CN213872213U - Access device and exhaust system - Google Patents
Access device and exhaust system Download PDFInfo
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- CN213872213U CN213872213U CN202022402206.0U CN202022402206U CN213872213U CN 213872213 U CN213872213 U CN 213872213U CN 202022402206 U CN202022402206 U CN 202022402206U CN 213872213 U CN213872213 U CN 213872213U
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- joint
- tail gas
- gas supply
- connector
- access device
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- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
Abstract
The utility model discloses an access device and an exhaust system, which are used for connecting a process equipment tail gas pump, a gas supply device and a tail gas processor and are characterized by comprising a first joint, a second joint and a connecting pipe; one end of the connecting pipe is connected with the first joint, and the other end of the connecting pipe is connected with the second joint; the first joint is connected with the tail gas processor; the second joint is respectively connected with the process equipment tail gas pump and the gas supply equipment. The first joint is provided with a first valve between the tail gas processor and the first joint. The tail gas processor is provided with a connector, and the connector is provided with a flexible hose. An access device for expanding the gas supply equipment is additionally arranged between the tail gas processor and the gas supply equipment, the first joint and the second joint are utilized to enable the exhaust pipeline to be convenient to disassemble and assemble, the newly added gas supply equipment can be conveniently installed, and the increasing production requirement is met.
Description
Technical Field
The utility model relates to an access device, concretely relates to access device and exhaust system for extending air feeder.
Background
Some flammable and combustible special gases, such as silane, are used in many microelectronic industries, and are generally stored in a steel cylinder container, supplied to a production facility through being installed in a safe and effective gas supply device, and when the gas is used up or the gas supply device is in a problem, the special gas in the steel cylinder container needs to be purged, and the special gas remained in the steel cylinder container or in a pipeline needs to be purged to a tail gas processor. Because the capacity of the microelectronic industry is enlarged in recent years, the equipment is frequently updated, if gas supply equipment needs to be added, the original system needs to be greatly modified, the price of a tail gas processor is high, the construction cost of system configuration is high, and the existing production equipment is not beneficial to increasing and expanding the gas supply equipment.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to the inconvenient shortcoming that expands air feeder of prior art, provide an access device.
In order to solve the technical problem, the utility model discloses a following technical scheme can solve:
an access device is used for connecting a process equipment tail gas pump, a gas supply device and a tail gas processor and is characterized by comprising a first joint, a second joint and a connecting pipe; one end of the connecting pipe is connected with the first joint, and the other end of the connecting pipe is connected with the second joint and is used for connecting expanded gas supply equipment; the first joint is connected with the tail gas processor; the second joint is respectively connected with the process equipment tail gas pump and the gas supply equipment.
Furthermore, a branch pipeline is arranged on the connecting pipe of the first joint and the second joint, a first valve is arranged on the branch pipeline, and a third joint is arranged at the tail end of the branch pipeline and used for connecting the increased gas supply equipment.
Furthermore, a baffle plate structure is arranged on the upper portion of the second sensor, and the first joint and the second joint are vacuum joints.
Further, the third joint is a vacuum joint.
An exhaust system comprises a process equipment tail gas pump, a gas supply device, a tail gas processor and an access device, wherein a second valve is arranged between a first connector and the tail gas processor.
Furthermore, the second joint is connected with one or more air supply equipment, every air supply equipment with all be equipped with the third valve between the second joint.
Further, the third valve is a loose joint ball valve.
Further, the tail gas treater is provided with one or more interfaces.
Furthermore, a flexible hose is arranged on a connector of the tail gas processor.
The utility model discloses owing to adopted above technical scheme, have following benefit:
an access device for expanding the gas supply equipment is additionally arranged between the tail gas processor and the gas supply equipment, the first joint and the second joint are utilized to enable the exhaust pipeline to be convenient to disassemble and assemble, the newly added gas supply equipment can be conveniently installed, and the increasing production requirement is met.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic view of an exhaust system including an access device;
FIG. 2 is a schematic view of another venting system including an access device.
As shown in the drawing, the system comprises a first connector 1, a second connector 2, a connecting pipe 3, an access device 123, a branch pipeline 4, a first valve 5, a third connector 6, a second valve 7, a third valve 8, a process equipment tail gas pump 10, a gas supply device 20, a tail gas processor 30, a connector 301 and a flexible hose 302.
Detailed Description
The present invention will be described in further detail with reference to the following examples, which are illustrative of the present invention and are not intended to limit the present invention.
Example 1:
an access device, as shown in fig. 1, is used for connecting a process equipment exhaust pump 10, an air supply equipment 20 and an exhaust gas processor 30, and includes a first joint 1, a second joint 2 and a connecting pipe 3, wherein the first joint 1, the second joint 2 and the connecting pipe 3 together form an access equipment 123 for connecting an expanded air supply equipment.
One end of the connecting pipe 3 is connected with the first joint 1, and the other end is connected with the second joint 2; the first joint 1 is connected with a tail gas processor; the second joint 2 is respectively connected with a tail gas pump 10 and a gas supply device 20 of the process device.
The first and second connectors of this embodiment may be vacuum connectors in other embodiments.
Example 2:
referring to fig. 1, in this embodiment, an exhaust system including the access device in embodiment 1 includes an exhaust pump 10 of a process plant, two gas supply devices 20, and an exhaust gas processor 30, and a second valve 7 is disposed between the first joint 1 and the exhaust gas processor.
Two air supply devices are connected to the second connector 2.
The tail gas processor is provided with a connector 301, and the connector is provided with a flexible hose 302 for connecting other pipelines.
The number of the gas supply devices in this embodiment may be 1 or any number.
The tail gas treater in the embodiment can be provided with a plurality of interfaces, and each interface is provided with a flexible hose.
When the air supply equipment is to be added, the second valve 7 is closed, and the access equipment 123 is detached through the first connector and the second connector, so that the air supply equipment needing to be added can be added to the exhaust system.
Example 2:
an access device, as shown in fig. 1, is used for connecting a process equipment exhaust pump 10, an air supply equipment 20 and an exhaust gas processor 30, and includes a first joint 1, a second joint 2 and a connecting pipe 3, wherein the first joint 1, the second joint 2 and the connecting pipe 3 together form an access equipment 123 for connecting an expanded air supply equipment.
One end of the connecting pipe 3 is connected with the first joint 1, and the other end is connected with the second joint 2; the first joint 1 is connected with a tail gas processor; the second joint 2 is respectively connected with a tail gas pump 10 and a gas supply device 20 of the process device.
Be equipped with branch road pipeline 4 on the connecting pipe 3 of first joint 1 and second joint 2, be equipped with first valve 5 on the branch road pipeline 4, be equipped with the third joint 6 on the branch road pipeline 4 end for connect the air feeder that increases.
The first and second connectors of this embodiment may be vacuum connectors in other embodiments.
Example 4:
the present embodiment includes an exhaust system having the access device in embodiment 1 or embodiment 3, which includes a process equipment exhaust pump 10, two gas supply devices 20, and an exhaust gas processor 30, and a second valve 7 is disposed between the first joint 1 and the exhaust gas processor.
The second connector 2 is connected with two air supply devices 20, and a third valve 8 is arranged between each air supply device and the second connector 2.
The tail gas processor is provided with a plurality of connectors 301, and each connector is provided with a flexible hose 302 which can be used for connecting other pipelines.
The first valve, the second valve and the third valve in this embodiment may be loose joint ball valves in other embodiments.
When the air supply equipment needs to be added, the second valve 7 is closed, the first connector 1 and the second connector 2 do not need to be detached, the first valve is only required to be closed, the air supply equipment needing to be added is connected to the third connector 6, the air supply equipment can be added into an exhaust system, and the first valve 5 is opened after the air supply equipment is added.
For the device embodiments, since they substantially correspond to the method embodiments, reference may be made to the partial description of the method embodiments for relevant points. The above-described system embodiments are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (9)
1. An access device is used for connecting a process equipment tail gas pump, a gas supply device and a tail gas processor, and is characterized by comprising a first joint, a second joint and a connecting pipe, wherein the first joint, the second joint and the connecting pipe are used for connecting expanded gas supply devices;
one end of the connecting pipe is connected with the first joint, and the other end of the connecting pipe is connected with the second joint;
the first joint is connected with the tail gas processor;
the second joint is respectively connected with the process equipment tail gas pump and the gas supply equipment.
2. The access device according to claim 1, wherein a branch pipeline is provided on the connecting pipe between the first joint and the second joint, a first valve is provided on the branch pipeline, and a third joint is provided at the end of the branch pipeline for connecting an additional gas supply device.
3. An access device as claimed in claim 1, wherein said first and second connectors are vacuum connectors.
4. An access device according to claim 2, wherein the third connector is a vacuum connector.
5. An exhaust system comprising a process equipment exhaust pump, a gas supply device and an exhaust gas processor, characterized by further comprising the access device of any one of claims 1-4, wherein a second valve is arranged between the first connector and the exhaust gas processor.
6. The exhaust system of claim 5, wherein one or more gas supplies are connected to the second connector, and a third valve is provided between each gas supply and the second connector.
7. The exhaust system of claim 6, wherein the third valve is a ball-and-spigot valve.
8. An exhaust system according to claim 5, wherein the exhaust gas processor is provided with one or more interfaces.
9. The exhaust system of claim 8, wherein a flexible hose is provided on the interface of the exhaust gas processor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022402206.0U CN213872213U (en) | 2020-10-26 | 2020-10-26 | Access device and exhaust system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022402206.0U CN213872213U (en) | 2020-10-26 | 2020-10-26 | Access device and exhaust system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213872213U true CN213872213U (en) | 2021-08-03 |
Family
ID=77074525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022402206.0U Active CN213872213U (en) | 2020-10-26 | 2020-10-26 | Access device and exhaust system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213872213U (en) |
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2020
- 2020-10-26 CN CN202022402206.0U patent/CN213872213U/en active Active
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