CN214122276U

CN214122276U - Atomic force microscope probe clamping auxiliary device

Info

Publication number: CN214122276U
Application number: CN202022614276.2U
Authority: CN
Inventors: 张丽; 李天军
Original assignee: Shaoxing Interfer Photoelectric Technology Co ltd
Current assignee: Shaoxing Interfer Photoelectric Technology Co ltd
Priority date: 2020-11-12
Filing date: 2020-11-12
Publication date: 2021-09-03
Anticipated expiration: 2030-11-12

Abstract

The utility model provides an atomic force microscope probe clamping auxiliary device belongs to atomic force microscope technical field. The probe clamp comprises a shell with an inward-sunken storage groove, wherein the cross section of the storage groove is rectangular, and a plurality of probe clamps connected with the storage groove in a sliding manner are arranged in the storage groove. Every probe presss from both sides the homoenergetic and fixes a probe in the probe storage passageway through probe clamping mechanism, can once send into many probes to the probe storage passageway through a plurality of probe entrances, external actuating mechanism's actuating lever can stretch into from the probe entrance of the top, and it is ejecting from the probe storage passageway with the probe in the probe clamp of the top, make the probe move and transfer to probe mounted position to the probe export, the probe installation of the top is outer back, it links to each other with probe entry and probe export to store the passageway through the probe of all probe clamps upward movements of actuating mechanism drive to next probe clamp, in order to carry out next needle changing.

Description

Atomic force microscope probe clamping auxiliary device

Technical Field

The utility model belongs to the technical field of the atomic force microscope, a atomic force microscope probe clamping auxiliary device is related to.

Background

Atomic Force Microscope (AFM) has been widely used in semiconductor sample testing, and its working principle is to study the surface structure and properties of substances by detecting the very weak interatomic interaction Force between the surface of a sample to be tested and a micro Force sensitive element (probe). Generally, a probe includes a tip and a micro-cantilever, and a tip of the micro-cantilever, which is extremely sensitive to weak force, is fixed to a probe base, and the tip of the front end of the micro-cantilever is close to a sample surface. When the distance between the needle tip and the surface of the sample is very small, very weak attraction or repulsion force is generated between atoms of the needle tip and the surface of the sample, so that the micro-cantilever is deformed or the motion state is changed. In the scanning process, the micro-cantilever with the needle point moves up and down in the direction vertical to the surface of the sample, the state change of the micro-cantilever is collected through the reflected laser beam and the photoelectric detection system thereof, and the position corresponding relation between the state change of the micro-cantilever and each scanning point is measured, so that the physicochemical properties such as the surface structure of the material with atomic molecular level resolution and the like are obtained.

However, the probe of the atomic force microscope is easy to be damaged when in use, so the atomic force microscope often needs to replace the probe to meet the test requirement in the use process, but the probe replacement in the prior art needs manual replacement, and the work efficiency is low.

In order to overcome the deficiencies of the prior art, various solutions have been proposed through continuous research, such as chinese patent disclosing a probe clamp for moving an atomic force microscope probe [ application No.: 200810070695.5] comprising a probe shaft and a probe bonding head located at the front end of the probe shaft, wherein: the probe bonding head is composed of cured adhesive material, wherein the adhesive material is prepared by uniformly mixing 10 parts by weight of dimethoxy silane with the specification of 184 type SILICONE ELASTOMER KIT and 2-4 parts by weight of SILICONE resin curing agent with the name of tetramethylvinylcycloterasiloxane, and then naturally curing in the air at room temperature. The probe clamp has simple structure and low manufacturing cost, and is far lower than the cost of special tweezers for taking and placing probes. The probe is easy to move, and the success rate of movement is very high, but the problems are also existed.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the above-mentioned problem, provide an atomic force microscope probe clamping auxiliary device.

In order to achieve the above purpose, the utility model adopts the following technical proposal:

the utility model provides an atomic force microscope probe clamping auxiliary device, is including the casing that has inside sunken holding tank, the cross-section of holding tank be the rectangle, the holding tank in be equipped with a plurality of probe clamps with holding tank sliding connection, the probe press from both sides the inside wall of lateral wall and holding tank and support and lean on, the probe press from both sides the level in be provided with the cross-section and be circular shape probe storage channel, probe storage channel in be equipped with probe clamping mechanism, the lateral wall upside of casing still be equipped with the probe export that the level set up, the casing keep away from the probe entry that still is equipped with a plurality of levels setting on the lateral wall of probe export one side, probe entry and probe storage channel link to each other.

In the above-mentioned atomic force microscope probe clamping auxiliary device, the probe clamping mechanism includes a front end clamping component and a rear end clamping component, the front end clamping component is disposed on one side of the probe storage channel close to the probe outlet, and the rear end clamping component is disposed on one side of the probe storage channel close to the probe inlet.

In foretell an atomic force microscope probe clamping auxiliary device, front end clamping unit include that two set up respectively and store the passageway upper and lower side press from both sides tight groove, press from both sides tight inslot and be equipped with tight piece of clamp, press from both sides and press from both sides between the tight piece of clamp in the inslot and press from both sides tight clearance, press from both sides tight piece and press from both sides and still be equipped with the elastic component that can drive two tight pieces of clamp and draw close each other between the groove, rear end clamping unit's structure the same with front end clamping unit's structure.

In the above-mentioned atomic force microscope probe clamping auxiliary device, a clamping gap between two clamping blocks in the rear end clamping assembly is larger than a clamping gap between two clamping blocks in the front end clamping assembly.

In the atomic force microscope probe clamping auxiliary device, two limiting grooves with rectangular cross sections are further arranged on two sides of the clamping groove, the two limiting grooves are symmetrically arranged along the central line of the clamping groove, and two limiting blocks inserted into the limiting grooves are further arranged on two sides of the clamping block.

In the above-mentioned atomic force microscope probe clamping auxiliary device, the elastic member is a compression spring.

In the above-mentioned atomic force microscope probe clamping auxiliary device, the end of the clamping block is further provided with a cork pad.

In the atomic force microscope probe clamping auxiliary device, the bottom of the storage tank is also provided with a probe clamp driving groove, and the probe clamp driving groove penetrates through the shell along the vertical direction.

In the atomic force microscope probe clamping auxiliary device, the probe clamp is further provided with four positioning holes which are connected with each other and are rectangular, and the cross section of each positioning hole is circular and penetrates through the probe clamp along the vertical direction.

In foretell an atomic force microscope probe clamping auxiliary device, casing bottom still be equipped with inside sunken rectangular channel, the rectangular channel in still be equipped with the cross-section and be circular shape thimble groove, the rectangular channel on still be connected with the thimble through the cross-section for annular magnetite detachable, the thimble insert to thimble inslot and thimble afterbody still even have a thimble seat, the thimble seat be iron plate, the external diameter of thimble and the length of the internal diameter looks adaptation of probe entry and thimble the same with the length of probe entry.

Compared with the prior art, the utility model has the advantages of:

1. every probe presss from both sides the homoenergetic and fixes a probe in the probe storage passageway through probe clamping mechanism, can once send into many probes to the probe storage passageway through a plurality of probe entrances, external actuating mechanism's actuating lever can stretch into from the probe entrance of the top, and it is ejecting from the probe storage passageway with the probe in the probe clamp of the top, make the probe move and transfer to probe mounted position to the probe export, the probe installation of the top is outer back, it links to each other with probe entry and probe export to store the passageway through the probe of all probe clamps upward movements of actuating mechanism drive to next probe clamp, in order to carry out next needle changing.

2. The front end clamping assembly and the rear end clamping assembly are matched to fix the probe, so that the probe can be prevented from being damaged due to external vibration.

3. Thereby the elastic component in two tight grooves of clamp in the front end clamping assembly can drive two and press from both sides tight piece and draw close each other and press from both sides tightly the probe front end, thus the rear end clamping assembly is the same with front end clamping assembly's structure and can press from both sides tightly the probe rear end, prevents that the probe from leading to the probe to damage because of external vibrations.

4. The thimble seat made of the iron plate can be matched with the magnet to fix the thimble and the thimble seat on the shell, the thimble can assist in completely jacking the probe into the probe storage channel from the probe inlet, the length of the thimble is the same as that of the probe inlet, and the tail part of the probe can be prevented from not entering the probe storage channel, so that the probe is clamped or damaged when being moved.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.

Drawings

Fig. 1 is a schematic diagram of the overall structure provided by the present invention;

fig. 2 is a top view of the present invention;

fig. 3 is an enlarged schematic view at a in fig. 1.

Detailed Description

As shown in fig. 1-3, an atomic force microscope probe clamping auxiliary device, including the casing 2 that has inside sunken holding tank 1, the cross-section of holding tank 1 be the rectangle, holding tank 1 in be equipped with a plurality of with holding tank 1 sliding connection's probe clamp 3, the probe press from both sides 3 lateral wall and the inside wall of holding tank 1 support and lean on, probe clamp 3 in the level be provided with the cross-section and be circular shape probe storage passageway 4, probe storage passageway 4 in be equipped with probe clamping mechanism 5, the lateral wall upside of casing 2 still be equipped with the probe export 6 of level setting, casing 2 keep away from and still be equipped with the probe entry 7 that a plurality of levels set up on the lateral wall of probe export 6 one side, probe entry 7 link to each other with probe storage passageway 4.

In this embodiment, each probe clip 3 can fix a probe in the probe storage channel 4 through the probe clamping mechanism 5, can once send many probes into the probe storage channel 4 through a plurality of probe inlets 7, the actuating lever of the external drive mechanism can stretch into from the probe inlet of the top, and push out the probe in the probe clip of the top from the probe storage channel 4, make the probe move to the probe outlet 6 and transfer to the probe installation position, the probe installation of the top is outer, store the channel 4 and link to each other with probe inlet and probe outlet 6 through the probe that all probe clips upward movement of drive mechanism in next probe clip, in order to carry out next needle change.

Specifically, referring to fig. 1-3, the probe clamping mechanism 5 includes a front clamping assembly 8 and a rear clamping assembly 9, the front clamping assembly 8 is disposed on the side of the probe storage channel 4 near the probe outlet 6, and the rear clamping assembly 9 is disposed on the side of the probe storage channel 4 near the probe inlet 7. The front end clamping assembly 8 and the rear end clamping assembly 9 are matched to fix the probe, so that the probe can be prevented from being damaged due to external vibration.

Preferably, as shown in fig. 1 to 3, the front end clamping assembly 8 includes two clamping grooves 10 respectively disposed on the upper and lower sides of the probe storage channel 4, a clamping block 11 is disposed in the clamping groove 10, a clamping gap 12 is disposed between the clamping blocks 11 in the two clamping grooves 10, an elastic member 13 is further disposed between the clamping block 11 and the clamping groove 10, the elastic member can drive the two clamping blocks 11 to approach each other, and the structure of the rear end clamping assembly 9 is the same as that of the front end clamping assembly 8. The elastic piece 13 in the two clamping grooves 10 in the front end clamping assembly 8 can drive the two clamping blocks 11 to mutually approach to clamp the front end of the probe, and the rear end clamping assembly 9 and the front end clamping assembly 8 have the same structure and can clamp the rear end of the probe, so that the probe is prevented from being damaged due to external vibration.

Preferably, as shown in fig. 1-3, the clamping gap 12 between the two clamping blocks 11 in the rear clamping assembly 9 is larger than the clamping gap 12 between the two clamping blocks 11 in the front clamping assembly 8, which ensures that clamping is also performed when the probe front end diameter is smaller than the rear end.

Preferably, as shown in fig. 1 to fig. 3, two limiting grooves 14 with rectangular cross sections are further disposed on two sides of the clamping groove 10, the two limiting grooves 14 are symmetrically disposed along a center line of the clamping groove 10, and two limiting blocks 15 inserted into the limiting grooves 14 are further disposed on two sides of the clamping block 11. The limiting groove 14 is matched with the limiting block 15 to limit the clamping block 11, and the clamping block 11 can be prevented from being separated from the clamping groove.

Preferably, as shown in connection with fig. 1-3, the elastic member 13 is a compression spring.

Preferably, as shown in fig. 1-3, the end of the clamping block 11 is further provided with a cork pad 16, and the cork pad 16 can prevent the probe from being scratched.

Preferably, as shown in fig. 1 to 3, the bottom of the storing bath 1 is further provided with a probe holder driving groove 17, and the probe holder driving groove 17 penetrates the case 2 in a vertical direction. The driving rod of the external driving mechanism can penetrate into the probe clamp driving groove 17 so as to drive all the probe clamps to synchronously move upwards.

Preferably, as shown in fig. 1-3, the probe clamp 3 is further provided with four connected rectangular positioning holes 18, and the cross section of each positioning hole 18 is circular and vertically penetrates through the probe clamp 3. The positioning hole 18 on the probe clamp 3 can be matched with the positioning rod to position and limit the probe clamp, and the probe clamp is prevented from being separated from the shell after moving out of the storage tank 1 and being incapable of resetting.

Preferably, as shown in fig. 1 to 3, the bottom of the casing 2 is further provided with an inward recessed rectangular groove 19, the rectangular groove 19 is further provided with a thimble groove 20 having a circular cross section, the rectangular groove 19 is further detachably connected with a thimble 22 by a magnet 21 having an annular cross section, the thimble 22 is inserted into the thimble groove 20, the tail of the thimble 22 is further connected with a thimble seat 23, the thimble seat 23 is an iron plate, the outer diameter of the thimble 22 is matched with the inner diameter of the probe inlet 7, and the length of the thimble 22 is the same as the length of the probe inlet 7. The thimble seat made of iron plates can be matched with the magnet to fix the thimble 22 and the thimble seat on the shell, the thimble can assist in completely jacking the probe into the probe storage channel 4 from the probe inlet, the length of the thimble 22 is the same as that of the probe inlet 7, and the tail part of the probe can be prevented from not entering the probe storage channel 4, so that the probe clamp is blocked or damaged when being moved. The rectangular groove 19 can facilitate the removal of the thimble seat 23, and the depth of the rectangular groove 19 is greater than or equal to the thickness of the thimble seat 23.

The utility model discloses a theory of operation is: each probe clamp 3 can fix a probe in the probe storage channel 4 through the probe clamping mechanism 5, a plurality of probes can be sent into the probe storage channel 4 through a plurality of probe inlets 7 at one time, a driving rod of an external driving mechanism can extend into the probe inlet from the uppermost side and eject the probe in the probe clamp from the probe storage channel 4, so that the probe moves towards a probe outlet 6 and is transferred to a probe mounting position, and after the probe at the uppermost side is mounted, all the probe clamps are driven by the driving mechanism to move upwards to the probe storage channel 4 in the next probe clamp to be connected with the probe inlet and the probe outlet 6 so as to carry out next needle changing;

the front end clamping assembly 8 and the rear end clamping assembly 9 are matched to fix the probe, so that the probe can be prevented from being damaged due to external vibration, the elastic pieces 13 in the two clamping grooves 10 in the front end clamping assembly 8 can drive the two clamping blocks 11 to mutually approach to clamp the front end of the probe, and the rear end clamping assembly 9 and the front end clamping assembly 8 have the same structure, so that the rear end of the probe can be clamped, and the probe is prevented from being damaged due to external vibration;

thereby the actuating lever of external actuating mechanism can penetrate from probe clamp drive groove 17 and can drive the synchronous upward movement of whole probe clamps, locating hole 18 cooperation locating lever on the probe clamp 3 can fix a position and spacing to the probe clamp, prevent that the probe clamp from moving and break away from with the casing after holding tank 1 is outer, can't reset, the thimble seat of making by iron plate can cooperate the magnetite to fix thimble 22 and thimble seat on the casing, the thimble can assist with the probe from probe entry complete jack-in to probe storage channel 4 in, the length of thimble 22 and the length of probe entry 7 the same can prevent that probe afterbody part from not getting into in probe storage channel 4, thereby lead to appearing blocking or probe damage when removing the probe clamp. The rectangular groove 19 can facilitate the removal of the thimble seat 23, and the depth of the rectangular groove 19 is greater than or equal to the thickness of the thimble seat 23.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims

1. An atomic force microscope probe clamping auxiliary device comprises a shell (2) with an inward-concave storage groove (1), it is characterized in that the cross section of the storage groove (1) is rectangular, a plurality of probe clips (3) which are connected with the storage groove (1) in a sliding way are arranged in the storage groove (1), the outer side wall of the probe clamp (3) is abutted against the inner side wall of the storage tank (1), a probe storage channel (4) with a circular section is horizontally arranged in the probe clamp (3), a probe clamping mechanism (5) is arranged in the probe storage channel (4), a horizontally arranged probe outlet (6) is also arranged on the upper side of the side wall of the shell (2), the probe inlet (7) that still is equipped with a plurality of levels setting on the lateral wall of casing (2) keep away from probe export (6) one side, probe inlet (7) link to each other with probe storage channel (4).

2. The probe clamping auxiliary device for the atomic force microscope according to claim 1, wherein the probe clamping mechanism (5) comprises a front clamping assembly (8) and a rear clamping assembly (9), the front clamping assembly (8) is disposed on the side of the probe storage channel (4) close to the probe outlet (6), and the rear clamping assembly (9) is disposed on the side of the probe storage channel (4) close to the probe inlet (7).

3. The atomic force microscope probe clamping auxiliary device according to claim 2, wherein the front end clamping assembly (8) comprises two clamping grooves (10) respectively arranged on the upper side and the lower side of the probe storage channel (4), clamping blocks (11) are arranged in the clamping grooves (10), a clamping gap (12) is arranged between the clamping blocks (11) in the two clamping grooves (10), an elastic member (13) capable of driving the two clamping blocks (11) to be close to each other is further arranged between the clamping blocks (11) and the clamping grooves (10), and the structure of the rear end clamping assembly (9) is the same as that of the front end clamping assembly (8).

4. The clamping aid for the AFM probe according to claim 3, wherein the clamping gap (12) between the two clamping blocks (11) in the rear clamping assembly (9) is larger than the clamping gap (12) between the two clamping blocks (11) in the front clamping assembly (8).

5. The atomic force microscope probe clamping auxiliary device according to claim 3, wherein two limiting grooves (14) with rectangular cross sections are further arranged on two sides of the clamping groove (10), the two limiting grooves (14) are symmetrically arranged along a center line of the clamping groove (10), and two limiting blocks (15) inserted into the limiting grooves (14) are further arranged on two sides of the clamping block (11).

6. The atomic force microscope probe clamping aid device according to claim 3, 4 or 5, wherein the elastic member (13) is a compression spring.

7. The atomic force microscope probe clamping auxiliary device is characterized in that a cork pad (16) is further arranged at the end part of the clamping block (11).

8. An atomic force microscope probe clamping auxiliary device according to any one of claims 1-5, characterized in that the bottom of the storage tank (1) is further provided with a probe clamp driving groove (17), and the probe clamp driving groove (17) penetrates through the housing (2) along the vertical direction.

9. The probe clamping auxiliary device for the atomic force microscope according to any one of claims 1 to 5, wherein the probe clamp (3) is further provided with four connected rectangular positioning holes (18), and the cross section of each positioning hole (18) is circular and penetrates through the probe clamp (3) along the vertical direction.

10. The atomic force microscope probe clamping auxiliary device according to any one of claims 1-5, wherein an inwardly recessed rectangular groove (19) is further formed in the bottom of the shell (2), a thimble groove (20) with a circular cross section is further formed in the rectangular groove (19), a thimble (22) is detachably connected to the rectangular groove (19) through a magnet (21) with an annular cross section, the thimble (22) is inserted into the thimble groove (20), a thimble seat (23) is further connected to the tail of the thimble (22), the thimble seat (23) is an iron plate, the outer diameter of the thimble (22) is matched with the inner diameter of the probe inlet (7), and the length of the thimble (22) is the same as that of the probe inlet (7).