CN213889606U - All-in-one silicon mud cleaning device - Google Patents
All-in-one silicon mud cleaning device Download PDFInfo
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- CN213889606U CN213889606U CN202023098262.6U CN202023098262U CN213889606U CN 213889606 U CN213889606 U CN 213889606U CN 202023098262 U CN202023098262 U CN 202023098262U CN 213889606 U CN213889606 U CN 213889606U
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- sprinkler
- top cover
- sleeve
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Abstract
The utility model discloses an all-in-one silicon mud cleaning device, including the device shell, the top surface of device shell sets up the top cap, the inside of top cap is provided with the sleeve, the telescopic outside and the inside that is located the top cap are provided with the water storage box, the left side of water storage box and the inside that is located the device shell are provided with the multiunit motor, the bottom of motor and the inside that is located the device shell are provided with the threaded rod, the outside surface of threaded rod is provided with the slider, the outside of slider and the inboard that is located the device shell are provided with the water sprayer, the outside of water sprayer and the outside surface that is located the sleeve are provided with the draft tube, the bottom surface of device shell is provided with the multiunit telescopic link. The utility model discloses an all-in-one silicon mud cleaning device adopts the mode that cup joints the all-in-one top, washs the workstation of all-in-one and the equipment of polishing comprehensively, improves the cleaning efficiency.
Description
Technical Field
The utility model relates to a silicon chip processing technology field, in particular to all-in-one silicon mud cleaning device.
Background
Silicon wafers are generally thin slices cut from single crystal silicon, having diameters of 6 inches, 8 inches, 12 inches, and the like, and are used primarily for the production of integrated circuits. The silicon chip is only a raw material, and the chip is a finished product. The silicon wafer is an important material for manufacturing integrated circuits, and various semiconductor devices can be manufactured by means of photoetching, ion implantation and the like on the silicon wafer. When a silicon wafer is processed, polishing is needed, and residual silicon mud after polishing is not cleaned for a long time, can be adhered to the surface of equipment to form scabs and is difficult to process. The existing silicon mud cleaning device is not comprehensive enough in cleaning, basically adopts local cleaning, is poor in cleaning angle, is inconvenient to disassemble and inflexible to use due to the fact that the existing silicon mud cleaning device is directly installed on equipment, and the all-in-one machine silicon mud cleaning device is provided.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main aim at provides all-in-one silicon mud cleaning device, can effectively solve the problem in the background art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
all-in-one silicon mud cleaning device, including the device shell, the top surface of device shell sets up the top cap, the inside of top cap is provided with the sleeve, telescopic outside and the inside that is located the top cap are provided with the water storage box, the left side of water storage box and the inside that is located the device shell are provided with the multiunit motor, the bottom of motor and the inside that is located the device shell are provided with the threaded rod, the outside surface of threaded rod is provided with the slider, the outside of slider and the inboard that is located the device shell are provided with the sprinkler, the outside of sprinkler and the outside surface that is located the sleeve are provided with the draft tube, the bottom surface of device shell is provided with the multiunit telescopic link.
Preferably, the device shell, the top cover and the telescopic rods are fixedly connected, the telescopic rods are four groups, openings corresponding to the sleeves are formed in the top cover, the telescopic top cover is fixedly connected, and the top cover and the top of the device shell are of a circular structure.
By adopting the technical scheme, the following technical effects can be achieved: thereby reached and be convenient for install the effect to the all-in-one outside.
Preferably, the motor is electrically connected with the top cover, the threaded rod is movably connected with the motor and the device shell, threads corresponding to the outer side of the threaded rod are arranged on the inner side of the sliding block, a rubber layer is arranged on the outer side of the sliding block and on the inner side of the device shell, the rubber layer is fixedly connected with the device shell, a convex block is arranged between the outer side of the sliding block and the water sprayer, the convex block is fixedly connected with the water sprayer and the sliding block, and an opening corresponding to the convex block is formed in the rubber layer.
By adopting the technical scheme, the following technical effects can be achieved: thereby the effect that the washing leakproofness is strong has been reached.
Preferably, the sprinkler is of an annular structure, the inner side of the sprinkler is an arc surface, a plurality of groups of water spraying grooves are arranged on the inner side of the sprinkler, the water spraying grooves are of a long-strip structure, a diversion strip is arranged on the inner side of each water spraying groove and inside the water sprayer, the inner side of each diversion strip is an arc surface corresponding to the outer side of the sprinkler, and the diversion strips are fixedly connected with the inner side of the sprinkler.
By adopting the technical scheme, the following technical effects can be achieved: thereby achieving the effect of overall flushing.
Preferably, the top of the water sprayer and the bottom of the water storage tank are provided with water outlet pipes, the water outlet pipes are fixedly connected with the water storage tank and the water sprayer, the outer side of the guide cylinder is of an arc surface structure, and the guide cylinder is fixedly connected with the sleeve and the top cover.
By adopting the technical scheme, the following technical effects can be achieved: thereby achieving the effect of water flow guiding.
Compared with the prior art, the utility model discloses following beneficial effect has: this all-in-one silicon mud cleaning device, cup joint the all-in-one through the device shell, the sleeve cup joints the equipment of polishing at all-in-one top, the telescopic link height-adjusting of many groups of rethread, can accomplish the installation, it rotates to drive the threaded rod through the motor, utilize the threaded rod outside and the screw thread that the slider corresponds, it removes along the inboard of device shell to drive the slider, the slider passes through the lug and is connected between the sprinkler, drive the sprinkler downstream, under the centre gripping on rubber layer, avoid the inboard of water infiltration device shell, the rethread water storage box passes through the inside delivery water of outlet pipe to the sprinkler, the cambered surface structure of the inside water conservancy diversion strip of sprinkler, with the inboard of water split to the sprinkler, discharge from the spout again, improve the water-washed dynamics of each spout, thereby the effect of comprehensive clearance has been reached.
Drawings
FIG. 1 is a schematic perspective view of a silicon sludge cleaning device of an all-in-one machine of the present invention;
FIG. 2 is a front view structural section of the integrated silicon sludge cleaning device of the utility model;
FIG. 3 is an enlarged schematic structural view of the area A in FIG. 2 of the silicon sludge cleaning device of the all-in-one machine of the present invention;
fig. 4 is a schematic view of the overlooking structure of the device shell of the silicon sludge cleaning device of the all-in-one machine of the present invention.
In the figure: 1. a device housing; 2. a top cover; 3. a sleeve; 4. a water storage tank; 5. an electric motor; 6. a threaded rod; 7. a slider; 8. a water sprayer; 9. a draft tube; 10. a telescopic rod; 11. a rubber layer; 12. a bump; 13. a water spraying groove; 14. a flow guide strip; 15. and (5) discharging a water pipe.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
As shown in fig. 1-4, the all-in-one machine silicon mud cleaning device comprises a device shell 1, a top cover 2 is arranged on the outer surface of the top of the device shell 1, a sleeve 3 is arranged inside the top cover 2, a water storage tank 4 is arranged outside the sleeve 3 and inside the top cover 2, a plurality of groups of motors 5 are arranged on the left side of the water storage tank 4 and inside the device shell 1, a threaded rod 6 is arranged at the bottom of each motor 5 and inside the device shell 1, a sliding block 7 is arranged on the outer surface of the outer side of the threaded rod 6, a water sprayer 8 is arranged on the outer side of the sliding block 7 and inside the device shell 1, a guide cylinder 9 is arranged on the outer surface of the outer side of the water sprayer 8 and outside the sleeve 3, and a plurality of groups of telescopic rods 10 are arranged on the outer surface of the bottom of the device shell 1.
The motor 5 is electrically connected with the top cover 2, the motor 5 can adopt a Y200L1-2 model asynchronous motor, the power is 30kW, the threaded rod 6, the motor 5 and the device shell 1 are movably connected, the inner side of the sliding block 7 is provided with threads corresponding to the outer side of the threaded rod 6, so that the sliding block 7 is driven to move, the outer side of the sliding block 7 and the inner side of the device shell 1 are provided with a rubber layer 11, the rubber layer 11 is fixedly connected with the device shell 1, a bump 12 is arranged between the outer side of the sliding block 7 and the water sprayer 8, the bump 12 is fixedly connected with the water sprayer 8 and the sliding block 7, an opening corresponding to the bump 12 is arranged inside the rubber layer 11, and the sliding block 7 is not influenced to drive the water sprayer 8 to move through the bump 12.
Sprinkler 8 is the loop configuration, improves 8 coverage of sprinkler, and 8 inboard of sprinkler is the cambered surface, improves 8 spraying angle of sprinkler, and 8 inboards of sprinkler are provided with multiunit water spout 13, and water spout 13 is rectangular structure, and the inboard of water spout 13 and the inside that is located sprinkler 8 are provided with water conservancy diversion strip 14 for the rivers direction, the inboard of water conservancy diversion strip 14 be with 8 outside corresponding cambered surfaces of sprinkler, water conservancy diversion strip 14 is fixed connection with 8 inboard of sprinkler.
The top of the water sprayer 8 and the bottom of the water storage tank 4 are provided with a water outlet pipe 15, the water outlet pipe 15 is fixedly connected with the water storage tank 4 and the water sprayer 8, the outer side of the guide cylinder 9 is of a cambered surface structure, so that water can be conveniently sprayed to fall, and the guide cylinder 9 is fixedly connected with the sleeve 3 and the top cover 2.
It should be noted that the utility model relates to an all-in-one machine silicon mud cleaning device, when in use, a worker sleeves the all-in-one machine on the inner side of the device shell 1, the sleeve 3 sleeves the polishing equipment on the top of the all-in-one machine, and the multiple groups of telescopic rods 10 are started to adjust the height, so that the installation can be completed; the staff starts motor 5 afterwards, drive threaded rod 6 and rotate, utilize the screw thread that the threaded rod 6 outside corresponds with slider 7, it removes along the inboard of device shell 1 to drive slider 7, slider 7 passes through being connected between lug 12 and the sprinkler 8, drive sprinkler 8 and remove downwards, under the centre gripping of rubber layer 11, avoid water infiltration device shell 1's inboard, and simultaneously, water storage box 4 carries water through outlet pipe 15 to the inside of sprinkler 8, the cambered surface structure of the inside water conservancy diversion strip 14 of sprinkler 8, with the inboard of water conservancy diversion to sprinkler 8, discharge from the spout again, improve the water-washed dynamics of each spout 13, make sprinkler 8 spray all-in-one when reciprocating, spray to the all-in-one, make the clearance more comprehensive, it is comparatively practical.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. All-in-one silicon mud cleaning device, including device shell (1), its characterized in that: the outer surface of the top of the device shell (1) is provided with a top cover (2), the inside of the top cover (2) is provided with a sleeve (3), a water storage tank (4) is arranged outside the sleeve (3) and inside the top cover (2), a plurality of groups of motors (5) are arranged on the left side of the water storage tank (4) and inside the device shell (1), a threaded rod (6) is arranged at the bottom of the motor (5) and inside the device shell (1), the outer surface of the outer side of the threaded rod (6) is provided with a sliding block (7), the outer side of the sliding block (7) and the inner side of the device shell (1) are provided with a water sprayer (8), a guide cylinder (9) is arranged on the outer surface of the outer side of the water sprayer (8) and the outer surface of the outer side of the sleeve (3), the outer surface of the bottom of the device shell (1) is provided with a plurality of groups of telescopic rods (10).
2. The all-in-one machine silicon sludge cleaning device according to claim 1, wherein: the device is characterized in that the device shell (1) is fixedly connected with the top cover (2) and the telescopic rods (10), the telescopic rods (10) are four groups, openings corresponding to the sleeves (3) are formed in the top cover (2), the top cover (2) of each sleeve (3) is fixedly connected, and the top cover (2) and the top of the device shell (1) are of a circular structure.
3. The all-in-one machine silicon sludge cleaning device according to claim 1, wherein: the electric water sprayer is characterized in that the motor (5) is electrically connected with the top cover (2), the threaded rod (6) is movably connected with the motor (5) and the device shell (1), threads corresponding to the outer side of the threaded rod (6) are arranged on the inner side of the sliding block (7), a rubber layer (11) is arranged on the outer side of the sliding block (7) and on the inner side of the device shell (1), the rubber layer (11) is fixedly connected with the device shell (1), a convex block (12) is arranged between the outer side of the sliding block (7) and the water sprayer (8), the convex block (12) is fixedly connected with the water sprayer (8) and the sliding block (7), and an opening corresponding to the convex block (12) is formed in the rubber layer (11).
4. The all-in-one machine silicon sludge cleaning device according to claim 1, wherein: sprinkler (8) are the loop configuration, the inboard of sprinkler (8) is the cambered surface, sprinkler (8) inboard is provided with multiunit water spout (13), water spout (13) are rectangular structure, the inboard of water spout (13) and the inside that is located sprinkler (8) are provided with water conservancy diversion strip (14), the inboard of water conservancy diversion strip (14) is the corresponding cambered surface in sprinkler (8) outside, water conservancy diversion strip (14) are fixed connection with the inboard of sprinkler (8).
5. The all-in-one machine silicon sludge cleaning device according to claim 1, wherein: the top of water sprayer (8) and the bottom that is located water storage box (4) are provided with outlet pipe (15), outlet pipe (15) are fixed connection with water storage box (4) and water sprayer (8), the outside of draft tube (9) is the cambered surface structure, draft tube (9) are fixed connection with sleeve (3) and top cap (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023098262.6U CN213889606U (en) | 2020-12-21 | 2020-12-21 | All-in-one silicon mud cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023098262.6U CN213889606U (en) | 2020-12-21 | 2020-12-21 | All-in-one silicon mud cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213889606U true CN213889606U (en) | 2021-08-06 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023098262.6U Active CN213889606U (en) | 2020-12-21 | 2020-12-21 | All-in-one silicon mud cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213889606U (en) |
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2020
- 2020-12-21 CN CN202023098262.6U patent/CN213889606U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Silicon mud cleaning device of all-in-one machine Effective date of registration: 20221215 Granted publication date: 20210806 Pledgee: Kunming Chengdong Sub branch of China Construction Bank Corp. Pledgor: YUNNAN LUZHONG INDUSTRY AND TRADE Co.,Ltd. Registration number: Y2022980027376 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230605 Granted publication date: 20210806 Pledgee: Kunming Chengdong Sub branch of China Construction Bank Corp. Pledgor: YUNNAN LUZHONG INDUSTRY AND TRADE Co.,Ltd. Registration number: Y2022980027376 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Integrated machine silicon mud cleaning device Effective date of registration: 20230608 Granted publication date: 20210806 Pledgee: Kunming Chengdong Sub branch of China Construction Bank Corp. Pledgor: YUNNAN LUZHONG INDUSTRY AND TRADE Co.,Ltd. Registration number: Y2023980043252 |