CN213925003U

CN213925003U - Coating film light-operated sheet clamp jig

Info

Publication number: CN213925003U
Application number: CN202022971184.XU
Authority: CN
Inventors: 王刚; 陈林帆
Original assignee: Zhejiang Meidikai Optical Semiconductor Co ltd
Current assignee: Zhejiang Meidikai Optical Semiconductor Co ltd
Priority date: 2020-12-10
Filing date: 2020-12-10
Publication date: 2021-08-10
Anticipated expiration: 2030-12-10

Abstract

The utility model relates to the technical field of optical film forming jigs of sputtering machines, in particular to a film coating light-operated sheet clamp jig which is characterized by comprising a clamp jig body, wherein the central position of the clamp jig body is provided with a placing groove hole for placing a light-operated glass sheet, and the edge of the placing groove hole is in a ladder shape; the shape and the size of the light control glass sheet are matched with the placing groove hole. The utility model discloses a put at the central point that presss from both sides the tool body and set up and place the slotted hole, make optical glass can dismantle and place downthehole at the standing groove to form a whole with pressing from both sides the tool, the tool can use repeatedly at the coating film in-process, convenient the dismantlement. And due to the arrangement of the slotted holes, the area of the optical glass is greatly reduced, the waste of glass sheets is avoided, and resources are saved. The invention has the advantage of improving the cost with the maximum efficiency without influencing the monitoring result of the narrow-band coating.

Description

Coating film light-operated sheet clamp jig

Technical Field

The utility model relates to a sputter optics film forming tool technical field especially relates to a coating film light-operated piece presss from both sides tool.

Background

At present, when 8-inch or other narrow-band product pieces are coated by a sputtering machine, the general control mode is the combination of light control and speed, and the premise of speed control is that the detection speed based on the light control can give a certain reference to the following speed control, so that one piece of glass is required to be used as a light control piece for secondary coating during each coating. Since the jig for accompanying plating of photo-control is the same as that of normal products, it is required that the size of the substrate for accompanying plating must be 8 inches or other corresponding same sizes. 8 cun or other light-operated glass processing and transport that correspond the size are very inconvenient to can not reuse after using once, the effective range that actual light-operated device detected the needs is few moreover, and unnecessary part can have extravagant and unable used repeatedly like this, leads to material cost, input such as cost of labor increases. Therefore, there is a need for an improved clamping fixture for a photo-controlled substrate.

At present, the narrow-band interference filter can replace an expensive light splitting device such as a grating, and is widely applied to the fields of optical experiments and industry. Therefore, the requirement for the narrow-band filter is increased, and the cost is wasted if the substrate holder of the photo-control wafer is not improved.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems in the prior art, the utility model provides a coating film light control sheet clamp jig.

In order to achieve the above object, the utility model provides a following technical scheme: a coated optical control piece clamp jig comprises a clamp jig body, wherein a placing groove hole for placing an optical control glass piece is formed in the center of the clamp jig body, and the edge of the placing groove hole is in a step shape; the shape and the size of the light control glass sheet are matched with the placing groove hole.

Preferably, the clamp jig body is made of stainless iron.

Preferably, the placing slotted hole is a square hole, and the section of the placing slotted hole in the thickness direction is T-shaped.

Preferably, the size of the placing slotted hole is 48X48mm, and the edge width is 0.5 mm.

Preferably, the thickness of the clamp jig body is 0.8-1.2 mm.

Preferably, screw holes are formed in the clamp jig bodies on the two sides of the placing groove hole.

Preferably, the outer edge of the clamp jig body is provided with a notch.

Preferably, the jig clamping body comprises a jointed board and an annular or frame-shaped covering plate, the central position of the jointed board is provided with the slotted hole, the central position of the covering plate is provided with a mounting hole, the edge of the mounting hole is provided with an inner edge, the upper surface of the inner edge is lower than the upper surface of the covering plate, the edge of the jointed board is provided with an outer edge matched with the inner edge, and the jointed board is detachably arranged on the mounting hole of the covering plate.

Preferably, a magnet adsorption layer for adsorbing the upper surface of the inner edge is arranged on the lower surface of the outer edge.

Preferably, the spliced plates are provided with a plurality of outer profiles which are the same in size and matched with the mounting holes, and the placing slotted holes in the spliced plates are different in size.

The utility model has the advantages that: the utility model discloses a put at the central point that presss from both sides the tool body and set up and place the slotted hole, make optical glass can dismantle and place downthehole at the standing groove to form a whole with pressing from both sides the tool, the tool can use repeatedly at the coating film in-process, convenient the dismantlement. And due to the arrangement of the slotted holes, the area of the optical glass is greatly reduced, the waste of glass sheets is avoided, and resources are saved. The invention has the advantage of improving the cost with the maximum efficiency without influencing the monitoring result of the narrow-band coating.

Drawings

Fig. 1 is a schematic front view of a clamping fixture combined with a light control glass sheet.

Fig. 2 is a schematic view of the overall structure of the clamp jig in embodiment 1.

FIG. 3 is a schematic structural view of a panel of example 2.

FIG. 4 is a schematic view showing the back structure of the panels of example 2.

FIG. 5 is a schematic view of the structure of a cover plate in example 2.

FIG. 6 is a schematic view showing the structure of the back surface of the cover plate in example 2.

Wherein: 1-clamp jig body, 11-placing slotted hole, 12-screw hole, 13-notch, 14-jointed board, 15-covering board, 16-mounting hole, 17-inner edge, 18-outer edge, 19-magnet adsorption layer and 101-light control glass sheet.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings.

Example 1

A coated light control sheet clamp jig is shown in figures 1 and 2 and comprises a clamp jig body 1 made of stainless iron, wherein a placing groove hole 11 used for placing a light control glass sheet 101 is formed in the center of the clamp jig body 1, the placing groove hole 11 is square, the edge of the placing groove hole 11 is in a ladder shape, and specifically, the section of the placing groove hole 11 in the thickness direction is in a T shape. The thickness of the clamp jig body 1 is 0.8-1.2 mm, the most preferable thickness is 1.0mm, the size of the placing slotted hole 11 is 48X48mm, and the edge width is 0.5 mm. The shape and size of the light control glass sheet 101 are matched with the placing slotted hole 11. Screw holes 12 are formed in the clamp jig body 1 on two sides of the slot 11 so as to fix the clamp jig conveniently. The outer edge of the clamp jig body 1 is provided with a notch 13, so that the clamp jig or other products placed on the upper surface of the clamp jig can be taken conveniently.

The light-operated glass sheet is placed in the placing groove hole 11 of the clamp jig body 1, and then plating is carried out as a plating accompanying sheet, so that the using amount of the light-operated glass sheet can be greatly saved, and the material and the cost are saved. Because the light-operated glass piece area that uses is little, it is more convenient to carry and store, and this anchor clamps are durable for durable, can recycle.

Example 2

As shown in fig. 3 to 6, the present embodiment is substantially the same as embodiment 1, except that in the present embodiment, the jig clamping device body 1 includes a jointed board 14 having the placement slot 11 at a central position and an annular or frame-shaped cover plate 15, a mounting hole 16 is formed at a central position of the cover plate 15, an inner edge 17 is formed at an edge of the mounting hole 16, an upper surface of the inner edge 17 is lower than an upper surface of the cover plate 15, an outer edge 18 adapted to the inner edge 17 is formed at an edge of the jointed board 14, and the jointed board 14 is detachably disposed on the mounting hole of the cover plate 15. The outer contours of the plurality of jointed boards 14 are the same and matched with the mounting holes 16, and the sizes of the placing slotted holes 11 in the plurality of jointed boards 14 are different. The size of the placing slot hole 11 can be changed by replacing the jointed board 14 combined with the covering board 15, and then the light-operated glass sheet 101 with the corresponding size is matched, so that the application range of the clamp jig can be greatly enlarged.

In this embodiment, a magnet attracting layer 19 is provided on the lower surface of the outer edge 18 for attracting the upper surface of the inner edge 17, so as to facilitate the combination, assembly and disassembly of the panels 14 and the covering plate 15.

The above embodiments are only used for illustrating the present invention, and not for limiting the present invention, and those skilled in the relevant technical field can make various changes and modifications without departing from the spirit and scope of the present invention, so that all equivalent technical solutions also belong to the scope of the present invention, and the protection scope of the present invention should be defined by the claims.

Claims

1. The coated light control sheet clamp jig is characterized by comprising a clamp jig body (1), wherein a placing groove hole (11) for placing a light control glass sheet (101) is formed in the center of the clamp jig body (1), and the edge of the placing groove hole (11) is in a step shape; the shape and the size of the light control glass sheet (101) are matched with the placing slotted hole (11).

2. The coated light control sheet clamp jig of claim 1, wherein the clamp jig body (1) is made of stainless iron.

3. The coated light control sheet fixture according to claim 1, wherein the slot (11) is a square hole, and the cross section of the slot (11) in the thickness direction is T-shaped.

4. The coated light control sheet fixture of claim 3, wherein the size of the slot (11) is 48X48mm, and the width of the edge is 0.5 mm.

5. The coated light control sheet clamp jig according to claim 1, wherein the thickness of the clamp jig body (1) is 0.8-1.2 mm.

6. The coated light control sheet clamp jig of claim 1, wherein the clamp jig body (1) on both sides of the placement slot hole (11) is provided with screw holes (12).

7. The coated optical control sheet clamp jig of claim 1, wherein the outer edge of the clamp jig body (1) is provided with a notch (13).

8. The coated light control sheet clamp jig as claimed in any one of claims 1 to 7, wherein the clamp jig body (1) comprises a jointed board (14) and an annular or frame-shaped cover plate (15), the central position of the jointed board (14) is provided with the placing slot (11), the central position of the cover plate (15) is provided with a mounting hole (16), the edge of the mounting hole (16) is provided with an inner edge (17), the upper surface of the inner edge (17) is lower than the upper surface of the cover plate (15), the edge of the jointed board (14) is provided with an outer edge (18) matched with the inner edge (17), and the jointed board (14) is detachably arranged on the mounting hole of the cover plate (15).

9. The jig for coating the light control sheet according to claim 8, wherein a magnet adsorption layer (19) for adsorbing the upper surface of the inner edge (17) is arranged on the lower surface of the outer edge (18).

10. The jig for coating light control sheet as claimed in claim 8, wherein the plurality of panels (14) are provided, the plurality of panels (14) have the same outer contour size and are adapted to the mounting holes (16), and the plurality of panels (14) have different placement slots (11).