CN213866389U - Vapor deposition mask, vapor deposition module, vapor deposition device, and organic display device - Google Patents

Abstract

The utility model provides an evaporation coating mask, subassembly, device and organic display device, the evaporation coating mask is used in the evaporation coating of evaporation coating material to the evaporation coating base plate, the evaporation coating mask includes: the chip comprises a first surface side, a second surface side and a through hole, and is characterized in that the first surface side at least comprises a plurality of first concave parts, the second surface side comprises a plurality of second concave parts and a plurality of second supporting parts, the second concave parts comprise second openings and second etching surfaces, two adjacent second etching surfaces are intersected to form a protruding part, and the protruding part protrudes along the direction departing from the first surface side; the second supporting part comprises a plurality of edge parts and a plurality of tip parts, the tip parts are located between two adjacent edge parts, the edge parts are inwards recessed, the tip parts point to the protruding parts and are connected with the protruding parts, so that the adhesion between an evaporation mask and an evaporation substrate is improved, wrinkles during net opening are reduced, meanwhile, shadows during evaporation are reduced, and the evaporation precision is improved.

Description

Vapor deposition mask, vapor deposition module, vapor deposition device, and organic display device

[ technical field ] A method for producing a semiconductor device

The utility model relates to an optics mask plate technical field especially relates to an evaporation coating mask, subassembly, device and organic display device.

[ background of the invention ]

In recent years, displays used in mobile terminals such as smartphones and tablet computers are required to be very fine (number of pixels: 400ppi or more). In the future, mobile terminals will be required to use Ultra High Definition (UHD) and it is expected that OLED panels of higher definition (number of pixels: 800ppi) will be required. The OLED panel needs to use an evaporation mask in manufacturing, the evaporation mask needs to be highly refined in order to correspond to high-precision of the OLED panel, the thickness of the evaporation mask is too large, a shadow which is not evaporated fully can be left on an evaporation workpiece, the evaporation effect is influenced, the evaporation mask with the smaller thickness is beneficial to improving refinement, the rigidity can be reduced due to too small thickness, wrinkles can occur when the evaporation mask is stretched, the difference in rigidity can cause the poor adhesion of the evaporation mask and an evaporation substrate, and therefore the evaporation precision is influenced. Therefore, it is necessary to provide a vapor deposition mask having high adhesion and a method for manufacturing the same.

[ Utility model ] content

An object of the utility model is to provide a coating by vaporization mask with high adherence.

The technical scheme of the utility model as follows: an evaporation mask used for evaporation of an evaporation material onto an evaporation substrate, the evaporation mask comprising:

a first surface side constituting a side of the vapor deposition mask facing the vapor deposition substrate;

a second surface side which constitutes a side of the vapor deposition mask opposite to the first surface side; and

a through hole penetrating the first surface side and the second surface side,

the first surface side at least comprises a plurality of first concave parts, the first concave parts surround the through hole, the second surface side comprises a plurality of second concave parts and a plurality of second supporting parts, the second concave parts and the first concave parts are communicated to form the through hole, the second supporting parts are planes, and the thickness T from the second supporting parts to the first surface side satisfies the relation: t is more than or equal to 10um and less than or equal to 40 um; the second concave part comprises a second opening and second etching surfaces, the second opening is connected with the second supporting part, the second etching surfaces are connected with the second opening and the through hole, two adjacent second etching surfaces are intersected to form a protruding part, and the protruding part protrudes along the direction departing from the side of the first surface; the second supporting part comprises a plurality of edge parts and a plurality of tip parts, the tip parts are located between two adjacent edge parts, the edge parts are inwards sunken, and the tip parts point to the protruding parts and are connected with the protruding parts.

More preferably, a plurality of the side portions are arranged in pairs, and define a width W3 between two opposite side portions, and satisfy the relation:

2um≤W3≤10um。

more preferably, a plurality of the tips are arranged in pairs, and the distance between two opposite tips is defined as W4, and the relation is satisfied:

1um≤W4-W3≤5um。

more preferably, the first surface side further includes a first support portion surrounding the first recess.

Preferably, the first support portion is a plane, and a thickness T from the second support portion to the first surface side is a thickness from the second support portion to the first support portion.

More preferably, the evaporation mask is made of a nickel-iron alloy.

An evaporation mask assembly comprising any of the above evaporation masks.

A vapor deposition mask device includes the vapor deposition mask assembly.

An organic display device obtained by vapor deposition by the vapor deposition mask device as described above.

The beneficial effects of the utility model reside in that: the utility model discloses stipulate the shape of the second supporting part of coating by vaporization mask in order to improve coating by vaporization mask and coating by vaporization base plate complex adherence, alleviate the fold when opening the net, the shadow when lightening the coating by vaporization simultaneously improves the coating by vaporization precision.

[ description of the drawings ]

FIG. 1 is a schematic structural view of an evaporation mask device according to the present invention;

FIG. 2 is a schematic structural view of an evaporation mask assembly of the present invention;

FIG. 3 is a schematic view of a first side of an evaporation mask corresponding to a green evaporation material;

FIG. 4 is a schematic view of a first side of a vapor deposition mask for a red vapor deposition material;

FIG. 5 is a schematic view of a first side of a vapor deposition mask for a blue vapor deposition material;

FIG. 6 shows an evaporation region formed by combining three evaporation materials of red, green and blue on a glass substrate;

fig. 7 is a schematic view of a vapor deposition mask according to the present invention, showing a first surface of the mask facing upward;

fig. 8 is a schematic view of a vapor deposition mask according to the present invention, showing a second surface of the mask facing upward;

FIG. 9 is a schematic cross-sectional view taken at A-A of FIG. 7;

FIG. 10 is a schematic cross-sectional view taken at B-B of FIG. 7;

FIG. 11 is a schematic flow chart of a method for manufacturing a vapor deposition mask according to the present invention;

fig. 12 is a schematic structural view of the first laminating apparatus of the present invention;

fig. 13 is a schematic structural view of an exposure apparatus according to the present invention;

fig. 14 is a schematic structural view of a developing device of the present invention;

FIG. 15 is a schematic view of a conveying sequence of the metal coil in the manufacturing apparatus according to the present invention;

fig. 16 is a sectional view of the vapor deposition mask structure according to step S20 of the present invention;

fig. 17 is a sectional view of the vapor deposition mask structure according to step S40 of the present invention;

fig. 18 is a sectional view of the vapor deposition mask structure according to step S50 of the present invention;

fig. 19 is a sectional view of the vapor deposition mask structure according to step S60 of the present invention;

fig. 20 is a sectional view of a vapor deposition mask structure according to step S70 of the present invention.

[ detailed description ] embodiments

The present invention will be further described with reference to the accompanying drawings and embodiments.

(vapor deposition mask device 4000)

The present embodiment provides an evaporation mask device 4000, and referring to fig. 1, the evaporation mask device 4000 includes: vapor deposition mask assembly 1000, vapor deposition assembly 2000, and vapor deposition substrate 3000, vapor deposition assembly 2000 heats vapor deposition material 2300 that is vaporized or sublimated and deposits it on vapor deposition substrate 3000 through vapor deposition mask assembly 1000.

More preferably, referring to fig. 2, the vapor deposition mask assembly 1000 includes a vapor deposition mask 100 and a frame 200, a through-hole region 210 is formed in a middle portion of the frame 200, a vapor deposition substrate 3000 is disposed in the through-hole region 210, the vapor deposition mask 100 is fixed to the frame 200 and is closely attached to the vapor deposition substrate 3000, and a vapor deposition material 2300 is attached to the vapor deposition substrate 3000 attached to the vapor deposition mask 100 through the vapor deposition mask 100.

The evaporation substrate 3000 is preferably made of a glass material, and in this embodiment, the evaporation substrate 3000 is specifically electrode glass provided with an electrode.

More preferably, the evaporation assembly 2000 includes a heater 2100, a crucible 2200, and an evaporation material 2300, the evaporation material 2300 is placed in the crucible 2200, and the heater 2100 is used for heating the crucible 2200. Specifically, the evaporation material 2300 is an organic light emitting material. The heater 2100 heats the crucible 2200 to cause the vapor deposition material 2300 to be vaporized or sublimated and rise, and is adhered closely to one surface of the vapor deposition substrate 3000 facing the vapor deposition module 2000 through the vapor deposition mask 100. In this embodiment, the deposition substrate 3000 is electrode glass, and the electrodes of the electrode glass adsorb the evaporated deposition material 2300, thereby improving the deposition effect.

(vapor deposition mask Assembly 1000)

Referring to fig. 2, the vapor deposition mask assembly 1000 includes a frame 200 and a plurality of vapor deposition masks 100, in this embodiment, the number of the vapor deposition masks 100 is 7, and 7 strip-shaped vapor deposition masks 100 are fixed to the frame 200 at intervals.

Preferably, the frame 200 has a rectangular structure with a through region 210 formed therein, the vapor deposition mask 100 is welded to the frame 200 through a mesh, the active region 110 of the vapor deposition mask 100 is disposed in the through region 210 of the frame 200, and the frame 200 supports the vapor deposition mask 100. In this embodiment, the frame 200 is made of a metal material that can be fixed by magnetic attraction.

Preferably, the vapor deposition mask 100 includes an effective region 110, a surrounding region 120 and a fixing region 130, wherein a plurality of effective regions 110 are disposed on one strip-shaped vapor deposition mask 100, in this embodiment, 5 effective regions 110 are arranged on the vapor deposition mask 100 at intervals, the surrounding region 120 surrounds the effective region 110, and mainly plays a role of supporting the effective regions 110, the fixing region 130 is connected with the surrounding region 120, and the fixing region 130 is fixed to the frame 200.

More preferably, referring to fig. 3 and 4, the active area 110 is configured with a plurality of through holes 30, the evaporation material 2300 is tightly adhered to the evaporation substrate 3000 through the through holes 30, the through holes 30 can be designed into a plurality of arbitrary sizes and shapes according to actual requirements, and can be organically arranged and combined to obtain a desired pattern, and the process of adhering the evaporation material 2300 to the evaporation substrate 3000 can be understood as a process of transferring the actually desired pattern to the evaporation substrate 3000 through the active area 110 of the evaporation mask 100.

Preferably, in the process of spreading the vapor deposition mask 100 on the frame 200, an acting force is applied to the frame 200 to generate pre-deformation, and then the vapor deposition mask 100 is welded on the frame 200, so that the alignment position of the vapor deposition mask after spreading the screen is prevented from being displaced after the frame is welded by matching the screen spreading force of the vapor deposition mask and the pre-tension of the frame. Meanwhile, when the vapor deposition mask 100 is subjected to vapor deposition, even if the vapor deposition mask is thermally expanded, positional deviation of the through-holes does not occur as long as the original tension is maintained, and the vapor deposition accuracy is maintained.

Specifically, the pre-deformation force of the pre-deformation treatment and the mesh force with respect to the evaporation mask 100 were obtained by simulation. In the case where the vapor deposition mask 100 is stretched without applying a pretension, the vapor deposition mask 100 itself has a force to return to its original shape, and the frame 200 itself is distorted, and as a result, the position of the dog-ear alignment during welding is also deviated. Meanwhile, if the vapor deposition mask 100 is excessively bent by its own weight or excessively welded, the product may be misaligned when the vapor deposition substrate 3000 and the vapor deposition mask 100 are bonded to each other by a magnet. Therefore, the vapor deposition mask 100 has an optimum amount of curvature, and the shrinkage factor of the vapor deposition mask can be determined by calculating the stretching force from the optimum amount of curvature, calculating the elongation value of the vapor deposition mask from the stretching force, and therefore, the vapor deposition mask 100 is stretched, aligned, and welded while applying a tensile force to the frame 200. At this time, a pretension is given to the frames 200 to prevent them from extending and contracting from a state where they are aligned with the aligned position of the expanded vapor deposition mask 100. The pretension is calculated by simulation based on the tension of the vapor deposition mask 100, that is, the tension applied to each vapor deposition mask 100 is equal to the pretension applied to the frame 200. In this embodiment, many evaporation plating masks 100 open the net in proper order on the frame, because the pretension when following evaporation plating mask opens the net can slowly weaken after the net is opened to each evaporation plating mask, consequently the method of weakening pretension is difficult to obtain through once simulation is accurate, need open the net stage to each evaporation plating mask and just carry out the actual measurement to frame displacement, through it to carrying out the secondary simulation to pretension weakening value. More specifically, in the present embodiment, two ends of each of the vapor deposition masks 100 and the frames 200 are respectively bonded by being pressed into a mesh by 3 pressing portions existing on the long side of the frame 200, and therefore, it is necessary to perform a pre-tension variation analysis of the 3 pressing portions in the simulation, and it is understood that, depending on the actual production, other numbers of the vapor deposition masks 100 and the frames 200 may be pressed into a mesh by portions.

It can be understood that, regardless of whether or not the frame 200 is subjected to the preliminary deformation treatment, the vapor deposition mask 100 meshes exist during the frame 200, and the positions of the through holes 30 of the vapor deposition mask 100 on the frame 200 after actually meshing are deviated from the positions of the through holes 30 of the vapor deposition mask 100 on the frame 200 in theory, and the positions of the through holes 30 of the vapor deposition mask 100 on the frame 200 in this theory are regarded as positions with a predetermined positional accuracy, and in this embodiment, the positions of the through holes 30 of the vapor deposition mask 100 on the frame 200 simulated by calculating and simulating the preliminary deformation amount and the lock position, and the deviation accuracy of the positions of the through holes 30 of the vapor deposition mask 100 on the frame 200 from the positions with the predetermined positional accuracy is defined as P, and the relational expression is satisfied: p is more than or equal to-3 um and less than or equal to 3 um. When the accuracy is satisfied, it is possible to prevent the influence on the production efficiency due to excessive pursuit of the positional accuracy while ensuring high vapor deposition accuracy of the vapor deposition mask 100 in the vapor deposition process.

(vapor deposition mask 100)

Referring to fig. 2, the vapor deposition mask 100 includes an effective region 110, a peripheral region 120, and a fixed region 130, wherein a plurality of effective regions 110 are disposed on a strip-shaped vapor deposition mask 100, the peripheral region 120 surrounds the effective regions 110, and the fixed region 130 is connected to the peripheral region 120. The vapor deposition mask 100 is formed by etching a metal coil 40, in this embodiment, the metal coil 40 is a nickel-iron alloy, also called invar (invar), which is 36% nickel characterized by a thermal expansion coefficient of about 1 ppm/DEG C.

More preferably, referring to fig. 7 and 8, the effective region 110 includes a first surface side 10, a second surface side 20, and a through hole 30, the first surface side 10 constituting a side of the vapor deposition mask 100 facing the vapor deposition substrate 3000, the second surface side 20 constituting a side of the vapor deposition mask 100 opposite to the first surface side 10, the second surface side 20 facing the vapor deposition module 2000 in the present embodiment, and the through hole 30 penetrating the first surface side 10 and the second surface side 20 in a thickness direction of the vapor deposition mask 100.

Specifically, the number of the through holes 30 is plural, the plural through holes 30 are arranged in the effective region 110 at a constant interval according to actual needs, and a desired pattern is obtained by depositing the vapor deposition material 2300 on the vapor deposition substrate 3000 according to the size and shape of the through holes 30 and the organic arrangement and combination among the through holes 30.

Specifically, referring to fig. 3 to 6, each of the effective areas 110 has a substantially quadrangular shape in the drawing, and one effective area 110 corresponds to one organic display device. The effective regions 110 corresponding to the three different vapor deposition masks 100a, 100b, and 100c shown in fig. 3 to 5 may be formed in the same shape and size and in the corresponding positions, so as to form high-pixel vapor deposition regions by depositing organic vapor deposition materials of different colors on the glass substrate 3000 as shown in fig. 6.

Specifically, referring to fig. 7, the first surface side 10 includes a first concave portion 11 and a first support portion 12, the first concave portion 11 surrounds the through hole 30, the first support portion 12 is a flat surface, the first support portion 12 surrounds the first concave portion 11, and the first support portion 12 is configured to be attached to the vapor deposition substrate 3000.

Specifically, referring to fig. 8, the second face side 20 includes a second concave portion 21 and a second support portion 22, the second concave portion 21 surrounds the through hole 30, and the number of the second concave portions 21 is plural. The second supporting portion 22 is a plane, the thickness of the second supporting portion 22 to the first surface side 10 is equal to the thickness T of the metal coil material 40, the second supporting portion 22 is formed between the plurality of second concave portions 21, and the projection of the second supporting portion 22 on the first surface side 10 is located in the first supporting portion 12, in this embodiment, 4 second concave portions 21 surround and form 1 second supporting portion 22, the second supporting portion 22 extends in a direction away from the first surface side 10, and the thickness of the first supporting portion 12 of the second supporting portion 22 to the first surface side 10 is equal to the thickness of the metal coil material 40 for etching and forming the evaporation mask 100 plate.

Specifically, the vapor deposition mask 100 is formed by etching the metal coil 40, and the thickness T of the metal coil 40 satisfies the following relationship: t is more than or equal to 10um and less than or equal to 40 um.

Specifically, referring to fig. 9 and 10, the first recess 11 includes a first opening 111 and a first etched surface 112, the first opening 111 is located on the first surface side 10, and the first etched surface 112 is an arc surface concavely formed from the first opening 111 to the second surface side 20. The first opening 111 is connected to the first support portion 12, the first etching surface 112 extends from the first opening 111 to the through hole 30 in a bending manner, and the first etching surface 112 connects the first opening 111 and the through hole 30.

Specifically, referring to fig. 9 and 10, the second recess 21 includes a second opening 211 and a second etching surface 212, the second opening 211 is connected to the second support 22, the second etching surface 212 extends from the second opening 211 to the through hole 30, and the second etching surface 212 connects the second opening 211 to the through hole 30.

More preferably, referring to fig. 10, the second etching surfaces 212 connect the second opening 211 and the through hole 30, and two adjacent second etching surfaces 212 intersect to form a protrusion 213, and the protrusion 213 protrudes in a direction away from the first surface side 10;

preferably, the second support part 22 includes a plurality of side parts 221 and a plurality of tip parts 222, the tip parts 222 are located between two adjacent side parts 221, the side parts 221 are recessed inward, and the tip parts 222 point to the protrusion parts 213 and are connected with the protrusion parts 213, so that the vapor deposition mask 100 and the vapor deposition substrate 3000 have high adhesion in cooperation, wrinkles in screen stretching are reduced, shadows in vapor deposition are reduced, and vapor deposition accuracy is improved.

More preferably, the side portions are disposed in pairs, the tip portions are disposed in pairs, a width between the opposite side portions is defined as W3, a distance between the opposite tip portions is defined as W4, and the relationship:

2um≤W3≤10um；

1um≤W4-W3≤5um；

when the relational expression is satisfied, the vapor deposition mask and the vapor deposition substrate are matched to have high adherence, so that wrinkles during screen stretching are reduced, shadows during vapor deposition are reduced, and vapor deposition accuracy is improved.

(method for manufacturing vapor deposition mask 100)

The present embodiment provides a method for manufacturing an evaporation mask 100, for manufacturing the evaporation mask 100, with reference to fig. 11 to 20, the method including:

step S10: a metal coil 40 is provided.

Specifically, the metal coil 40 includes an upper surface 41 and a lower surface 42, the upper surface 41 is opposite to the lower surface 42, the thickness T of the metal coil 40 is the thickness from the upper surface 41 to the lower surface 42, and the relationship: t is more than or equal to 10um and less than or equal to 40 um;

more preferably, metal coil 40 is used for etching to form evaporation mask 100, in this embodiment, metal coil 40 is embodied as a nickel-iron alloy, also known as invar (invar), which is a 36% nickel-containing iron alloy characterized by a coefficient of thermal expansion of about 1 ppm/deg.c.

Preferably, the upper surface 41 and the lower surface 42 require conventional acid cleaning and inspection prior to etching of the metal coil 40. Specifically, the upper surface 41 and the lower surface 42 of the metal coil 40 are sprayed with acid and alkali, and the metal coil 40 can be released by the winding machine 61 to slowly pass through the cleaning device, and then be wound after being cleaned so as to facilitate the subsequent process. This removes foreign matter on the surface of the metal coil 40, removes metal mesons on the metal surface 40, and prevents defects in the hole shape.

Step S20: a dry film resist 50 is vacuum bonded to the upper surface 41 and the lower surface 42 of the metal coil 40, respectively.

Specifically, the dry film photoresist 50 includes a first dry film photoresist 51 and a second dry film photoresist 52, the first dry film photoresist 51 is attached to the upper surface 41 of the metal coil 40, and the second dry film photoresist 52 is attached to the lower surface 42 of the metal coil 40.

Specifically, the dry film photoresist 50 is attached to the upper surface 41 and the lower surface 42 of the metal coil 40 by hot pressing. Before the hot pressing laminating, metal coil 40 rolls up in rolling machine 61, metal coil 40 slowly passes through preheating device 623 through rolling machine 61 release, and preheating device 623 is right metal coil 40's upper surface 41 and lower surface 42 preheat, and metal coil 40 after preheating slowly laminates with dry film photoresistance 50 mutually through hot pressing gyro wheel 625. Before hot-pressing laminating, the dry film photoresistor 50 is rolled up in another rolling machine 61, the dry film photoresistor 50 of this embodiment is still covered at least and is used for bearing and protecting the substrate layer 53 of dry film photoresistor 50, the dry film photoresistor 50 slowly releases and peels off the substrate layer 53 from the rolling machine 61, the dry film photoresistor 50 of peeling off the substrate layer 53 is laminated with the metal coiled material 40 through hot-pressing roller 625, the metal coiled material 40 that is laminated with the dry film photoresistor 50 is rolled up in the rolling machine 61 so as to be convenient for transfer to the next process.

Preferably, the process of thermally pressing the dry film photoresist 50 to the metal coil 40 is performed in a vacuum environment to improve the adhesion between the dry film photoresist 50 and the upper surface 41 and the lower surface 42 of the metal coil 40.

Step S30: the dry film photoresist 50 is patterned by exposure and development.

Specifically, the dry film photoresist 50 is used for exposure and development to form a patterned dry film photoresist 50, and the patterned dry film photoresist 50 is used as a mask to transfer a designed pattern onto the metal coil 40 for etching to form the size and shape of the first surface side 10, the second surface side 20 and the through hole 30.

Specifically, exposure development is performed in the exposure apparatus 63 and the development apparatus 64, respectively.

Specifically, the exposure apparatus 63 at least includes several winding machines 61, several conveying rollers 632, and an exposure machine 633. In this embodiment, the exposure machine 633 is a vertical exposure machine 633, and the metal coil 40 attached with the dry film photoresist 50 is wound in the winding machine 61. The metal coil 40 is released from the winder 61 and is driven by a plurality of conveying rollers 632 to pass through the exposure machine 633 from the top down.

Specifically, the exposure machine 633 at least includes an exposure lamp 6331, an exposure machine frame 6332, a vacuum seal 6333, a first exposure mask 6334 and a second exposure mask 6335, the exposure machine frames 6332 are provided in pairs, the first exposure mask 6334 and the second exposure mask 6335 are respectively provided in the exposure machine frames 6332, and the first exposure mask 6334 and the second exposure mask 6335 are respectively located on both sides of the metal coil 40. Specifically, the first exposure mask 6334 is located on one side of the metal coil 40 attached with the first dry film photoresist 51, the second mask is located on one side of the metal coil 40 attached with the second dry film photoresist 52, and the first exposure mask 6334 and the second exposure mask 6335 are opposite and spaced.

Before exposure, the first exposure mask 6334 and the second exposure mask 6335 are aligned. The first exposure mask 6334 and the second exposure mask 6335 are positionally aligned with an alignment accuracy of 2um or less.

At the time of exposure, the conveyance tension of the metal plate is released, and a vacuum environment is formed between the first exposure mask 6334 and the second exposure mask 6335 by the vacuum seal 6333, so that the metal coil 40 is exposed in the vacuum environment. In this case, with respect to the vapor deposition mask 100, the first exposure mask 6334 faces the first surface side 10 of the vapor deposition mask 100, the second exposure mask 6335 faces the second surface side 20 of the vapor deposition mask 100, and the ambient temperature t of the first exposure mask 6334 and the second exposure mask 6335 is controlled to be: t is more than or equal to minus 2 ℃ and less than or equal to 2 ℃.

Specifically, in this embodiment, the exposure mask is a glass substrate patterned by forming chrome, the exposure mask is one of soda lime glass or quartz glass, and in this embodiment, the exposure mask is soda lime glass, and the chrome is specifically a diaphragm disposed on the glass substrate and an oxide diaphragm disposed on the diaphragm. After exposure, the metal coil 40 is wound in a winder 61. Thus, the tension applied to the metal coil can be minimized, the temperature variation in the pattern can be minimized, the pattern size variation in the glass pattern can be minimized, and the position deviation defect of the hole can be prevented.

Specifically, the developing device 64 employs a known developing device 64, and the exposed metal coil 40 is patterned in the developing device 64 to transfer the designed pattern to the dry film resist 50. Specifically, the patterned first dry film resist 51 is used to etch the upper surface 41 of the metal coil 40 to form the first surface side 10 of the vapor deposition mask 100, and the patterned second dry film resist 52 is used to etch the lower surface 42 of the metal coil 40 to form the second surface side 20 and the through holes 30 of the vapor deposition mask 100.

Step S40: etching the upper surface 41 by the patterned dry film resist 50 to form a first face side 10;

specifically, the dry film photoresist 50 includes a first dry film photoresist 51 and a second dry film photoresist 52, and in this step, the upper surface 41 is etched by the patterned first dry film photoresist 51 to form the first surface side 10. Specifically, the first dry film resist 51 is patterned to serve as an etching mask, and a designed pattern is transferred to the upper surface 41 of the metal coil 40 to form the designed first surface side 10.

Specifically, the first surface side 10 at least includes a plurality of first recesses 11, the first recesses 11 include first openings 111 and first etching surfaces 112, the first openings 111 are located on the upper surface 41, the first openings 111 are flush with the upper surface 41, and the first etching surfaces 112 are curved surfaces formed by recessing from the first openings 111 toward the lower surface 42. It can be understood that the first opening 111 is an opening profile of the first recess 11 formed on the upper surface 41, and the first etching surface 112 is a curved surface formed during the process of recessing the first recess 11 toward the lower surface 42.

Specifically, before step S40 is performed, an etching condition teaching process is performed to obtain the etching conditions at the time of actual etching.

Specifically, in order to obtain the etching conditions during actual etching, the guide plate is first passed through an etching device, in this embodiment, the guide plate is made of a PET material (polyethylene terephthalate) with a thickness of 0.3mm, and an etching surface for first etching is adhered to the lower surface of the guide plate.

Specifically, after the etching condition extraction is finished, the metal coil 40 actually used for etching is set in the etching apparatus, and the guide plate is connected to the metal coil 40 actually used for etching. In this embodiment, the upper surface 41 is faced downward, the upper surface 41 is etched, and the etching solution etches the upper surface 41 through the patterned first dry film resist 51 to form the first surface side 10. In this embodiment, the etching degree is controlled by limiting the structure size of the first opening 111, and the specific process parameters may be specifically set according to the actual situation, and the finally formed structure size of the first opening 111 is used as the standard debugging process parameters. And after etching, fully cleaning with pure water, drying and rolling. This enables accurate control of the hole size in mass production.

Step S50: vacuum bonding a resin 70 to the first surface side 10 to fill the first recess 11;

specifically, the first groove is filled with a resin 70 in a vacuum atmosphere, and in the present embodiment, the resin 70 covers the first surface side 10 in a bonded manner and fills the first recess 11 of the first surface side 10. The vacuum environment is used to improve the filling tightness between the resin 70 and the first groove, so as to prevent the etching liquid from entering the first recess 11 through the through hole 30. In this embodiment, the resin 70 is a thermoplastic acid-resistant resin 70.

Step S60: etching the lower surface 42 through the patterned dry film photoresist 50 to form a second face side 20;

specifically, in this step, the lower surface 42 is etched through the patterned second dry film resist 52 to form the second side 20. Specifically, the second dry film resist 52 is used as a mask for etching, and the designed pattern is transferred to the lower surface 42 of the metal coil 40 to form the designed second surface side 20.

Specifically, the second surface side 20 at least includes a plurality of second recesses 21, the second recesses 21 are recessed toward the upper surface 41, the second recesses 21 penetrate the first recesses 11 to form through holes 30, and the first etching surface 112 connects the first openings 111 and the through holes 30; it can be understood that the first recesses 11 correspond to the second recesses 21 one by one, and the through holes 30 are formed therethrough.

Specifically, in the present embodiment, the lower surface 42 is faced downward, the lower surface 42 is etched, and the etching liquid etches the lower surface 42 through the patterned second dry film resist 52 to form the second side 20. In this embodiment, the etching degree is controlled by limiting the structural size of the through hole 30, and the specific process parameters can be specifically set according to the actual situation, and the process parameters are adjusted by using the structural size of the finally formed through hole 30 as the standard. And after etching, fully cleaning with pure water, drying and rolling.

Step S70: stripping the resin 70 and the dry film photoresist 50;

the metal coil 40 is released into a peeling apparatus, and the resin 70, the first dry film resist 51 and the second dry film resist 52 are peeled off and sufficiently washed with pure water. In this embodiment, the peeling treatment is carried out by one or a combination of both of an inorganic base and an organic base.

Step S80: after the stripping is completed, the metal coil 40 is cut to form a plurality of metal sheets.

Specifically, the metal coil 40 is cut in a direction perpendicular to the winding direction of the metal coil 40 to form a plurality of sheet-like metal sheets.

Step S90: the metal sheet is cut out to form a plurality of strip-shaped evaporation masks 100.

Specifically, the metal sheet is cut into a strip-shaped vapor deposition mask 100 according to the designed vapor deposition mask 100.

Preferably, after the strip-shaped vapor deposition mask 100 is obtained, a corresponding inspection process is performed as needed.

Specifically, the automatic appearance inspection step of automatically inspecting all the through holes 30 in the vapor deposition mask 100 cut out by separation by comparison with the through holes 30 on the outer periphery of the through hole to be inspected; comparing the average value of the outer peripheral through holes 30 with the target through holes 30 by image processing; the comparison check is performed by comparing the area of the through-hole, and the shortest dimension and the longest dimension

Specifically, the inspection step is checked, and the defective through hole 30 is retrieved to perform the defect determination.

Specifically, in the appearance sorting step, a good vapor deposition mask 100 and a bad vapor deposition mask 100 are sorted out according to actual requirements.

Specifically, in the dimension inspection step, the qualified vapor deposition mask 100 is placed, and the dimension parameter of the vapor deposition mask 100 is measured by the vapor deposition mask measuring device measuring means.

Specifically, in the size sorting step, a good vapor deposition mask 100 and a bad vapor deposition mask 100 are sorted out according to actual requirements.

Specifically, in the visual appearance step, the acceptable vapor deposition mask 100 is placed, and the vapor deposition mask visual inspection stage is used to inspect the vapor deposition mask 100 for foreign matter deformation and the like.

Specifically, the appearance sorting step is visually checked to sort out the acceptable vapor deposition mask 100 and the defective vapor deposition mask 100 according to actual requirements.

Specifically, in the packaging step, the vapor deposition masks 100 that have passed through the above-described steps are placed in a predetermined number in a vacuum package.

In this embodiment, the key parameters involved in the vapor deposition mask 100 plate and the process are as follows:

where T is the thickness of the metal coil, W3 is the width between the opposing edges, and W4 is the distance between the opposing tips.

Parameter(s)	Size of	Unit of
			T	10	um
W3	2	um
			W4	4	um

As another example, the following parameters may also be employed:

parameter(s)	Size of	Unit of
			T	25	um
W3	5	um
			W4	8	um

As yet another example, the following parameters may also be employed:

parameter(s)	Size of	Unit of
			T	40	um
W3
		10	um
W4				15	um

(vapor deposition mask manufacturing apparatus 60)

In the present embodiment, there is provided a vapor deposition mask manufacturing apparatus 60 for realizing the above-described method for manufacturing a vapor deposition mask 100, with reference to fig. 12 to 20, the manufacturing apparatus 60 including: the metal coil 40 is conveyed by the winding machine 61 to sequentially pass through the first attaching device 62, the exposure device 63, the developing device 63, the first cutting device 691 and the second cutting device 692, and the metal coil 40 is conveyed by the winding machine 61 to sequentially pass through the first attaching device 62, the exposure device 63, the developing device 64, the first etching device 65, the second attaching device 66, the second etching device 67, the peeling device 68, the first cutting device 691 and the second cutting device 692.

More preferably, the winder 61 is used to wind or release the metal coil 40;

specifically, the number of the winding machines 61 is several, and the winding machines 61 are applied to a first attaching device 62, an exposing device 63, a developing device 64, a first etching device 65, a second attaching device 66, a second etching device 67, a peeling device 68, a first cutting device 691 and a second cutting device 692, the winding machines 61 are used in pairs, one winding machine 61 releases the metal coil 40 wound thereon, the other winding machine 61 winds the metal coil 40 thereon, so that the metal coil 40 slowly passes through the corresponding processing device, and the winding machines 61 can be flexibly used in cooperation with a conveying roller 632, a tensioning wheel and the like according to actual requirements.

Preferably, the first attaching device 62 is used for vacuum attaching the dry film photoresist 50 on the upper surface 41 and the lower surface 42 of the metal coil 40.

Specifically, the first attaching device 62 includes a vacuum cavity 621, a first winding machine 622, a preheating device 623, a second winding machine 624, and a hot pressing roller 625. The first winding machine 622, the preheating device 623, the second winding machine 624 and the hot pressing roller 625 are arranged in the vacuum cavity 621, and the first winding machine 622 is arranged in pairs and used for conveying the metal coil 40 to pass through the preheating device 623 and the hot pressing roller 625 slowly in sequence. The second winder 624 is used in cooperation with the first winder 622 and the hot press roller 625, and is used for conveying the dry film photoresist 50 to be attached to the upper surface 41 and the lower surface 42 of the metal coil 40 at the position of the hot press roller 625. In this embodiment, the dry film photoresist 50 is provided with a substrate layer 53, the substrate layer 53 is peeled off by the second winder 624 before the dry film photoresist 50 is attached to the metal coil 40, and the peeling process may adopt a known peeling method.

Specifically, before the hot pressing laminating, metal coil 40 rolls up in first rolling machine 622, metal coil 40 slowly passes through preheating device 623 through first rolling machine 622 release, and preheating device 623 is right metal coil 40's upper surface 41 and lower surface 42 preheat, and metal coil 40 after preheating slowly laminates with dry film photoresistance 50 through hot pressing gyro wheel 625. Before hot-pressing and attaching, the dry film photoresist 50 is wound in a second winding machine 624, the dry film photoresist 50 is slowly released from the second winding machine 624 and peels off the substrate layer 53, the dry film photoresist 50 which peels off the substrate layer 53 is attached to the metal coil 40 through a hot-pressing roller 625, and the metal coil 40 to which the dry film photoresist 50 is attached is wound in a first winding machine 622 so as to be transferred to the next process.

Specifically, the vacuum cavity 621 forms a vacuum environment, and the dry film photoresist 50 is thermally pressed and attached to the metal coil 40 in the vacuum environment, so that the adhesion tightness between the dry film photoresist 50 and the upper surface 41 and the lower surface 42 of the metal coil 40 is improved.

More preferably, the exposure apparatus 63 is used to expose the dry film resist 50. The exposure apparatus 63 includes a third winder 631, a conveying roller 632, and an exposure machine 633. The third winder 631 is provided in pairs for conveying the metal coil 40 to pass slowly through the exposure machine 633, and the conveying roller 632 cooperates with the third winder 631 to convey the metal coil 40. In this embodiment, the exposure machine 633 is a vertical exposure machine 633, and the metal coil 40 firstly releases tension when passing through the exposure machine 633.

Specifically, the exposure machine 633 includes an exposure lamp 6331, an exposure machine frame 6332, a vacuum seal 6333, a first exposure mask 6334, and a second exposure mask 6335, the exposure machine frames 6332 are provided in pairs, the first exposure mask 6334 and the second exposure mask 6335 are respectively provided in the exposure machine frames 6332, and the first exposure mask 6334 and the second exposure mask 6335 are respectively located on both sides of the metal coil 40. Specifically, the first exposure mask 6334 is located on one side of the metal coil 40 attached with the first dry film photoresist 51, the second mask is located on one side of the metal coil 40 attached with the second dry film photoresist 52, and the first exposure mask 6334 and the second exposure mask 6335 are opposite and spaced.

Specifically, the developing device 64 is used for developing the dry film photoresist 50 to realize patterning, in this embodiment, the developing device 64 includes a developing device 641 and a fourth winder 642, and the fourth winder 642 is arranged in pairs and is used for conveying the metal coil 40 to slowly pass through the developing device 641. The developing device 641 employs a known device for realizing development.

Specifically, the first etching device 65 etches the upper surface 41 through the patterned dry film resist 50 to form the first surface side 10.

Specifically, the first surface side 10 includes at least a plurality of first recesses 11, the first recesses 11 include first openings 111 and first etching surfaces 112, the first openings 111 are flush with the upper surface 41, and the first etching surfaces 112 are formed by recessing from the first openings 111 toward the lower surface 42. In this embodiment, the first etching surface 112 is a curved surface.

Specifically, the second bonding apparatus 66 is used for vacuum bonding a resin 70 on the first surface side 10 to fill the first recess 11.

Specifically, the second etching device 67 etches the lower surface 42 through the patterned dry film photoresist 50 to form the second face side 20.

Specifically, the second surface side 20 at least includes a plurality of second recesses 21, the second recesses 21 are recessed toward the upper surface 41, the second recesses 21 penetrate the first recesses 11 to form through holes 30, and the first etching surface 112 connects the first openings 111 and the through holes 30;

specifically, the stripping device 68 is used for stripping the resin 70 and the dry film photoresist 50, in this embodiment, the stripping device 68 implements stripping treatment by one or a combination of inorganic base or organic base;

in particular, the first cutting device 691 is intended for cutting the metal coil 40 into a number of metal sheets.

Specifically, the second cutting apparatus 692 is used to cut the metal sheet to form several strip-shaped evaporation masks 100.

(organic display device)

This embodiment provides an organic display device 5000, and the organic display device 5000 is manufactured by performing vapor deposition by the vapor deposition mask device 4000.

Therefore, the utility model discloses stipulate the shape of the second supporting part of coating by vaporization mask in order to improve coating by vaporization mask and coating by vaporization base plate complex adherence, alleviateed the fold when opening the net, alleviateed the shadow when coating by vaporization simultaneously, improved the coating by vaporization precision.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims (9)

1. An evaporation mask used for evaporation of an evaporation material onto an evaporation substrate, the evaporation mask comprising:

a first surface side constituting a side of the vapor deposition mask facing the vapor deposition substrate;

a second surface side which constitutes a side of the vapor deposition mask opposite to the first surface side; and

a through hole penetrating the first surface side and the second surface side,

the first surface side at least comprises a plurality of first concave parts, the first concave parts surround the through hole, the second surface side comprises a plurality of second concave parts and a plurality of second supporting parts, the second concave parts and the first concave parts are communicated to form the through hole, the second supporting parts are planes, and the thickness T from the second supporting parts to the first surface side satisfies the relation: t is more than or equal to 10um and less than or equal to 40 um; the second concave part comprises a second opening and second etching surfaces, the second opening is connected with the second supporting part, the second etching surfaces are connected with the second opening and the through hole, two adjacent second etching surfaces are intersected to form a protruding part, and the protruding part protrudes along the direction departing from the side of the first surface; the second supporting part comprises a plurality of edge parts and a plurality of tip parts, the tip parts are located between two adjacent edge parts, the edge parts are inwards sunken, and the tip parts point to the protruding parts and are connected with the protruding parts.

2. The vapor deposition mask according to claim 1, wherein the side portions are provided in pairs, a width between two opposing side portions is defined as W3, and a relation:

2um≤W3≤10um。

3. the vapor deposition mask according to claim 2, wherein the tip portions are arranged in pairs, a distance between two opposite tip portions is defined as W4, and the relationship:

1um≤W4-W3≤5um。

4. the vapor deposition mask according to claim 3, wherein the first surface side further comprises a first support portion that surrounds the first concave portion.

5. The vapor deposition mask according to claim 4, wherein the first support section is a flat surface, and a thickness T from the second support section to the first surface side is a thickness from the second support section to the first support section.

6. The vapor deposition mask of claim 1, wherein the vapor deposition mask is made of a nickel-iron alloy.

7. An evaporation mask assembly comprising the evaporation mask according to any one of claims 1 to 6.

8. An evaporation mask device comprising the evaporation mask assembly according to claim 7.

9. An organic display device obtained by vapor deposition using the vapor deposition mask device according to claim 8.

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