CN213922028U

CN213922028U - High-sensitivity laser on-line measuring instrument for semiconductor detection

Info

Publication number: CN213922028U
Application number: CN202022285043.2U
Authority: CN
Inventors: 袁静
Original assignee: Dandong Chaoyue Integrated Electronic Technology Co ltd
Current assignee: Dandong Chaoyue Integrated Electronic Technology Co ltd
Priority date: 2020-10-14
Filing date: 2020-10-14
Publication date: 2021-08-10
Anticipated expiration: 2030-10-14

Abstract

The utility model discloses a semiconductor detects with high sensitivity's online measuring instrument of laser, including measuring apparatu body and guard box, the equal fixedly connected with surge tank in four corners of guard box inner chamber bottom, the first spring of bottom fixedly connected with of surge tank inner chamber, the top fixedly connected with shock attenuation board of first spring, the top fixedly connected with shock attenuation post of shock attenuation board, the top of shock attenuation post is run through to the top and the fixedly connected with of surge tank and is placed the board, the top of placing the board is seted up flutedly, the measuring apparatu body is placed in the recess, the bottom fixedly connected with attenuator of guard box inner chamber. The utility model discloses a measuring apparatu body, protective housing, surge tank, first spring, shock attenuation board, shock attenuation post, the cooperation of placing board, attenuator, second spring and chamber door are used, can effectually improve the barrier propterty of measuring apparatu body, and the protection measuring apparatu body does not receive the influence of vibrations or dust, has improved measurement accuracy.

Description

High-sensitivity laser on-line measuring instrument for semiconductor detection

Technical Field

The utility model relates to a measuring apparatu technical field specifically is a semiconductor detects with high sensitivity's online measuring apparatu of laser.

Background

The laser on-line measuring instrument is divided into a laser thickness gauge, a laser length gauge, a laser leveling instrument and the like, the laser thickness gauge generally comprises two laser displacement sensors which are vertically opposite, the upper sensor and the lower sensor respectively measure the position of the upper surface and the position of the lower surface of a measured body, and the thickness of the measured body is obtained through calculation.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor detects with high sensitivity's online measuring instrument of laser possesses the good advantage of protecting effect, has solved current laser thickness gauge when transportation or deposit, and is great or the dust is great because of vibrations easily, influences the use accuracy of laser thickness gauge, the problem of measuring error's the condition appears.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a semiconductor detects with high sensitivity's online measuring instrument of laser, includes measuring apparatu body and protective housing, the equal fixedly connected with damper box in four corners of protective housing inner chamber bottom, the first spring of bottom fixedly connected with of damper box inner chamber, the top fixedly connected with shock attenuation board of first spring, the top fixedly connected with shock attenuation post of shock attenuation board, the top of shock attenuation post is run through to the top and the fixedly connected with of damper box and is placed the board, the top of placing the board is seted up flutedly, the measuring apparatu body is placed in the recess, the bottom fixedly connected with attenuator of protective housing inner chamber, the top of attenuator and the bottom fixed connection of placing the board, the surface cover of attenuator is equipped with the second spring, there is the chamber door positive through hinge swing joint of protective housing.

Preferably, the top of the protective box is fixedly connected with a handle, and the surface of the handle is provided with anti-skid lines.

Preferably, first chutes are formed in two sides of the protection box, first sliding blocks are fixedly connected to two sides of the placing plate, and one side, far away from the placing plate, of each first sliding block extends to an inner cavity of each first chute and is movably connected with the first chute.

Preferably, the second spout has all been seted up to the both sides of damper box, the equal fixedly connected with second slider in both sides of shock attenuation board, one side that shock attenuation board was kept away from to the second slider extends to the inner chamber of second spout and with second spout swing joint.

Preferably, the left side of the front surface of the box door is fixedly connected with a handle, and the surface of the handle is provided with anti-skid grains.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a measuring apparatu body, the protective housing, the surge tank, first spring, the shock attenuation board, the shock attenuation post, place the board, the attenuator, the cooperation of second spring and chamber door is used, can the effectual barrier propterty that improves the measuring apparatu body, the protection measuring apparatu body does not receive the influence of vibrations or dust, measurement accuracy has been improved, solved current laser thickness gauge when transportation or depositing, because of vibrations are great or the dust is great easily, influence the use accuracy of laser thickness gauge, the problem of measuring error's the condition appears.

2. The utility model discloses a setting has the handle of anti-skidding line, can be better mention the guard box, through setting up first spout and first slider, can make and place the better upper and lower activity of board, through setting up second spout and second slider, can make the better upper and lower slip of shock attenuation board, through setting up the handle that has anti-skidding line, can better open the chamber door.

Drawings

FIG. 1 is a schematic view of the internal structure of the present invention;

FIG. 2 is a schematic view of the external structure of the present invention;

fig. 3 is a partially enlarged view of a in fig. 1 according to the present invention.

In the figure: 1. a gauge body; 2. a protective box; 3. a damper box; 4. a first spring; 5. a damper plate; 6. a shock-absorbing post; 7. placing the plate; 8. a damper; 9. a second spring; 10. a box door; 11. a grip; 12. a first chute; 13. a first slider; 14. a second chute; 15. a second slider; 16. a handle.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The components of the present invention are all standard components or components known to those skilled in the art, and the structure and principle thereof can be known by the technical manual or by the conventional experimental method.

Referring to fig. 1-3, a high-sensitivity laser online measuring instrument for semiconductor detection comprises a measuring instrument body 1 and a protective box 2, wherein a handle 11 is fixedly connected to the top of the protective box 2, anti-skid lines are arranged on the surface of the handle 11, the protective box 2 can be better lifted by arranging the handle 11 with the anti-skid lines, first sliding grooves 12 are respectively arranged on both sides of the protective box 2, first sliding blocks 13 are respectively and fixedly connected to both sides of a placing plate 7, one sides of the first sliding blocks 13 far away from the placing plate 7 extend to an inner cavity of the first sliding grooves 12 and are movably connected with the first sliding grooves 12, the placing plate 7 can be better moved up and down by arranging the first sliding grooves 12 and the first sliding blocks 13, four corners of the bottom of the inner cavity of the protective box 2 are respectively and fixedly connected with a damping box 3, second sliding grooves 14 are respectively arranged on both sides of the damping box 3, and second sliding blocks 15 are respectively and fixedly connected to both sides of the damping plate 5, one side of the second sliding block 15, which is far away from the damping plate 5, extends to an inner cavity of the second sliding groove 14 and is movably connected with the second sliding groove 14, the damping plate 5 can better slide up and down by arranging the second sliding groove 14 and the second sliding block 15, the bottom of the inner cavity of the damping box 3 is fixedly connected with a first spring 4, the top of the first spring 4 is fixedly connected with the damping plate 5, the top of the damping plate 5 is fixedly connected with a damping column 6, the top of the damping column 6 penetrates through the top of the damping box 3 and is fixedly connected with a placing plate 7, the top of the placing plate 7 is provided with a groove, the measuring instrument body 1 is placed in the groove, the bottom of the inner cavity of the protective box 2 is fixedly connected with a damper 8, the top of the damper 8 is fixedly connected with the bottom of the placing plate 7, the surface of the damper 8 is sleeved with a second spring 9, the front of the protective box 2 is movably connected with a box door 10 through a hinge, the left side of the front of the box door 10 is fixedly connected with a handle 16, the surface of handle 16 is provided with anti-skidding line, handle 16 through setting up the anti-skidding line has, can better open chamber door 10, through measuring apparatu body 1, protective housing 2, surge tank 3, first spring 4, shock attenuation board 5, shock attenuation post 6, place board 7, attenuator 8, the cooperation of second spring 9 and chamber door 10 is used, can effectual improvement measuring apparatu body 1's barrier propterty, protection measuring apparatu body 1 does not receive the influence of vibrations or dust, measurement accuracy has been improved, it is great or the dust is great to have solved current laser thickness gauge when the transportation or deposit, it is great because of vibrations easily or dust, influence the use precision of laser thickness gauge, the problem of measuring error's the condition appears.

During the use, the user places measuring apparatu body 1 in placing the recess on board 7, close chamber door 10, if vibrations appear when the transportation, place board 7 and oppress first spring 4 downwards, attenuator 8 and second spring 9, make first spring 4, attenuator 8 and second spring 9 atress shrink, at first spring 4, the vibrations that produce are offset under the reset action of attenuator 8 and second spring 9, protection measuring apparatu body 1 does not receive the damage, and guard box 2 can effectually prevent the dust entering, better protection measuring apparatu body 1.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a semiconductor detects online measuring apparatu of laser with high sensitivity, includes measuring apparatu body (1) and protective housing (2), its characterized in that: four corners of the bottom of the inner cavity of the protective box (2) are fixedly connected with shock absorption boxes (3), the bottom of the inner cavity of the damping box (3) is fixedly connected with a first spring (4), the top of the first spring (4) is fixedly connected with a damping plate (5), the top of the damping plate (5) is fixedly connected with a damping column (6), the top of the damping column (6) penetrates through the top of the damping box (3) and is fixedly connected with a placing plate (7), the top of the placing plate (7) is provided with a groove, the measuring instrument body (1) is placed in the groove, the bottom of the inner cavity of the protective box (2) is fixedly connected with a damper (8), the top of the damper (8) is fixedly connected with the bottom of the placing plate (7), the surface cover of attenuator (8) is equipped with second spring (9), there is chamber door (10) positive through hinge swing joint of guard box (2).

2. The high-sensitivity laser on-line measuring instrument for semiconductor detection according to claim 1, wherein: the top of the protective box (2) is fixedly connected with a handle (11), and anti-skid lines are arranged on the surface of the handle (11).

3. The high-sensitivity laser on-line measuring instrument for semiconductor detection according to claim 1, wherein: first spout (12) have all been seted up to the both sides of guard box (2), place the equal fixedly connected with first slider (13) in both sides of board (7), one side that board (7) were kept away from in first slider (13) extends to the inner chamber of first spout (12) and with first spout (12) swing joint.

4. The high-sensitivity laser on-line measuring instrument for semiconductor detection according to claim 1, wherein: second spout (14) have all been seted up to the both sides of surge tank (3), the equal fixedly connected with second slider (15) in both sides of shock attenuation board (5), one side that shock attenuation board (5) were kept away from in second slider (15) extends to the inner chamber of second spout (14) and with second spout (14) swing joint.

5. The high-sensitivity laser on-line measuring instrument for semiconductor detection according to claim 1, wherein: the left side of the front face of the box door (10) is fixedly connected with a handle (16), and anti-skid grains are arranged on the surface of the handle (16).