 is fixedly connected with a fixed box 5, the inner wall of the fixed box 5 is slidably connected with a pull rod 6, one end of the pull rod 6 is fixedly connected with a limiting plate 7, a telescopic rod 8 is fixedly connected between the fixed box 5 and the limiting plate 7, the outer surface of the telescopic rod 8 is sleeved with a compression spring 9, two ends of the compression spring 9 are respectively fixedly connected with the fixed box 5 and the limiting plate 7, one side of the limiting plate 7 is fixedly connected with an insert rod 10, the top of the unit body 1 is fixedly connected with a straight plate 11, one side of the straight plate 11 is fixedly connected with a sleeve 12, and the inserted link 10 is connected with the sleeve 12 in a sliding manner.
In this embodiment, through the setting of pull rod 6, when making pull rod 6 stimulate to both sides, drive limiting plate 7 to both sides compression telescopic link 8 and compression spring 9, take inserted bar 10 out from sleeve 12, make inserted bar 10 and arm-tie 19 separation, cooperation active carbon sterilization net 2, first dust screen 3, second dust screen 4 and unit body 1 sliding connection, thereby can disinfect net 2 with active carbon, first dust screen 3, second dust screen 4 takes out, when it damages, be convenient for dismantle it, change or maintain, disinfect net 2 through active carbon, disinfect to the air, strengthen the air quality, cooperation first dust screen 3, be convenient for get rid of the dust in the air, make the air quality effect better, utilize second dust screen 4, further get rid of the dust in the air.
Specifically, mounting groove 13 has been seted up to the inner wall of unit body 1, and the quantity of mounting groove 13 is three, and three mounting groove 13 respectively with active carbon sterilization net 2, first dust screen 3, 4 sliding connection of second dust screen.
In this embodiment, through mounting groove 13, increase the stability of active carbon sterilization net 2, first dust screen 3, second dust screen 4.
Specifically, the front of the unit body 1 is provided with a sliding door 14 through a hinge, and one side of the sliding door 14 is fixedly connected with a handle.
In this embodiment, the sliding door 14 facilitates handling of dust adsorbed on the first dust-proof net 3 and the second dust-proof net 4.
Specifically, one end of the pull rod 6 is fixedly connected with a pull head 15, and the outer surface of the pull head 15 is fixedly connected with an anti-slip sleeve.
In this embodiment, the pull rod 6 is conveniently pulled by the slider 15, which increases convenience.
Specifically, the inner wall of the fixing box 5 is fixedly connected with a limiting rod 16, and the limiting rod 16 is connected with the limiting plate 7 in a sliding manner.
In this embodiment, through gag lever post 16 and limiting plate 7 sliding connection, stability when increasing limiting plate 7 and removing.
Specifically, one side of the unit body 1 is provided with an air inlet 17, and the other side of the unit body 1 is provided with an air outlet 18.
In this embodiment, the air inlet 17 and the air outlet 18 facilitate the introduction of air into the unit body 1.
The utility model discloses a theory of operation and use flow: when the air purifier is used, air is sucked into the unit body 1 from the air inlet 17 through the suction fan, the air is sterilized through the sterilization effect of the activated carbon sterilization net 2, the air quality is enhanced, the adsorption effect of the first dust screen 3 and the second dust screen 4 is matched, dust in the air is conveniently removed, the air quality effect is better, the purified air is blown out from the air outlet 18, when the activated carbon sterilization net 2, the first dust screen 3 and the second dust screen 4 are damaged, the pull heads 15 are pulled towards two sides, the pull heads 15 drive the limiting plates 7 to compress the telescopic rods 8 and the compression springs 9 towards two sides, the inserting rod 10 is pulled out from the sleeve 12, the inserting rod 10 is separated from the pull plates 19, and the activated carbon sterilization net 2, the first dust screen 3 and the second dust screen 4 are matched to be in sliding connection with the unit body 1, so that the activated carbon sterilization net 2, the first dust screen 3 and the second dust screen 4 can be pulled out, it is convenient to dismantle, change or maintain.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a silicon carbide semiconductor production is with air treatment unit of clean room, includes unit body (1), its characterized in that: the inner wall of the unit body (1) is connected with an active carbon sterilization net (2) in a sliding manner, the inner wall of the unit body (1) is connected with a first dustproof net (3) in a sliding manner, the inner wall of the unit body (1) is connected with a second dustproof net (4) in a sliding manner, the tops of the active carbon sterilization net (2), the first dustproof net (3) and the second dustproof net (4) are fixedly connected with a pull plate (19), the top of the unit body (1) is fixedly connected with a fixed box (5), the inner wall of the fixed box (5) is connected with a pull rod (6) in a sliding manner, one end of the pull rod (6) is fixedly connected with a limiting plate (7), a telescopic rod (8) is fixedly connected between the fixed box (5) and the limiting plate (7), the outer surface of the telescopic rod (8) is sleeved with a compression spring (9), and two ends of the compression spring (9) are respectively fixedly connected with the fixed box (5) and the limiting plate (7), one side fixedly connected with inserted bar (10) of limiting plate (7), the top fixedly connected with straight board (11) of unit body (1), one side fixedly connected with sleeve (12) of straight board (11), inserted bar (10) and sleeve (12) sliding connection.
2. The clean room air handling unit for silicon carbide semiconductor production according to claim 1, wherein: mounting groove (13) have been seted up to the inner wall of unit body (1), the quantity of mounting groove (13) is three, three mounting groove (13) respectively with active carbon sterilization net (2), first dust screen (3), second dust screen (4) sliding connection.
3. The clean room air handling unit for silicon carbide semiconductor production according to claim 1, wherein: the front of the unit body (1) is provided with a sliding door (14) through a hinge, and one side of the sliding door (14) is fixedly connected with a handle.
4. The clean room air handling unit for silicon carbide semiconductor production according to claim 1, wherein: one end of the pull rod (6) is fixedly connected with a pull head (15), and the outer surface of the pull head (15) is fixedly connected with an anti-skidding sleeve.
5. The clean room air handling unit for silicon carbide semiconductor production according to claim 1, wherein: the inner wall fixedly connected with gag lever post (16) of fixed box (5), gag lever post (16) and limiting plate (7) sliding connection.
6. The clean room air handling unit for silicon carbide semiconductor production according to claim 1, wherein: an air inlet (17) is formed in one side of the unit body (1), and an air outlet (18) is formed in the other side of the unit body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023247533.XU CN214249909U (en) | 2020-12-29 | 2020-12-29 | Clean room air treatment unit for silicon carbide semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023247533.XU CN214249909U (en) | 2020-12-29 | 2020-12-29 | Clean room air treatment unit for silicon carbide semiconductor production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214249909U true CN214249909U (en) | 2021-09-21 |
Family
ID=77744001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023247533.XU Active CN214249909U (en) | 2020-12-29 | 2020-12-29 | Clean room air treatment unit for silicon carbide semiconductor production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214249909U (en) |
-
2020
- 2020-12-29 CN CN202023247533.XU patent/CN214249909U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Clean Room Air Handling Unit for Silicon Carbide Semiconductor Production Effective date of registration: 20231215 Granted publication date: 20210921 Pledgee: Agricultural Bank of China Limited by Share Ltd. South Lake branch Pledgor: Zhejiang Zhongdian Environmental Technology Co.,Ltd. Registration number: Y2023330003031 |