CN214079849U - Laser processing equipment feeding system - Google Patents

Abstract

The utility model provides a laser processing equipment feeding system, include: the device comprises a detection component, a motion component and a calculation component; the motion assembly is used for moving the substrate to be processed to the detection area of the detection assembly and adjusting the position of the workbench; the detection assembly is used for detecting the position information of the substrate to be processed and transmitting the detection result to the calculation assembly; the computing assembly is used for carrying out data processing on the detection result and controlling the motion assembly according to the data processing result; and the calculation component compares the detection result with the standard template to obtain an angle deviation value and a space deviation value between the substrate to be processed and the standard template, calculates an angle correction scheme and a space correction scheme according to the angle deviation value and the space deviation value, and performs angle correction and space correction through the movement component. The utility model discloses an adopt no centre gripping system, avoided because of the substrate damage that the centre gripping action produced, reduced because of the useless piece that the centre gripping error leads to produces, promoted the stability of blowing and the work efficiency of complete machine greatly.

Description

Laser processing equipment feeding system

Technical Field

The utility model relates to a laser beam machining equipment field, in particular to laser beam machining equipment feeding system.

Background

In the field of laser processing at present, a feeding system used by more than ninety percent of laser processing equipment in the market is a clamping and positioning workbench with bearings, a few feeding systems used are non-bearing workbench capable of automatically identifying feeding, most of the feeding workbench with the automatic identification function is imported equipment, and the price is high.

The working mode of the original feeding system with clamping is as follows:

the material taking manipulator takes out a substrate from a bin, then the material taking manipulator is driven by a moving motor to convey the substrate to a material placing position, the material taking manipulator descends to place the substrate on a working table, then the material taking manipulator is lifted, the moving motor drives the material taking manipulator to move to a position to be positioned, a clamping system of a working platform is controlled by a cylinder to drive a clamping wheel to clamp the substrate, the substrate is located between the clamping wheel and a fixed wheel at the moment, the substrate is positioned in this way, then the working table is vacuumized, the clamping wheel is reset, and subsequent movement is carried out.

The substrate that often can appear in current area banks up clamping position workstation in the material loading process splits, and the centre gripping action deviation leads to the waste sheet scheduling problem, and the locating wheel all belongs to the consumptive material with the driving wheel, needs the periodic maintenance to change.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a solve the defect of above-mentioned current area banks up with earth centre gripping positioning table, provide following laser processing equipment feeding system.

In order to achieve the above purpose, the utility model adopts the following specific technical scheme:

laser beam machining equipment feeding system includes: the device comprises a detection component, a motion component and a calculation component;

the motion assembly is used for moving the substrate to be processed to the detection area of the detection assembly and adjusting the position of the workbench;

the detection assembly is used for detecting the position information of the substrate to be processed and transmitting the detection result to the calculation assembly;

the computing assembly is used for carrying out data processing on the detection result and controlling the motion assembly according to the data processing result; and the calculation component compares the detection result with the standard template to obtain an angle deviation value and a space deviation value between the substrate to be processed and the standard template, calculates an angle correction scheme and a space correction scheme according to the angle deviation value and the space deviation value, and performs angle correction and space correction through the movement component.

Preferably, the detection assembly comprises: identifying a camera and an illumination source; the motion assembly moves the substrate to be processed to a set detection position, the illumination light source provides illumination, and the recognition camera performs image acquisition.

Preferably, the motion assembly comprises: the manipulator, a first micro motor for controlling the manipulator and a second motor for controlling the workbench; the mechanical arm clamps and moves the substrate to be processed; the first micro motor drives the manipulator to move angularly or positionally; and the second motor drives the workbench to move.

Preferably, the first micro motor is a small servo motor.

The utility model discloses can gain following technological effect:

(1) through adopting no centre gripping system, avoided because of the substrate damage that the centre gripping action produced, reduced because of the useless piece that the clamping error leads to produces, promoted the stability of blowing and the work efficiency of complete machine greatly, also indirectly promoted the qualification rate of product, reduced the production of the useless piece in the work.

(2) And a clamping mechanism is cancelled, so that the personnel cost and the capital cost of daily maintenance of the equipment are reduced.

(3) The research and development without the clamping mechanism greatly help to improve the quality of the laser processing equipment, lays a solid foundation for the future market prospect of the laser processing equipment, and provides help for the improvement of different semiconductor equipment in the future.

Drawings

Fig. 1 is a three-dimensional schematic view of a feeding system of a laser processing device according to an embodiment of the present invention;

FIG. 2 is a front view of a three-dimensional schematic view of a feeding system of the laser machining apparatus of the embodiment shown in FIG. 1;

FIG. 3 is a right side view of the three-dimensional schematic illustration of the laser machining apparatus feeding system of the embodiment shown in FIG. 1;

fig. 4 is a top view of a three-dimensional schematic diagram of a feeding system of the laser processing apparatus of the embodiment shown in fig. 1.

Wherein the reference numerals include: the device comprises a detection assembly 1, a recognition camera 101, an illumination light source 102, a motion assembly 2, a manipulator 201 and a first micro motor 202.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not constitute limitations on the invention.

As shown in fig. 1, the embodiment of the utility model provides a laser processing equipment feeding system, include: detection component 1, motion component 2, calculation component.

The detection assembly 1 comprises a detector and a detection environment providing device, after the motion assembly 2 moves the substrate to be processed to the detection area of the detection assembly 1, a signal is transmitted to the detection assembly 1, the detection environment providing device is started to provide the environment required by the normal work of the detector, the detector starts to work, the detection result is obtained, and the detection result is transmitted to the calculation assembly.

The calculation component carries out data processing on the detection result transmitted by the detection component, carries out scheme design according to the data processing result, transmits the designed scheme to the motion component and controls the motion component 2 to move.

The motion assembly 2 comprises a mechanical arm for moving a substrate to be processed, a first motor for controlling the mechanical arm and a second motor for controlling the workbench, and the first motor and the second motor can move under the control of a program, so that the motion can be performed according to a scheme designed by the calculation assembly.

The utility model discloses an in the embodiment, motion subassembly 2 is including the rotating electrical machines that is used for angular deviation to revise and the linear electric motor that is used for the space deviation to revise, revises the angular deviation of manipulator through the rotating electrical machines turned angle, carries out level and vertical correction to the workstation through linear electric motor.

As shown in fig. 2-4, in an embodiment of the present invention, the detecting assembly 1 includes: the recognition camera 101, the illumination light source 102, the motion assembly 2 includes: a manipulator 201 and a first micro motor 202 for controlling the manipulator.

The utility model discloses an in the embodiment, miniature motor 202 chooses for use small-size servo motor, and small-size servo motor contrast step motor commonly used has the more accurate advantage of motion control, can carry out accurate location more effectively.

The specific operation of the present invention will be described in detail with reference to fig. 1-4 below:

(1) the first micro motor 202 controls the manipulator 201 to return to the set starting point, and the initial position of the manipulator 201 is guaranteed to be fixed.

(2) The first micro motor 202 controls the manipulator 201 to move to the storage bin for taking a film, and after the film taking action is completed, the manipulator 201 and the substrate to be processed move together to set a detection area. After the movement is completed, the first micro motor 202 transmits a movement in-place signal to the motion control card, and after the motion control card receives the movement in-place signal, the illumination light source 102 is turned on and the recognition camera 101 is started to acquire images.

(3) The calculation component compares the acquired image with the standard template to obtain an angle deviation value between the substitute processing substrate and the standard template, calculates an angle correction scheme according to the angle deviation value, and controls the manipulator 201 to perform angle correction through the first micro motor 202 according to the angle correction scheme. After the correction is finished, the first micro motor 202 transmits a correction completion signal to the motion control card, and the motion control card starts the recognition camera 101 again to perform image acquisition after receiving the correction completion signal.

(4) And (5) repeating the step (3) until the substrate to be processed has no angular deviation from the standard template.

(5) And (4) comparing the image acquired in the step (3) or (4) with the standard template to obtain a final space deviation value between the substrate to be processed and the standard template, calculating a space correction scheme according to the space deviation value, moving the workbench through a second motor according to the space correction scheme to perform space correction, and keeping the space position relationship between the workbench and the substrate to be processed fixed.

(6) According to the preset action, the first micro motor 202 controls the mechanical arm 201 to accurately move the substrate to be processed to the set material placing position on the upper surface of the workbench, and one-time feeding operation is completed.

The utility model provides a no relative limit location clamping system of clamping system has the advantage in the aspect of certain quality promotion, can improve the precision of location, and then reduces the productivity decline and the manufacturing cost increase that leads to because of the inaccurate and useless piece that forms in location.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limiting the present invention. Variations, modifications, substitutions and alterations of the above-described embodiments may occur to persons of ordinary skill in the art without departing from the scope of the invention.

The above detailed description of the present invention does not limit the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the scope of the claims of the present invention.

Claims (4)

1. Laser beam machining equipment feeding system, its characterized in that includes: the device comprises a detection component, a motion component and a calculation component;

the motion assembly is used for moving the substrate to be processed to the detection area of the detection assembly and adjusting the position of the workbench;

the detection assembly is used for detecting the position information of the substrate to be processed and transmitting a detection result to the calculation assembly;

and the computing assembly is used for carrying out data processing on the detection result and controlling the motion assembly according to the data processing result.

2. The laser machining apparatus feeding system of claim 1, wherein the detection assembly comprises: identifying a camera and an illumination source; the motion assembly moves the substrate to be processed to a set detection position, the illumination light source provides illumination, and the recognition camera acquires images.

3. The laser machining apparatus loading system of claim 1, wherein the movement assembly comprises: the manipulator, a first micro motor for controlling the manipulator and a second motor for controlling the workbench; the mechanical arm clamps and moves the substrate to be processed; the first micro motor drives the manipulator to move angularly or positionally; and the second motor drives the workbench to move.

4. The laser machining apparatus feeding system of claim 3, wherein the first micro motor is a small servo motor.

Images