CN213905322U

CN213905322U - Quartz boat convenient for taking and placing silicon wafers

Info

Publication number: CN213905322U
Application number: CN202022885924.8U
Authority: CN
Inventors: 汤芳; 常永喜
Original assignee: Zhejiang Haorui Quartz Technology Co ltd
Current assignee: Zhejiang Haorui Quartz Technology Co ltd
Priority date: 2020-12-06
Filing date: 2020-12-06
Publication date: 2021-08-06
Anticipated expiration: 2030-12-06

Abstract

The utility model discloses a quartz boat convenient for taking and placing silicon wafers, which comprises a body and a protection pad, wherein a sleeve is fixed at the bottom of the body, and a clamping groove is formed in the sleeve; the improved multifunctional electric iron wire drawing machine is characterized in that a fixing plate is fixed to the top of the body, a clamping block is connected to one side of the fixing plate, a sliding groove is formed in the body, a sliding block is embedded in the sliding groove, a placing frame is connected to one side of the sliding block, a groove is formed in the body and is close to the placing frame, and a limiting groove is formed in one side of the groove. This quartz boat convenient to get and put silicon chip is provided with the rack, and the pulling rack slides along the recess, can drive the slider simultaneously and slide along the spout, follows the gliding stopper of rack this moment and can remove along the spacing groove, wherein can carry on spacingly to the rack when the stopper removes the adaptive position, prevents that rack and body from breaking away from, can drive the silicon chip and remove when the rack roll-off to can conveniently take out the silicon chip, be convenient for get and put.

Description

Quartz boat convenient for taking and placing silicon wafers

Technical Field

The utility model relates to a silicon chip diffusion technical field specifically is a quartz boat convenient to get and put silicon chip.

Background

The quartz boat is an indispensable material in the production process of semiconductor materials and devices, such as a crucible for growing germanium and silicon single crystals, a boat muffle tube, a bell jar and the like. In the new technical field: the excellent performance of sound, light and electricity can be used as ultrasonic delay line on radar, infrared tracking direction finding, prism of infrared photograph, communication, spectrograph and spectrophotometer, lens and reflecting window of large astronomical telescope.

Although the quartz boats for silicon wafers in the current market are very large in types and quantity, most of the quartz boats for silicon wafers are inconvenient to take and place, assemble and clamp the silicon wafers, so that the technology capable of improving the structure of the quartz boat convenient for taking and placing the silicon wafers is urgently needed in the market to perfect the equipment.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a quartz boat convenient to get and put silicon chip to the quartz boat that is used for the silicon chip on solving the existing market that above-mentioned background art provided is not convenient for get and puts, and the equipment of being not convenient for is not convenient for the problem of centre gripping silicon chip.

In order to achieve the above object, the utility model provides a following technical scheme: a quartz boat convenient for taking and placing silicon wafers comprises a body and a protection pad, wherein a sleeve is fixed at the bottom of the body, and a clamping groove is formed in the sleeve;

a fixing plate is fixed to the top of the body, a clamping block is connected to one side of the fixing plate, a sliding groove is formed in the body, a sliding block is embedded in the sliding groove, a placing frame is connected to one side of the sliding block, a groove is formed in the body close to the placing frame, a limiting groove is formed in one side of the groove, and a limiting block is connected to one side of the placing frame close to the limiting groove;

the rack is internally provided with a guide groove, the guide groove is internally connected with a guide rod, one side of the guide rod is connected with a clamping plate, the clamping plate is close to the guide rod, a spring is connected between the clamping plates, one side of the clamping plate is connected with a guide wheel, and the protection pad is connected to one side of the guide wheel.

Preferably, the sleeve and the fixing plate are in sliding connection, the sleeve and the fixing plate are rectangular, and the vertical section inside the sleeve is matched with the vertical section of the fixing plate in size.

Preferably, the clamping block is made of rubber, the clamping block and the clamping groove are both arc-shaped, and the size of the clamping block is the same as that of the clamping groove.

Preferably, constitute sliding connection between spout and the rack through the slider, and constitute sliding connection between spacing groove and the rack through the stopper to the maximum sliding distance of stopper is no longer than the self length of spacing groove.

Preferably, the U-shaped placing frame is shaped like a U, and the transverse section of one side of the placing frame is matched with the transverse section of the groove in size.

Preferably, the guide groove and the clamping plate form sliding connection through the guide rod, and the clamping plate forms a telescopic structure through the spring.

Compared with the prior art, the beneficial effects of the utility model are that: this quartz boat convenient to get and put silicon chip:

1. the silicon wafer placing device is provided with a placing rack, the placing rack is pulled to slide along the groove, meanwhile, the sliding block is driven to slide along the sliding groove, the limiting block sliding along the placing rack can move along the limiting groove, the placing rack can be limited when the limiting block moves to an adaptive position, the placing rack is prevented from being separated from the body, and a silicon wafer can be driven to move when the placing rack slides out, so that the silicon wafer can be conveniently taken out and taken out;

2. the silicon wafer clamping device is provided with a clamping plate and a guide wheel, a silicon wafer is pulled to be inserted, the guide wheel can roll along the direction of inserting the silicon wafer, when the guide wheel rolls, a protection pad can prevent the guide wheel from scratching the silicon wafer through the characteristics of the guide wheel, when the silicon wafer is inserted, the clamping plate can be extruded, the clamping plate can move along a guide rod after being extruded, a spring can be pulled at the same time, the spring which receives tensile force after the silicon wafer is prevented can pull the clamping plate to move inwards by pulling of the spring, the clamping plate can drive the guide wheel to move inwards to extrude the silicon wafer, and the silicon wafer can be clamped conveniently;

3. be provided with draw-in groove and fixture block, this can be with the sleeve and the fixed plate at another group's body top dock, then promote the body and drive the sleeve and slide along the fixed plate, telescopic inner wall can extrude the fixture block, the fixture block can produce deformation after receiving the extrusion, can dock fixture block and draw-in groove after the sleeve removes the adaptation position, the fixture block that receives the extrusion this moment can reset through self characteristic, can carry out the block with the draw-in groove after the fixture block resets, thereby can fix sleeve and fixed plate, be convenient for assemble between the body.

Drawings

FIG. 1 is a schematic view of the structure of the present invention;

fig. 2 is a schematic view of the main view enlarging structure of the placing rack of the utility model;

fig. 3 is a schematic view of the top enlarged structure of the placing frame of the present invention;

FIG. 4 is an enlarged schematic view of part A of the present invention;

fig. 5 is a schematic view of the protective pad of the present invention showing an enlarged structure from the top view.

In the figure: 1. a body; 2. a sleeve; 3. a card slot; 4. a fixing plate; 5. a clamping block; 6. a chute; 7. a slider; 8. placing a rack; 9. a groove; 10. a limiting groove; 11. a limiting block; 12. a guide groove; 13. a guide bar; 14. a splint; 15. a spring; 16. a guide wheel; 17. and (6) a protective pad.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a quartz boat convenient for taking and placing silicon wafers comprises a body 1, a sleeve 2, clamping grooves 3, a fixing plate 4, clamping blocks 5, sliding grooves 6, sliding blocks 7, a placing rack 8, a groove 9, a limiting groove 10, a limiting block 11, a guide groove 12, a guide rod 13, a clamping plate 14, a spring 15, a guide wheel 16 and a protection pad 17, wherein the sleeve 2 is fixed at the bottom of the body 1, the sleeve 2 and the fixing plate 4 are in sliding connection, the sleeve 2 and the fixing plate 4 are rectangular, the vertical section inside the sleeve 2 is matched with the vertical section of the fixing plate 4, the sleeve 2 and the fixing plate 4 at the top of the other group of bodies 1 can be butted by pulling the body 1, then the body 1 is pushed to drive the sleeve 2 to slide along the fixing plate 4, and the clamping grooves 3 are formed in the sleeve 2;

the top of the body 1 is fixed with a fixing plate 4, one side of the fixing plate 4 is connected with a fixture block 5, the fixture block 5 is made of rubber, the fixture block 5 and the clamping groove 3 are in the same arc shape, the size of the fixture block 5 is the same as that of the clamping groove 3, the fixture block 5 deforms after being extruded, when the sleeve 2 moves to a proper position, the fixture block 5 which is extruded can reset through the self characteristic, the fixture block 5 can be clamped with the clamping groove 3 after being reset, a sliding groove 6 is formed in the body 1, the sliding groove 6 and the placing frame 8 are in sliding connection through a sliding block 7, the limiting groove 10 and the placing frame 8 are in sliding connection through a limiting block 11, the maximum sliding distance of the limiting block 11 does not exceed the self length of the limiting groove 10, the sliding block 7 slides along the sliding groove 6, and the limiting block 11 which slides along the placing frame 8 can move along the limiting groove 10, the placing frame 8 is limited when the limiting block 11 moves to an adaptive position, the placing frame 8 is prevented from being separated from the body 1, the sliding block 7 is embedded in the sliding groove 6, the placing frame 8 is connected to one side of the sliding block 7, the placing frame 8 is U-shaped, the transverse cross section of one side of the placing frame 8 is matched with the transverse cross section of the groove 9, the placing frame 8 is pulled to slide along the groove 9, the silicon wafer is driven to move when the placing frame 8 slides out, the groove 9 is formed in the body 1 close to the placing frame 8, the limiting groove 10 is formed in one side of the groove 9, and the limiting block 11 is connected to one side of the placing frame 8 close to the limiting groove 10;

guide way 12 has been seted up to rack 8 inside, constitute sliding connection through guide bar 13 between guide way 12 and the splint 14, and constitute extending structure through spring 15 between the splint 14, can extrude splint 14 when the silicon chip is male, splint 14 receives the extrusion and can remove along guide bar 13, can stimulate spring 15 simultaneously, and the silicon chip receives tensile spring 15 after preventing to accomplish and can stimulate splint 14 through the pulling of self and draw close inwards, 12 internally connected with guide bar 13 in guide way, guide bar 13 one side is connected with splint 14, is close to guide bar 13 be connected with spring 15 between the splint 14, splint 14 one side is connected with leading wheel 16, protection pad 17 is connected in leading wheel 16 one side.

The working principle is as follows: when the quartz boat convenient for taking and placing the silicon wafers is used, firstly, the silicon wafers are too densely placed for more silicon wafers to be taken and placed, the placing rack 8 is pulled to slide along the groove 9, meanwhile, the sliding block 7 is driven to slide along the sliding groove 6, at the moment, the limiting block 11 sliding along the placing rack 8 moves along the limiting groove 10, the limiting block 11 limits the placing rack 8 when moving to an adaptive position, the placing rack 8 is prevented from being separated from the body 1, the silicon wafers are driven to move when the placing rack 8 slides out, so that the silicon wafers can be conveniently taken out, the guide wheel 16 rolls along the direction of inserting the silicon wafers, the protective pad 17 prevents the guide wheel 16 from scratching the silicon wafers through the characteristics of the guide wheel 16 when the guide wheel 16 rolls, the clamp plate 14 is extruded when the silicon wafers are inserted, the clamp plate 14 is extruded to move along the guide rod 13, and the spring 15 is pulled at the same time, the spring 15 which is subjected to tension after the silicon chip is prevented from being completed pulls the clamping plate 14 to draw close inwards through self-pulling, the clamping plate 14 drives the guide wheel 16 to draw close inwards to extrude the silicon chip, when the body 1 needs to be built, the sleeve 2 is butted with the fixing plate 4 at the top of the other group of bodies 1 by pulling the body 1, then the body 1 is pushed to drive the sleeve 2 to slide along the fixing plate 4, the inner wall of the sleeve 2 can extrude the clamping block 5, the clamping block 5 can deform after being extruded, when the sleeve 2 moves to the adaptive position, the clamping block 5 is butted with the clamping groove 3, the clamping block 5 extruded at the moment can reset through the self characteristic, the clamping block 5 can be clamped with the clamping groove 3 after resetting, so that the sleeve 2 is fixed to the fixing plate 4 and thus the body 1 is assembled, which will not be described in detail in this description, and which is well known to those skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. The utility model provides a quartz boat convenient to get and put silicon chip, includes body (1) and protection pad (17), its characterized in that: a sleeve (2) is fixed at the bottom of the body (1), and a clamping groove (3) is formed in the sleeve (2);

a fixing plate (4) is fixed to the top of the body (1), a clamping block (5) is connected to one side of the fixing plate (4), a sliding groove (6) is formed in the body (1), a sliding block (7) is embedded in the sliding groove (6), a placing frame (8) is connected to one side of the sliding block (7), a groove (9) is formed in the body (1) close to the placing frame (8), a limiting groove (10) is formed in one side of the groove (9), and a limiting block (11) is connected to one side of the placing frame (8) close to the limiting groove (10);

guide way (12) have been seted up to rack (8) inside, guide way (12) internal connection has guide bar (13), guide bar (13) one side is connected with splint (14), is close to guide bar (13) be connected with spring (15) between splint (14), splint (14) one side is connected with leading wheel (16), protection pad (17) are connected in leading wheel (16) one side.

2. The quartz boat convenient for taking and placing silicon wafers as claimed in claim 1, wherein: sliding connection is formed between the sleeve (2) and the fixing plate (4), the sleeve (2) and the fixing plate (4) are rectangular, and the vertical section inside the sleeve (2) is matched with the vertical section of the fixing plate (4).

3. The quartz boat convenient for taking and placing silicon wafers as claimed in claim 1, wherein: the clamping block (5) is made of rubber, the clamping block (5) and the clamping groove (3) are arc-shaped, and the size of the clamping block (5) is the same as that of the clamping groove (3).

4. The quartz boat convenient for taking and placing silicon wafers as claimed in claim 1, wherein: sliding connection is formed between the sliding groove (6) and the placing frame (8) through the sliding block (7), sliding connection is formed between the limiting groove (10) and the placing frame (8) through the limiting block (11), and the maximum sliding distance of the limiting block (11) does not exceed the length of the limiting groove (10).

5. The quartz boat convenient for taking and placing silicon wafers as claimed in claim 1, wherein: the U-shaped placing frame (8) is shaped like a U, and the transverse section of one side of the placing frame (8) is matched with the transverse section of the groove (9).

6. The quartz boat convenient for taking and placing silicon wafers as claimed in claim 1, wherein: the guide groove (12) and the clamping plate (14) are in sliding connection through the guide rod (13), and the clamping plate (14) is in a telescopic structure through the spring (15).