CN214108106U

CN214108106U - Cleaning device for photoetching machine chip carrying table

Info

Publication number: CN214108106U
Application number: CN202022430056.4U
Authority: CN
Inventors: 张俊杰
Original assignee: Shanghai Lieth Precision Equipment Co ltd
Current assignee: Shanghai Lieth Precision Equipment Co ltd
Priority date: 2020-10-28
Filing date: 2020-10-28
Publication date: 2021-09-03
Anticipated expiration: 2030-10-28

Abstract

The utility model discloses a photoetching machine carries piece platform cleaning device, including the clean case, the lower surface of clean case is open structure, threaded hole has been seted up respectively to the right side wall of clean case, the inner wall of screw hole threaded connection has the screw thread jackscrew respectively, two the inner chamber of extending to the clean case of the looks remote site of screw thread jackscrew, the surface threaded connection of screw thread jackscrew has fixation nut. This photoetching machine carries piece platform cleaning device, through setting up the inside mechanism of blowing of clean box and function case, one set of cleaning device that dust absorption mechanism and wiper mechanism constitute, can blow dirt to the photoetching machine slide holder, dust absorption and alcohol cleaning and disinfecting's combination operation, lower surface through setting up the clean box is open structure, can conveniently pass through the pulley with the clean box and remove the top position of slide holder, make the slide holder be located the inner chamber of clean box, make the washing environment be in semi-enclosed state, the effect of cleaning has been improved.

Description

Cleaning device for photoetching machine chip carrying table

Technical Field

The utility model relates to a cleaning device technical field specifically is photoetching machine film carrier cleaning device.

Background

The common photoetching machine is a mask aligning photoetching machine, the general photoetching process is carried out by cleaning and drying the surface of a silicon wafer, coating a bottom, spin-coating a photoresist, soft baking, aligning exposure, post baking, developing, hard baking, etching and other procedures, the photoetching means that a pattern process is made by light, the photoresist is homogenized on the surface of the silicon wafer, then a device or a circuit structure is temporarily 'copied' to the silicon wafer in the process of transferring the pattern on the mask plate to the photoresist, and in a long chip manufacturing industrial chain, the photoetching machine is a dazzling bright bead which represents the top level of human technology development (the other is an aeroengine) and is necessary precision equipment in chip manufacturing.

In the photoetching process of the photoetching machine, if a slide holder of the photoetching machine is polluted by dust particles, the problems of local damage of products and the like can be caused, even the products are scrapped under severe conditions, and economic loss is brought to enterprises.

To this end, we provide a cleaning apparatus for a wafer stage of a lithographic apparatus.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a photoetching machine carries piece platform cleaning device to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a cleaning device for a photo-etching machine carrying table comprises a cleaning box, wherein the lower surface of the cleaning box is of an open structure, threaded holes are respectively formed in the right side wall and the right side wall of the cleaning box, threaded jackscrews are respectively in threaded connection with the inner walls of the threaded holes, the opposite ends of the two threaded jackscrews extend to the inner cavity of the cleaning box, fixing nuts are in threaded connection with the outer surfaces of the threaded jackscrews, one ends, far away from the fixing nuts, of the threaded jackscrews are rotatably connected with fixing blocks through rotating shafts, one sides, far away from the threaded jackscrews, of the fixing blocks are fixedly connected with rubber blocks, a carrying table is arranged between the opposite surfaces of the two rubber blocks, a function box is fixedly connected with the upper surface of the cleaning box, an air blowing mechanism, a dust sucking mechanism and a cleaning mechanism are respectively arranged in the inner cavity of the function box, the air blowing mechanism comprises an air fixing blower, and the dust sucking mechanism comprises a micro dust collector, the cleaning mechanism comprises a spray bottle.

Preferably, the through-hole has been seted up to clean case left side wall in the position on screw hole upper portion, the inner wall fixedly connected with air-supply line of through-hole, the first rubber hose of left side air inlet end fixedly connected with of air-supply line, the one end fixedly connected with air-out pipe that the air-supply line was kept away from to first rubber hose, the one end that the air-out pipe was kept away from first rubber hose run through the left side wall of function case and with the air-out end fixed connection of air-blower, the air-out end of air-supply line extends to slide glass platform left side and is close to the position of slide glass bench surface.

Preferably, the through-hole has been seted up to the position that the clean box right side wall is close to interior roof, the first trachea of inhaling of inner wall fixedly connected with of through-hole, the right side wall and the fixedly connected with loudspeaker fill that the clean box was run through to the left end of first trachea of inhaling, the one end fixedly connected with second rubber hose that loudspeaker were fought is kept away from to first trachea, the one end fixedly connected with second trachea of first trachea of inhaling is kept away from to second rubber hose, the left end of second trachea run through the right side wall of function box and with the fixed connection of the end of breathing in of miniature dust catcher.

Preferably, the through-hole has been seted up to the upper surface of cleaning box, the inner wall fixedly connected with standpipe of through-hole, the bottom of standpipe extends to the inner chamber and the fixedly connected with spray tube of cleaning box, the lower fixed surface of spray tube is connected with the atomising head, the quantity of atomising head is a plurality of, the top fixedly connected with transparent hose of standpipe, the one end that the standpipe was kept away from to transparent hose and the output fixed connection of spray bottle, the spray tube is located the position directly over the slide holder platform.

Preferably, four angles of the lower surface of the cleaning box are fixedly connected with connecting rods respectively, and the bottom of each connecting rod is rotatably connected with a pulley through a rotating shaft.

Preferably, the left side outer wall fixedly connected with flush mounting plate of function case, flush mounting plate's surface is provided with air-blower switch and miniature dust catcher switch respectively, flush mounting plate and air-blower, miniature dust catcher are all through wire electric connection, flush mounting plate passes through the outside power supply of electric wire plug connection.

Preferably, the front of cleaning box is rotated through the damping pivot and is connected with first cabinet door, the observation window has been seted up to the surface of first cabinet door, the equal fixedly connected with magnetic stripe in the left and right both sides at the first cabinet door back, the equal fixedly connected with magnetic stripe in the position that cleaning box right and right inside lateral wall bottom is close to first cabinet door, and the equal magnetism of magnetic stripe of two sets of corresponding positions is inhaled mutually.

Preferably, the front of the function box is rotationally connected with two second cabinet doors through hinges, the number of the second cabinet doors is two, the front of the second cabinet doors is provided with eight strip-shaped heat dissipation holes, and the upper surface of the function box is rotationally connected with a handle through a rotating shaft.

Preferably, the inner cavity of the spray bottle is filled with alcohol disinfectant, and an air filter element is arranged inside the miniature dust collector.

Advantageous effects

The utility model provides a photoetching machine carries piece platform cleaning device possesses following beneficial effect:

1. this photoetching machine carries piece platform cleaning device, through setting up the inside mechanism of blowing of clean box and function case, one set of cleaning device that dust absorption mechanism and wiper mechanism constitute, can blow dirt to the photoetching machine slide holder, dust absorption and alcohol cleaning and disinfecting's combination operation, lower surface through setting up the clean box is open structure, can conveniently pass through the pulley with the clean box and remove the top position of slide holder, make the slide holder be located the inner chamber of clean box, make the washing environment be in semi-enclosed state, the effect of cleaning has been improved.

2. This photoetching machine carries piece platform cleaning device, through the screw thread jackscrew that sets up the clean box inside, the fixed block, the clamping mechanism that fixation nut and rubber block are constituteed, can fix piece platform and clean box, do not receive the influence of other slight vibrations, stability in the cleaning process has been increased, through the observation window that sets up first cabinet door surface, can make things convenient for the limit to wash the limit and look over the washing progress, through the handle that sets up the clean box upper surface, this cleaning device's carrying has been made things convenient for, and the practicality has been improved.

Drawings

FIG. 1 is a schematic view of a front cross-sectional structure of the present invention;

FIG. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic side view of the present invention;

FIG. 4 is an enlarged view of the structure at A in FIG. 1;

fig. 5 is an enlarged schematic view of B in fig. 1.

In the figure: 1 cleaning box, 2 threaded holes, 3 threaded jackscrews, 4 fixing nuts, 5 fixing blocks, 6 rubber blocks, 7 slide racks, 8 functional boxes, 9 air blowers, 10 miniature dust collectors, 11 spray bottles, 12 air inlet pipes, 13 first rubber hoses, 14 air outlet pipes, 15 first air suction pipes, 16 horn hoppers, 17 second rubber hoses, 18 second air suction pipes, 19 vertical pipes, 20 spray pipes, 21 spray heads, 22 transparent hoses, 23 connecting rods, 24 pulleys, 25 switch panels, 26 first cabinet doors, 27 observation windows, 28 second cabinet doors, 29 handles and 30 strip-shaped heat dissipation holes.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: photoetching machine carries piece platform cleaning device, including cleaning box 1, cleaning box 1's lower surface is open structure, cleaning box 1's right side, right side lateral wall has seted up threaded hole 2 respectively, threaded hole 2's inner wall threaded connection has screw jack 3 respectively, the extension to cleaning box 1's inner chamber of the looks remote site of two screw jack 3, the surface threaded connection of screw jack 3 has fixation nut 4, the one end that fixation nut 4 was kept away from to screw jack 3 is rotated through the pivot and is connected with fixed block 5, one side fixedly connected with block rubber 6 of screw jack 3 is kept away from to fixed block 5, be provided with slide holder platform 7 between the opposite face of two block rubber 6.

The through-hole has been seted up to the position that the 1 left side wall of cleaning box is located screw hole 2 upper portion, the inner wall fixedly connected with air-supply line 12 of through-hole, the first rubber tube 13 of left side air inlet end fixedly connected with of air-supply line 12, the one end fixedly connected with air-out pipe 14 of air-supply line 12 is kept away from to first rubber tube 13, the one end that first rubber tube 13 was kept away from to air-out pipe 14 run through the left side wall of function case 8 and with the air-out end fixed connection of air-blower 9, the air-out end of air-supply line 12 extends to slide glass platform 7 left side and the position that is close to slide glass platform 7 upper surface.

Fixed surface is connected with function case 8 on dustbin 1, four angles difference fixedly connected with connecting rod 23 of lower surface of dustbin 1, the bottom of connecting rod 23 is rotated through the pivot and is connected with pulley 24, through setting up the inside mechanism of blowing of dustbin 1 and function case 8, one set of cleaning device that dust absorption mechanism and wiper mechanism constitute, can blow dirt to photoetching machine slide holder 7, dust absorption and alcohol cleaning and disinfecting's combination operation, lower surface through setting up dustbin 1 is open structure, can conveniently remove the top position of slide holder 7 with dustbin 1 through pulley 24, make slide holder 7 be located the inner chamber of dustbin 1, make the washing environment be in semi-closed state, the effect of cleaning has been improved.

The inner chamber of function case 8 is provided with blast mechanism respectively, dust absorption mechanism and wiper mechanism, blast mechanism is including solid air-blower 9, dust absorption mechanism includes miniature dust catcher 10, wiper mechanism includes spray bottle 11, the through-hole has been seted up to the position that clean case 1 right side wall is close to interior roof, the first breathing pipe 15 of inner wall fixedly connected with of through-hole, the right side wall and the fixedly connected with loudspeaker fill 16 of clean case 1 are run through to the left end of first breathing pipe 15, the one end fixedly connected with second rubber hose 17 that loudspeaker fill 16 were kept away from to first breathing pipe 15 is kept away from to second rubber hose 17, the left end of second breathing pipe 18 run through the right side wall of function case 8 and with miniature dust catcher 10's the fixed connection of breathing in.

The through-hole has been seted up to the upper surface of cleaning box 1, the inner wall fixedly connected with standpipe 19 of through-hole, the bottom of standpipe 19 extends to the inner chamber and the fixedly connected with spray tube 20 of cleaning box 1, the lower fixed surface of spray tube 20 is connected with atomising head 21, the quantity of atomising head 21 is a plurality of, the top fixedly connected with transparent hose 22 of standpipe 19, the one end that standpipe 19 was kept away from to transparent hose 22 and the output fixed connection of spray bottle 11, spray tube 20 is located the position directly over slide holder 7.

The outer wall fixedly connected with switch panel 25 of the left side of function box 8, the surface of switch panel 25 is provided with air-blower 9 switch and miniature dust catcher 10 switch respectively, switch panel 25 and air-blower 9, miniature dust catcher 10 all pass through wire electric connection, and switch panel 25 passes through the outside power supply of electric wire plug connection.

The front of cleaning box 1 is rotated through the damping pivot and is connected with first cabinet door 26, and observation window 27 has been seted up to the surface of first cabinet door 26, the equal fixedly connected with magnetic stripe in the left and right both sides at the first cabinet door 26 back, the equal fixedly connected with magnetic stripe in the position that cleaning box 1 right and right side inside wall bottom is close to first cabinet door 26, and the equal magnetism of magnetic stripe of two sets of corresponding positions is inhaled mutually.

The front of function case 8 is connected with second cabinet door 28 through hinge rotation, and the quantity of second cabinet door 28 is two, and bar louvre 30 has all been seted up in the front of second cabinet door 28, and the quantity of bar louvre 30 is eight, and the upper surface of function case 8 is connected with handle 29 through the pivot rotation.

Alcohol disinfectant has been held to the inner chamber of spray bottle 11, the inside of miniature dust catcher 10 is provided with air filter, through setting up the inside screw thread jackscrew 3 of cleaning box 1, fixed block 5, the clamping mechanism that fixation nut 4 and block rubber 6 are constituteed, can fix slide holder 7 and cleaning box 1, do not receive the influence of other slight vibrations, stability in the cleaning process has been increased, through the observation window 27 that sets up first cabinet door 26 surface, can make things convenient for the limit to wash and look over the washing progress, through setting up handle 29 of cleaning box 1 upper surface, this cleaning device's carrying has been made things convenient for, and the practicality has been improved.

The working principle is as follows: when the cleaning device for the photo-etching machine carrying table is used, firstly, a handle 29 is screwed up to take the cleaning device to the back position of the carrying table 7, then a first cabinet door 26 of the cleaning box 1 is upwards opened through a damping rotating shaft, the cleaning box 1 is moved from the back side of the carrying table 7 to the front side direction through pulleys 24 at four corners at the bottom of the cleaning box 1, so that the carrying table 7 is placed in an inner cavity of the cleaning box 1, then, threaded jackscrews 3 at the outer walls of the left side and the right side of the cleaning box 1 are screwed to drive a fixing block 5 and a rubber block 6 to clamp and fix the carrying table 7, then, a fixing nut 4 is screwed to carry out limiting and fixing, the cleaning device is connected with external power supply through an electric wire plug, then, a blower switch and a miniature dust collector switch on a switch panel 25 are respectively pressed to start a blower 9 and a miniature dust collector 10, the blower 9 blows air to the upper surface of the carrying table 7 through an air outlet pipe 14, a first rubber hose 13 and an air inlet pipe 12, the method is characterized in that the micro dust on the surface of the slide holder 7 is blown away from the surface of the slide holder, then the micro dust floating in the inner cavity of the cleaning box 1 is sucked into an air filter core of the micro dust collector 10 through a first air suction pipe 15, a second rubber hose 17 and a second air suction pipe 18, in order to enhance the cleaning effect, a second cabinet door 28 of a functional box 8 on the upper surface of the cleaning box 1 can be opened, the slide holder 7 is sprayed with alcohol for cleaning through a spraying bottle 11 in the inner cavity of the functional box 8, firstly, the button on the top of the spraying bottle 11 is pressed to enable the alcohol to pass through a transparent hose 22, a vertical pipe 19 and a spraying pipe 20, and then, the alcohol is sprayed onto the surface of the slide holder 7 through a plurality of spraying heads 21, and after a series of operations of dust blowing, dust collection and alcohol cleaning, the cleaning effect is greatly improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Photoetching machine carries piece platform cleaning device, including clean case (1), its characterized in that: the lower surface of the cleaning box (1) is of an open structure, the right side wall and the right side wall of the cleaning box (1) are respectively provided with a threaded hole (2), the inner wall of the threaded hole (2) is respectively in threaded connection with a threaded jackscrew (3), the relative end of the threaded jackscrew (3) extends to the inner cavity of the cleaning box (1), the outer surface of the threaded jackscrew (3) is in threaded connection with a fixing nut (4), one end, far away from the fixing nut (4), of the threaded jackscrew (3) is rotatably connected with a fixing block (5) through a rotating shaft, one side, far away from the threaded jackscrew (3), of the fixing block (5) is fixedly connected with a rubber block (6), a sheet carrying table (7) is arranged between the opposite surfaces of the rubber blocks (6), the upper surface of the cleaning box (1) is fixedly connected with a function box (8), and the inner cavity of the function box (8) is respectively provided with a blowing mechanism, The cleaning device comprises a dust collection mechanism and a cleaning mechanism, wherein the blowing mechanism comprises a fixed blowing machine (9), the dust collection mechanism comprises a miniature dust collector (10), and the cleaning mechanism comprises a spray bottle (11).

2. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the through-hole has been seted up to clean case (1) left side wall in the position on screw hole (2) upper portion, the inner wall fixedly connected with air-supply line (12) of through-hole, the left side air inlet end fixedly connected with of air-supply line (12) has first rubber hose (13), the one end fixedly connected with that air-supply line (12) were kept away from in first rubber hose (13) goes out tuber pipe (14), the one end that goes out tuber pipe (14) and keep away from first rubber hose (13) runs through the left side wall of function case (8) and with the air-out end fixed connection of air-blower (9), the air-out end of air-supply line (12) extends to slide holder platform (7) left side and is close to the position of slide holder platform (7) upper surface.

3. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the through-hole has been seted up to the position that clean case (1) right side wall is close to interior roof, the first breathing pipe of inner wall fixedly connected with (15) of through-hole, the left end of first breathing pipe (15) runs through the right side wall and the fixedly connected with loudspeaker fill (16) of clean case (1), the one end fixedly connected with second rubber hose (17) that loudspeaker were fought (16) are kept away from in first breathing pipe (15), the one end fixedly connected with second breathing pipe (18) of first breathing pipe (15) are kept away from in second rubber hose (17), the left end of second breathing pipe (18) run through the right side wall of function box (8) and with the fixed connection of breathing in of miniature dust catcher (10).

4. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the through-hole has been seted up to the upper surface of clean case (1), the inner wall fixedly connected with standpipe (19) of through-hole, the bottom of standpipe (19) extends to inner chamber and fixedly connected with spray tube (20) of clean case (1), the lower fixed surface of spray tube (20) is connected with atomising head (21), the quantity of atomising head (21) is a plurality of, the top fixedly connected with transparent hose (22) of standpipe (19), the one end that standpipe (19) were kept away from in transparent hose (22) and the output fixed connection of spray bottle (11), position directly over slide holder (7) is located in spray tube (20).

5. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: four angles of the lower surface of the cleaning box (1) are respectively and fixedly connected with a connecting rod (23), and the bottom of the connecting rod (23) is rotatably connected with a pulley (24) through a rotating shaft.

6. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the utility model discloses a dust collector, including function box (8), left side outer wall fixedly connected with flush mounting plate (25) of function box (8), the surface of flush mounting plate (25) is provided with air-blower (9) switch and miniature dust catcher (10) switch respectively, flush mounting plate (25) and air-blower (9), miniature dust catcher (10) are all through wire electric connection, flush mounting plate (25) are through electric wire plug connection external power supply.

7. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the front of cleaning box (1) is rotated through the damping pivot and is connected with first cabinet door (26), observation window (27) have been seted up to the surface of first cabinet door (26), the equal fixedly connected with magnetic stripe in the left and right both sides at first cabinet door (26) back, the equal fixedly connected with magnetic stripe in position that cleaning box (1) right and right side inner side wall bottom is close to first cabinet door (26), and the equal magnetism of magnetic stripe of two sets of corresponding positions is inhaled mutually.

8. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the front of function case (8) is rotated through the hinge and is connected with second cabinet door (28), the quantity of second cabinet door (28) is two, bar louvre (30) have all been seted up in the front of second cabinet door (28), the quantity of bar louvre (30) is eight, the upper surface of function case (8) is rotated through the pivot and is connected with handle (29).

9. The cleaning apparatus for a carrier stage of a lithography machine according to claim 1, wherein: the inner cavity of the spray bottle (11) is filled with alcohol disinfectant, and an air filter element is arranged inside the miniature dust collector (10).