CN214040588U - Laser divergence angle test equipment of COS - Google Patents

Abstract

The utility model discloses a laser divergence angle test equipment of COS, test equipment includes base, the three-dimensional alignment jig of COS, COS clamping anchor clamps, photoelectric detector support and revolving stage, and three-dimensional alignment jig of COS, photoelectric detector support set up on the base, and COS clamping anchor clamps set up on the three-dimensional alignment jig of COS, COS on the COS clamping anchor clamps with photoelectric detector on the photoelectric detector support is at same central height, and the revolving stage setting is in the bottom or the top of COS clamping anchor clamps and/or photoelectric detector support for realize COS and photoelectric detector and rotate relatively, rotate the in-process and utilize photoelectric detector measures and takes notes the laser energy value when different turned angle, and according to the laser energy value calculates and determines the divergence angle of laser. The equipment is convenient to operate, low in manufacturing cost and labor cost, and capable of realizing testing of large current and pulse current.

Description

Laser divergence angle test equipment of COS

Technical Field

The utility model belongs to the technical field of laser test, in particular to laser divergence angle test equipment of COS.

Background

The COS (Chip On substrate) of a semiconductor laser is a core component for generating laser, and the divergence angle of a laser beam is an important parameter for evaluating the COS, and is used for measuring the speed of the beam diverging outwards from the beam waist. The commonly used method for accurately testing the COS divergence angle needs to shape the fast and slow axes of a light beam respectively, then fit the fast and slow axes of the light beam through MATLAB according to the sizes of light spots on a CCD camera at different positions, calculate the light beam parameter product (the diameter of the light beam and the divergence angle of the light beam), and calculate the divergence angle by combining the width of a light emitting area of a chip.

CN108287060A discloses a device for measuring the divergence angle of laser, which is shown in fig. 1, and the device measures the spot size of the CCD camera at different positions (L is 0, 1 … … 25mm) from the light source, and calculates the BPP by fitting the data with Matlab, and then calculates the divergence angle. However, when the device is used for testing, the time is long, materials such as optical lenses and the like are consumed, the time and the labor are wasted, the cost is high, and the overall benefit is poor.

SUMMERY OF THE UTILITY MODEL

To address the above problems, the present invention discloses a laser divergence angle testing apparatus of COS to overcome the above problems or at least partially solve the above problems.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a laser divergence angle test equipment of COS, test equipment includes base, the three-dimensional alignment jig of COS, COS clamping anchor clamps, photoelectric detector support and revolving stage, the three-dimensional alignment jig of COS the photoelectric detector support sets up on the base, COS clamping anchor clamps set up on the three-dimensional alignment jig of COS, COS on the COS clamping anchor clamps with photoelectric detector on the photoelectric detector support is at same central height, the revolving stage sets up COS clamping anchor clamps and/or the bottom or the top of photoelectric detector support is used for realizing COS with photoelectric detector rotates relatively, utilizes at the rotation in-process photoelectric detector measures and takes notes the laser energy value when different turned angle, and according to laser energy value calculates and determines the divergence angle of laser.

Optionally, the number of the rotary table is one, and the rotary table is arranged at the bottom of the COS clamping fixture; the COS clamping fixture is characterized in that the photoelectric detector support and the photoelectric detector are one, and the COS clamping fixture is further provided with a turnover mechanism for turning over the COS by 90 degrees.

Optionally, the number of the rotating tables is two, the two rotating tables are respectively a slow axis testing rotating table and a fast axis testing rotating table, the slow axis testing rotating table is fixed on the base, a slow axis photoelectric detector support is fixedly connected to a rotating shaft of the slow axis testing rotating table, the slow axis photoelectric detector support comprises a mechanical arm and a vertical support, the mechanical arm is driven by the rotating shaft to rotate, the vertical support is slidably arranged on the mechanical arm, and the slow axis photoelectric detector is arranged on the vertical support.

Optionally, the fast axis testing turntable is disposed on the top of the fast axis fixing support, the fast axis fixing support is disposed on the base, a fast axis photoelectric detector support is disposed on a rotating shaft of the fast axis testing turntable, and a fast axis photoelectric detector is disposed on the fast axis photoelectric detector support.

Optionally, the COS clamping fixture adopts a vacuum pump crimping structure, a vacuum adsorption positioning structure or an electrode crimping structure.

Optionally, the COS clamping fixture of the electrode crimping structure includes a fixture support, a fixture base, a COS fixing groove, an applied electrode, a spring compression post, a spring, a crimping part and a position locking part; the clamp bracket is fixedly connected to the three-dimensional adjusting frame, the clamp base is arranged on the clamp bracket, a COS fixing groove is formed in the top of the clamp base, and the COS is positioned in the COS fixing groove; the power-on electrode is arranged on the upper portion of the COS and is pressed down by the spring pressing column, the spring and the pressing portion to abut against the power-on portion of the COS, and the position locking portion is further arranged on the upper portion of the clamp support and used for fixing the spring pressing column during pressing down, so that the power-on electrode and the power-on portion can be kept in abutting joint.

Optionally, the fixture base is made of oxygen-free copper or pure copper, and a water cooling channel is arranged on the fixture base.

Optionally, a diamond sheet is further disposed between the fixture base and the COS.

Optionally, a test bench support is further arranged between the COS three-dimensional adjusting frame and the base, the cross section of the test bench support is in an inverted U shape, and the slow shaft testing turntable is arranged on the lower portion of the test bench support.

Optionally, the test equipment further comprises a COS power supply and/or a turntable controller, the COS power supply supplies power to the COS, continuous or pulse mode switching can be achieved, output current can be tuned, and voltage can be adaptively adjusted; the rotary table controller is used for adjusting the rotary step length of the rotary table and can also adjust the sliding step length, speed and position of the vertical support on the mechanical arm.

The utility model has the advantages and beneficial effects that:

the device can realize full-automatic testing without beam shaping, has low equipment input cost and simple operation, can form a complete report without too much labor time cost, consumes short time, and can realize testing of large current and pulse type current.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:

FIG. 1 is a prior art laser divergence angle measurement apparatus;

fig. 2 is a block diagram of a laser divergence angle testing apparatus for COS in an embodiment of the present invention;

fig. 3 is a structural diagram of the COS clamping fixture in an embodiment of the present invention;

FIG. 4 is a software testing interface diagram according to an embodiment of the present invention;

fig. 5 is a diagram showing the result of software testing according to an embodiment of the present invention;

fig. 6 is a schematic diagram illustrating rotation of a Photodetector (PD) according to an embodiment of the present invention;

in the figure: the device comprises a COS clamping fixture 1, a fixture support 11, a fixture base 12, a COS fixing groove 13, a COS fixing groove 14, an electrode 15, a spring compression column 16 and a crimping part 17, wherein the COS clamping fixture is used for clamping the COS, the fixture support is used for supporting the fixture, the fixture base is used for supporting the COS, the COS fixing groove 14 is used for fixing the COS fixing groove, the electrode 15 is used for fixing the COS fixing groove, the spring compression column 16 is used for fixing the COS fixing groove, and the crimping part 17 is used for crimping the spring compression column; 2 is a three-dimensional adjusting bracket; a test bench support is shown as 3; 4 is a slow axis test turntable, and 4-1 is a fast axis test turntable; 5 is a slow-axis photoelectric detector bracket, and 5-1 is a fast-axis photoelectric detector bracket; 6 is a fast shaft fixing bracket; 7 is a slow axis photodetector, and 7-1 is a fast axis photodetector.

Detailed Description

In order to make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to perform clear and complete description of the technical solution of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It is to be understood that the terms "comprises/comprising," "consisting of … …," or any other variation, are intended to cover a non-exclusive inclusion, such that a product, device, process, or method that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product, device, process, or method if desired. Without further limitation, an element defined by the phrases "comprising/including … …," "consisting of … …," or "comprising" does not exclude the presence of other like elements in a product, device, process, or method that comprises the element.

It will be further understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship illustrated in the drawings for convenience in describing the invention and to simplify the description, and do not indicate or imply that the device, component, or structure so referred to must have a particular orientation, be constructed in a particular orientation, or be operated in a particular orientation, and are not to be considered limiting of the invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

The embodiment discloses a laser divergence angle testing device of a COS, and fig. 2 shows an implementation manner of the testing device, the testing device comprises a base at the bottom, a three-dimensional COS adjusting frame 2, a COS clamping fixture 1, a Photo Detector (PD) support (5, 5-1) and a turntable (4, 4-1), wherein the three-dimensional COS adjusting frame 2 and the photo Detector support 5 are directly or indirectly arranged on the base, the COS clamping fixture 1 is arranged on the three-dimensional COS adjusting frame 2, the three-dimensional COS adjusting frame 2 can realize position adjustment in three directions of XYZ, the COS fixture 1 is fixedly arranged on the COS fixture 1, and in order to ensure that a test is normally performed, the COS and the photo Detector on the photo Detector support 5 need to be aligned and be at the same center height when the test starts.

Further, referring to fig. 2, a turntable 4 is disposed at the bottom or top of the COS clamping fixture and/or the photodetector holder, and is used for realizing relative rotation between the COS and the photodetector, so that laser energy values (or voltage values) at different rotation angles are measured and recorded by the photodetector during rotation, and a divergence angle of the laser is determined by calculation according to the laser energy values.

The calculation and determination process can acquire and analyze the energy data at each angle obtained through test recording through similar software such as LabView, the interface design of the software is shown in FIG. 4, and parameters such as the rotating angle, the step length, the duty ratio during pulse test and the like can be preset on the software interface. After the test results are obtained, an energy curve can be fitted according to the energy data, and then the full width at half maximum FWHM and the divergence angles of different energies are calculated.

In one embodiment, the number of the rotary tables is one, and the rotary tables are arranged at the bottom of the COS clamping fixture; the COS clamping fixture is characterized in that the photoelectric detector support and the photoelectric detector are both one, a turnover mechanism is further arranged on the COS clamping fixture and used for turning the COS over 90 degrees, and preferably, the turned COS and the photoelectric detector are still located at the same center height.

In the embodiment, the energy value of each angle in the horizontal slow axis direction can be firstly measured by utilizing the mode that the COS rotates but the photoelectric detector does not rotate; and then after the COS is turned over, rotating the COS in a certain step length in the vertical direction, and then obtaining each energy value in the vertical fast axis direction, thereby obtaining the energy data of each angle on the fast and slow axes.

In a preferred embodiment, two of the turrets, a slow axis test turret 4 and a fast axis test turret 4-1, see fig. 2, achieve COS not rotating, while photodetectors are provided in the slow and fast axis directions, respectively, which rotate around the COS, thereby achieving the test of the energy values at various angles.

Specifically, referring to fig. 2, the slow axis testing turntable 4 is preferably fixed on the base, a slow axis photodetector support 5 is fixedly connected to a rotating shaft of the slow axis testing turntable, the slow axis photodetector support 5 includes a horizontally arranged mechanical arm and a vertical support arranged on the mechanical arm, the mechanical arm rotates under the driving of the rotating shaft, the vertical support is slidably arranged on the mechanical arm after being driven by a stepping motor, and the vertical support is provided with the slow axis photodetector 7.

The fast axis test turntable 4-1 is arranged on the top of the fast axis fixing support 6, the fast axis fixing support 6 is arranged on the base and used for supporting the fast axis test turntable 4-1 and the fast axis photoelectric detector support 5-1, the fast axis photoelectric detector support 5-1 is arranged on a rotating shaft of the fast axis test turntable 4-1, and the fast axis photoelectric detector 7-1 is arranged on the fast axis photoelectric detector support.

In one embodiment, the COS clamping fixture may adopt any one of a vacuum pump crimping structure, a vacuum adsorption positioning structure or an electrode crimping structure. For example, in the vacuum adsorption positioning structure, the COS clamping can adopt machine vision recognition, and the suction head clamp automatically picks up the COS, then through the mode location to COS vacuum adsorption in the bottom.

Preferably, referring to fig. 3, the COS clamping jig of the electrode crimping structure includes a jig holder 11, a jig base 12, a COS fixing groove 14, a powered electrode 15, a spring compression post 16, a spring, a crimping portion 17 and a position locking portion; the jig support 11 is fixedly attached to the three-dimensional adjustable frame 2, and includes a base portion and an upper support portion attached to the base portion for supporting the powered electrode, the spring compression post 16, the crimping portion 17, and the like.

Wherein the clamp bracket 11 is provided with the clamp base 12, the top of the clamp base 12 is provided with a COS fixing groove 14, and the COS13 is positioned in the COS fixing groove 14; the energizing electrode 15 is disposed on the upper portion of the COS13 and is pressed down manually by the spring pressure post 16, the spring and crimp portion 17 to abut on the electrical connection portion of the COS, and the energizing electrode is connected to a COS power line.

In addition, a position locking portion for fixing the spring plunger 16 during the above-described pressing operation so that the charging electrode and the electric contact portion are held in contact is provided on the upper support portion of the jig holder.

In one embodiment, in order to improve the heat dissipation capability of the clamp base and enable a large current to be tested, the clamp base is made of oxygen-free copper or pure copper, and a water cooling channel is arranged on the clamp base.

Further, still be provided with the diamond piece between anchor clamps base and the COS to improve the holistic radiating effect of anchor clamps.

In an embodiment, referring to fig. 2, a test bench support 3 is further disposed between the COS three-dimensional adjusting bracket 2 and the base, the cross section of the test bench support 3 is an inverted U shape, in order to save space, and according to the distance design requirement, a slow axis test turntable 4 may be disposed at the lower portion of the test bench support 3, and at this time, an opening is disposed at the front end of the test bench support 3 for the slow axis test turntable 4 to pass through when rotating.

In one embodiment, the test equipment further comprises a COS power supply and/or a turntable controller (not shown), the COS power supply is used for supplying COS, and two power supply modes can be included: the device has a continuous mode or a pulse mode, can realize free switching of the two modes, and has tunable output current and adaptive adjustment of the output voltage.

The rotary table controller is used for adjusting the rotating step length of the rotary table and can also be used for adjusting the sliding step length, speed and position of the vertical support in the photoelectric detector support on the mechanical arm in a mode of controlling the stepping motor.

In conclusion, the device uses the light emitting area of the COS chip as the center, and uses mechanical precision control and integral structure design to realize the alignment of the COS chip, the fast axis test turntable, the slow axis test turntable and the photoelectric detector, so that the center of the light receiving surface of the photoelectric detector PD is aligned with the central energy position of the fast axis and the slow axis light spot.

In practical operation, considering the COS chip, the divergence angle of the slow axis is generally 6-12 °, the fast axis is 30-60 °, and in order to achieve accurate and fast testing, the rotation angles of the fast and slow axis mechanical arms are respectively set, and the step length can be set according to requirements, for example: slow axis angle 40 °, fast axis angle 80 °, step size 0.02 °, PD rotation diagram is shown in fig. 6.

After the parameters are set, the mechanical arm is started by one key, after a period of test is finished, the mechanical arm can reset to the set angle, the software interface can display the normalized energy distribution graph along with the angle to obtain an energy curve as shown in fig. 5, so that full width at half maximum (FWHM) data and a 95% energy divergence angle are obtained, and naturally, divergence angles corresponding to other energies can be set according to needs.

The use of the device can obtain the following technical effects:

the energy of different angle positions of the semiconductor laser chip is tested in a mode of rotating the photoelectric detector PD mechanical arm, the divergence angles of different energies are calculated through the energy distribution curve, the operation is simple, and the investment cost is low.

The equipment obtains the divergence angle data by calculating the distribution condition of energy, so that the COS does not have extremely high requirement on placement precision, the tolerance range is large, and the measurement can be realized by amplifying the scanning angle range.

The COS clamping fixture adopts a spring compression joint electrode mode and a diamond heat dissipation mode, so that continuous 30W heat dissipation can be realized, and a chip with a larger current can be tested; higher current chips may use pulsed power-up to test results.

The above description is only for the embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, extension, etc. made within the spirit and principle of the present invention are all included in the protection scope of the present invention.

Claims (10)

1. The test equipment is characterized by comprising a base, a COS three-dimensional adjusting frame, a COS clamping fixture, a photoelectric detector support and a rotary table, wherein the COS three-dimensional adjusting frame and the photoelectric detector support are arranged on the base, the COS clamping fixture is arranged on the COS three-dimensional adjusting frame, the COS on the COS clamping fixture and the photoelectric detector on the photoelectric detector support are located at the same central height, the rotary table is arranged at the bottom or the top of the COS clamping fixture and/or the photoelectric detector support and used for achieving relative rotation of the COS and the photoelectric detector, the photoelectric detector is used for measuring and recording laser energy values at different rotation angles in the rotation process, and the divergence angle of the laser is determined according to calculation of the laser energy values.

2. The test equipment as claimed in claim 1, wherein the turntable is one and is arranged at the bottom of the COS clamping fixture; the COS clamping fixture is characterized in that the photoelectric detector support and the photoelectric detector are one, and the COS clamping fixture is further provided with a turnover mechanism for turning over the COS by 90 degrees.

3. The test equipment as claimed in claim 1, wherein the number of the two rotary tables is two, and the two rotary tables are respectively a slow axis test rotary table and a fast axis test rotary table, the slow axis test rotary table is fixed on the base, a slow axis photoelectric detector support is fixedly connected to a rotating shaft of the slow axis test rotary table, the slow axis photoelectric detector support comprises a mechanical arm and a vertical support, the mechanical arm is driven by the rotating shaft to rotate, the vertical support is slidably arranged on the mechanical arm, and the slow axis photoelectric detector is arranged on the vertical support.

4. The test apparatus of claim 3, wherein the fast axis test turntable is disposed on top of a fast axis fixed support disposed on the base, a fast axis photodetector support disposed on a rotating shaft of the fast axis test turntable, and a fast axis photodetector disposed on the fast axis photodetector support.

5. The test equipment as claimed in claim 3, wherein the COS clamping fixture adopts a vacuum pump crimping structure, a vacuum adsorption positioning structure or an electrode crimping structure.

6. The test equipment as claimed in claim 5, wherein the COS clamping fixture of the electrode crimping structure comprises a fixture bracket, a fixture base, a COS fixing groove, a powered electrode, a spring compression column, a spring, a crimping part and a position locking part; the clamp bracket is fixedly connected to the three-dimensional adjusting frame, the clamp base is arranged on the clamp bracket, a COS fixing groove is formed in the top of the clamp base, and the COS is positioned in the COS fixing groove; the power-on electrode is arranged on the upper portion of the COS and is pressed down by the spring pressing column, the spring and the pressing portion to abut against the power-on portion of the COS, and the position locking portion is further arranged on the upper portion of the clamp support and used for fixing the spring pressing column during pressing down, so that the power-on electrode and the power-on portion can be kept in abutting joint.

7. The test equipment as claimed in claim 6, wherein the fixture base is made of oxygen-free copper or pure copper, and a water cooling channel is formed in the fixture base.

8. The test apparatus as claimed in claim 6 or 7, wherein a diamond wafer is further disposed between the clamp base and the COS.

9. The test equipment as claimed in claim 3, wherein a test bench support is further arranged between the COS three-dimensional adjusting frame and the base, the cross section of the test bench support is in an inverted U shape, and the slow shaft test turntable is arranged at the lower part of the test bench support.

10. The test equipment as claimed in claim 3, wherein the test equipment further comprises a COS power supply and/or a turntable controller, the COS power supply supplies power to the COS, continuous or pulse mode switching can be realized, output current can be tuned, and voltage can be adaptively adjusted; the rotary table controller is used for adjusting the rotary step length of the rotary table and can also adjust the sliding step length, speed and position of the vertical support on the mechanical arm.

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