CN213958910U

CN213958910U - Guide rail lead screw for automatic photoresist removing machine for round crystal

Info

Publication number: CN213958910U
Application number: CN202022356131.7U
Authority: CN
Inventors: 何浩梁
Original assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Current assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Priority date: 2020-10-21
Filing date: 2020-10-21
Publication date: 2021-08-13
Anticipated expiration: 2030-10-21

Abstract

The utility model relates to the technical field of installation protection, in particular to a guide rail lead screw for an automatic photoresist remover for a wafer, which comprises a slide rail; be provided with the spacing groove in the bottom of slide rail, the inside sliding connection of spacing groove have spacing subassembly, spacing subassembly pass through the bolt fit and fix inside the machine of degumming, the utility model discloses a set up the mounting structure of a slide rail, through setting up the spacing groove in the bottom of slide rail, through setting up the spacing subassembly that can remove in the spacing inslot portion, can be connected the slide rail with the outside through spacing subassembly, avoided the fixed mode of the installation of the keyhole of beating, guarantee that the slider can smooth slide in the outside of slide rail, reduce the risk that the slider drops from the slide rail.

Description

Guide rail lead screw for automatic photoresist removing machine for round crystal

Technical Field

The utility model relates to an installation protection technical field specifically is a guide rail lead screw for automatic degumming machine of brilliant circle.

Background

The photoresist remover usually adopts a high-power radio frequency power supply added on a cage type electrode to generate glow discharge between the electrode and the inner wall of a reaction cavity, process gas in the glow region is ionized into charged plasma, and the effects of stripping photoresist, material surface treatment, modification and the like are achieved by utilizing the interaction between the plasma and the material surface.

The sliding rail is also called a guide rail and a slideway, and is generally used in industry and furniture industry, and the device is mounted on the upper end of the sliding rail, so that the device moves on the sliding rail, and is generally used as a mounting part of a mobile processing device in industry, and the furniture industry is often used in the manufacture of furniture such as drawers, however, the sliding rail has certain problems in the arrangement:

the existing slide rail is usually fixed by arranging bolt holes on the slide rail and fixing the slide rail through bolts, and the slide block is blocked from sliding on the slide rail due to the bolt holes and the bolts, so that the slide block is at a risk of breaking away from the slide rail, and the existing slide rail is usually fixed only at a fixed position and can be installed on two sides of the slide rail.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fixed strengthening mechanism that uses of guide rail lead screw for automatic machine of photoresist stripping of brilliant circle to solve the problem that provides among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a guide rail lead screw for an automatic wafer stripper comprises a slide rail; the bottom of the sliding rail is provided with a limiting groove, the inside of the limiting groove is connected with a limiting component in a sliding mode, and the limiting component is fixed inside the degumming machine through the bolt in a matching mode.

Preferably, the spacing groove include slip lagging and spacing hole, the slip lagging setting in spacing inslot wall both sides, and the up end of slip lagging and the bottom of slide rail are reserved there is the slip cell body, spacing hole setting in the inside of slip lagging, just spacing hole evenly be straight line distribution on the up end of slip lagging, the bottom slip joint of slip lagging have spacing subassembly, spacing subassembly pass through slip lagging and slide rail cooperation sliding connection.

Preferably, the limiting component comprises a clamping plate and a fixing table, the clamping plate and the fixing table are fixedly connected through a connecting column in a matched mode, the connecting column is fixed in the middle of the fixing table and the clamping plate and is perpendicular to the clamping plate and the connecting column, a mounting hole is formed in the bottom end face of the fixing table, the limiting component is connected with the outside through the fixing table in a matched mode through a bolt and is fixed to the outside, the clamping plate is connected to the limiting groove in a sliding mode, and the upper end of the clamping plate is connected to the sliding groove in a clamped mode.

Preferably, the bottom of slip lagging still be connected with the locking component, the locking component including card post and connecting plate, card post and connecting plate between fixed connection, just the connecting plate fix the both ends at the card post, the connecting plate can dismantle the inside of connecting at spacing hole, and the slip lagging of spacing groove both sides links together through the locking component.

Preferably, the connecting plate passes through the limiting hole and abuts against the top of the limiting groove, and the bottom of the clamping column abuts against the lower end face of the sliding sleeve plate.

Preferably, the both sides of slide rail be provided with the slide, slide rail upper end outside sliding connection have the slider, the inside of both sides slip joint at the slide of slider, and the up end of slide rail is provided with the spout of gomphosis, slider bottom laminating on the up end of slide rail.

Preferably, the diameter of the clamping plate is smaller than the width of the inner walls of the two sides of the limiting groove.

Preferably, the locking member butt in the outside of spliced pole, and the locking member set up the both sides of two sets of spacing subassemblies respectively.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through setting up the mounting structure of a slide rail, through setting up the spacing groove in the bottom of slide rail, through set up the spacing subassembly that can remove in the spacing inslot portion, can be connected the slide rail with the outside through spacing subassembly, avoided the fixed mode of the installation of drilling, guarantee that the slider can smooth slide in the outside of slide rail, reduce the risk that the slider drops from the slide rail.

2. Through setting up mobilizable spacing subassembly, through at the inside slip joint cardboard of spacing inslot for the cardboard can slide at the spacing inslot, makes slide rail and outside fixed through the fixed station simultaneously, and the fixed position of fixed station in the slide rail bottom is adjustable simultaneously, installs through adjusting the mounted position of spacing subassembly in the slide rail bottom, has improved the flexibility of slide rail installation.

3. Through setting up the locking component, when spacing subassembly is fixed, pass spacing hole through the connecting plate with the locking component and fix the inside at the slip lagging, through the laminating of locking component in the both sides of spacing subassembly for spacing subassembly can not take place to remove, makes the slide rail can stably fix, avoids the slide rail to take place the displacement.

4. Through setting up the cup joint cap, cup joint the both sides at the slide rail through cup jointing the cap, seal the both ends of spacing groove, avoided spacing subassembly to drop from the spacing inslot portion, guarantee that spacing subassembly can install in the bottom of slide rail.

Drawings

Fig. 1 is a schematic view of a connection structure between the bottom of the slide rail and the limiting assembly and the locking member of the present invention;

FIG. 2 is a schematic view of the combined connection structure between the slide rail and the slide block of the present invention;

FIG. 3 is a schematic view of the connection structure between the components at the bottom of the slide rail according to the present invention;

FIG. 4 is a schematic view of the connection structure of the components of the limiting component of the present invention;

fig. 5 is a schematic view of a partial structure of the slide rail of the present invention;

fig. 6 is a schematic side view of the locking member connected to the sliding sleeve.

In the figure: 10. a slide rail; 11. a limiting groove; 12. a sliding sleeve plate; 13. a limiting hole; 14. a slideway;

20. a slider;

30. a limiting component; 31. clamping a plate; 32. a fixed table; 33. mounting holes; 34. connecting columns;

40. a locking member; 41. clamping the column; 42. a connecting plate;

50. sleeving a cap; 51. an abutment member.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Examples

Referring to fig. 1-6, there are shown: a guide rail lead screw for an automatic wafer stripper comprises a slide rail 10; the bottom of the slide rail 10 is provided with a limit groove 11, the inside of the limit groove 11 is connected with a limit component 30 in a sliding way, the limit component 30 is fixed inside the degumming machine through bolt matching, the limit groove 11 comprises a sliding sleeve plate 12 and a limit hole 13, the sliding sleeve plate 12 is arranged on two sides of the inner wall of the limit groove 11, a sliding groove body is reserved between the upper end surface of the sliding sleeve plate 12 and the bottom of the slide rail 10, the limit hole 13 is arranged inside the sliding sleeve plate 12, the limit hole 13 is uniformly distributed on the upper end surface of the sliding sleeve plate 12 in a straight line, the bottom of the sliding sleeve plate 12 is connected with the limit component 30 in a sliding way, the limit component 30 is connected with the slide rail 10 in a sliding way through the sliding sleeve plate 12 in a matching way, the bottom of the slide rail 10 is provided with the limit groove 11, the limit component 30 which can move is arranged inside the limit groove 11, the slide rail 10 can be connected with the outside through the limit component 30, the fixing mode of bolting hole installation is avoided, the sliding block 20 can be guaranteed to slide smoothly outside the sliding rail 10, the risk that the sliding block 20 falls off from the sliding rail 10 is reduced, the limiting component 30 comprises a clamping plate 31 and a fixed table 32, the clamping plate 31 and the fixed table 32 are matched and fixedly connected through a connecting column 34, the connecting column 34 is fixed in the middle of the fixed table 32 and the clamping plate 31 and is vertical to the clamping plate 31 and the connecting column 34, the bottom end face of the fixed table 32 is provided with a mounting hole 33, the limiting component 30 is matched and connected with a bolt through the fixed table 32 and is fixed with the outside, the clamping plate 31 is clamped inside the limiting groove 11 in a sliding manner, the upper end of the clamping plate 31 is clamped in the sliding groove body, the bottom of the sliding sleeve plate 12 is also connected with a locking component 40, the movable limiting component 30 is arranged, and the clamping plate 31 is clamped in the limiting groove 11 in a sliding manner, the clamping plate 31 can slide in the limiting groove 11, the slide rail 10 is fixed with the outside through the fixing table 32, the fixing position of the fixing table 32 at the bottom of the slide rail 10 is adjustable, the mounting position of the limiting component 30 at the bottom of the slide rail 10 is adjusted, the mounting flexibility of the slide rail 10 is improved, the locking component 40 comprises a clamping column 41 and a connecting plate 42, the clamping column 41 is fixedly connected with the connecting plate 42, the connecting plate 42 is fixed at two ends of the clamping column 41, the connecting plate 42 is detachably connected in the limiting hole 13, the sliding sleeve plates 12 at two sides of the limiting groove 11 are connected together through the locking component 40, when the limiting component 30 is fixed, the locking component 40 penetrates through the limiting hole 13 through the connecting plate 42 and is fixed in the sliding sleeve plate 12, and is attached to two sides of the limiting component 30 through the locking component 40, make spacing subassembly 30 can not take place to remove for slide rail 10 can be stably fixed, avoids slide rail 10 to take place the displacement.

The two ends of the limiting groove 11 are sealed by sleeving the sleeving cap 50 on the two sides of the sliding rail 10, so that the limiting component 30 is prevented from falling off from the inside of the limiting groove 11, the butting part 51 is connected outside the sleeving cap 50, so that the sleeving cap 50 can be butted on the two ends of the sliding rail 10, the limiting component 30 can be ensured to be installed at the bottom of the sliding rail 10, the connecting plate 42 passes through the limiting hole 13 to be butted with the top of the limiting groove 11, the bottom of the clamping column 41 is butted on the lower end surface of the sliding sleeve plate 12, the two sides of the sliding rail 10 are provided with the sliding ways 14, the outer part of the upper end of the sliding rail 10 is slidably connected with the sliding block 20, the two sides of the sliding block 20 are slidably clamped inside the sliding ways 14, the upper end surface of the sliding rail 10 is provided with the embedded sliding grooves, the bottom of the sliding block 20 is jointed on the upper end surface of the sliding rail 10, and the diameter of the clamping plate 31 is equal to the distance width between the two groups of the sliding sleeve plates 12, the diameter of the clamping plate 31 is smaller than the width of the inner walls of the two sides of the limiting groove 11, the locking members 40 abut against the outer sides of the connecting columns 34, and the locking members 40 are respectively arranged on the two sides of the two groups of limiting assemblies 30.

The above description is for further details of the present invention, and it is not assumed that the embodiments of the present invention are limited to these descriptions, and it is obvious to those skilled in the art that the present invention can be implemented by a plurality of simple deductions or replacements without departing from the concept of the present invention, and all should be considered as belonging to the protection scope defined by the claims submitted by the present invention.

Claims

1. A guide rail lead screw for an automatic wafer stripper comprises a slide rail (10);

the method is characterized in that:

the bottom of slide rail (10) is provided with spacing groove (11), the inside sliding connection of spacing groove (11) have spacing subassembly (30), spacing subassembly (30) pass through the bolt cooperation and fix inside the degumming machine.

2. The lead screw of claim 1, wherein the lead screw comprises: spacing groove (11) including slip lagging (12) and spacing hole (13), slip lagging (12) set up in spacing groove (11) inner wall both sides, and the up end of slip lagging (12) and the bottom of slide rail (10) reserve has the slip cell body, spacing hole (13) set up the inside at slip lagging (12), just spacing hole (13) evenly be the straight line and distribute on the up end of slip lagging (12), the bottom slip joint of slip lagging (12) have spacing subassembly (30), spacing subassembly (30) through slip lagging (12) and slide rail (10) cooperation sliding connection.

3. The lead screw of claim 2, wherein the lead screw comprises: spacing subassembly (30) include cardboard (31) and fixed station (32), cardboard (31) and fixed station (32) between through spliced pole (34) cooperation fixed connection, and spliced pole (34) are fixed at the middle part of fixed station (32) and cardboard (31) to keep perpendicular with cardboard (31) and spliced pole (34), the bottom face of fixed station (32) on be provided with mounting hole (33), spacing subassembly (30) be connected with the external fixation through fixed station (32) and bolt cooperation, cardboard (31) slip joint inside spacing groove (11), and the upper end joint of cardboard (31) in the sliding tray body.

4. The lead screw of claim 2, wherein the lead screw comprises: the bottom of slip sleeve board (12) still be connected with locking member (40), locking member (40) including card post (41) and connecting plate (42), card post (41) and connecting plate (42) between fixed connection, just connecting plate (42) fix the both ends at card post (41), connecting plate (42) can dismantle the inside of connecting at spacing hole (13), and slip sleeve board (12) of spacing groove (11) both sides link together through locking member (40).

5. The lead screw of claim 4, wherein the lead screw comprises: the connecting plate (42) penetrates through the limiting hole (13) to be abutted against the top of the limiting groove (11), and the bottom of the clamping column (41) is abutted against the lower end face of the sliding sleeve plate (12).

6. The lead screw of claim 1, wherein the lead screw comprises: the both sides of slide rail (10) be provided with slide (14), slide rail (10) upper end outside sliding connection have slider (20), the inside of both sides slip joint at slide (14) of slider (20), and the up end of slide rail (10) is provided with the spout of gomphosis, slider (20) bottom laminate on the up end of slide rail (10).

7. The lead screw of claim 3, wherein the lead screw comprises: the diameter of the clamping plate (31) is the distance width between the two groups of sliding sleeve plates (12), and the diameter of the clamping plate (31) is smaller than the width of the inner walls of the two sides of the limiting groove (11).

8. The lead screw of claim 4, wherein the lead screw comprises: the locking component (40) is abutted to the outer side of the connecting column (34), and the locking component (40) is respectively arranged on two sides of the two groups of limiting assemblies (30).