CN213904304U - Touch substrate and display device - Google Patents

Touch substrate and display device Download PDF

Info

Publication number
CN213904304U
CN213904304U CN202022832625.8U CN202022832625U CN213904304U CN 213904304 U CN213904304 U CN 213904304U CN 202022832625 U CN202022832625 U CN 202022832625U CN 213904304 U CN213904304 U CN 213904304U
Authority
CN
China
Prior art keywords
touch
fan
layer
signal line
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202022832625.8U
Other languages
Chinese (zh)
Inventor
张新秀
何敏
谢晓冬
张天宇
赵雪
钟腾飞
桑华煜
庞斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei Xinsheng Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202022832625.8U priority Critical patent/CN213904304U/en
Application granted granted Critical
Publication of CN213904304U publication Critical patent/CN213904304U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The utility model provides a touch-control base plate, display device belongs to and shows technical field. The utility model discloses a touch-control base plate, it includes: the touch screen comprises a substrate, a second touch layer and a first touch layer which are arranged on the substrate, and an interlayer insulating layer arranged between the second touch layer and the first touch layer; the first touch layer comprises a plurality of first touch electrodes and a plurality of touch signal lines which are arranged side by side along a first direction; the plurality of first touch control electrodes and the plurality of touch control signal lines extend along a second direction; the second touch layer comprises a plurality of second touch electrodes arranged side by side along a second direction, each of the plurality of second touch electrodes extends along the first direction, and one second touch electrode is connected with at least one touch signal line through a first connecting through hole penetrating through the interlayer insulating layer; the first touch layer further comprises at least one shielding electrode, and the shielding electrode extends along the second direction; and a shielding electrode is arranged between at least part of the first touch electrode and the touch signal line.

Description

Touch substrate and display device
Technical Field
The utility model belongs to the technical field of show, concretely relates to touch-control base plate, display device.
Background
With the development of touch screen technology, various touch technologies have emerged. According to the working principle of the touch screen, the touch technology generally includes the following steps: resistive touch screens, capacitive touch screens, infrared touch screens, electromagnetic touch screens, and surface acoustic wave touch screens. Among them, the capacitive touch screen is most widely used. The capacitive touch screen comprises a self-capacitance touch screen and a mutual capacitance touch screen, and the mutual capacitance touch screen has the advantages of strong anti-interference capability, high sensitivity, strong multi-point touch and identification capabilities and the like, so the mutual capacitance touch screen becomes one of the mainstream touch screens at present.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least, provide a touch-control base plate, display device.
In a first aspect, an embodiment of the present disclosure provides a touch substrate, which includes: the touch screen comprises a substrate, a second touch layer and a first touch layer which are arranged on the substrate, and an interlayer insulating layer arranged between the second touch layer and the first touch layer; wherein the content of the first and second substances,
the first touch layer comprises a plurality of first touch electrodes and a plurality of touch signal lines which are arranged side by side along a first direction; the plurality of first touch control electrodes and the plurality of touch control signal lines extend along a second direction;
the second touch layer comprises a plurality of second touch electrodes arranged side by side along the second direction, each of the plurality of second touch electrodes extends along the first direction, and one of the second touch electrodes is connected with at least one touch signal line through a first connection via penetrating the interlayer insulating layer; wherein the content of the first and second substances,
the first touch layer further comprises at least one shielding electrode extending along the second direction; and the shielding electrode is arranged between at least part of the first touch electrode and the touch signal line.
And one touch signal line is arranged between the two adjacent first touch electrodes.
At least one shielding electrode is arranged between the two adjacent first touch electrodes.
Any one of the touch control line signal lines comprises a first side and a second side which are oppositely arranged in a first direction; the shielding electrode is disposed between only one of the first and second sides of the touch line signal line and the first touch electrode.
Wherein the first touch layer further comprises: a plurality of first redundant touch electrodes arranged side by side along a first direction, each of the plurality of first redundant touch electrodes extending along the second direction; the plurality of first redundant touch electrodes are located between at least adjacent two of the first touch electrodes, the touch signal lines, and the shielding electrodes in the first touch layer.
Wherein the second touch layer further comprises: the touch panel comprises a plurality of second redundant touch electrodes arranged side by side along a second direction, wherein each of the plurality of second redundant touch electrodes extends along the first direction, the second redundant touch electrode is arranged between two adjacent second touch electrodes, and the second redundant touch electrodes are configured to disconnect the two adjacent second touch electrodes.
The touch substrate comprises a fan-out area; a first fan-out routing, a second fan-out routing and a third fan-out routing which are positioned in the fan-out area are also arranged on the substrate; the first fan-out routing is connected with the first touch electrode; the second fan-out routing is connected with the touch signal line; the third fan-out wire is connected with the shielding electrode.
At least parts of the first fan-out routing, the second fan-out routing and the third fan-out routing are located on different layers, and/or at least one of the first fan-out routing, the second fan-out routing and the third fan-out routing comprises parts located on different layers.
One of the first fan-out routing wire, the second fan-out routing wire and the third fan-out routing wire is positioned on the second touch layer, two of the first fan-out routing wire and the second fan-out routing wire are positioned on the first touch layer, and the third fan-out routing wire comprises a first sub-signal wire and a second sub-signal wire which are electrically connected; one of the first sub-signal line and the second sub-signal line is located on the second touch layer, and the other is located on the first touch layer.
The first fan-out routing is located on the first touch layer;
the second fan-out routing is located on the second touch layer and is connected with the touch signal line through a second connecting through hole penetrating through the interlayer insulating layer;
the third fan-out wiring comprises a first sub-signal wire and a second sub-signal which are electrically connected; the first sub-signal line is positioned on the second touch layer, and the second sub-signal line is positioned on the first touch layer; one end of the first sub-signal line is connected with the shielding electrode through a third connecting via hole penetrating through the interlayer insulating layer, and the other end of the first sub-signal line is connected with the second sub-signal line through a fourth connecting via hole penetrating through the interlayer insulating layer.
The second connecting via hole, the third connecting via hole and the fourth connecting via hole are all located in the fan-out area.
Wherein the shield electrode comprises a ground electrode.
Wherein at least part of the connecting line of the first connecting via hole intersects with the first direction.
Wherein at least one of the first touch and the first touch layer comprises a metal grid.
In a second aspect, an embodiment of the disclosure provides a display device, which includes any one of the touch substrates described above.
Drawings
FIG. 1 is a schematic diagram of an exemplary touch screen;
FIG. 2 is a schematic view of another exemplary touch screen;
fig. 3 is a schematic view of a touch substrate according to an embodiment of the disclosure;
FIG. 4 is a cross-sectional view of a touch substrate along the A-A' direction according to an embodiment of the disclosure;
fig. 5 is a schematic view of a first touch layer according to an embodiment of the disclosure;
fig. 6 is a schematic view of a second touch layer according to an embodiment of the disclosure;
fig. 7 is a schematic view of another first touch layer according to an embodiment of the disclosure;
fig. 8 is a schematic view of another first touch layer according to an embodiment of the disclosure;
fig. 9 is a schematic view of another first touch layer according to an embodiment of the disclosure;
fig. 10 is a schematic view of another second touch layer according to the embodiment of the disclosure;
fig. 11 is a schematic diagram illustrating a connection between a touch signal line and a driving electrode in an embodiment of the disclosure;
fig. 12 is another schematic diagram illustrating a touch signal line and a driving electrode connected in accordance with an embodiment of the present disclosure;
fig. 13 is a schematic connection diagram of a driving signal line and a second fan-out trace according to an embodiment of the disclosure;
FIG. 14 is an enlarged top view taken at position A in FIG. 3;
FIG. 15 is a schematic view of the shield electrode and the third fan-out trace according to the embodiment of the disclosure;
FIG. 16 is an enlarged top view taken at position B in FIG. 3;
fig. 17 is a schematic view of a display device according to an embodiment of the present disclosure.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
Unlike the combination of the touch screen and the display panel, the touch screen generally includes: an out-cell touch screen (e.g., a touch screen attached to a display panel), an on-cell touch sensor (i.e., a touch screen disposed between a color filter substrate and a polarizer of a display panel) and an in-cell touch sensor (i.e., a touch screen embedded in a liquid crystal pixel) on a display panel.
For a mutual capacitance touch screen, the basic working principle is as follows: two conductors that adjacent set up have inherent capacitance between two conductors, when another conductor (like the finger) is close to two conductors, can form inductive capacitance with between two conductors, this inductive capacitance can connect in parallel to inherent capacitance, causes holistic electric capacity to increase. After the finger is taken away, the capacitance restores to the inherent capacitance. The periphery of the touch screen is provided with a drive control circuit, and the circuit judges whether the touch screen contacts and where the contact position is through the change of capacitance when the drive detection has or not the finger, thereby completing the touch function of the touch screen.
FIG. 1 is a schematic diagram of an exemplary touch screen; as shown in fig. 1, the touch screen has a touch area and a peripheral area surrounding the touch area. The touch screen comprises a plurality of first touch electrodes which are arranged in parallel along a first direction and a plurality of second touch electrodes which are arranged in parallel along a second direction, wherein the first touch electrodes are positioned in a touch area. Each first touch electrode extends along the second direction, and each second touch electrode extends along the first direction. The second touch electrode and the first touch electrode are insulated, that is, the first interlayer insulating layer 200 may be disposed therebetween. The first direction and the second direction are arranged crosswise, for example: one of the first direction and the second direction is a row direction X, and the other is a column direction Y. One of the second touch electrode and the first touch electrode is a driving electrode 21, and the other is a sensing electrode 11. In the embodiment of the present disclosure, the first direction is taken as the row direction X, the second direction is taken as the column direction Y, the second touch electrode is taken as the driving electrode 21, and the first touch electrode is taken as the sensing electrode 11 for example; of course, the first direction and the second direction may be interchanged, and the second touch electrode and the first touch electrode may also be interchanged, where the first direction is the row direction X, the second direction is the column direction Y, the second touch electrode is the driving electrode 21, and the first touch electrode is the sensing electrode 11, which does not limit the scope of the present disclosure.
With reference to fig. 1, the driving electrodes 21 and the sensing electrodes 11 intersect each other at spatial positions to form mutual capacitances (coupling capacitances), the touch driving circuit FPC applies a driving scanning signal to the driving electrodes 21 through the touch signal lines 22, when a finger touches, the mutual capacitances change and are output through the sensing electrodes 11, and at this time, the controller detects the change of the mutual capacitances according to the electrical signals output by the sensing electrodes 11, so as to determine specific touch positions.
The utility model discloses the people discovers, and touch-control signal line 22 is usually input by the tip of drive electrode 21, so touch-control signal line 22 is located the peripheral region of touch-sensitive screen, and because the position that sets up touch-sensitive signal line 22 is light tight, does not set up the position printing opacity of touch-sensitive signal line 22, can cause the transmissivity inhomogeneous like this, consequently still need shelter from through the light shield layer in touch-sensitive signal line 22 position, then can lead to the touch-sensitive screen to have the frame in the peripheral region this moment.
FIG. 2 is a schematic view of another exemplary touch screen; as shown in fig. 2, in order to reduce the frame of the touch screen, even make the frame free, the touch signal line 22 may be disposed in the touch area, and at this time, a layer where the touch signal line 22 is disposed may be added in the touch screen, for example, the touch signal line 22 is disposed on a side of the driving electrode 21 away from the sensing electrode 11, a second interlayer insulating layer 200 is disposed between the touch signal line 22 and the driving electrode 21, and the touch signal line 22 and the driving electrode 21 may be electrically connected through a connection via penetrating through the second interlayer insulating layer 200, but as can be seen from fig. 2, the touch signal line 22 needs to extend to a fan-out area in a peripheral area and is connected with the touch driving circuit FPC through a bonding process, at this time, an extending direction of the touch signal line 22 is the same as an extending direction of the sensing electrode 11, and signals between the two are prone to generate interference, thereby affecting the accuracy of touch detection.
In view of the above problems, the following technical solutions are provided in the embodiments of the present disclosure.
In a first aspect, fig. 3 is a schematic view of a touch substrate according to an embodiment of the disclosure; FIG. 4 is a cross-sectional view of a touch substrate along the A-A' direction according to an embodiment of the disclosure; fig. 5 is a schematic view of a first touch layer according to an embodiment of the disclosure; fig. 6 is a schematic view of a second touch layer according to an embodiment of the disclosure; as shown in fig. 3 to 6, an embodiment of the present disclosure provides a touch substrate, which includes a substrate 100, a first touch layer 10, an interlayer insulating layer 200, and a second touch layer 20 sequentially disposed on the substrate 100; the first touch layer 10 includes a plurality of sensing electrodes 11 and a plurality of touch signal lines 22 arranged side by side along a row direction X, and each of the sensing electrodes 11 and the touch signal lines 22 extends along a column direction Y; the second touch layer 20 includes a plurality of driving electrodes 21 arranged side by side in a column direction Y, each driving electrode 21 extending in a row direction X; the interlayer insulating layer 200 is provided with a first connecting via 301, and one driving electrode 21 is connected to at least one touch signal line 22 through the first connecting via 301 penetrating through the interlayer insulating layer 200, so as to connect the driving electrode 21 and the corresponding touch signal line 22, so that the touch signal line 22 provides a touch driving signal for the driving electrode 21. In particular, the first touch layer 10 of the touch substrate of the embodiment of the disclosure further includes a shielding electrode 30, the shielding electrode 30 extends along the column direction Y, and the shielding electrode 30 is disposed between at least a portion of the sensing electrode 11 and the touch signal line 22, so as to avoid signal interference between the sensing electrode 11 and the touch signal line 22 that are disposed adjacently.
It should be noted that the shielding electrode 30 has a shielding function as the name implies, and therefore it can be understood that the shielding electrode 30 needs to be connected with a fixed potential to realize the shielding function, the fixed potential includes but is not limited to a grounding signal, that is, the shielding electrode 30 can be a grounding shielding electrode 30. It should be noted that, referring to fig. 4, in the embodiment of the present disclosure, the first touch layer 10 is located on one side of the second touch layer 20 close to the substrate 100, and in an actual product, the positions of the first touch layer 10 and the second touch layer 20 may be interchanged.
Since the first touch layer 10 in the touch substrate of the embodiment of the present disclosure includes not only the sensing electrode 11, but also the touch signal line 22 and the shielding electrode 30, wherein the touch signal line 22 passes through the first connection via 301 penetrating through the interlayer insulating layer 200 and the driving electrode 21, and the shielding electrode 30 is disposed between the touch signal line 22 and the sensing electrode 11, signal interference between the touch signal line 22 and the sensing electrode 11 can be reduced by the shielding electrode 30. Meanwhile, the first touch layer 10 includes the touch signal line 22 and the shielding electrode 30, that is, the touch signal line 22, the shielding electrode 30 and the sensing electrode 11 are located in the same layer and made of the same material, so that the touch signal line 22, the shielding electrode 30 and the sensing electrode 11 can be formed in a one-step patterning process, which does not increase the process cost and the thickness of the touch substrate.
In some embodiments, a touch signal line 22 is disposed between two adjacent sensing electrodes 11 of the first touch layer 10, for example: the sensing electrodes 11 and the touch signal lines 22 are alternately arranged. The reason for this is that the touch signal lines 22 need to be electrically connected to the driving electrodes 21 through the first connecting vias 301 penetrating through the interlayer insulating layer 200, and the touch signal lines 22 and the sensing electrodes 11 are alternately disposed to avoid the concentrated arrangement of the touch signal lines 22, which can avoid the problem of the reduced yield of the touch substrate caused by the concentrated arrangement of the first connecting vias 301. Of course, if the distance between two adjacent sensing electrodes 11 is large, a plurality of touch signal lines 22 may be disposed between two adjacent sensing electrodes 11, that is, the number of touch signal lines 22 between two adjacent sensing electrodes 11 may also be set according to the distance between two adjacent sensing electrodes 11. In the following description, for convenience of understanding, a touch signal line 22 is disposed between two adjacent sensing electrodes 11 for illustration, and it should be understood that this does not limit the scope of the embodiments of the present disclosure.
In some embodiments, when the touch signal line 22 is disposed between adjacent sensing electrodes 11, the shielding electrode 30 is disposed between adjacent sensing electrodes 11 at this time, so as to avoid interference between the touch signal line 22 and the signals on the sensing electrodes 11.
For example: one touch signal line 22 is disposed between any two adjacent sensing electrodes 11, one touch signal line 22 is connected to one touch electrode 21 through a first connecting via 301 penetrating through the interlayer insulating layer 200, and different touch signal lines 22 are connected to different touch electrodes 21. Each touch signal line 22 includes a first side and a second side opposite to each other in the row direction X, and if the first side is a side close to the left sensing electrode 11, the second side is a side close to the right sensing electrode. At this time, the shielding electrode 30 may be disposed between the first side and/or the second side of the touch signal line 22 and the sensing electrode 11.
For example: one touch signal line 22 is disposed between any two adjacent sensing electrodes 11, and when the number of the sensing electrodes 11 is greater than that of the driving electrodes 21, the number of the touch signal lines 22 on the touch substrate is also greater than that of the driving electrodes 21. At this time, the driving electrode 21 farther from the touch driving circuit FPC side may be connected to a plurality of touch signal lines 22 in such a manner as to reduce the problem of RC delay (line resistance delay). When the driving electrode 21 is connected to a plurality of touch signal lines 22, at least one of the touch signal lines 22 is bound to the driving circuit FPC for providing a touch driving signal to the driving electrode 21, and the rest of the touch signal lines 22 may be in a floating state; or the plurality of touch signal lines 22 are connected in parallel to reduce the resistance. Each touch signal line 22 includes a first side and a second side opposite to each other in the row direction X, and if the first side is a side close to the left sensing electrode 11, the second side is a side close to the right sensing electrode. At this time, the shielding electrode 30 may be disposed between the first side and/or the second side of the touch signal line 22 and the sensing electrode 11.
In the following description, a touch signal line 22 is disposed between any two adjacent sensing electrodes 11, one touch signal line 22 is connected to one touch electrode 21 through a first connecting via 301 penetrating through the interlayer insulating layer 200, and different touch signal lines 22 are connected to different touch electrodes 21. The positional relationship between the shield electrode 30 and the touch signal line 22 will be described with reference to the following specific example.
In one example, referring to fig. 6, in the first touch layer 10, one shielding electrode 30 and one touch signal line 22 are disposed between every two adjacent sensing electrodes 11; the touch signal line 22 includes a first side and a second side opposite to each other in the row direction X, where the first side is a side close to the left sensing electrode 11, and the second side is a side close to the right sensing electrode, for example: the shielding electrode 30 is located between the first side of the touch signal line 22 and the sensing electrode 11. Of course, it is also possible to dispose the shielding electrode 30 between the second side of the touch signal line 22 and the sensing electrode 11. In this way, the interference of the signal between the touch signal line 22 and the sensing electrode 11 disposed adjacent thereto is avoided as much as possible.
In another example, fig. 7 is a schematic diagram of another first touch layer according to an embodiment of the disclosure; as shown in fig. 7, the structure of the first touch layer 10 is different from that of the first touch layer shown in fig. 6 in that a shielding electrode 30 is disposed between a first side of a touch signal line 22 and a sensing electrode 11, and between a second side of the touch signal line 22 and the sensing electrode 11. In this way, the interference of signals between the touch signal line 22 and the sensing electrode 11 disposed adjacent thereto is avoided as much as possible.
In some embodiments, fig. 8 is a schematic view of another first touch layer according to the embodiments of the present disclosure; as shown in fig. 8, the first touch layer 10 includes not only the sensing electrodes 11, the touch signal lines 22, and the shielding electrodes 30, but also a plurality of first redundant touch electrodes 40 arranged side by side along the row direction X, wherein each first redundant touch electrode 40 extends along the column direction Y. The sensing electrode 11 in the first touch layer 10 and the shielding electrode 30 are disconnected from each other by the first redundant touch electrode 40. For example: the shielding electrode 30 is arranged between the touch signal line 22 and the sensing electrode 11 adjacent to the touch signal line, and at this time, the first redundant touch electrode 40 is arranged between the sensing electrode 11 and the shielding electrode 30, so that risks of short circuit and electrostatic discharge (ESD) among the sensing electrode 11, the touch signal line 22 and the shielding electrode 30 can be effectively avoided. In addition, in the embodiment of the present disclosure, the sensing electrode 11, the touch signal line 22, the shielding electrode 30, and the first redundant touch electrode 40 are all structures of the first touch layer 10, and the four can be formed by a one-step patterning process, for example: the sensing electrode 11, the touch signal line 22, the shielding electrode 30 and the first redundant touch electrode 40 are designed to be the same pattern, but the pattern of the first redundant touch electrode 40 can be cut up, so that the first redundant touch electrode 40 is disconnected from the sensing electrode 11, the touch signal line 22 and the shielding electrode 30, and the sensing electrode 11, the touch signal line 22 and the shielding electrode 30 can be disconnected from each other.
In some embodiments, fig. 9 is a schematic view of another first touch layer according to the embodiments of the present disclosure; as shown in fig. 9, the first touch layer 10 has substantially the same structure as the first touch layer 10 shown in fig. 8, except that the first redundant touch electrode 40 is disposed between the sensing electrode 11 and the shielding electrode 30, and the first redundant touch electrode 40 is also disposed between the shielding electrode 30 and the touch signal line 22, and between the sensing electrode 11 and the touch signal line 22, so as to effectively avoid the risk of short circuit and electrostatic discharge (ESD) between the sensing electrode 11, the touch signal line 22, and the shielding electrode 30. The structures and the forming manners of the sensing electrode 11, the touch signal line 22, the shielding electrode 30 and the first redundant touch electrode 40 can be the same as those of the first touch layer shown in fig. 8, and therefore, the description thereof will not be repeated.
In some embodiments, fig. 10 is a schematic view of another second touch layer according to the embodiments of the disclosure; as shown in fig. 10, the second touch layer 20 includes not only the driving electrodes 21, but also a plurality of second redundant touch electrodes 50 arranged side by side in the column direction Y, each of the second redundant touch electrodes 50 extending in the row direction X. Wherein a second redundant touch electrode 50 is disposed between two adjacent driving electrodes 21, and the second redundant touch electrode 50 is configured to disconnect the adjacent driving electrodes 21. For example: the driving electrodes 21 and the second redundant touch electrodes 50 are alternately disposed, and are disconnected from each other. In the embodiment of the present disclosure, the second redundant touch electrode 50 disconnects the driving electrodes 21 disposed adjacently, so that the risks of short circuit and electrostatic discharge (ESD) between the adjacent driving electrodes 21 can be effectively avoided. In addition, in the embodiment of the present disclosure, the driving electrode 21 and the second redundant touch electrode 50 are both structures of the second touch layer 20, and both can be formed by a one-step patterning process, for example: the driving electrode 21 and the second redundant touch electrode 50 are designed to have the same pattern, except that the pattern of the second redundant touch electrode 50 can be cut up, so that the second redundant touch electrode 50 is disconnected from the driving electrode 21, and the driving electrode 21 is disconnected from the driving electrode 21.
In some embodiments, the first touch layer 10 and the second touch layer 20 may be formed of Indium Tin Oxide (ITO) film, which is a transparent conductor, and is not only convenient for normal touch of the touch substrate, but also does not affect normal display of the display device. However, the second touch layer 20 and the first touch layer 10 are almost covered over the entire touch area of the touch substrate, and the sheet resistance of the ito film is particularly large, so that the ito film is not suitable for touch control of a large-sized screen. In addition, since the ito film is used as a transparent electrode of most display devices, resources are relatively short, and the price is increasing, which is not favorable for reducing the manufacturing cost of the touch substrate and thus the display device.
In some embodiments of the present disclosure, at least one of the first touch layer 10 and the second touch layer 20 employs a grid-like structure. For example: the first touch layer 10 and the second touch layer 20 both use metal mesh-shaped touch layers. Since the first touch layer 10 and/or the second touch layer 20 in the embodiment of the present disclosure use a Metal mesh touch layer, that is, the first touch layer 10 and/or the second touch layer 20 is made of a low resistance Metal material (such as silver, aluminum, copper, molybdenum, niobium, or an alloy thereof), the Metal is opaque, so that it is made into a mesh shape. The first touch layer 10 and/or the second touch layer 20 are/is formed by adopting metal conductors, and the first touch layer 10 and/or the second touch layer 20 formed by adopting the metal conductors are in a grid structure, namely, a light-transmitting area is arranged in the grid structure, so that the touch substrate can normally touch, the surface resistance of the first touch layer 10 and/or the second touch layer 20 in the touch substrate is greatly reduced, and the power consumption of the touch substrate is further reduced; in addition, since the metal conductor is more easily available and has lower cost than the indium tin oxide transparent conductor, the first touch layer 10 and/or the second touch layer 20 adopting the metal mesh shape also reduces the production cost of the touch substrate.
In some embodiments, the interlayer insulating layer 200 between the first touch layer 10 and the second touch layer 20 may employ an organic material. In order to achieve stable electrical connection between the driving electrode 21 and the touch signal line 22, a plurality of first connection vias 301 penetrating through the interlayer insulating layer 200 may be employed for each touch signal line 22 to be electrically connected to the driving electrode 21, with particular reference to fig. 3. For example: one touch signal line 22 may be electrically connected to the driving electrode 21 by using two first connection via holes 301, the two first connection via holes 301 may be arranged side by side along the column direction Y, and of course, the first connection via holes 301 may also be arranged side by side along the row direction X. In one example, a connection line of the first connection through hole 301 for at least partially connecting different drive electrodes 21 and touch signal lines 22 intersects the row direction X. Therefore, the first connecting through holes 301 can be arranged in a dispersed manner, and the problem that the toughness of the touch substrate is affected due to the fact that the first connecting through holes 301 are arranged in the row direction X, so that the bending resistance of the touch substrate is poor, and the yield of the touch substrate is affected is avoided.
In an example, fig. 11 is a schematic diagram illustrating connection between a touch signal line and a driving electrode in an embodiment of the disclosure; as shown in fig. 11, one touch signal line 22 is connected to one driving electrode 21 by using a plurality of first connecting vias 301 penetrating through the interlayer insulating layer 200, and in fig. 11, for example, one touch signal line 22 is connected to one driving electrode 11 by 2 first connecting vias 301, the two first connecting vias 301 are arranged along the column direction Y, so that the first connecting vias 301 are located in the same column to facilitate alignment of the mask during the preparation, thereby facilitating the preparation of the first connecting vias 301. Of course, the plurality of first connection vias 301 connecting one touch signal line 22 and the driving electrode 21 may also be arranged along the row direction X, and will not be described in detail herein.
In another example, fig. 12 is another schematic diagram illustrating a touch signal line and a driving electrode connected in an embodiment of the disclosure; as shown in fig. 12, one touch signal line 22 may be connected to one driving electrode 21 by using at least 3 first connecting via holes 301, and the at least 3 first connecting via holes 301 are not located on the same straight line in the row direction X and are not located on the same straight line in the column direction Y, so that an irregular arrangement may be formed to prevent display problems such as moire patterns.
It should be noted that in the embodiment of the present disclosure, the "∘" of the position of the first connecting via 301 does not represent the actual shape of the first connecting via 301, and the shape of the first connecting via 301 depends on the shape of the first connecting via 301 used in the patterning process. The top view of the first connecting via 301 may have a rounded quadrilateral shape.
In addition, in the embodiment of the present disclosure, in order to ensure stable connection between the touch signal line 22 and the driving electrode 21, the line width of the touch signal line 22 at the first connection via hole 301 is wider than the line widths at other positions, for example, the touch signal line 22 protrudes to both sides by about 6 μm at the first connection via hole 301.
In some embodiments, a touch substrate has a touch substrate having a touch area and a peripheral area surrounding the touch area; the first touch layer 10 and the second touch layer 20 are located in a touch area; the peripheral region includes a fan-out region located at one side of the touch region, and in the embodiment of the present disclosure, the fan-out region is close to one end portion of the sensing electrode 11 (i.e., the lower side of the touch substrate shown in fig. 3) as an example. Referring to fig. 3, the touch substrate further includes a first fan-out trace 60, a second fan-out trace 70, and a third fan-out trace 80 located in the fan-out region; one first fan-out trace 60 is connected to one sensing electrode 11; one second fan-out trace 70 is connected to one touch signal line 22; a third fan-out trace 80 connects to one shield electrode 30. For example: the first fan-out routing lines 60 are connected with the sensing electrodes 11 in a one-to-one correspondence manner, and are used for outputting touch signals sensed by the sensing electrodes 11; the second fan-out traces 70 are connected to the touch signal lines 22 in a one-to-one correspondence manner, and are used for providing driving scanning signals to the driving electrodes 21; the third fan-out trace 80 is connected to the shielding electrode 30 in a one-to-one correspondence, and is used for providing a ground signal for the shielding electrode 30.
It should be noted that the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 all extend to the connection pads corresponding thereto, and the touch driver circuit FPC is bound to the connection pads to provide corresponding signals for the first fan-out trace 60 and the third fan-out trace 80, and process the signals output by the second fan-out trace 70, so as to allow the controller to recognize the touch information. A ground signal line 90 may be further disposed in a peripheral region of the touch substrate, and the shielding electrode may be connected to the ground signal line 90. The ground signal line 90 may be disposed in the same layer as the sensing electrode 11, or in the same layer as the driving electrode 21, which is not limited in the embodiment of the present disclosure.
In one example, to avoid the risk of short between the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80, in the embodiment of the present disclosure, one of the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 is located on the second touch layer 20, two of the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 are located on the first touch layer 10, and three of the first fan-out trace, the second fan-out trace, and the third fan-out trace include the electrically connected first sub-signal line 801 and the second sub-signal line 802; one of the first sub-signal line 801 and the second sub-signal line 802 is located on the second touch layer 20, and the other is located on the first touch layer 10.
For example: fig. 13 is a cross-sectional view of the touch substrate along the direction B-B' according to the embodiment of the disclosure, and as shown in fig. 13, the second fan-out trace 70 is connected to the touch signal line 22 through a second connecting via 302 penetrating through the interlayer insulating layer 200. FIG. 14 is an enlarged top view taken at position A in FIG. 3; as shown in fig. 14, the second connecting via 302 may be rectangular; the line width of the second fan-out trace 70 at the second connection via hole 302 is larger than the line widths at other positions, so that the second fan-out trace 70 can be electrically connected to the second fan-out trace 70 well when the touch signal line 22 adopts a metal grid structure, so as to ensure the stability of the circuit. Fig. 15 is a cross-sectional view of a touch substrate along the direction C-C' according to an embodiment of the disclosure, and as shown in fig. 15, the third fan-out trace 80 includes a first sub-signal line 801 and a second signal line electrically connected, where the first sub-signal line 801 is located on the second touch layer 20, and the second sub-signal line 802 is located on the first touch layer 10; at this time, one end of the first sub-signal line 801 is connected to the shield electrode 30 through the third connection via 303 penetrating the interlayer insulating layer 200, and the other end thereof is connected to the second sub-signal line 802 through the fourth connection via 304 penetrating the interlayer insulating layer 200. FIG. 16 is an enlarged top view taken at position B in FIG. 3; as shown in fig. 16, the line width of the first sub-signal line 801 of the third fan-out trace 80 at the position of the third connection via 303 is greater than the line widths at other positions, so that when the shielding electrode 30 adopts a metal grid structure, the first sub-signal line 801 of the third fan-out trace 80 can be electrically connected well, so as to ensure the stability of the line. As can be seen, when the first touch layer 10 and the second touch layer 20 are formed, the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 can be formed, so that the process steps are not increased.
It should be noted that, in the above description, only the third fan-out trace 80 in the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 includes the first sub-signal line 801 and the second sub-signal line 802, the first fan-out trace 60 is located in the first touch layer 10, and the second fan-out trace 70 is located in the second touch layer 20 as an example, in practical application, positions of each layer of the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 may be interchanged, as long as it is ensured that the short circuit problem does not occur in the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80. In addition, at least part of the first fan-out trace 60, the second fan-out trace 70, and the third fan-out trace 80 are located on different layers, or at least part of the fan-out trace is located on different layers, so that orthographic projections of the fan-out traces on the substrate 100 on different layers are at least partially overlapped, and therefore more signal lines can be arranged as much as possible under the condition that the space of the fan-out area is limited, which is beneficial to realizing a narrow frame. The interlayer insulating layer 200 is disposed between the first touch layer 10 and the second touch layer 20, and the interlayer insulating layer 200 covers the substrate 100 entirely, and is hollowed out only at the positions of the first connection via 301, the second connection via 302, the third connection via 303, and the fourth connection via 304, which are recessed inward (75-350 μm) at the edges.
In addition, the second connecting via 302, the third connecting via 303, and the fourth connecting via 304 are located in the fan-out area. Therefore, the problem of shadow elimination caused by a large number of through holes in the touch area can be effectively avoided. The touch substrate of the present disclosure further includes a ground signal line (not shown) located in the peripheral region, and the ground signal line may be located at the same layer as the first touch layer 10 or the second touch layer 20, which is not limited in the present disclosure. Since the touch signal lines 22 are disposed on the second touch layer 20, i.e., in the touch area, in the embodiment of the disclosure, a narrow frame design can be achieved without increasing the thickness of the touch substrate. Further, a shielding electrode 30 is disposed between the touch signal line 22 and the sensing electrode 11 in the embodiment of the disclosure, and signal interference between the touch signal line 22 and the sensing electrode 11 can be avoided by the shielding electrode 30.
In a second aspect, embodiments of the present disclosure provide a method for manufacturing a touch substrate, which can be used to manufacture any one of the touch substrates described above. Specifically, the preparation method in the embodiment of the present disclosure may include the following steps:
s1, providing a substrate 100, and forming a pattern including the first touch layer 10 on the substrate 100 through a patterning process; the first touch layer 10 includes a plurality of sensing electrodes 11, a plurality of touch signal lines 22, and a shielding electrode 30, which are arranged side by side along the row direction X; each of the sensing electrodes 11, the touch signal lines 22, and the shielding electrodes 30 extends in the column direction Y.
It should be noted that the "patterning process" in the embodiments of the present disclosure refers to a technique of forming a part of a complete material layer into a desired structure by removing a part of the complete material layer, and generally includes one or more steps of forming the material layer, coating photoresist, exposing, developing, etching, stripping the photoresist, and the like.
For example: the first touch layer 10 may be made of metal materials, such as: such as silver, aluminum, copper, molybdenum, niobium, or alloys thereof, and the like. Step S1 may include forming a first metal conductive layer on the substrate 100 by, but not limited to, a sputtering process, and coating a photoresist on the first metal conductive layer, and then forming the first touch layer 10 having the patterns of the sensing electrodes 11, the touch signal lines 22, and the shielding electrodes 30 by exposing, developing, etching, stripping the photoresist, and the like.
In some embodiments, the first touch layer 10 formed in step S1 includes not only the sensing electrodes 11, the touch signal lines 22, and the shielding electrodes 30, but also the first redundant touch electrodes 40. The first redundant touch electrode 40 is configured to disconnect the sensing electrode 11, the touch signal line 22, and the shielding electrode 30 from each other. For example: the first touch layer 10 adopts a metal grid structure, and at this time, the metal grid structure among the sensing electrodes 11, the touch signal lines 22, and the shielding electrodes 30 is cut up, so as to form the first redundant touch electrode 40. In addition, in S1, not only the first touch layer 10 is formed, but also the first fan-out trace 60 for providing a signal to the sensing electrode 11 and the second sub-signal line 802 of the third fan-out trace 80 are formed in the fan-out region of the touch substrate.
S2, on the substrate 100 where the step S1 is completed, the interlayer insulating layer 200 is formed, and the first connection via 301 is formed through a patterning process. The first connecting via 301 is used to connect the driving electrode 21 and the touch signal line 22, which are formed subsequently.
When the first sub-signal lines 801 of the second and third fan-out traces 70 and 80 are formed in the subsequent step, the second, third, and fourth connection vias 302, 303, and 304 penetrating the interlayer insulating layer 200 are also formed in step S2. The second connecting via 302 is used for connecting the subsequently formed second fan-out trace 70 with the touch signal line 22, the third connecting via 303 is used for connecting the shielding signal line with the subsequently formed first sub-signal line 801, and the fourth connecting via 304 is used for connecting the second sub-signal line 802 with the subsequently formed first sub-signal line 801.
S3, a pattern including the second touch layer 20 is formed on the substrate 100 after the step S2 through a patterning process. The second touch layer 20 includes a plurality of driving electrodes 21 arranged side by side along the column direction Y, and each driving electrode 21 extends along the row direction X.
For example: the second touch layer 20 may be made of a metal material, for example: such as silver, aluminum, copper, molybdenum, niobium, or alloys thereof, and the like. Step S3 may include forming a second metal conductive layer on the substrate 100 by, but not limited to, a sputtering process, and coating a photoresist on the second metal conductive layer, and then forming the first touch layer 10 including the pattern with the driving electrodes 21 by exposing, developing, etching, stripping the photoresist, and the like.
In some embodiments, the second touch layer 20 formed in step S2 includes not only the driving electrodes 21 but also the second redundant touch electrodes 50. The second redundant touch electrode 50 is configured to disconnect the driving electrodes 21 adjacently disposed, that is, the driving electrodes 21 and the second redundant touch electrode 50 are alternately disposed and disconnected from each other. For example: the second touch layer 20 adopts a metal grid structure, and the metal grid structure between the adjacent driving electrodes 21 is cut into pieces to form the second redundant touch electrode 50. In addition, not only the second touch layer 20 is formed in S2, but also the second fan-out trace 70 for providing signals to the driving electrodes 21 and the first sub-signal line 801 of the third fan-out trace 80 may be formed in the fan-out region of the touch substrate. One end of the first sub-signal line 801 is connected to the shield electrode 30 through a third connection via 303 penetrating the interlayer insulating layer 200, and the other end is connected to the second sub-signal line 802 through a fourth connection via 304 penetrating the interlayer insulating layer 200. The second fan-out trace 70 is connected to the driving signal line through a second connection via 302 penetrating the interlayer insulating layer 200.
Thus, the touch substrate in the embodiment of the present disclosure is prepared. Of course, the method for manufacturing a touch substrate according to the embodiment of the present disclosure further includes a step of forming a structure such as a ground electrode, which is not listed here.
In a third aspect, fig. 17 is a schematic view of a display device according to an embodiment of the disclosure, and as shown in fig. 17, the embodiment of the disclosure provides a display device including a display panel 2 and any one of the touch substrates 1 described above. Since the display device in the embodiment of the present disclosure includes the touch substrate, it can implement a narrow frame design, and can also avoid the problem of interference between the touch signal lines 22 and the signals on the sensing electrodes 11.
In some embodiments, the display panel in the display device may be any product or component having a display function, such as a liquid crystal panel, an organic light emitting display panel, electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator.
In some embodiments, the display device may be a touch screen. That is, the touch substrate is disposed on the display side of the display panel 2. Specifically, a first buffer layer may be formed on the display surface side of the display panel 2, then the second touch layer 20 side of the touch substrate 1 is disposed opposite to the first buffer layer, a black matrix BM pattern is formed in the peripheral area of the substrate 100 of the touch substrate 1 to form a frame of the touch screen, and finally the cover plate 3 is disposed opposite to the black matrix BM to form a complete structure of the touch screen.
Of course, the display device in the embodiment of the disclosure may also be an in-cell touch screen structure, that is, the touch substrate is integrated inside the display panel. The types of display devices are not listed in the embodiments of the present disclosure.
It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (15)

1. A touch substrate, comprising: the touch screen comprises a substrate, a second touch layer and a first touch layer which are arranged on the substrate, and an interlayer insulating layer arranged between the second touch layer and the first touch layer; it is characterized in that the preparation method is characterized in that,
the first touch layer comprises a plurality of first touch electrodes and a plurality of touch signal lines which are arranged side by side along a first direction; the plurality of first touch control electrodes and the plurality of touch control signal lines extend along a second direction;
the second touch layer comprises a plurality of second touch electrodes arranged side by side along the second direction, each of the plurality of second touch electrodes extends along the first direction, and one of the second touch electrodes is connected with at least one touch signal line through a first connection via penetrating the interlayer insulating layer; wherein the content of the first and second substances,
the first touch layer further comprises at least one shielding electrode extending along the second direction; and the shielding electrode is arranged between at least part of the first touch electrode and the touch signal line.
2. The touch substrate of claim 1, wherein one touch signal line is disposed between two adjacent first touch electrodes.
3. The touch substrate of claim 1, wherein at least one shielding electrode is disposed between two adjacent first touch electrodes.
4. The touch substrate of claim 3, wherein any one of the touch line signal lines comprises a first side and a second side opposite to each other in a first direction; the shielding electrode is disposed between only one of the first and second sides of the touch line signal line and the first touch electrode.
5. The touch substrate of any one of claims 1-4, wherein the first touch layer further comprises: a plurality of first redundant touch electrodes arranged side by side along a first direction, each of the plurality of first redundant touch electrodes extending along the second direction; the plurality of first redundant touch electrodes are located between at least adjacent two of the first touch electrodes, the touch signal lines, and the shielding electrodes in the first touch layer.
6. The touch substrate of any one of claims 1-4, wherein the second touch layer further comprises: the touch panel comprises a plurality of second redundant touch electrodes arranged side by side along a second direction, wherein each of the plurality of second redundant touch electrodes extends along the first direction, the second redundant touch electrode is arranged between two adjacent second touch electrodes, and the second redundant touch electrodes are configured to disconnect the two adjacent second touch electrodes.
7. The touch substrate of any one of claims 1-4, wherein the touch substrate comprises a fan-out region; a first fan-out routing, a second fan-out routing and a third fan-out routing which are positioned in the fan-out area are also arranged on the substrate; the first fan-out routing is connected with the first touch electrode; the second fan-out routing is connected with the touch signal line; the third fan-out wire is connected with the shielding electrode.
8. The touch substrate of claim 7, wherein at least some of the first fan-out trace, the second fan-out trace, and the third fan-out trace are located on different layers, and/or wherein at least one of the first fan-out trace, the second fan-out trace, and the third fan-out trace include portions located on different layers.
9. The touch substrate of claim 7, wherein one of the first fan-out trace, the second fan-out trace, and the third fan-out trace is located on the second touch layer, two of the first fan-out trace and the third fan-out trace are located on the first touch layer, and three of the first fan-out trace, the second fan-out trace and the third fan-out trace comprise a first sub-signal line and a second sub-signal line which are electrically connected; one of the first sub-signal line and the second sub-signal line is located on the second touch layer, and the other is located on the first touch layer.
10. The touch substrate of claim 9, wherein the first fan-out trace is located on a first touch layer;
the second fan-out routing is located on the second touch layer and is connected with the touch signal line through a second connecting through hole penetrating through the interlayer insulating layer;
the third fan-out wiring comprises a first sub-signal wire and a second sub-signal which are electrically connected; the first sub-signal line is positioned on the second touch layer, and the second sub-signal line is positioned on the first touch layer; one end of the first sub-signal line is connected with the shielding electrode through a third connecting via hole penetrating through the interlayer insulating layer, and the other end of the first sub-signal line is connected with the second sub-signal line through a fourth connecting via hole penetrating through the interlayer insulating layer.
11. The touch substrate of claim 10, wherein the second connecting via, the third connecting via, and the fourth connecting via are all located in the fan-out area.
12. The touch substrate of any of claims 1-4, wherein the shield electrode comprises a ground electrode.
13. The touch substrate of any one of claims 1-4, wherein at least some of the first connecting vias intersect the first direction.
14. The touch substrate of any one of claims 1-4, wherein at least one of the first touch and the first touch layer comprises a metal mesh-like touch layer.
15. A display device comprising the touch substrate according to any one of claims 1 to 14.
CN202022832625.8U 2020-11-30 2020-11-30 Touch substrate and display device Active CN213904304U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022832625.8U CN213904304U (en) 2020-11-30 2020-11-30 Touch substrate and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022832625.8U CN213904304U (en) 2020-11-30 2020-11-30 Touch substrate and display device

Publications (1)

Publication Number Publication Date
CN213904304U true CN213904304U (en) 2021-08-06

Family

ID=77124316

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022832625.8U Active CN213904304U (en) 2020-11-30 2020-11-30 Touch substrate and display device

Country Status (1)

Country Link
CN (1) CN213904304U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113835559A (en) * 2021-09-26 2021-12-24 武汉华星光电半导体显示技术有限公司 Display panel
CN114020165A (en) * 2021-10-25 2022-02-08 武汉华星光电技术有限公司 Self-contained touch panel
CN114089873A (en) * 2021-11-16 2022-02-25 武汉华星光电半导体显示技术有限公司 Display panel and electronic device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113835559A (en) * 2021-09-26 2021-12-24 武汉华星光电半导体显示技术有限公司 Display panel
CN113835559B (en) * 2021-09-26 2023-07-25 武汉华星光电半导体显示技术有限公司 Display panel
CN114020165A (en) * 2021-10-25 2022-02-08 武汉华星光电技术有限公司 Self-contained touch panel
CN114020165B (en) * 2021-10-25 2023-12-29 武汉华星光电技术有限公司 Self-contained touch panel
CN114089873A (en) * 2021-11-16 2022-02-25 武汉华星光电半导体显示技术有限公司 Display panel and electronic device
US11954278B2 (en) 2021-11-16 2024-04-09 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and electronic device

Similar Documents

Publication Publication Date Title
US20230376159A1 (en) Touch substrate, method for manufacturing touch substrate and display apparatus
CN213904304U (en) Touch substrate and display device
US9454267B2 (en) Touch sensing circuit and method for making the same
KR101410584B1 (en) Touch panel and a manufacturing method thereof
US9081427B2 (en) Position-sensing panel and method
US9207720B2 (en) Flexible touch screen panel and fabrication method thereof
EP2530565B1 (en) Electrode structure of the touch panel, method thereof and touch panel
US9086766B2 (en) Touch panel and touch display panel
US8946578B2 (en) Touch panel and a manufacturing method thereof
CN108646946B (en) Flexible touch panel, manufacturing method thereof and flexible touch display
US20100163394A1 (en) Capacitive Touch Panel
US20100214247A1 (en) Capacitive Touch Panel
US8279195B2 (en) Touch screen panel
CN108958542B (en) Display device, touch panel and manufacturing method thereof
US11907456B2 (en) Touch substrate, display panel, and touch display device
CN108829297B (en) Touch substrate, touch display panel, touch display device and touch driving method
US9058083B2 (en) Touch sensing structure and method for making the same
CN110851016A (en) Touch substrate, preparation method thereof and touch device
CN109814758B (en) Touch substrate, touch driving method and electronic device
CN113010042B (en) Touch display panel
CN109917962B (en) Touch panel
CN213122936U (en) Touch display panel and electronic equipment
CN111552413A (en) Touch substrate, touch screen and display device
CN113608638B (en) Touch substrate, preparation method thereof and display device
CN112051934A (en) Touch panel

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant