CN214182189U - SiO removing device in simple harmonic dust remover matched with crystal pulling furnace - Google Patents
SiO removing device in simple harmonic dust remover matched with crystal pulling furnace Download PDFInfo
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- CN214182189U CN214182189U CN202022345019.3U CN202022345019U CN214182189U CN 214182189 U CN214182189 U CN 214182189U CN 202022345019 U CN202022345019 U CN 202022345019U CN 214182189 U CN214182189 U CN 214182189U
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Abstract
The utility model discloses a supporting simple harmonic formula dust remover interior SiO clearing device of crystal pulling furnace relates to semiconductor preparation technical field, including compressed air joint, air-vent valve and the flow control valve that connects gradually, compressed air joint free end is used for giving vent to anger the pipe connection with compressed air, and the flow control valve is given vent to anger the end and is used for being connected with simple harmonic formula dust remover lower part ash bin. The utility model provides a SiO clearing device in the supporting simple harmonic formula dust remover of crystal pulling furnace makes SiO accomplish oxidation reaction under safe controllable state, burns out filter material and dust explosion's emergence when avoiding the deashing operation, has reached the protection and has filtered the filter media and prevent and treat that dust particle arranges atmospheric purpose outward.
Description
Technical Field
The utility model relates to a semiconductor preparation technical field especially relates to a SiO clearing device in supporting simple harmonic formula dust remover of crystal pulling furnace.
Background
In the process of producing the silicon single crystal rod in the photovoltaic industry, silicon monoxide (SiO) which is extremely easy to react violently with oxygen is generated from silicon raw materials and a quartz crucible at high temperature. In the prior art, an electromagnetic valve is used for controlling air to slowly enter a simple harmonic dust remover, and the reaction (primary oxidation) speed of SiO and air is controlled by controlling the air inlet amount so as to reduce the calorific value of the reaction.
The conventional SiO dust primary oxidation system adopts a passive intake mode, air is passively taken into a simple harmonic dust remover through an electromagnetic valve and a flow meter, when the air pressure in the simple harmonic dust remover is consistent with the external atmospheric pressure, the pressure difference disappears, and air intake stops. The volume of the equipment is limited, the amount of passively taken air is limited, the SiO consumed by reaction is limited, and the permeability of the passively taken air is limited, so that the situation that the surface layer of the accumulated SiO is oxidized and the deep layer is not oxidized is easily caused. At present, with the further increase of the continuous operation time of the crystal pulling furnace, the production amount of SiO is far beyond the past, and SiO can not be completely consumed by adopting a one-time oxidation process of passive gas inlet. When the ash is removed, SiO which is not oxidized in the ash bin at the lower part of the simple harmonic dust remover contacts a large amount of air, the SiO is quickly oxidized to generate a large amount of heat, and the high-temperature baking can cause the burning loss of the filter material at the upper part and even the dust explosion. The burnt filter material loses the filtering capability, if the burnt filter material is not discovered and replaced in time, SiO dust generated in the production process directly enters a dry vacuum pump at the rear end along with air flow, vacuum pump parts are abraded, the service life of the vacuum pump is shortened, the vacuum pump can be locked by dust under the more serious condition, and the whole production system stops production and the dust of discharged gas exceeds the standard.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a supporting SiO clearing device in simple harmonic formula dust remover of crystal pulling furnace to solve the problem that above-mentioned prior art exists, make SiO accomplish oxidation under safe controllable state, burn the emergence of losing filter material and dust explosion when avoiding the deashing operation.
In order to achieve the above object, the utility model provides a following scheme:
the utility model provides a SiO clearing device in supporting simple harmonic formula dust remover of crystal pulling furnace, including the compressed air who connects gradually, air-vent valve and flow control valve, the compressed air connects the free end and is used for giving vent to anger the pipeline with compressed air and be connected, the flow control valve is given vent to anger the end and is used for being connected with simple harmonic formula dust remover lower part ash bin.
Preferably, the dust collector further comprises a diffusion chamber, the flow control valve is connected with the diffusion chamber through a pipeline, an air outlet pipe is arranged on the diffusion chamber, and the air outlet pipe is used for being connected with a dust bin at the lower part of the simple harmonic dust collector.
Preferably, the flow control valve is a solenoid valve.
Preferably, a manual flow control valve is provided on a pipe connecting the flow control valve and the diffusion chamber.
Preferably, the bottom of the diffusion chamber is provided with a drain pipe, and the drain pipe is connected with a drain valve.
Preferably, the manual flow control valve is a manual ball valve.
The utility model discloses for prior art gain following technological effect:
the utility model provides a SiO clearing device in supporting simple harmonic formula dust remover of crystal pulling furnace, after crystal pulling furnace production operation is accomplished, and after oxidation, let in compressed air in the simple harmonic formula dust remover lower part ash storehouse, compressed air is diffusion in simple harmonic formula dust remover, the SiO on oxidation top layer, and the deep SiO of infiltration oxidation, air input through controlling the compressed air that lets in, make SiO accomplish oxidation reaction under safe controllable state, the emergence of scaling loss filter material and dust explosion when avoiding the deashing operation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of a SiO removing device in a simple harmonic dust remover matched with a crystal pulling furnace provided by the utility model;
in the figure: 1-compressed air joint, 2-pressure regulating valve, 3-flow control valve, 4-diffusion chamber, 5-air outlet pipe, 6-manual flow control valve, 7-blow-off pipe and 8-blow-off valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model aims at providing a supporting SiO clearing device in simple harmonic formula dust remover of crystal pulling furnace to solve the problem that prior art exists, make SiO accomplish oxidation under safe controllable state, burn the emergence of losing filter material and dust explosion when avoiding the deashing operation.
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Example one
The embodiment provides a method for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace.
After the production operation of the crystal pulling furnace is finished, passive air intake is carried out through a primary oxidation system for preliminary oxidation reaction, after the primary oxidation is finished, compressed air is introduced into a dust bin at the lower part of the simple harmonic dust remover, if the primary oxidation is not finished, the compressed air is directly introduced to generate explosion, potential safety hazards exist, the introduced compressed air is diffused in the simple harmonic dust remover and is fully contacted with SiO accumulated in the simple harmonic dust remover, the SiO on the surface layer is oxidized, meanwhile, the compressed air permeates into the SiO in the deep layer, the SiO in the deep layer can be slowly oxidized, quantitative compressed air is introduced into the dust bin at the lower part of the simple harmonic dust remover through a pressure regulating valve and a flow control valve, so that the SiO in the simple harmonic dust remover completes the oxidation reaction in a safe and controllable state, the burning loss of a filter material and the dust explosion during the operation are avoided, and the ash removal due to the burning loss of the filter material cannot be found and replaced in time, the SiO dust directly enters the dry vacuum pump at the rear end along with the air flow, the parts of the vacuum pump are abraded, the service life of the vacuum pump is shortened, the vacuum pump is blocked by the dust under the more serious condition, the whole production system stops production, the condition that the dust of discharged gas exceeds the standard is caused, and the aims of protecting and filtering filter materials and preventing dust particles from being discharged to the atmosphere are fulfilled.
In the embodiment, the pressure of the introduced compressed air is 0.01 MPa-0.02 MPa, and the pressure is controlled by the pressure regulating valve, so that the permeation speed of the compressed air is moderate, and the SiO is prevented from burning the filter material due to a large amount of heat generated by the over-high oxidation reaction speed.
Example two
As shown in fig. 1, the embodiment provides a SiO removal device in a simple harmonic dust remover matched with a crystal pulling furnace, which comprises a compressed air connector 1, a pressure regulating valve 2 and a flow control valve 3, which are connected in sequence, wherein a free end of the compressed air connector 1 is used for being connected with a compressed air outlet pipeline, and an air outlet end of the flow control valve 3 is used for being connected with a lower ash bin of the simple harmonic dust remover.
Connecting a compressed air connector 1 with a compressed air outlet pipeline, and closing a flow control valve 3 when the crystal pulling furnace is in normal production operation; after the production operation of the crystal pulling furnace is finished, and after the primary oxidation is finished, the pressure regulating valve 2 is regulated, the flow control valve 3 is opened, the pressure of the compressed air introduced into the ash bin at the lower part of the simple harmonic dust remover is enabled to reach a set pressure value, specifically 0.01 MPa-0.02 MPa, the compressed air is diffused in the simple harmonic dust remover and fully contacts with the SiO accumulated in the simple harmonic dust remover, the SiO on the surface layer is oxidized, meanwhile, the compressed air permeates into the SiO in the deep layer, the SiO in the deep layer can be slowly oxidized, and quantitative compressed air is introduced through the pressure regulating valve 2 and the flow control valve 3, so that the oxidation reaction of the SiO in the simple harmonic dust remover is completed under a safe and controllable state, the burning loss of the filter material and the dust explosion during the dust cleaning operation are avoided, the burning loss of the filter material cannot be found and replaced in time, and the SiO dust directly enters a dry vacuum pump at the rear end along with the air flow, the vacuum pump part is abraded, the service life of the vacuum pump is shortened, the vacuum pump can be locked by dust under more serious conditions, the whole production system stops production, the condition that dust of discharged gas exceeds the standard is caused, and the aims of protecting the filter material and preventing dust particles from being discharged to the atmosphere are fulfilled.
In this embodiment, the dust collector further comprises a diffusion chamber 4, the flow control valve 3 is connected with the diffusion chamber 4 through a pipeline, an air outlet pipe 5 is arranged on the diffusion chamber 4, and the air outlet pipe 5 is used for being connected with a lower dust bin of the simple harmonic dust collector. Compressed air enters the diffusion chamber 4, reaches stable airflow after being freely diffused, and enters the ash bin at the lower part of the simple harmonic dust remover through the air outlet pipe 5, so that the compressed air can be more stably diffused in the simple harmonic dust remover, and the occurrence of overhigh local oxygen concentration (too violent local oxidation reaction) and a dead flow area (local SiO is not oxidized) is avoided.
In this embodiment, the flow control valve 3 is an electromagnetic valve, and the flow of the compressed air is controlled by the electromagnetic valve, so that the operation is convenient and fast.
In this embodiment, a manual flow control valve 6 is arranged on a pipeline connecting the flow control valve 3 and the diffusion chamber 4, the manual flow control valve 6 is arranged as a manual safety device, the manual flow control valve 6 is in an open state during normal production operation of the crystal pulling furnace, and if the flow control valve 3 (electromagnetic valve) is accidentally opened due to a fault during normal production operation, the manual flow control valve 6 is manually closed, so that compressed air is prevented from entering the simple harmonic dust remover.
In this embodiment, the bottom of the diffusion chamber 4 is provided with a drain pipe 7, the drain pipe 7 is connected with a drain valve 8, and the dirt of the compressed air in the diffusion chamber 4 can be discharged by opening the drain valve 8.
In this embodiment, the manual flow control valve 6 is a manual ball valve, and has a simple structure and is convenient to operate.
The utility model discloses a concrete example is applied to explain the principle and the implementation mode of the utility model, and the explanation of the above example is only used to help understand the method and the core idea of the utility model; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (6)
1. The utility model provides a supporting SiO clearing device in simple harmonic formula dust remover of crystal pulling furnace which characterized in that: the device comprises a compressed air joint, a pressure regulating valve and a flow control valve which are sequentially connected, wherein the free end of the compressed air joint is connected with a compressed air outlet pipeline, and the air outlet end of the flow control valve is connected with a lower ash bin of the simple harmonic dust collector.
2. The matched simple harmonic dust remover internal SiO removing device of a crystal pulling furnace as claimed in claim 1, which is characterized in that: the device is characterized by further comprising a diffusion chamber, wherein the flow control valve is connected with the diffusion chamber through a pipeline, an air outlet pipe is arranged on the diffusion chamber, and the air outlet pipe is used for being connected with a lower ash bin of the simple harmonic dust remover.
3. The matched simple harmonic dust remover internal SiO removing device of a crystal pulling furnace as claimed in claim 1, which is characterized in that: the flow control valve is an electromagnetic valve.
4. The device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace as claimed in claim 2, which is characterized in that: and a manual flow control valve is arranged on a pipeline connecting the flow control valve and the diffusion chamber.
5. The device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace as claimed in claim 2, which is characterized in that: and a drain pipe is arranged at the bottom of the diffusion chamber and is connected with a drain valve.
6. The device for removing SiO in a simple harmonic dust remover matched with a crystal pulling furnace as claimed in claim 4, which is characterized in that: the manual flow control valve is a manual ball valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022345019.3U CN214182189U (en) | 2020-10-20 | 2020-10-20 | SiO removing device in simple harmonic dust remover matched with crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022345019.3U CN214182189U (en) | 2020-10-20 | 2020-10-20 | SiO removing device in simple harmonic dust remover matched with crystal pulling furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214182189U true CN214182189U (en) | 2021-09-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022345019.3U Active CN214182189U (en) | 2020-10-20 | 2020-10-20 | SiO removing device in simple harmonic dust remover matched with crystal pulling furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214182189U (en) |
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2020
- 2020-10-20 CN CN202022345019.3U patent/CN214182189U/en active Active
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