CN213985563U

CN213985563U - Quick leak detection device of ultrahigh vacuum exhaust station

Info

Publication number: CN213985563U
Application number: CN202023250353.7U
Authority: CN
Inventors: 杨超
Original assignee: Wuhan Yisheng Technology Co ltd
Current assignee: Wuhan Yisheng Technology Co ltd
Priority date: 2020-12-29
Filing date: 2020-12-29
Publication date: 2021-08-17
Anticipated expiration: 2030-12-29

Abstract

The utility model relates to a leak hunting equipment technical field especially relates to a quick leak hunting device of ultra-high vacuum exhaust platform, move the device to suitable position through the gyro wheel, through the pipeline with the exhaust platform with external flange joint, then pump the tracer gas pump in the gas storage tank into the pipeline of exhaust platform through the air pump, judge the leakage position through observing the position that the tracer gas appears, inhale the collecting box through the cover of breathing in simultaneously with the tracer gas of discharge and retrieve, overall structure is simple, the simple operation, and effectively retrieve the tracer gas, the flexibility is higher, the practicality is stronger; comprises an air storage tank, an air pump, a connecting pipe and an air pump pipe; still include shell, gyro wheel, concave plate, external flange, mount, air exhauster, suction tube, the cover of breathing in, blast pipe, collecting box, processing door, control cabinet, display screen and operating button, the inside inner chamber that is provided with of shell, gas storage tank and air pump all fixed the setting in the bottom right side of inner chamber.

Description

Quick leak detection device of ultrahigh vacuum exhaust station

Technical Field

The utility model relates to a leak hunting equipment technical field especially relates to a quick leak hunting device of ultrahigh vacuum exhaust station.

Background

As is well known, a rapid leak detection device for an ultra-high vacuum exhaust table is an auxiliary device which is used in the industrial production process to rapidly detect the vacuum exhaust table and facilitate the maintenance of the leakage position of the exhaust table, and is widely used in the technical field of leak detection equipment; when the existing quick leak detection device for the ultrahigh vacuum exhaust station is used, reply tracer gas in a gas storage tank is pumped into the exhaust station through a gas pump, so that the leakage position of the exhaust station is observed; however, most of the existing quick leak detection devices for the ultrahigh vacuum exhaust station are fixing devices, are inconvenient to move, and are relatively complex to operate and low in efficiency.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a quick leak hunting device of ultra-high vacuum exhaust platform convenient to remove, easy operation is convenient.

The utility model discloses a quick leak hunting device of ultra-high vacuum exhaust platform, including gas storage tank, air pump, connecting pipe and pump trachea, the air pump is located the right-hand side of gas storage tank, and the connecting pipe sets up in the left part of air pump and inserts the gas storage tank left, and the pump trachea sets up in the top of air pump; the device also comprises a shell, a roller, a concave plate, an external flange, a fixing frame, an exhaust fan, a suction pipe, a suction hood, an exhaust pipe, a collecting box, a processing door, a control console, a display screen and an operation button, wherein an inner cavity is arranged inside the shell, the air storage box and the air pump are both fixedly arranged on the right side of the bottom of the inner cavity, the roller is arranged at the bottom of the shell, the concave plate is fixedly arranged at the right part of the shell, the right part of the pump pipe penetrates through the concave plate from the inner cavity to the right, a connecting flange is arranged at the right part of the pump pipe, the fixing frame is fixedly arranged at the left part of the inner cavity, the exhaust fan is arranged at the top of the fixing frame, the suction pipe is arranged at the top of the exhaust fan and penetrates out of the shell leftwards, the suction hood is arranged at the left part of the suction pipe, the exhaust pipe is arranged at the left part of the exhaust fan and penetrates through the top of the fixing frame downwards, the collecting box is fixedly arranged at the bottom of the inner cavity and is arranged below the fixing frame, the bottom of the exhaust pipe is inserted into the collecting box from the top of the collecting box, the processing door is arranged on the lower side of the left part of the shell, the console is fixedly arranged on the top of the shell, the display screen is arranged on the top of the console, and the operating button is arranged on the top of the console.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes storing box and lid, and the storing box is fixed to be set up in the top right side of inner chamber, and the lid sets up in the right part of storing box.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes socket, picture peg and baffle, and the socket is fixed to be set up in the bottom left side of inner chamber, and the middle part of socket is provided with the slot, and the picture peg is fixed to be set up in the bottom of collecting box, and the right part of picture peg inserts the slot from the left part of socket right side, and the baffle is fixed to be set up in the bottom of inner chamber and to be located the right-hand of socket.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes the check valve, and the check valve sets up in the middle part of connecting pipe.

The utility model discloses a quick leak hunting device of ultrahigh vacuum exhaust platform still includes movable cover, blend stop and handle, and the top of movable cover is articulated and is located the right-hand of concave plate with the right part of shell, and the blend stop is fixed to be set up in the bottom upper end of concave plate, and the handle is fixed to be set up in the right part downside of movable cover.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes the bounding wall, and the bounding wall is fixed to be set up in the top of shell and to be located the right-hand of control cabinet.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes the guard bar, and the guard bar is fixed to be set up in the top of control cabinet and around setting up in the outside of display screen.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes the push rod, and the push rod is fixed to be set up in the top left side of shell.

Compared with the prior art, the beneficial effects of the utility model are that: leak the quick leak hunting device that uses super high vacuum exhaust platform and leak and examine time measuring to the exhaust platform, remove the device to suitable position through the gyro wheel, through pipeline and external flange joint with the exhaust platform, then go into the pipeline of exhaust platform with the tracer gas pump in the gas storage tank through the air pump, judge the leakage position through the position of observing the tracer gas appearance, retrieve in inhaling the collecting box through the cover of breathing in with exhaust tracer gas simultaneously, overall structure is simple, the simple operation, and effectively retrieve tracer gas, the flexibility is higher, the practicality is stronger.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic top view of the present invention;

FIG. 3 is an enlarged schematic view of A in FIG. 1;

FIG. 4 is an enlarged schematic view of B of FIG. 1;

in the drawings, the reference numbers: 1. a gas storage tank; 2. an air pump; 3. a connecting pipe; 4. a pump air pipe; 5. a housing; 6. a roller; 7. a concave plate; 8. connecting a flange externally; 9. a fixed mount; 10. an exhaust fan; 11. a suction tube; 12. an air intake cover; 13. an exhaust pipe; 14. a collection box; 15. a process gate; 16. a console; 17. a display screen; 18. an operating button; 19. a storage box; 20. a box cover; 21. a socket; 22. inserting plates; 23. a baffle plate; 24. a one-way valve; 25. a movable cover; 26. blocking strips; 27. a handle; 28. enclosing plates; 29. a protective strip; 30. a push rod.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

As shown in fig. 1 to 4, the quick leak detection device for an ultra-high vacuum exhaust platform of the present invention comprises a gas storage tank 1, an air pump 2, a connecting pipe 3 and a pump gas pipe 4, wherein the air pump 2 is located at the right side of the gas storage tank 1, the connecting pipe 3 is arranged at the left part of the air pump 2 and is inserted into the gas storage tank 1 leftwards, and the pump gas pipe 4 is arranged at the top of the air pump 2; the air storage box comprises a shell 5, a roller 6, a concave plate 7, an external flange 8, a fixing frame 9, an exhaust fan 10, a suction pipe 11, a suction hood 12, an exhaust pipe 13, a collecting box 14, a processing door 15, a control console 16, a display screen 17 and an operation button 18, wherein an inner cavity is arranged in the shell 5, the air storage box 1 and an air pump 2 are both fixedly arranged at the right side of the bottom of the inner cavity, the roller 6 is arranged at the bottom of the shell 5, the concave plate 7 is fixedly arranged at the right part of the shell 5, the right part of the air pump pipe 4 penetrates through the concave plate 7 from the inner cavity to the right, a connecting flange is arranged at the right part of the air pump pipe 4, the fixing frame 9 is fixedly arranged at the left part of the inner cavity, the exhaust fan 10 is arranged at the top of the fixing frame 9, the suction pipe 11 is arranged at the top of the exhaust fan 10 and penetrates out of the shell 5 leftwards, the suction hood 12 is arranged at the left part of the suction pipe 11, the exhaust pipe 13 is arranged at the left part of the exhaust fan 10 and penetrates downwards through the top of the fixing frame 9, the collecting box 14 is fixedly arranged at the bottom of the inner cavity and is positioned below the fixed frame 9, the bottom of the exhaust pipe 13 is inserted into the collecting box 14 from the top of the collecting box 14, the processing door 15 is arranged at the lower side of the left part of the shell 5, the control console 16 is fixedly arranged at the top of the shell 5, the display screen 17 is arranged at the top of the control console 16, and the operating button 18 is arranged at the top of the control console 16; leak the quick leak hunting device that uses super high vacuum exhaust platform and leak and examine time measuring to the exhaust platform, remove the device to suitable position through the gyro wheel, through pipeline and external flange joint with the exhaust platform, then go into the pipeline of exhaust platform with the tracer gas pump in the gas storage tank through the air pump, judge the leakage position through the position of observing the tracer gas appearance, retrieve in inhaling the collecting box through the cover of breathing in with exhaust tracer gas simultaneously, overall structure is simple, the simple operation, and effectively retrieve tracer gas, the flexibility is higher, the practicality is stronger.

The utility model discloses a quick leak detection device of an ultrahigh vacuum exhaust station, which also comprises a storage box 19 and a box cover 20, wherein the storage box 19 is fixedly arranged at the right side of the top of the inner cavity, and the box cover 20 is arranged at the right part of the storage box 19; the placing tool is convenient to use through the arrangement.

The utility model discloses a quick leak hunting device of super high vacuum exhaust platform still includes socket 21, picture peg 22 and baffle 23, and socket 21 is fixed to be set up in the bottom left side of inner chamber, and the middle part of socket 21 is provided with the slot, and picture peg 22 is fixed to be set up in the bottom of collecting box 14, and the right part of picture peg 22 inserts in the slot from the left part of socket 21 right side, and baffle 23 is fixed to be set up in the bottom of inner chamber and is located the right side of socket 21; the collecting box is convenient to clean through the arrangement.

The utility model discloses a quick leak detection device of an ultrahigh vacuum exhaust station, which also comprises a one-way valve 24, wherein the one-way valve 24 is arranged in the middle part of the connecting pipe 3; the gas backflow is prevented by the above arrangement.

The utility model discloses a quick leak hunting device of ultra-high vacuum exhaust station, still include movable cover 25, blend stop 26 and handle 27, the top of movable cover 25 is articulated with the right part of shell 5 and is located the right-hand side of notch board 7, blend stop 26 is fixed to be set up in the bottom upper end of notch board 7, handle 27 is fixed to be set up in the right lower side of movable cover 25; carry out dustproof protection to the recess inboard through above-mentioned setting.

The utility model discloses a quick leak detection device of an ultrahigh vacuum exhaust platform, which also comprises a coaming 28, wherein the coaming 28 is fixedly arranged at the top of the shell 5 and is positioned at the right side of the control platform 16; through the setting, the spinning tool is convenient.

The utility model discloses a quick leak detection device of an ultrahigh vacuum exhaust station, which also comprises a protective strip 29, wherein the protective strip 29 is fixedly arranged at the top of the control station 16 and is arranged outside the display screen 17 in a surrounding manner; the display screen is protected through the setting.

The utility model discloses a quick leak detection device of an ultrahigh vacuum exhaust station, which also comprises a push rod 30, wherein the push rod 30 is fixedly arranged at the left side of the top of the shell 5; through the arrangement, the whole device is convenient to push to move.

The utility model discloses a quick leak hunting device of ultra-high vacuum exhaust platform, it leaks to the exhaust platform and detects time measuring at the quick leak hunting device who uses ultra-high vacuum exhaust platform, remove the device to suitable position through the gyro wheel, through pipeline and external flange joint with the exhaust platform, then go into the pipeline of exhaust platform with the tracer gas pump in the gas storage tank through the air pump, position through observing the tracer gas appearance judges the leakage position, retrieve in inhaling the collecting box through the cover of breathing in with the tracer gas of discharge simultaneously, overall structure is simple, the operation is convenient, and effectively retrieve tracer gas, the flexibility is higher, the practicality is stronger, before accomplishing above-mentioned action, at first will remove the position that the user needed.

The utility model discloses a quick leak hunting device of ultra-high vacuum exhaust stage, above the mounting means, the connected mode or the mode that sets up of all parts are common mechanical system to concrete structure, model and the coefficient index of all its parts are its from taking the technique, as long as can reach all can implement of its beneficial effect, so do not add at many and give unnecessary details.

The utility model relates to a quick leak detection device of an ultrahigh vacuum exhaust platform, under the condition that the contrary explanation is not made, the directional terms "up, down, left, right, front, back, inside, and outside, and vertical and horizontal" included in the term merely represent the orientation of the term in the normal use state, or be a trivial term understood by those skilled in the art, and should not be considered as limiting the term, at the same time, the numerical terms "first," "second," and "third," etc. do not denote any particular quantity or order, but rather are used to distinguish one from another, furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements, but also includes other elements not expressly listed or inherent to such process, method, article, or apparatus.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. A quick leak detection device of an ultrahigh vacuum exhaust platform comprises a gas storage tank (1), an air pump (2), a connecting pipe (3) and a pump air pipe (4), wherein the air pump (2) is positioned on the right side of the gas storage tank (1), the connecting pipe (3) is arranged on the left part of the air pump (2) and is inserted into the gas storage tank (1) leftwards, and the pump air pipe (4) is arranged on the top of the air pump (2); it is characterized by also comprising a shell (5), a roller (6), a concave plate (7), an external flange (8), a fixed frame (9), an exhaust fan (10), a suction pipe (11), a suction cover (12), an exhaust pipe (13), a collecting box (14), a processing door (15), a console (16), a display screen (17) and an operation button (18), wherein an inner cavity is arranged inside the shell (5), the air storage box (1) and the air pump (2) are fixedly arranged on the right side of the bottom of the inner cavity, the roller (6) is arranged on the bottom of the shell (5), the concave plate (7) is fixedly arranged on the right part of the shell (5), the right part of the air pump pipe (4) penetrates through the concave plate (7) from the inner cavity to the right, the connecting flange is arranged on the right part of the air pump pipe (4), the fixed frame (9) is fixedly arranged on the left part of the inner cavity, the exhaust fan (10) is arranged on the top of the fixed frame (9), the suction pipe (11) is arranged on the top of the exhaust fan (10) and penetrates out of the shell (5) leftwards, suction hood (12) sets up in the left part of suction tube (11), blast pipe (13) set up in the left part of air exhauster (10) and pass the top of mount (9) downwards, collecting box (14) are fixed to be set up in the bottom of inner chamber and are located the below of mount (9), the bottom of blast pipe (13) is inserted in collecting box (14) from the top of collecting box (14), handle door (15) set up in the left part downside of shell (5), fixed the setting in the top of shell (5) of control cabinet (16), display screen (17) set up in the top of control cabinet (16), operating button (18) set up in the top of control cabinet (16).

2. The quick leak detection device for the ultrahigh vacuum exhaust stand according to claim 1, further comprising a storage box (19) and a box cover (20), wherein the storage box (19) is fixedly arranged at the right side of the top of the inner cavity, and the box cover (20) is arranged at the right part of the storage box (19).

3. The quick leak detection device for the ultrahigh vacuum exhaust platform as claimed in claim 2, further comprising a socket (21), an insert plate (22) and a baffle plate (23), wherein the socket (21) is fixedly arranged at the left side of the bottom of the inner cavity, a slot is arranged in the middle of the socket (21), the insert plate (22) is fixedly arranged at the bottom of the collection box (14), the right part of the insert plate (22) is inserted into the slot from the left part of the socket (21) to the right, and the baffle plate (23) is fixedly arranged at the bottom of the inner cavity and positioned at the right side of the socket (21).

4. The rapid leak detection apparatus for an ultra-high vacuum exhaust stand according to claim 3, further comprising a check valve (24), wherein the check valve (24) is disposed at a middle portion of the connection pipe (3).

5. The quick leak detection device for the ultrahigh vacuum exhaust stand according to claim 4, further comprising a movable cover (25), a barrier strip (26) and a handle (27), wherein the top of the movable cover (25) is hinged with the right part of the housing (5) and is positioned at the right side of the concave plate (7), the barrier strip (26) is fixedly arranged at the upper end of the bottom of the concave plate (7), and the handle (27) is fixedly arranged at the lower side of the right part of the movable cover (25).

6. The apparatus for rapid leak detection of an ultra-high vacuum exhaust stage as claimed in claim 5, further comprising a shroud (28), the shroud (28) being fixedly disposed at the top of the housing (5) and to the right of the console (16).

7. The rapid leak detection device for the ultrahigh vacuum exhaust stand as set forth in claim 6, further comprising a protective strip (29), wherein the protective strip (29) is fixedly disposed on the top of the console (16) and surrounds and is disposed outside the display screen (17).

8. The rapid leak detection device for an ultrahigh vacuum exhaust stand as set forth in claim 7, further comprising a push rod (30), the push rod (30) being fixedly disposed at the left side of the top of the housing (5).