CN214151374U

CN214151374U - UV lamp convenient to disassemble

Info

Publication number: CN214151374U
Application number: CN202120306902.3U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2021-02-03
Filing date: 2021-02-03
Publication date: 2021-09-07
Anticipated expiration: 2031-02-03

Abstract

The utility model discloses a UV lamp convenient to disassemble, which comprises a bracket, a UV lamp module is evenly clamped on the right side surface of the bracket, a protective layer is pasted on the right side surface of the bracket, a metal plate spacing structure is fixedly connected on the left side surface of the bracket, and a water cooling structure is fixedly connected on the left side surface of the metal plate spacing structure; according to the scheme, the UV lamp modules are clamped on the bracket, and the clamped UV lamp modules are uniformly distributed, so that the uniformity of ultraviolet light distribution is ensured; meanwhile, when the local UV lamp is damaged, the lamp can be simply disassembled and replaced; the scheme adopts evenly distributed's UV lamp module group setting on the support, and the support size can be adjusted according to the size of wafer, satisfies the demand that the impression wafer grow gradually.

Description

UV lamp convenient to disassemble

Technical Field

The utility model relates to a nanoimprint lithography technology field specifically is a convenient UV lamp of dismantling.

Background

The nanoimprint technology is a technology for transferring a micro-nano structure on a template to a material to be processed by assistance of photoresist. Nanoimprint can be classified into thermal imprint, ultraviolet imprint, micro-contact imprint, step imprint, and the like, according to a curing method, an imprint area, a template, and the like.

Ultraviolet imprinting is the most common imprinting technology in the prior art, high temperature and high pressure are not needed, the problem that a mold and a substrate are deformed due to the generation of internal stress is avoided, the service life of the mold is prolonged, and the process period is shortened. However, as the size of the imprinted wafer becomes larger, the size of the required UV lamp becomes larger, and the traditional UV lamp is easy to cause local damage or poor uniformity and other problems; to solve the above problems, we propose a UV lamp that is easily disassembled.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a UV lamp of convenient dismantlement to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a convenient UV lamp of dismantling, includes the support, the even joint of right flank of support has the UV lamp module group, the inoxidizing coating has been pasted to the support right flank, the left flank fixedly connected with metal sheet interval structure of support, the left surface fixedly connected with water-cooling structure of metal sheet interval structure.

Preferably, the UV lamp module is including seting up the recess in the support right flank, the joint groove has been seted up to both sides around the recess inner wall, the recess inner wall edge paste is fixed with the rubber circle, it has the UV lamp of laminating rubber circle to peg graft in the recess, the fixed fixture block that is equipped with joint in the joint inslot of lateral wall around the UV lamp.

Preferably, the metal plate spacing structure comprises a metal plate, connecting lug plates are integrally formed at the upper end and the lower end of the metal plate, the connecting lug plates are fixedly connected with the support and the outer wall of the water cooling structure through screws, through holes are uniformly formed in the metal plate, heat-conducting columns are inserted in the through holes, and the heat-conducting columns are attached to the outer wall of the water cooling structure.

Preferably, the water-cooling structure includes hollow shell, hollow shell inner chamber coils there is snakelike return bend, hollow shell fixed intercommunication has circulating pipe is run through at the both ends of snakelike return bend.

Compared with the prior art, this scheme has designed the convenient UV lamp of dismantling, has following beneficial effect:

(1) according to the scheme, the UV lamp modules are clamped on the bracket, and the clamped UV lamp modules are uniformly distributed, so that the uniformity of ultraviolet light distribution is ensured; meanwhile, when the local UV lamp is damaged, the lamp can be simply disassembled and replaced.

(2) The scheme adopts evenly distributed's UV lamp module group setting on the support, and the support size can be adjusted according to the size of wafer, satisfies the demand that the impression wafer grow gradually.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a structural part of a UV lamp module according to the present invention;

fig. 3 is the schematic diagram of the internal structure of the middle water-cooling structure of the present invention.

In the figure: 1 water-cooling structure, 11 hollow casings, 12 snakelike return bends, 13 circulating pipe, 2 metal sheet alternate structure, 21 metal sheets, 22 through-holes, 23 heat conduction post, 3 supports, 4UV lamp module, 41 recesses, 42 joint groove, 43 rubber circles, 44UV lamps, 45 fixture blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2 and fig. 3, the present invention provides a technical solution: the utility model provides a convenient UV lamp of dismantling, includes support 3, and the even joint of right flank of support 3 has

UV lamp module

4, and 3 right flanks of support paste has inoxidizing coating 31, and the left flank fixedly connected with metal sheet of support 3 separates structure 2, and the left surface fixedly connected with water-cooling structure 1 that metal sheet separates structure 2.

The UV lamp modules 4 are clamped on the bracket 3, and the clamped UV lamp modules 4 are uniformly distributed, so that the uniformity of ultraviolet light distribution is ensured; and can be easily removed for replacement when the localized UV lamp 44 is damaged.

UV lamp module group 4 is including offering in the recess 41 of 3 right flank of support, and joint groove 42 has been seted up to both sides around the 41 inner walls of recess, and 41 inner walls edge paste of recess is fixed with rubber circle 43, and it has the UV lamp 44 of laminating rubber circle 43 to peg graft in the recess 41, and the fixed fixture block 45 that is equipped with joint in joint groove 42 of lateral wall around the UV lamp 44.

Through the setting of rubber circle 43, improve the leakproofness between UV lamp 44 edge and the recess 41, avoid the entering of outside dust and moisture, there is the metal contact of connecting the power recess 41 bottom surface, and UV lamp 44 lower extreme is equipped with the power connection sheetmetal that pastes alloy metal contact, realizes UV lamp 44's power connection, and the cooperation through fixture block 45 and joint groove 42 carries out the joint to UV lamp 44 fixed, and dismantlement that can be simple is changed.

The metal plate separation structure 2 comprises a metal plate 21, connecting lug plates 24 are integrally formed at the upper end and the lower end of the metal plate 21, the connecting lug plates 24 are fixedly connected with the support 3 and the outer wall of the water cooling structure 1 through screws, through holes 22 are uniformly formed in the metal plate 21, heat-conducting columns 23 are inserted in the through holes 22, and the heat-conducting columns 23 are attached to the outer wall of the water cooling structure 1.

Through 21 interval water-cooling structures 1 of metal sheet and UV lamp module 4 for the water-cooling evenly cools down UV lamp module 4, and heat conduction post 23 is used for transmitting the degree of coldness, and evenly distributed's heat conduction post 23 makes the refrigeration effect more even.

The water cooling structure 1 comprises a hollow shell 11, a snake-shaped bent pipe 12 is coiled in the inner cavity of the hollow shell 11, and two ends of the snake-shaped bent pipe 12 penetrate through the hollow shell 11 and are fixedly communicated with a circulating water pipe 13; circulating pipe 13 connects the control by temperature change water tank, utilizes the control by temperature change water tank to refrigerate inside water, connects circulating water pump on circulating pipe 13, utilizes the circulating water pump of break-make to supply water for circulating pipe 13 for cold water realizes the refrigeration effect at snakelike return bend 12 inner loop.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a UV lamp of convenient dismantlement which characterized in that: including support (3), the even joint of right flank of support (3) has UV lamp module (4), support (3) right flank is pasted and is had inoxidizing coating (31), the left flank fixedly connected with metal sheet interval structure (2) of support (3), the left surface fixedly connected with water-cooling structure (1) of metal sheet interval structure (2).

2. A UV lamp facilitating disassembly according to claim 1, wherein: UV lamp module (4) is including offering in recess (41) of support (3) right flank, joint groove (42) have been seted up to both sides around recess (41) inner wall, recess (41) inner wall edge paste is fixed with rubber circle (43), it has UV lamp (44) of laminating rubber circle (43) to peg graft in recess (41), the fixed fixture block (45) that are equipped with joint in joint groove (42) of lateral wall around UV lamp (44).

3. A UV lamp facilitating disassembly according to claim 1, wherein: metal sheet interval structure (2) include metal sheet (21), the upper and lower both ends integrated into one piece of metal sheet (21) has engaging lug board (24), engaging lug board (24) are through screw and support (3) and water-cooling structure (1) outer wall fixed connection, through-hole (22) have evenly been seted up on metal sheet (21), it has heat conduction post (23) to peg graft in through-hole (22), heat conduction post (23) laminating water-cooling structure (1) outer wall.

4. A UV lamp facilitating disassembly according to claim 1, wherein: water-cooling structure (1) includes hollow casing (11), hollow casing (11) inner chamber is coiled there is snakelike return bend (12), the both ends of snakelike return bend (12) are run through hollow casing (11) and are fixed the intercommunication have circulating water pipe (13).