CN214160198U - Developing solution spraying device and developing equipment - Google Patents
Developing solution spraying device and developing equipment Download PDFInfo
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- CN214160198U CN214160198U CN202022435291.0U CN202022435291U CN214160198U CN 214160198 U CN214160198 U CN 214160198U CN 202022435291 U CN202022435291 U CN 202022435291U CN 214160198 U CN214160198 U CN 214160198U
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Abstract
The embodiment of the utility model discloses a developer spraying device and developing equipment, the developer spraying device comprises a liquid storage container, a pump body, a reversing valve, a first filter, a second filter, a spray head and a flow meter, wherein the input end of the pump body is connected with the liquid outlet end of the liquid storage container, and the output end of the pump body is connected with the input end of the reversing valve; the input end of the first filter is connected with the first output end of the reversing valve, the input end of the second filter is connected with the second output end of the reversing valve, and the output end of the first filter and the output end of the second filter are both connected with the input end of the spray head through the flow meter; when the flow counted by the flow meter is smaller than a preset first threshold value, the input end of the reversing valve is switched to be connected with the first output end or the second output end of the reversing valve, the filter is switched when the flow drops due to the fact that the filter is blocked and unavailable, the filter is replaced without stopping the developing device, and the operation time of the developing device is guaranteed.
Description
Technical Field
The utility model relates to a liquid crystal display panel makes technical field, especially relates to a developer solution spraying device and developing equipment.
Background
The developing device is an indispensable device in the liquid crystal panel manufacturing industry, the glass substrate coated with the photoresist enters the developing device after exposure, and the developing device uniformly spreads developing solution on the glass substrate through the developing solution spraying device so as to display an image defined by the photomask.
As shown in fig. 1, a filter 2 'is disposed in a liquid delivery pipe from a liquid storage container 1' to a spray head 3 'in fig. 1, the filter 2' can filter impurities in the developing solution, when the developing device is used for a long time, the filter 2 'accumulates impurities, the filter 2' is blocked, the developing solution sprayed from the spray head 3 'is insufficient or even cannot be sprayed out, and poor development occurs, so that the developing device needs to be stopped to replace the filter 2', and the working time of the developing device is undoubtedly reduced.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides an aim at: the utility model provides a developer solution spraying device and developing equipment to solve developing equipment among the prior art and need shut down and change the filter, reduced developing equipment's operating time's problem.
In a first aspect, an embodiment of the present invention provides a developer spraying apparatus, which includes a liquid storage container for storing developer, a pump body, a reversing valve, a first filter, a second filter, a nozzle, and a flow meter for counting a flow rate of the developer;
the liquid storage container is provided with a liquid outlet end for outputting the developing solution;
the input end of the pump body is connected with the liquid outlet end of the liquid storage container, and the output end of the pump body is connected with the input end of the reversing valve;
the reversing valve comprises a first output end and a second output end, the input end of the first filter is connected with the first output end of the reversing valve, the input end of the second filter is connected with the second output end of the reversing valve, and the output ends of the first filter and the second filter are connected with the input end of the spray head through the flow meter;
when the flow is smaller than a preset first threshold value, the input end of the reversing valve is switched to be communicated with the second output end from being communicated with the first output end, or the input end of the reversing valve is switched to be communicated with the first output end from being communicated with the second output end.
Optionally, the developer spraying device further includes a controller, the controller is electrically connected to the flow meter and the reversing valve respectively, and when the flow rate collected by the flow meter is smaller than a preset first threshold, the controller outputs a reversing signal to the reversing valve to drive an input end of the reversing valve to be communicated with the first output end or to be communicated with the second output end, or drive an input end of the reversing valve to be communicated with the first output end.
Optionally, the developer spraying device further comprises a pressure gauge for collecting a pressure value of the developer, and the output end of the first filter and the output end of the second filter are both connected with the input end of the flow meter through the pressure gauge;
when the pressure value is smaller than a preset pressure threshold value, the input end of the reversing valve is switched to be communicated with the second output end from being communicated with the first output end, or the input end of the reversing valve is switched to be communicated with the first output end from being communicated with the second output end.
Optionally, a flow valve is arranged at an input end of the flow meter, an input end of the flow valve is connected with output ends of the first filter and the second filter, an output end of the flow valve is connected with an input end of the flow meter, and the controller is electrically connected with the flow valve;
and when the flow rate is smaller than a preset second threshold value, the flow valve adjusts the flow rate of the developing solution flowing into the input end of the flow meter.
Optionally, the input end of the pump body and the output end of the pump body are both provided with a first valve.
Optionally, the input end of the first filter, the output end of the first filter, the input end of the second filter, and the output end of the second filter are provided with second valves.
Optionally, the first filter and the second filter are both removable filters.
Optionally, the directional valve is a solenoid directional valve.
Optionally, the developer spraying device further comprises a developer recycling assembly, and the output end of the developer recycling assembly is connected with the liquid inlet end of the liquid storage container.
In a second aspect, an embodiment of the present invention provides a developing apparatus, including a developing platform and the developer spraying device according to the first aspect of the present invention;
the developing platform is used for bearing a substrate to be developed;
and the developing solution spraying device sprays the developing solution to the substrate.
The utility model has the advantages that:
the developer spraying device comprises a liquid storage container for storing developer, a pump body, a reversing valve, a first filter, a second filter, a spray head and a flow meter for counting the flow of the developer, wherein the reversing valve comprises a first output end and a second output end, the input end of the first filter is connected with the first output end of the reversing valve, the input end of the second filter is connected with the second output end of the reversing valve, the output end of the first filter and the output end of the second filter are both connected with the input end of the spray head through the flow meter, when the flow is smaller than a preset first threshold value due to blockage of the first filter or the second filter, the input end of the reversing valve is driven to be switched to be communicated with the second output end from the communication with the first output end, or the input end of the reversing valve is driven to be switched to be communicated with the first output end from the communication with the second output end, the problem of when having realized that first filter blocks up to be unavailable to switch into using the second filter, perhaps the second filter blocks up to switch into using first filter when unavailable, need not developing apparatus and shuts down to change first filter or second filter, has solved developing apparatus and has shut down to change the filter and lead to developing apparatus's activity duration to reduce, has guaranteed developing apparatus's activity duration.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and examples.
FIG. 1 is a schematic view of a prior art developer spraying apparatus;
FIG. 2 is a schematic view of a developer spraying apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of a developer spraying apparatus according to another embodiment of the present invention;
in fig. 1: 1', a liquid storage container; 2', a filter; 3', a spray head;
in fig. 2 and 3:
10. a reservoir; 20. a pump body; 30. a diverter valve; 40. a first filter; 50. a second filter; 60. a flow meter; 70. a spray head; 80. a controller; 90. a flow valve; 100. a pressure gauge; 110. a first valve; 120. a second valve; 130. and the developing solution recovery assembly.
Detailed Description
The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
Fig. 2 is the schematic diagram of the developer spraying apparatus of the embodiment of the present invention, as shown in fig. 2, the developer spraying apparatus of the embodiment of the present invention includes a liquid storage container 10 for storing developer, a pump body 20, a reversing valve 30, a first filter 40, a second filter 50, a nozzle 70, and a flow meter 60 for counting the flow of developer.
The liquid storage container 10 is provided with a liquid outlet end for outputting the developer, and the pump body 20 may be an electric pump for sucking and discharging the developer, for example, a vane pump, a displacement pump, etc. using electric energy as a driving force. The input end of the pump body 20 is connected with the liquid outlet end of the liquid storage container 10, and the output end of the pump body 20 is connected with the input end of the reversing valve 30, so that the developing solution stored in the liquid storage container 10 can be output to the input end of the reversing valve 30 through the pump body 20.
The directional control valve 30 can be a directional control valve having more than two flow patterns and more than two outputs in the optional embodiment of the present invention, the directional control valve 30 comprises an input end, a first output end and a second output end, when the input end of the directional control valve 30 is communicated with the first output end, the input end of the directional control valve 30 is not communicated with the second output end, when the input end of the directional control valve 30 is communicated with the second output end, the input end of the directional control valve 30 is not communicated with the first output end. In an alternative embodiment, the input of the first filter 40 is connected to a first output of the directional valve 30, the input of the second filter 50 is connected to a second output of the directional valve 30, and both the output of the first filter 40 and the output of the second filter 50 are connected to the input of the spray head 70 via the flow meter 60.
In an optional embodiment of the present invention, the first filter 40 and the second filter 50 are detachable filters, that is, the first filter 40 and the second filter 50 can be detached from the developer spraying apparatus, specifically, the first filter 40 and the second filter 50 can be detachably installed in the pipeline for transporting the developer, so that when the first filter 40 or the second filter 50 is blocked and needs to be replaced, the first filter 40 or the second filter 50 can be conveniently detached and replaced.
The flow meter 60 counts the flow rate of the developer flowing into the nozzle 70, and when the flow rate counted by the flow meter 60 is smaller than a preset first threshold value, the input end of the reversing valve 30 is switched from being communicated with the first output end to being communicated with the second output end, or the input end of the reversing valve 30 is switched from being communicated with the second output end to being communicated with the first output end, so that the switching between the first filter 40 and the second filter 50 is realized. In practical applications, the reversing valve 30 may be a manually controlled reversing valve, for example, when the operator observes that the flow counted by the flow meter 60 is smaller than the preset first threshold, the reversing valve 30 is manually operated to realize the developer flowing to the first filter 40 or the second filter 50. Of course, the reversing valve 30 may also be an automatically controlled reversing valve, for example, the reversing valve 30 may be an electromagnetic reversing valve, and when the flow counted by the flow meter 60 is smaller than a preset first threshold value, the electromagnetic reversing valve obtains electric energy to reverse to enable the developer to flow to the first filter 40 or the second filter 50, where the preset first threshold value may be a minimum flow value of the developer required by the spray head 70 to achieve normal development.
The utility model discloses developer spraying device's theory of operation as follows:
in the developing process, the pump body 20 conveys the developing solution in the liquid storage container 10 to the input end of the reversing valve 30, the developing solution passes through the reversing valve 30, then passes through the first filter 40 or the second filter 50, then flows into the flow meter 60, passes through the flow meter 60, and then is ejected from the nozzle 70. The flow meter 60 counts the flow of the developer, if the input end of the current reversing valve 30 is communicated with the first output end of the reversing valve 30, that is, the developer is filtered through the first filter 40 at present, the first filter 40 is blocked to cause insufficient flow, and the flow is smaller than a preset first threshold value, the input end of the reversing valve 30 can be controlled to be switched from being communicated with the first output end to being communicated with the second output end, so that the developer is filtered through the second filter 50, no developer flows through the first filter 40, and the first filter 40 can be replaced.
Similarly, if the input of the present directional valve 30 is in communication with the second output of the directional valve 30, that is, the developing solution is currently filtered through the second filter 50, the second filter 50 is clogged to cause an insufficient flow rate, the flow rate is smaller than a preset first threshold value, the input of the directional valve 30 can be controlled to switch from being communicated to the second output to being communicated to the first output, to filter the developing solution through the first filter 40, the second filter 50 may be replaced, it is thereby achieved that when clogging of the first filter 40 is not available a switch to use of the second filter 50 is made, or the second filter 50 is switched to use the first filter 40 when the blockage is unavailable, and the first filter 40 or the second filter 50 is replaced without stopping the developing device, so that the problem of reduced working time of the developing device caused by the fact that the developing device stops to replace the filter is solved, and the working time of the developing device is ensured.
As shown in fig. 3, the developer spraying apparatus according to another embodiment of the present invention further includes a controller 80 on the basis of the above embodiment, and the controller 80 is electrically connected to the flow meter 60 and the reversing valve 30 respectively.
Specifically, when the flow counted by the flow meter 60 is smaller than a preset first threshold, the controller 80 outputs a direction change signal to the direction change valve 30 to drive the input end of the direction change valve 30 to be switched from being communicated to the first output end to being communicated to the second output end, or to drive the input end of the direction change valve 30 to be switched from being communicated to the second output end to being communicated to the first output end.
In one example, the direction changing valve 30 is an electromagnetic direction changing valve, for example, a two-position three-way electromagnetic direction changing valve, the input end of the direction changing valve 30 can be controlled by the controller 80 to be communicated with the first output end or the second output end, for example, when the input end of the direction changing valve 30 is communicated with the first output end currently, the developing solution is filtered by the first filter 40, when the first filter 40 is blocked and the flow rate of the developing solution at the spray head 70 is insufficient, the flow rate counted by the flow meter 60 is smaller than a preset first threshold value, the controller 80 outputs an electric signal to the direction changing valve 30, the direction changing valve 30 is powered on, the input end of the direction changing valve 30 is communicated with the second output end to filter the developing solution by the second filter 50, no developing solution flows through the first filter 40 any more, the first filter 40 can be replaced without the development device being stopped, the operation time of the development device is ensured, and, the reversing valve 30 is controlled to reverse through the controller 80, and whether the first filter 40 and the second filter 50 are blocked or not is judged without personnel, so that the problem of low accuracy in judgment of personnel is solved, the reversing accuracy of the reversing valve 30 is improved, and the automation degree of the developing device can be improved.
As shown in fig. 3, in an alternative embodiment of the present invention, the developer spraying apparatus further includes a pressure gauge 100 for collecting the pressure of the developer, and the output end of the first filter 40 and the output end of the second filter 50 are connected to the input end of the flow meter 60 through the pressure gauge 100. When the pressure is smaller than the preset pressure threshold, the input end of the reversing valve 30 is switched from being communicated with the first output end to being communicated with the second output end, or the input end of the reversing valve 30 is switched from being communicated with the second output end to being communicated with the first output end.
In one example, the preset pressure threshold may be a minimum pressure of the developer required by the spray head 70 during spraying, if the first filter 40 or the second filter 50 is clogged to cause insufficient flow, the pressure of the developer output by the output end of the first filter 40 and the output end of the second filter 50 is reduced, and when the pressure is lower than the preset pressure threshold, the developer may be diverted by the diverting valve 30 to flow to the first filter 40 or the second filter 50. For example, if the direction changing valve 30 is an electromagnetic direction changing valve, a controller 80 may be provided, the controller 80 being electrically connected to the pressure gauge 100 and the direction changing valve 30, assuming that the input terminal of the direction changing valve 30 is now communicated with the first output terminal, the developing solution is filtered by the first filter 40, when the first filter 40 is blocked, the flow rate of the developer at the nozzle 70 is insufficient, the pressure value of the pressure gauge 100 is smaller than the preset pressure threshold value, the controller 80 outputs an electric signal to the reversing valve 30, the reversing valve 30 is powered on, the input end of the reversing valve 30 is communicated with the second output end, so as to filter the developing solution through the second filter 50, the developing solution does not flow through the first filter 40 any more, the first filter 40 can be replaced without stopping the developing device, the working time of the developing device is ensured, whether the filter is switched is determined by setting the pressure value of the developer collected by the pressure gauge 100, and the method is suitable for spraying scenes with high requirements of the sprayer 70 on the pressure value of the developer.
As shown in fig. 3, in an alternative embodiment of the present invention, the input end of the flow meter 60 is provided with a flow valve 90, wherein the flow valve 90 may be a valve body for adjusting the flow rate of the developer flowing into the flow meter 60, and in one example, the flow valve 90 may be an automatically controlled flow valve, that is, after the flow valve 90 is set with a flow value, the flow rate of the developer output from the flow valve 90 is maintained at the set flow value; in another example, the flow valve 90 may also be a flow valve controlled in real time by the controller 80. The flow valve 90 has an input connected to the output of the first filter 40 and the output of the second filter 50, for example, the flow valve 90 has an input connected to a pressure gauge 100, the flow valve 90 has an output connected to the output of the first filter 40 and the output of the second filter 50 via the pressure gauge 100, and the flow valve 90 has an output connected to the input of the flow meter 60. The flow valve 90 regulates the flow of developer into the input of the flow meter 60 when the flow counted by the flow meter 60 is less than a preset second threshold, wherein the preset second threshold is greater than a preset first threshold, which in one example may be 10L/MIN, and the second threshold may be slightly greater than the first threshold, such as 10.5L/MIN. In the case where the first filter 40 or the second filter 50 is not clogged and the flow rate is sufficient, when the flow rate counted by the flow meter 60 is smaller than the preset second threshold value and larger than the preset first threshold value, the flow valve 90 adjusts the flow rate of the developer flowing into the flow meter 60, the flow rate is made to be larger than the preset second threshold value, and as the use time of the developer spraying device increases, after the first filter 40 or the second filter 50 is blocked, even if the flow valve 90 is adjusted, the flow counted by the flow meter 60 is still smaller than the preset second threshold, which indicates that the first filter 40 or the second filter 50 is seriously blocked, the flow valve 90 cannot be used to adjust the flow larger than the preset second threshold, and as time continues to increase, the flow of the developer may be smaller than the preset first threshold, which cannot meet the spraying requirement, and the reversing valve 30 needs to be controlled to reverse to perform the switching of the filters. Through setting up flow valve 90, both can provide the developer of stable flow for shower nozzle 70, can provide the developer of different flow for shower nozzle 70 again, satisfied the development technology demand of different flow.
As shown in fig. 3, in the optional embodiment of the present invention, the input end of the pump body 20 and the output end of the pump body 20 are both provided with the first valve 110, the input end of the first filter 40, the output end of the first filter 40, the input end of the second filter 50 and the output end of the second filter 50 are both provided with the second valve 120, when the pump body 20 breaks down and needs to be maintained, the first valve 110 of the input end and the output end of the pump body 20 can be closed, the developer in the developer conveying pipeline is prevented from flowing into the pump body 20, and the pump body 20 is convenient to be maintained. Similarly, when the first filter 40 and the second filter 50 need to be replaced, the second valves 120 at the two ends of the first filter 40 and the second filter 50 can be also closed, so that the developer in the developer conveying pipeline is prevented from flowing into the first filter 40 and the second filter 50, and the first filter 40 and the second filter 50 are convenient to maintain.
As shown in fig. 3, in the optional embodiment of the present invention, the developer spraying apparatus further includes a developer recycling component 130, an output end of the developer recycling component 130 is connected to a liquid inlet of the liquid storage container 10, wherein the developer recycling component 130 can be a component capable of recycling developer in the developing device, and the component 130 can recycle the extra developer through the developer, so as to realize the recycling of the developer and improve the utilization rate of the developer.
The embodiment of the utility model provides a still provide a developing device, this developing device include the development platform with the utility model discloses the developer spraying device of any embodiment, wherein, the development platform is used for bearing the base plate of treating the development, and developer spraying device is used for to base plate spraying developer, and in an example, the base plate can be glass substrate, metal substrate etc. and developer spraying device's shower nozzle is accomplished the development to base plate spraying developer.
The utility model discloses developing device includes developing solution spraying apparatus, in this developing solution spray head device, when the flow is less than predetermined first threshold value, the input of switching-over valve switches to and communicates to the second output from intercommunication to first output, perhaps the input of switching-over valve switches to and communicates to first output from intercommunication to the second output, it blocks up to switch to using the second filter to have realized that first filter blocks up when unavailable, perhaps the second filter blocks up to switch to using first filter when unavailable, it changes first filter or second filter to need not developing device to shut down, the problem that developing device's activity duration that leads to developing device's activity duration to change filter has been solved, developing device's activity duration has been guaranteed.
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.
Claims (10)
1. The developing solution spraying device is characterized by comprising a liquid storage container for storing developing solution, a pump body, a reversing valve, a first filter, a second filter, a spray head and a flow meter for counting the flow of the developing solution;
the liquid storage container is provided with a liquid outlet end for outputting the developing solution;
the input end of the pump body is connected with the liquid outlet end of the liquid storage container, and the output end of the pump body is connected with the input end of the reversing valve;
the reversing valve comprises a first output end and a second output end, the input end of the first filter is connected with the first output end of the reversing valve, the input end of the second filter is connected with the second output end of the reversing valve, and the output ends of the first filter and the second filter are connected with the input end of the spray head through the flow meter;
when the flow is smaller than a preset first threshold value, the input end of the reversing valve is switched to be communicated with the second output end from being communicated with the first output end, or the input end of the reversing valve is switched to be communicated with the first output end from being communicated with the second output end.
2. The developer spraying apparatus according to claim 1, further comprising a controller, wherein the controller is electrically connected to the flow meter and the reversing valve, respectively, and when the flow collected by the flow meter is smaller than a preset first threshold, the controller outputs a reversing signal to the reversing valve to drive an input end of the reversing valve to be switched from being communicated to the first output end to being communicated to the second output end, or to drive an input end of the reversing valve to be switched from being communicated to the second output end to being communicated to the first output end.
3. The developer spraying apparatus according to claim 1, further comprising a pressure gauge for collecting a pressure value of the developer, wherein the output end of the first filter and the output end of the second filter are connected to the input end of the flow meter through the pressure gauge;
when the pressure value is smaller than a preset pressure threshold value, the input end of the reversing valve is switched to be communicated with the second output end from being communicated with the first output end, or the input end of the reversing valve is switched to be communicated with the first output end from being communicated with the second output end.
4. The developer spraying apparatus according to claim 2, wherein a flow valve is provided at an input end of the flow meter, an input end of the flow valve is connected to output ends of the first filter and the second filter, an output end of the flow valve is connected to an input end of the flow meter, and the controller is electrically connected to the flow valve;
and when the flow rate is smaller than a preset second threshold value, the flow valve adjusts the flow rate of the developing solution flowing into the input end of the flow meter.
5. The developer spraying apparatus according to any one of claims 1 to 4, wherein the input end of the pump body and the output end of the pump body are each provided with a first valve.
6. The developer spraying apparatus according to any one of claims 1 to 4, wherein the input of the first filter, the output of the first filter, the input of the second filter and the output of the second filter are provided with second valves.
7. The developer spraying apparatus according to any one of claims 1 to 4, wherein said first filter and said second filter are each a removable filter.
8. The developer spraying apparatus according to any one of claims 1 to 4, wherein said switching valve is an electromagnetic switching valve.
9. The developer spraying apparatus according to any one of claims 1 to 4, further comprising a developer recovery unit, wherein an output end of the developer recovery unit is connected to a liquid inlet end of the liquid storage container.
10. A developing apparatus comprising a developing station and the developer spraying device according to any one of claims 1 to 9;
the developing platform is used for bearing a substrate to be developed;
and the developing solution spraying device sprays the developing solution to the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022435291.0U CN214160198U (en) | 2020-10-28 | 2020-10-28 | Developing solution spraying device and developing equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022435291.0U CN214160198U (en) | 2020-10-28 | 2020-10-28 | Developing solution spraying device and developing equipment |
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| CN214160198U true CN214160198U (en) | 2021-09-10 |
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