CN214063587U

CN214063587U - Vacuum chuck clamping main shaft oiling structure and wafer thinning machine

Info

Publication number: CN214063587U
Application number: CN202120025067.6U
Authority: CN
Inventors: 周石坚; 黄郁声
Original assignee: Dongguan Zhikong Xinneng Industrial Co ltd
Current assignee: Dongguan Zhikong Xinneng Industrial Co ltd
Priority date: 2021-01-06
Filing date: 2021-01-06
Publication date: 2021-08-27
Anticipated expiration: 2031-01-06

Abstract

The utility model discloses a tight main shaft oiling structure of vacuum chuck clamp to tight main shaft oiling structure provides a wafer attenuate machine based on this tight main shaft oiling structure of vacuum chuck clamp, tight main shaft oiling structure of vacuum chuck clamp includes installs angular contact ball bearing on the rotation axis through the compact heap, is in angular contact ball bearing top the oiling passageway has been seted up on the compact heap, install the direct type in the oiling passageway and press the oiling cup, angular contact ball bearing department still installs oil blanket and lower oil blanket, the beneficial effects of the utility model are that: it can press into the oil cup hole through pressing oil gun and pour into grease into and carry out the oil supplementing operation, carries out timely replenishment to the grease in the angular contact ball bearing, has solved prior art, and grease can't in the angular contact ball bearing in time be replenished, causes to produce dry friction between the ball of angular contact ball bearing and the raceway, and then leads to noise at work and the rolling play grow to cause the unstable problem of chip size.

Description

Vacuum chuck clamping main shaft oiling structure and wafer thinning machine

Technical Field

The utility model relates to a wafer attenuate machine specifically is a tight main shaft oiling structure of vacuum chuck clamp and wafer attenuate machine.

Background

The manufacturing of a semiconductor wafer thinning machine is a new and emerging field of manufacturing of very precise high-end mechanical equipment in our country, the thinning machine is mainly used for carrying out thinning processing on a semiconductor wafer chip, a vacuum chuck clamping main shaft is a device for fixedly clamping the wafer chip, the wafer chip is vacuumized and fixed through an end plane of the vacuum chuck and is clamped with the chip, the vacuum chuck clamping main shaft rotates, a grinding wheel main shaft rotates at a high speed relative to the vacuum chuck clamping main shaft to grind an unpolished facet of the chip, and therefore the grinding processing of the wafer chip is achieved. The size thickness of the chip which is not thinned is about 0.8, the size thickness after grinding is between 0.08mm and 0.1mm, the planeness is less than +/-0.003, and the surface roughness is close to a mirror surface, so the processing requirement of the chip is very high.

Because of the high precision requirements for wafer chip manufacturing, there are naturally also very high technical requirements for the design, production and manufacture of vacuum chuck clamping spindle assemblies. The existing vacuum chuck clamping main shaft is a micropore graphite air-floatation vacuum chuck rotating main shaft component, the micropore graphite air-floatation vacuum chuck clamping main shaft component uses pressurized air to form a pressurized air gap between a main shaft component and a shaft seat through micropore graphite, and no mechanical contact is generated between a rotating component and a non-rotating component, so the noise is low, and the abrasion of mechanical parts is hardly generated, therefore, the micropore graphite vacuum main shaft component is a brand new main shaft moving component, particularly, under the condition of emphasizing high speed such as thousands to tens of thousands of rotations, the advantages of the micropore graphite vacuum main shaft component can be embodied, but the mechanical device also has some defects, such as extremely high manufacturing requirement, because the air gap between the moving components is very small, the air gap between the axial direction and the radial direction of the main shaft rotating component is between 0.006 and 0.008, so the manufacturing precision of a plane grinder and an inner circular bed and an outer circular bed is also very high, generally, a high-precision grinding machine is difficult to find in China, in addition, microporous graphite belongs to a soft material, carbon powder is easy to fall in a workpiece, air gaps are blocked, and the main shaft is blocked and vibrates, and in addition, due to the new process of a new material, the manufacturing cost and the use cost are also very high.

With the development of the technology, in the prior art, the angular contact ball bearing is adopted on the thinning machine to manufacture the vacuum chuck clamping spindle component, because the working rotating speed of the vacuum chuck clamping spindle of the thinning machine is 200-300 revolutions, the thinning machine belongs to low-medium rotating speed rotation, the heat productivity and the deformation are not large, and the thinning and grinding processing of the high-precision wafer chip can be completely realized by adopting a proper bearing.

However, the above-mentioned angular contact ball bearing still has a disadvantage in use because the inside of the angular contact ball bearing is filled with grease initially, but the grease can leak out through the oil seal after long-term operation, when the grease leakage is not supplemented in time, dry friction is generated between the ball of the angular contact ball bearing and the raceway, which is very unfavorable for the operation of clamping the spindle by the bearing type vacuum chuck, and it can make the noise and rolling play of the bearing during operation become large, and further make the chip size unstable.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum chuck presss from both sides tight main shaft oiling structure and wafer attenuate machine to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a tight main shaft oiling structure of vacuum chuck clamp, includes and installs the angular contact ball bearing on the rotation axis through the compact heap, be in angular contact ball bearing top the compact heap is last to have seted up the oiling passageway, install straight-through pressure injection oil cup in the oiling passageway, angular contact ball bearing department still installs oil blanket and lower oil blanket.

As a further aspect of the present invention: and a waterproof disc is further arranged on the outer side of the rotating shaft, and an oil filling hole corresponding to the straight-through type pressure oil filling cup is formed in the waterproof disc.

As a further aspect of the present invention: an inner retainer ring and an outer retainer ring are respectively arranged between the inner ring and the outer ring of the two angular contact ball bearings, the inner retainer ring and the outer retainer ring are respectively used for limiting the inner ring and the outer ring of the angular contact ball bearings so as to inhibit the reduction of the raceway clearance, and a clearance is reserved between the inner retainer ring and the outer retainer ring.

As a further aspect of the present invention: the steel ball ventilation plug penetrates and extends into a gap between the inner retainer ring and the outer retainer ring, and is used for discharging high-temperature pressure gas outwards.

Another object of the embodiment of the utility model is to provide a wafer attenuate machine, which comprises a body, install on the body vacuum chuck press from both sides tight main shaft oiling structure.

Compared with the prior art, the beneficial effects of the utility model are that: it can press into the oil cup hole through pressing oil gun and pour into grease into and carry out the oil supplementing operation, carries out timely replenishment to the grease in the angular contact ball bearing, has solved prior art, and grease can't in the angular contact ball bearing in time be replenished, causes to produce dry friction between the ball of angular contact ball bearing and the raceway, and then leads to noise at work and the emergence that the rolling play grow causes the unstable problem of chip size.

Drawings

Fig. 1 is a schematic structural diagram of a vacuum chuck clamping spindle oiling structure.

Fig. 2 is a schematic structural view of a straight-through type pressure injection oil cup in an oil injection structure of a vacuum chuck clamping spindle.

In the figure: 1-straight-through type pressure filling oil cup, 2-upper oil seal, 3-angular contact ball bearing, 4-lower oil seal, 5-waterproof disc, 6-steel ball vent plug and 7-pressing block.

Detailed Description

Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.

Please refer to fig. 1-2, in the embodiment of the present invention, a vacuum chuck clamps tight spindle oiling structure, include and install angular contact ball bearing 3 on the rotation axis through compact heap 7, be in angular contact ball bearing 3 top the oiling passageway has been seted up on the compact heap 7, install through type pressure injection oil cup 1 in the oiling passageway, oil blanket 2 and lower oil blanket 4 are still installed to angular contact ball bearing 3 department.

In the embodiment, the pressing block 7 is provided with an oil injection channel, and the straight-through type pressure injection oil cup 1 is installed in the oil injection channel, preferably, the straight-through type pressure injection oil cup 1 in the embodiment is given with the national reference number GB 1152-.

Referring to fig. 1, as a preferred embodiment of the present invention, a waterproof plate 5 is further disposed outside the rotating shaft, and an oil injection hole corresponding to the straight-through type pressure injection oil cup 1 is disposed on the waterproof plate 5.

Referring to fig. 1, as another preferred embodiment of the present invention, an inner retaining ring and an outer retaining ring are further respectively disposed between the inner ring and the outer ring of two angular contact ball bearings 3, the inner retaining ring and the outer retaining ring are respectively used for limiting the inner ring and the outer ring of the angular contact ball bearing 3 to inhibit the rolling track play from decreasing, and a gap is reserved between the inner retaining ring and the outer retaining ring.

In this embodiment, the angular contact ball bearing 3 can bear both the axial force and the radial force, but when the outer ring raceway taper angles of the two angular contact ball bearings 3 are staggered, the heat generated when the angular contact ball bearing 3 rotates can make the raceway clearance have a tendency to become smaller, and after the inner retainer ring and the outer retainer ring are added, the problem that the raceway clearance is reduced can be effectively limited.

Referring to fig. 1, as another preferred embodiment of the present invention, the present invention further includes a steel ball vent plug 6, the steel ball vent plug 6 extends through a gap between the inner retainer ring and the outer retainer ring, and the steel ball vent plug 6 is used for discharging high temperature pressure gas outwards.

In this embodiment, although the inner and outer rings of the angular contact ball bearing 3 can be effectively limited after the inner and outer rings are added, the heat generated when the angular contact ball bearing 3 rotates still cannot be discharged, and therefore, the high-temperature pressure gas generated in the working process can be discharged through the steel ball vent plug 6 provided in this embodiment. Preferably, the steel ball breather plug 6 is labeled QC/T412-1999.

The above embodiment of the utility model discloses a tight main shaft oiling structure of vacuum chuck clamp, and based on tight main shaft oiling structure of this vacuum chuck clamp has provided a wafer attenuate machine, it can carry out the oil supplementing operation through pressing the oil pressure rifle to impress oil cup hole injection grease, grease to in the angular contact ball bearing 3 carries out timely replenishment, prior art has been solved, grease can't in the angular contact ball bearing 3 be in time replenished, produce the dry friction between ball and the raceway that causes angular contact ball bearing 3, and then lead to noise at work and the emergence that the rolling play grow caused the unstable problem of chip size.

Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.

It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. The utility model provides a tight main shaft oiling structure of vacuum chuck clamp, includes and installs angular contact ball bearing (3) on the rotation axis through compact heap (7), its characterized in that, be in angular contact ball bearing (3) top the oiling passageway has been seted up on compact heap (7), install straight-through pressure injection oil cup (1) in the oiling passageway, oil blanket (2) and lower oil blanket (4) are still installed in angular contact ball bearing (3) department.

2. The vacuum chuck clamping main shaft oil injection structure according to claim 1, wherein a waterproof plate (5) is further arranged on the outer side of the rotating shaft, and an oil injection hole corresponding to the straight-through type pressure oil injection cup (1) is formed in the waterproof plate (5).

3. The vacuum chuck clamping spindle oiling structure according to claim 1 or 2, wherein an inner retainer ring and an outer retainer ring are respectively arranged between the inner ring and the outer ring of the two angular contact ball bearings (3), the inner retainer ring and the outer retainer ring are respectively used for limiting the inner ring and the outer ring of the angular contact ball bearings (3) so as to inhibit the reduction of the raceway play, and a gap is reserved between the inner retainer ring and the outer retainer ring.

4. The vacuum chuck clamping main shaft oil injection structure according to claim 3, further comprising a steel ball vent plug (6), wherein the steel ball vent plug (6) extends through a gap between the inner retainer ring and the outer retainer ring, and the steel ball vent plug (6) is used for discharging high-temperature pressure gas outwards.

5. A wafer thinning machine comprises a body, and is characterized in that the body is provided with a vacuum chuck clamping main shaft oil injection structure according to any one of claims 1 to 4.