CN213956012U - Tubular heating furnace body structure - Google Patents
Tubular heating furnace body structure Download PDFInfo
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- CN213956012U CN213956012U CN202022041915.0U CN202022041915U CN213956012U CN 213956012 U CN213956012 U CN 213956012U CN 202022041915 U CN202022041915 U CN 202022041915U CN 213956012 U CN213956012 U CN 213956012U
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Abstract
The utility model discloses a tubular heating furnace body structure relates to semiconductor, solar cell's sintering equipment. The utility model comprises a shell, an external heat-insulating layer, an internal heat-insulating layer and a heating wire, and also comprises a plurality of ceramic block groups for fixing the heating wire, wherein the ceramic block groups comprise a plurality of combined ceramic blocks which are evenly clamped on the heating wire along the circumferential direction; the combined ceramic block comprises a clearance ceramic block and a holding ceramic block which are matched with each other; the gap ceramic block and the maintaining ceramic block are both arranged between the two furnace filaments of the heating wire; and a first channel matched with the heating wire is arranged on two sides of the gap ceramic block, and a second channel matched with the heating wire is arranged on two sides of the maintaining ceramic block. The utility model discloses a clearance ceramic block that the structure is different and the setting that keeps ceramic block are carried out extrusion deformation by ceramic block when avoiding the heater strip to be heated the inflation, cause heater strip or ceramic block to damage to and lead to the inside short circuit of furnace body, prolonged the life of heating furnace silk.
Description
Technical Field
The utility model belongs to the technical field of semiconductor, solar cell's sintering equipment, especially, relate to a tubular heating furnace body structure.
Background
Current tubular heating furnace body mainly includes the shell, a heat preservation layer, inside heat preservation layer, heater strip and insulator group, like the chinese grant publication number CN 210533046U, a tubular heating furnace body structure is disclosed, including the stove outer covering, outside heat preservation layer, interior heat preservation layer, heater strip and insulator group, insulator group includes a plurality of insulators, a plurality of insulators are evenly blocked on the heater strip along circumference, outside heat preservation layer cover is outside the insulator, the stove outer covering overlaps outside the outside heat preservation layer, be equipped with the annular gap between outside heat preservation layer and the heater strip, a plurality of insulators are cut apart into a plurality of arcs around the annular gap, interior heat preservation layer includes a plurality of arc heat preservation layer pieces, arc heat preservation layer piece and arc district one-to-one, and arc heat preservation layer piece is located the arc district, arc heat preservation layer piece is hard stereotype structure. A quartz furnace tube (not shown in the figure) is arranged on the ceramic block, the quartz furnace tube provides a vacuum or low-pressure or normal-pressure reaction cavity for the process, and the coating, diffusion, oxidation and annealing processes of equipment in the semiconductor and solar cell industries and the like are completed in the quartz furnace tube.
The furnace body structure has the following problems:
(1) the insulator of the existing tubular heating furnace body is mostly formed by repeatedly installing single-structure ceramic blocks; the ceramic blocks with single reserved gap structures are repeatedly installed, heating wires can swing back and forth in the gap structures in the production and manufacturing process of the heating furnace, and the whole group of ceramic blocks can also cause irregular change of the inner diameter due to the fact that gaps exist and are extruded in the manufacturing process, so that the assembly precision of the whole furnace body is influenced;
(2) according to the difference of the process temperature, when the temperature of the heating wire rises, the length of the heating wire can expand due to the fact that the metal material of the heating wire has a certain expansion coefficient, and the heating wire in the heating furnace is of a winding structure, so that the diameter of the heating wire can be changed in the radial direction. The insulation structure formed by installing the single ceramic block cannot leave an expansion gap when the heating wire radially expands, so that the heating wire is extruded by the ceramic block, the deformation of the heating wire and the damage of the ceramic block are easily caused, and the short circuit burning of the whole heating furnace body is easily caused due to the overlarge deformation or the damage of the insulation ceramic block.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a tubular heating furnace body structure to solve the problem that above-mentioned background art provided.
In order to solve the technical problem, the utility model discloses a realize through following technical scheme:
the utility model relates to a tubular heating furnace body structure, which comprises a shell, an external heat preservation layer, an internal heat preservation layer and a heating wire, and also comprises a plurality of ceramic block groups for fixing the heating wire, wherein the ceramic block groups comprise a plurality of combined ceramic blocks which are uniformly clamped on the heating wire along the circumferential direction; the combined ceramic block comprises a clearance ceramic block and a holding ceramic block which are matched with each other; the gap ceramic block and the maintaining ceramic block are both arranged between the two furnace filaments of the heating wire;
two sides of the gap ceramic block are provided with a first channel matched with the heating wire, and two sides of the maintaining ceramic block are provided with a second channel matched with the heating wire; the second channel is of a semicircular structure; the first channel is of a rectangular structure, and arc-shaped chamfers matched with the heating wires are arranged on two sides of the first channel.
Further, outside the combined ceramic block was established to outside heat preservation cover, the shell overlaps outside the heat preservation of outside, form annular gap between heater strip and the outside heat preservation, it is a plurality of the combined ceramic block is cut apart into a plurality of curved inside heat preservation with annular gap.
Furthermore, the external heat-insulating layer is of a soft or hard shaping structure.
Furthermore, the external heat-insulating layer is made of aluminum silicate fiber.
Furthermore, the inner heat-insulating layer is of an arc-shaped structure and is made of an aluminum silicate fiber material or an inorganic fiber material.
Further, the shell is made of stainless steel, and the heating wire is made of iron-chromium-aluminum alloy or nickel-chromium alloy.
Furthermore, the combined ceramic blocks on any one ceramic block group are distributed along the axial direction of the shell at equal intervals; and the gap ceramic blocks and the holding ceramic blocks on any one ceramic block group are alternately distributed; and a holding rod is inserted in any one of the ceramic block groups to connect and fix the gap ceramic block and the holding ceramic block in series.
Furthermore, the clearance ceramic block and the holding ceramic block are provided with through holes matched with the holding rods.
Further, the distance between any two adjacent ceramic block groups is the same.
The heat insulation ring is arranged at two end parts, the outer diameter of the heat insulation ring is the same as that of the external heat insulation layer, and one side of the heat insulation ring abuts against the end parts of the external heat insulation layer and the internal heat insulation layer; and the shell is sleeved outside the heat preservation ring.
The utility model discloses following beneficial effect has:
the utility model avoids the heating wire or the ceramic block from being damaged due to extrusion deformation of the ceramic block when the heating wire expands when heated and leads to short circuit inside the furnace body by arranging the gap ceramic blocks and the keeping ceramic blocks with different structures, thereby prolonging the service life of the heating furnace wire; meanwhile, the processing difficulty is reduced, and the production efficiency and the assembly precision are improved.
Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a first axial sectional view of the tubular heating furnace body of the present invention;
FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1;
FIG. 3 is an enlarged view of a portion B of FIG. 2;
fig. 4 is a second axial sectional view of the tubular heating furnace body of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "open hole", "upper", "lower", "thickness", "top", "middle", "length", "inner", "around", and the like, indicate positional or positional relationships, are merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the components or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Referring to fig. 1-4, the present invention relates to a tubular heating furnace body structure, which comprises a housing 1, an external insulating layer 2, an internal insulating layer 3, a heating wire 7, and a plurality of ceramic block groups for fixing the heating wire 7, wherein the ceramic block groups comprise a plurality of combined ceramic blocks, and the combined ceramic blocks are uniformly clamped on the heating wire 7 along the circumferential direction; the combined ceramic block comprises a clearance ceramic block 5 and a holding ceramic block 4 which are matched with each other; the gap ceramic block 5 and the holding ceramic block 4 are both arranged between two furnace wires of the heating wire 7;
wherein, the two sides of the gap ceramic block 5 are provided with a first channel 51 matched with the heating wire 7, and the two sides of the maintaining ceramic block 4 are provided with a second channel 41 matched with the heating wire 7; the second channel 41 is of a semicircular structure; the first channel 51 is of a rectangular structure, and arc-shaped chamfers matched with the heating wires 7 are arranged on two sides of the first channel.
The plurality of internal heat-insulating layers 3 are all filled with arc-shaped heat-insulating layer blocks, so that a good heat-insulating effect is provided for the heating furnace body; the first channel 51 of the gap ceramic block 5 provides deformation gap allowance for the heating wire after temperature rise, so that the gap ceramic block 5 and the heating wire 6 are not mutually extruded at high temperature to damage the gap ceramic block 5 and the heating wire 6. The second channel 41 on the holding ceramic block 4 provides a supporting and holding mechanism for the heating wire 6, so that the heating wire 6 and the holding ceramic block 4 can keep relative positions when being assembled at normal temperature, and assembly deformation is reduced.
Preferably, outside the combination ceramic piece was established to outside heat preservation 2 covers, shell 1 cover outside heat preservation 2, forms annular gap between heater strip 7 and the outside heat preservation 2, and a plurality of combination ceramic pieces divide annular gap into a plurality of curved inside heat preservation 3.
Preferably, the external insulation layer 2 is of a soft or hard setting structure.
Preferably, the external heat-insulating layer 2 is made of aluminum silicate fiber, is tightly wrapped on the periphery of the internal heat-insulating layer 3, has excellent heat-insulating effect, excellent thermal stability, good pulverization resistance and low heat storage property, and has silk resistance, thermal shock resistance and good sound absorption effect before and after heating.
Preferably, the inner insulating layer 3 is a circular arc structure, and is made of an aluminum silicate fiber material or an inorganic fiber material; the outer ring of the heating wire 7 is tightly attached except the positions where the ceramic blocks 4 and the gap ceramic blocks 5 are kept, and the ceramic heating wire has the characteristics of excellent compression strength and breaking strength, low thermal conductivity, thermal shock resistance, rapid temperature rise and temperature reduction, airflow scouring resistance, rapid cooling and rapid heating resistance and the like.
Preferably, the shell 1 is made of stainless steel and is mainly used for fixing and mounting the whole furnace body; the heating wire 7 is made of iron-chromium-aluminum alloy or nickel-chromium alloy.
Preferably, the combined ceramic blocks on any one ceramic block group are distributed along the axial direction of the shell 1 with equal gaps; and the gap ceramic blocks 5 and the holding ceramic blocks 4 on any one ceramic block group are alternately distributed; and a holding rod 6 is inserted on any ceramic block group to connect the gap ceramic block 5 and the holding ceramic block 4 in series and fix.
Preferably, the gap ceramic block 5 and the holding ceramic block 4 are provided with through holes cooperating with the holding rods 6, the holding rods 6 serving to stabilize the structure of the heating wire 7.
Preferably, the distance between any two adjacent ceramic block groups is the same.
Preferably, the heat insulation structure further comprises heat insulation rings 8 arranged at the two end parts, the outer diameter of each heat insulation ring 8 is the same as that of the outer heat insulation layer 2, and one side of each heat insulation ring 8 abuts against the end parts of the outer heat insulation layer 2 and the inner heat insulation layer 3; and the shell 1 is sleeved outside the heat preservation ring 8.
The assembling method comprises the following steps:
winding heating wires 7 on a cage-shaped supporting mechanism for assembling a heating furnace body, wherein a certain distance is reserved between every two circles of furnace wires by using a maintaining ceramic block 4 and a gap ceramic block 5, the maintaining ceramic blocks 4 and the gap ceramic blocks 5 on the same circle are distributed at equal intervals along the circumferential direction, and the maintaining ceramic blocks 4 and the gap ceramic blocks 5 which are arranged in the same straight line are connected in series and fixed by using a maintaining rod 6;
the internal heat-insulating layer 3 is arranged between two adjacent ceramic block groups and is firmly bound into a cylindrical structure by a high-temperature resistant fiber bag;
tightly wrapping the external heat-insulating layer 2 in the external area of the internal heat-insulating layer 3, designing into 1-5 layers according to the process temperature, then binding and firmly forming a cylindrical structure by using high-temperature resistant fiber bags, and installing heat-insulating rings 8 at two ends;
the outer shell 1 is tightly wrapped on the external heat-insulating layer 2, and the whole furnace body is fixed into a cage-shaped structure and then is detached from the supporting mechanism.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. The utility model provides a tubular heating furnace body structure, includes shell (1), outside heat preservation (2), inside heat preservation (3) and heater strip (7), its characterized in that: the ceramic heating wire fixing device further comprises a plurality of ceramic block groups used for fixing the heating wire (7), wherein each ceramic block group comprises a plurality of combined ceramic blocks, and the combined ceramic blocks are uniformly clamped on the heating wire (7) along the circumferential direction;
wherein the combined ceramic block comprises a clearance ceramic block (5) and a holding ceramic block (4) which are matched with each other;
the gap ceramic block (5) and the holding ceramic block (4) are arranged between the two furnace wires of the heating wire (7);
wherein, two sides of the gap ceramic block (5) are provided with a first channel (51) matched with the heating wire (7), and two sides of the maintaining ceramic block (4) are provided with a second channel (41) matched with the heating wire (7);
the second channel (41) is of a semicircular structure; the first channel (51) is of a rectangular structure, and arc-shaped chamfers matched with the heating wires (7) are arranged on two sides of the first channel.
2. The tubular heating furnace body structure according to claim 1, wherein the outer insulating layer (2) is sleeved with the combined ceramic blocks, the outer shell (1) is sleeved with the outer insulating layer (2), an annular gap is formed between the heating wire (7) and the outer insulating layer (2), and the combined ceramic blocks divide the annular gap into a plurality of arc-shaped inner insulating layers (3).
3. A tubular heating furnace body structure according to claim 1, characterized in that the outer insulating layer (2) is of a soft or hard shaped structure.
4. A tubular heating furnace body structure according to claim 3, characterized in that the outer insulating layer (2) is of aluminium silicate fibre material.
5. A tubular heating furnace body structure according to claim 1, characterized in that the inner insulating layer (3) is in a circular arc shape, which is made of aluminum silicate fiber material or inorganic fiber material.
6. The tubular heating furnace body structure according to claim 1, wherein the shell (1) is made of stainless steel, and the heating wire (7) is made of iron-chromium-aluminum alloy or nickel-chromium alloy.
7. The tubular heating furnace body structure according to claim 1, wherein the combined ceramic blocks on any one of the ceramic block sets are distributed with equal gaps along the axial direction of the shell (1);
and the gap ceramic blocks (5) and the holding ceramic blocks (4) on any one ceramic block group are alternately distributed; and a holding rod (6) is inserted in any one of the ceramic block groups to connect and fix the gap ceramic block (5) and the holding ceramic block (4) in series.
8. A tube furnace construction according to claim 1, characterized in that the gap ceramic blocks (5) and the holding ceramic blocks (4) are provided with through holes for cooperation with holding rods (6).
9. The tubular heating furnace body structure of claim 1, wherein the distance between any two adjacent ceramic block sets is the same.
10. The tubular heating furnace body structure according to claim 1, further comprising heat-insulating rings (8) arranged at both ends, wherein the outer diameter of the heat-insulating rings (8) is the same as the outer diameter of the external heat-insulating layer (2), and one side of the heat-insulating rings (8) abuts against the ends of the external heat-insulating layer (2) and the internal heat-insulating layer (3); and the shell (1) is sleeved outside the heat-insulating ring (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022041915.0U CN213956012U (en) | 2020-09-17 | 2020-09-17 | Tubular heating furnace body structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022041915.0U CN213956012U (en) | 2020-09-17 | 2020-09-17 | Tubular heating furnace body structure |
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| Publication Number | Publication Date |
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| CN213956012U true CN213956012U (en) | 2021-08-13 |
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| CN202022041915.0U Active CN213956012U (en) | 2020-09-17 | 2020-09-17 | Tubular heating furnace body structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116294613A (en) * | 2023-05-25 | 2023-06-23 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
| CN116878280A (en) * | 2023-06-13 | 2023-10-13 | 湖南红太阳光电科技有限公司 | Heating furnace body |
-
2020
- 2020-09-17 CN CN202022041915.0U patent/CN213956012U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116294613A (en) * | 2023-05-25 | 2023-06-23 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
| CN116294613B (en) * | 2023-05-25 | 2023-07-25 | 无锡松煜科技有限公司 | Electric heating furnace for manufacturing photovoltaic cells |
| CN116878280A (en) * | 2023-06-13 | 2023-10-13 | 湖南红太阳光电科技有限公司 | Heating furnace body |
| CN116878280B (en) * | 2023-06-13 | 2024-01-02 | 湖南红太阳光电科技有限公司 | Heating furnace body |
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