CN214040120U - Detection device for chip production - Google Patents

Detection device for chip production Download PDF

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Publication number
CN214040120U
CN214040120U CN202022456403.0U CN202022456403U CN214040120U CN 214040120 U CN214040120 U CN 214040120U CN 202022456403 U CN202022456403 U CN 202022456403U CN 214040120 U CN214040120 U CN 214040120U
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fixedly connected
motor
box
chip
lead screw
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CN202022456403.0U
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不公告发明人
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Chengdu Beixunqu Technology Co ltd
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Chengdu Beixunqu Technology Co ltd
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Abstract

The utility model discloses a detection device is used in chip production, including the drive case, the first motor of right side fixedly connected with of drive case, the pivot of first motor runs through to the inner chamber and the fixedly connected with lead screw of drive case, the left end of lead screw and the inner wall swing joint of drive case, the screw thread of lead screw surface both sides is opposite, the equal thread bush in both sides on lead screw surface is equipped with the thread bush, the top fixedly connected with connecting block of thread bush, the slot hole has all been seted up to the both sides at drive case top. The utility model discloses possess the advantage that the detection effect is good and have clean function, solved current detection device for chip production, in the use, can't carry out the centre gripping rotation to the chip, lead to can not carrying out diversified detection to the surface of chip to influence the detection effect, and because single structure does not have clean function, can not carry out the dust absorption to the dust on chip surface and handle, reduced the problem of detection device suitability.

Description

Detection device for chip production
Technical Field
The utility model relates to a chip production technical field specifically is a detection device is used in chip production.
Background
Chips (a general term for semiconductor device products), chips/chips, are a way in electronics to miniaturize circuits (including primarily semiconductor devices, including passive components, etc.) and are often fabricated on the surface of a semiconductor wafer.
Current detection device for chip production, in the use, can't carry out the centre gripping rotation to the chip, lead to can not carrying out diversified detection to the surface of chip to influence detection effect, and because single structure does not have clean function, can not carry out dust absorption to the dust on chip surface and handle, reduced detection device's suitability.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a detection device is used in chip production possesses detection effect and has the advantage of clean function, has solved current detection device for chip production, in the use, can't carry out the centre gripping rotation to the chip, leads to can not carrying out diversified detection to the surface of chip to influence detection effect, and because the structure is single, do not have clean function, can not carry out the dust absorption to the dust on chip surface and handle, reduced the problem of detection device suitability.
In order to achieve the above object, the utility model provides a following technical scheme: a detection device for chip production comprises a drive box, wherein a first motor is fixedly connected to the right side of the drive box, a rotating shaft of the first motor penetrates through an inner cavity of the drive box and is fixedly connected with a lead screw, the left end of the lead screw is movably connected with the inner wall of the drive box, threads on two sides of the surface of the lead screw are opposite, threaded sleeves are respectively sleeved on two sides of the surface of the lead screw, a connecting block is fixedly connected to the top of each threaded sleeve, long holes are respectively formed in two sides of the top of the drive box, the top of the connecting block penetrates through the long holes and is fixedly connected with a movable plate, a second motor is fixedly connected to the top of the left side of the movable plate, a first clamping plate is fixedly connected to the rotating shaft of the second motor, a rotating rod is movably connected to the top of the right side of the movable plate, a pressure sensor is fixedly connected to the right end of the rotating rod, and a second clamping plate is fixedly connected to the right side of the pressure sensor, the side, opposite to the second clamping plate, of the first clamping plate is provided with a limiting groove, the top of the driving box is fixedly connected with an electric telescopic rod, the top end of the electric telescopic rod is fixedly connected with a placing plate, the two sides of the top of the driving box are fixedly connected with hydraulic cylinders, the top end of the hydraulic cylinder is fixedly connected with a supporting plate, the bottom of the supporting plate is fixedly connected with a detection mechanism, the left side of the top of the supporting plate is fixedly connected with a dust suction box, the right side of the dust suction box is fixedly connected with a fan, an air outlet pipe of the fan is communicated with the dust suction box, the top of the supporting plate is fixedly connected with a distribution pipe, an air inlet pipe of the fan is communicated with the distribution pipe, the two sides of the bottom of the distribution pipe are communicated with dust suction pipes, the bottom of the dust suction pipes penetrates through the bottom of the supporting plate, the right side of the inner cavity of the dust suction box is fixedly connected with threaded pipes, and surface threaded sleeves of the threaded pipes are provided with filter cartridges, the cartridge filter and screwed pipe threaded connection, the ventilation hole has been seted up on the left side of suction box.
Preferably, the front side of the dust collection box is movably connected with a box door through a hinge, and the bottom of the front side of the box door is fixedly connected with a handle.
Preferably, four corners of the bottom of the driving box are fixedly connected with supporting rods, and the bottom ends of the supporting rods are fixedly connected with supporting blocks.
Preferably, the bottom of the threaded sleeve is fixedly connected with a guide block, the bottom of the inner cavity of the driving box is provided with a guide groove, and the bottom of the guide block extends to the inner cavity of the guide groove.
Preferably, the front side fixedly connected with controller of drive case, the controller respectively with first motor, second motor, electric telescopic handle, pneumatic cylinder and fan electric connection.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses a drive case, first motor, the lead screw, the thread bush, the connecting block, the slot hole, the fly leaf, the second motor, first splint, the bull stick, pressure sensor, the second splint, the spacing groove, electric telescopic handle, place the board, the pneumatic cylinder, a supporting plate, detection mechanism, the suction box, the fan, the cooperation of distribution pipe and dust absorption pipe, possess detection effect and reach the advantage that has clean function, current detection device for chip production has been solved, in the use, can't carry out the centre gripping rotation to the chip, lead to can not carrying out diversified detection to the surface of chip, thereby influence detection effect, and because single structure, do not have clean function, can't carry out the dust absorption to the dust on chip surface and handle, the problem of detection device suitability has been reduced.
2. The utility model discloses a set up the lead screw, thread bush and connecting block, make and to carry out relative movement between first splint and the second splint, through setting up the second motor, can rotate centre gripping rear side chip, increase detection effect, through setting up first splint, second splint and spacing groove, it is fixed to carry out stable centre gripping to the chip, through setting up the pneumatic cylinder, can highly adjust detection mechanism, through setting up the fan, distributing pipe and suction box, can carry out the dust absorption to the chip surface and handle, prevent chip surface adhesion dust, through setting up the chamber door, the person of facilitating the use dismantles the cartridge filter and washs, through setting up the bracing piece, can carry out stable support to the drive case.
Drawings
FIG. 1 is a schematic sectional view of the structure of the present invention;
FIG. 2 is a front view of the structure of the present invention;
FIG. 3 is a schematic sectional view of the partial structure of the present invention;
FIG. 4 is a schematic top view of a partial structure of the present invention;
fig. 5 is an enlarged schematic view of a in fig. 1 of the present invention.
In the figure: the device comprises a driving box 1, a first motor 2, a lead screw 3, a thread bush 4, a connecting block 5, a long hole 6, a movable plate 7, a second motor 8, a first clamping plate 9, a rotating rod 10, a pressure sensor 11, a second clamping plate 12, a limiting groove 13, an electric telescopic rod 14, a placing plate 15, a hydraulic cylinder 16, a supporting plate 17, a detection mechanism 18, a dust suction box 19, a fan 20, a distributing pipe 21, a dust suction pipe 22, a threaded pipe 23, a filter cartridge 24, a vent hole 25, a box door 26, a supporting rod 27 and a controller 28.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to be referred must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "provided", "connected", and the like are to be construed broadly, such as "connected", which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The utility model discloses a driving box 1, first motor 2, lead screw 3, thread bush 4, connecting block 5, slot hole 6, fly leaf 7, second motor 8, first splint 9, bull stick 10, pressure sensor 11, second splint 12, spacing groove 13, electric telescopic handle 14, place board 15, pneumatic cylinder 16, backup pad 17, detection mechanism 18, suction box 19, fan 20, distributor pipe 21, dust absorption pipe 22, screwed pipe 23, cartridge filter 24, ventilation hole 25, chamber door 26, bracing piece 27 and controller 28 part are the parts that general standard spare or technical personnel in the field know, its structure and principle all are that this technical personnel all can learn through the technical manual or learn through conventional experimental method.
Referring to fig. 1-5, a detection device for chip production comprises a driving box 1, wherein four corners of the bottom of the driving box 1 are fixedly connected with supporting rods 27, the bottom ends of the supporting rods 27 are fixedly connected with supporting blocks, the driving box 1 can be stably supported by arranging the supporting rods 27, the front side of the driving box 1 is fixedly connected with a controller 28, the controller 28 is respectively and electrically connected with a first motor 2, a second motor 8, an electric telescopic rod 14, a hydraulic cylinder 16 and a fan 20, the right side of the driving box 1 is fixedly connected with the first motor 2, a rotating shaft of the first motor 2 penetrates through the inner cavity of the driving box 1 and is fixedly connected with a screw rod 3, the left end of the screw rod 3 is movably connected with the inner wall of the driving box 1, threads on two sides of the surface of the screw rod 3 are opposite, threaded sleeves 4 are respectively arranged on two sides of the surface of the screw rod 3, the bottoms of the threaded sleeves 4 are fixedly connected with guide blocks, the bottom of the inner cavity of the driving box 1 is provided with a guide groove, the bottom of the guide block extends to the inner cavity of the guide groove, the top of the thread bush 4 is fixedly connected with a connecting block 5, the first clamping plate 9 and the second clamping plate 12 can move relatively by arranging a screw rod 3, the thread bush 4 and the connecting block 5, two sides of the top of the driving box 1 are respectively provided with a long hole 6, the top of the connecting block 5 penetrates through the long hole 6 and is fixedly connected with a movable plate 7, the top of the left side of the movable plate 7 is fixedly connected with a second motor 8, the chip on the clamped rear side can rotate by arranging the second motor 8, the detection effect is increased, the rotating shaft of the second motor 8 is fixedly connected with the first clamping plate 9, the top of the right side of the movable plate 7 is movably connected with a rotating rod 10, the right end of the rotating rod 10 is fixedly connected with a pressure sensor 11, the right side of the pressure sensor 11 is fixedly, the chip can be stably clamped and fixed by arranging the first clamping plate 9, the second clamping plate 12 and the limiting groove 13, the top of the driving box 1 is fixedly connected with an electric telescopic rod 14, the top end of the electric telescopic rod 14 is fixedly connected with a placing plate 15, two sides of the top of the driving box 1 are both fixedly connected with hydraulic cylinders 16, the height of the detection mechanism 18 can be adjusted by arranging the hydraulic cylinders 16, the top end of the hydraulic cylinder 16 is fixedly connected with a supporting plate 17, the bottom of the supporting plate 17 is fixedly connected with the detection mechanism 18, the left side of the top of the supporting plate 17 is fixedly connected with a dust box 19, the front side of the dust box 19 is movably connected with a box door 26 through a hinge, the bottom of the front side of the box door 26 is fixedly connected with a handle, the filter cartridge 24 is conveniently detached and cleaned by a user by arranging the box door 26, the right side of the dust box 19 is fixedly connected with a fan 20, and an air outlet pipe of the fan 20 is communicated with the dust box 19, top fixedly connected with distributing pipe 21 of backup pad 17, through setting up fan 20, distributing pipe 21 and suction box 19, can carry out the dust absorption to the chip surface and handle, prevent chip surface adhesion dust, fan 20's air-supply line and distributing pipe 21 are linked together, the both sides of distributing pipe 21 bottom all communicate there is dust absorption pipe 22, the bottom of dust absorption pipe 22 runs through to the bottom of backup pad 17, the right side fixedly connected with screwed pipe 23 of suction box 19 inner chamber, the surperficial threaded bush of screwed pipe 23 is equipped with cartridge filter 24, cartridge filter 24 and screwed pipe 23 threaded connection, ventilation hole 25 has been seted up in the left side of suction box 19, through drive box 1, first motor 2, lead screw 3, thread bush 4, connecting block 5, slot hole 6, fly leaf 7, second motor 8, first splint 9, bull stick 10, pressure sensor 11, second splint 12, spacing groove 13, electric telescopic handle 14, place board 15, Pneumatic cylinder 16, backup pad 17, detection mechanism 18, dust suction box 19, fan 20, distribution pipe 21 and dust absorption pipe 22's cooperation, possess detection effect and well and have the advantage of clean function, current detection device for chip production has been solved, in the use, can't carry out the centre gripping rotation to the chip, lead to can not carrying out diversified detection to the surface of chip, thereby influence detection effect, and because single structure, do not have clean function, can not carry out the dust absorption to the dust on chip surface and handle, the problem of detection device suitability has been reduced.
When the chip placing device is used, a chip is placed on the surface of a placing plate 15 through an external manipulator or a clamping mechanism, then a controller 28 controls an electric telescopic rod 14 to extend, the electric telescopic rod 14 drives the placing plate 15 to move, when the chip and a limiting groove 13 keep the same level, the electric telescopic rod 14 stops working, then the controller 28 controls a first motor 2 to operate, a rotating shaft of the first motor 2 drives a screw rod 3 to rotate, the screw rod 3 is in threaded connection with a threaded sleeve 4 to enable the threaded sleeve 4 to start to move relatively, the threaded sleeve 4 drives a connecting block 5 and a movable plate 7 to start to move relatively, the movable plate 7 drives a first clamping plate 9 and a second clamping plate 12 to start to move relatively, two sides of the chip extend to an inner cavity of the limiting groove 13, when a pressure sensor 11 detects pressure change, the controller 28 stops the first motor 2 to operate, then the controller 28 controls a second motor 8 to operate, and a rotating shaft of the second motor 8, first splint 9 drives the chip and rotates, and detection mechanism 18 detects the front and the back of chip, and controller 28 control fan 20 operation simultaneously, and fan 20 begins to carry out the dust absorption processing to the chip surface through distributing pipe 21 and dust absorption pipe 22, and the dust is carried to the inner chamber of cartridge filter 24 under fan 20's effect, and the cartridge filter 24 filters the dust that contains in the air, and the air after the filtration discharges out dust absorption case 19 through ventilation hole 25.
In summary, the following steps: this detection device is used in chip production, through drive case 1, first motor 2, lead screw 3, thread bush 4, connecting block 5, slot hole 6, fly leaf 7, second motor 8, first splint 9, bull stick 10, pressure sensor 11, second splint 12, spacing groove 13, electric telescopic handle 14, place board 15, pneumatic cylinder 16, backup pad 17, detection mechanism 18, suction box 19, fan 20, distributor 21 and suction tube 22's cooperation, current detection device is used in chip production has been solved, in the use, can't carry out the centre gripping rotation to the chip, lead to can not carrying out diversified detection to the surface of chip, thereby influence the detection effect, and because the structure is single, do not have clean function, can not carry out the dust absorption to the dust on chip surface and handle, the problem of detection device suitability has been reduced.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. The utility model provides a detection device is used in chip production, includes drive case (1), its characterized in that: the right side of the driving box (1) is fixedly connected with a first motor (2), a rotating shaft of the first motor (2) penetrates through an inner cavity of the driving box (1) and is fixedly connected with a lead screw (3), the left end of the lead screw (3) is movably connected with the inner wall of the driving box (1), threads on two sides of the surface of the lead screw (3) are opposite, threaded sleeves (4) are respectively sleeved on two sides of the surface of the lead screw (3), connecting blocks (5) are fixedly connected with the top of the threaded sleeves (4), long holes (6) are respectively formed in two sides of the top of the driving box (1), the top of each connecting block (5) penetrates through the corresponding long hole (6) and is fixedly connected with a movable plate (7), a second motor (8) is fixedly connected with the left top of the movable plate (7), a first clamping plate (9) is fixedly connected with the rotating shaft of the second motor (8), and a rotating rod (10) is movably connected with the top of the right side of the movable plate (7), the right end of the rotating rod (10) is fixedly connected with a pressure sensor (11), the right side of the pressure sensor (11) is fixedly connected with a second clamping plate (12), one side of the first clamping plate (9) opposite to the second clamping plate (12) is provided with a limiting groove (13), the top of the driving box (1) is fixedly connected with an electric telescopic rod (14), the top end of the electric telescopic rod (14) is fixedly connected with a placing plate (15), the two sides of the top of the driving box (1) are fixedly connected with hydraulic cylinders (16), the top end of the hydraulic cylinder (16) is fixedly connected with a supporting plate (17), the bottom of the supporting plate (17) is fixedly connected with a detection mechanism (18), the left side of the top of the supporting plate (17) is fixedly connected with a dust suction box (19), the right side of the dust suction box (19) is fixedly connected with a fan (20), and an air outlet pipe of the fan (20) is communicated with the dust suction box (19), the top fixedly connected with distribution pipe (21) of backup pad (17), the air-supply line and the distribution pipe (21) of fan (20) are linked together, the both sides of distribution pipe (21) bottom all communicate has dust absorption pipe (22), the bottom of dust absorption pipe (22) runs through to the bottom of backup pad (17), the right side fixedly connected with screwed pipe (23) of dust absorption case (19) inner chamber, the surperficial threaded bush of screwed pipe (23) is equipped with cartridge filter (24), cartridge filter (24) and screwed pipe (23) threaded connection, ventilation hole (25) have been seted up in the left side of dust absorption case (19).
2. The detecting device for chip production according to claim 1, wherein: the front side of the dust collection box (19) is movably connected with a box door (26) through a hinge, and the bottom of the front side of the box door (26) is fixedly connected with a handle.
3. The detecting device for chip production according to claim 1, wherein: four corners of the bottom of the driving box (1) are fixedly connected with supporting rods (27), and the bottom ends of the supporting rods (27) are fixedly connected with supporting blocks.
4. The detecting device for chip production according to claim 1, wherein: the bottom fixedly connected with guide block of thread bush (4), the guide way has been seted up to the bottom of drive case (1) inner chamber, and the bottom of guide block extends to the inner chamber of guide way.
5. The detecting device for chip production according to claim 1, wherein: the front side fixedly connected with controller (28) of drive case (1), controller (28) respectively with first motor (2), second motor (8), electric telescopic handle (14), pneumatic cylinder (16) and fan (20) electric connection.
CN202022456403.0U 2020-10-29 2020-10-29 Detection device for chip production Active CN214040120U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022456403.0U CN214040120U (en) 2020-10-29 2020-10-29 Detection device for chip production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022456403.0U CN214040120U (en) 2020-10-29 2020-10-29 Detection device for chip production

Publications (1)

Publication Number Publication Date
CN214040120U true CN214040120U (en) 2021-08-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022456403.0U Active CN214040120U (en) 2020-10-29 2020-10-29 Detection device for chip production

Country Status (1)

Country Link
CN (1) CN214040120U (en)

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