CN213863726U - Integrated circuit cleaner storage device - Google Patents

Abstract

The utility model discloses an integrated circuit cleaner storage device, the on-line screen storage device comprises a base, the jar body is installed to the upper end of base, the upper end of the jar body is fixed with the connecting piece, the connecting piece link up the setting, the apron is installed to the upper end of connecting piece, be equipped with the equipment storehouse in the apron, be equipped with the solid mechanism of card in the equipment storehouse, the solid mechanism of card is last to be equipped with four fixture blocks, the second opening has all been seted up all around to the lower extreme of apron, and four fixture blocks slide respectively and cup joint in four second openings, the draw-in groove has been seted up to inside a week of connecting piece, and the outer end of four fixture blocks all sets up in the draw-in groove, be equipped with convenient moving mechanism on the base. The utility model discloses can be convenient and swift from jar body dismouting, the effectual loading efficiency and the convenience that increases the integrated circuit cleaner, simultaneously can effectual solution storage device's transport problem, make storage device more convenient when transport and use.

Description

Integrated circuit cleaner storage device

Technical Field

The utility model relates to an integrated circuit cleaner technical field especially relates to an integrated circuit cleaner storage device.

Background

In the large scale integrated circuit manufacturing process, it is necessary to open dense contact holes on the substrate insulating medium, and connect and integrate the electrode of the transistor and the next layer of metal connecting wire by means of the contact hole forming metal wire, the photosensitive material coated on the insulating medium forms the forms of contact hole and wire groove after exposure and development, the insulating medium uncovered by the photosensitive material is selectively removed by plasma etching, thereby forming the metal wire contact hole and wire groove, the photosensitive material left on the substrate forms gas compound after ashing step and gradually shrinks into solid residue, the residue of photosensitive material and other impurities left on the substrate need to be cleaned by the cleaning agent specially used for cleaning the integrated circuit.

The integrated circuit cleaner is after finishing production, need to save through storage device, when carrying the integrated circuit cleaner toward storage device in, need open the apron and carry, and traditional storage device's apron is because sealed requirement is higher, so all carry out fixed mounting through the bolt, thereby lead to opening and closing of apron all comparatively troublesome, influence its loading efficiency, the storage device who is equipped with the cleaner simultaneously is because weight is heavier, comparatively difficult when the transport, be not convenient for remove, operating personnel's intensity of labour has been increased, for this reason, we have provided an integrated circuit cleaner storage device and have solved above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a storage device for cleaning agent of integrated circuit.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides an integrated circuit cleaner storage device, includes the base, the jar body is installed to the upper end of base, the upper end of the jar body is fixed with the connecting piece, the connecting piece link up the setting, the apron is installed to the upper end of connecting piece, be equipped with the equipment storehouse in the apron, be equipped with solid mechanism of card in the equipment storehouse, be equipped with four fixture blocks in the solid mechanism of card, the second opening has all been seted up all around to the lower extreme of apron, and four fixture blocks slide respectively and cup joint in four second openings, the draw-in groove has been seted up to inside a week of connecting piece, and the outer end of four fixture blocks all sets up in the draw-in groove, be equipped with convenient moving mechanism on the base, be equipped with four second pulleys on the convenient moving mechanism, four second pulleys set up the below four corners at the base respectively.

Preferably, the clamping mechanism comprises a rotary table arranged at the lower end in the equipment bin, first openings are formed in the periphery of the upper end of the rotary table, fixed shafts are arranged in the four first openings, the bottom ends of the four fixed shafts are respectively fixed on the opposite sides of the upper ends of the four clamping blocks, a transverse plate is arranged above the rotary disc, the transverse plate is fixed in the equipment bin, a gear is arranged in the middle of the upper end of the transverse plate, a rotating shaft is fixed in the middle of the lower end of the gear, the rotating shaft is rotatably sleeved on the transverse plate, the bottom end of the rotating shaft is fixedly connected in the middle of the upper end of the rotating disc, a first slide way is arranged on the outer side of the gear, the first slide way is fixed at the upper end of the transverse plate, a first air cylinder is detachably connected to the left side of the upper end of the transverse plate, the telescopic end of the first cylinder is fixedly connected with a spur rack, the spur rack is meshed with the gear, and the spur rack is sleeved on the first slide in a sliding mode.

Preferably, convenient moving mechanism includes four second cylinders of difference fixed mounting in the inside upper end four corners of base, and the flexible end of four second cylinders is fixed with the bottom plate jointly, the left and right sides of bottom plate all rotates and is connected with two first pulleys, the inside four corners of base all is fixed with the second slide, and four first pulleys set up respectively in four second slides, the lower extreme of base link up the setting, and four second pulleys set up the lower extreme four corners at the bottom plate respectively.

Preferably, the outside of the jar body is provided with the control window, be provided with the scale on the control window, the lower extreme of the jar body is provided with the outlet pipe.

Preferably, the first cylinder is fixedly sleeved with a fixing piece, four corners of the upper end of the fixing piece are provided with screws, the upper end of the transverse plate is provided with four threaded blind holes, and the bottom ends of the four screws respectively penetrate through the four corners of the fixing piece and are in threaded sleeve joint in the four corresponding threaded blind holes.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through the matching of the clamping mechanism and the connecting piece, the integrated circuit cleaning agent can be more conveniently disassembled and assembled when the integrated circuit cleaning agent needs to be conveyed into the tank body, and the trouble of fixing the cover plate by a bolt is avoided, so that the cover plate can be more conveniently assembled and disassembled from the tank body, the convenience of the cover plate is effectively improved, and the loading efficiency of the integrated circuit cleaning agent can be effectively improved;

2. the four second pulleys can be lowered to support the base through the convenient moving mechanism when the storage device is carried, so that the storage device can be carried more conveniently, and the storage device is more convenient to carry and use;

to sum up, the utility model discloses can be convenient and swift with the apron from jar body dismouting, effectual loading efficiency and the convenience that increases the integrated circuit cleaner, simultaneously can effectual solution storage device's transport problem, make storage device more convenient when transport and use.

Drawings

FIG. 1 is a diagram of a connection structure of a detergent storage device for an integrated circuit according to the present invention;

FIG. 2 is a schematic view of an internal connection structure of the integrated circuit cleaning agent storage device according to the present invention;

FIG. 3 is a schematic diagram of a portable moving mechanism of the cleaning agent storage device for an integrated circuit according to the present invention;

FIG. 4 is a top view of the interior of a cover plate of an integrated circuit cleaning agent storage device according to the present invention;

FIG. 5 is a diagram of a turntable structure of an IC cleaning agent storage device according to the present invention;

FIG. 6 is a schematic diagram of a connector structure of an IC cleaning agent storage device according to the present invention;

FIG. 7 is a structural diagram of a fastening mechanism of a cleaning agent storage device for an integrated circuit according to the present invention;

FIG. 8 is a structural view of the junction between the fixing member and the transverse plate of the cleaning agent storage device for an integrated circuit according to the present invention;

in the figure: the device comprises a base 1, a tank body 2, a connecting piece 3, a cover plate 4, a device bin 5, a transverse plate 6, a first air cylinder 7, a spur rack 8, a first slide way 9, a gear 10, a rotating shaft 11, a rotating disc 12, a first opening 13, a fixed shaft 14, a fixture block 15, a second opening 16, a clamping groove 17, a fixing piece 18, a screw 19, a threaded blind hole 20, a monitoring window 21, a scale 22, a water outlet pipe 23, a second air cylinder 24, a bottom plate 25, a first pulley 26, a second slide way 27 and a second pulley 28.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-8, an integrated circuit cleaner storage device, including base 1, a jar body 2 is installed to the upper end of base 1, can drive jar body 2 through the removal of base 1 with fixed and remove or fix, jar body 2 is the equipment that is used for storing the integrated circuit cleaner, the outside of jar body 2 is provided with monitoring window 21, can watch the inside condition of jar body 2 through monitoring window 21, be provided with scale 22 on the monitoring window 21, can more accurate watch the integrated circuit cleaner in jar body 2 how much through scale 22, be used for measuring the quantity of the integrated circuit cleaner in jar body 2, the lower extreme of jar body 2 is provided with outlet pipe 23, can carry the next equipment with the integrated circuit cleaner in jar body 2 in through outlet pipe 23, play the effect of carrying.

The utility model discloses in, the upper end of jar body 2 is fixed with connecting piece 3, connecting piece 3 link up the setting, apron 4 is installed to the upper end of connecting piece 3, connecting piece 3 and jar body 2 integrated into one piece, through apron 4 with connecting piece 3 be connected, can realize the effect of apron 4 fixed mounting on jar body 2, be equipped with equipment storehouse 5 in the apron 4, be equipped with the solid mechanism of card in the equipment storehouse 5, equipment storehouse 5 is used for bearing the solid epaxial part of card, has the effect of bearing to the part of the solid mechanism of card.

The utility model discloses in, be equipped with four fixture blocks 15 on the solid mechanism of card, second opening 16 has all been seted up all around to the lower extreme of apron 4, four fixture blocks 15 slide respectively and cup joint in four second openings 16, the solid mechanism of card can drive four fixture blocks 15 and remove on second opening 16, draw-in groove 17 has been seted up to inside a week of connecting piece 3, four fixture block 15's outer end all sets up in draw-in groove 17, it removes to drive four fixture blocks 15 through the solid mechanism of card, it breaks away from or fixes the card of draw-in groove 17 to enable four fixture blocks 15 from draw-in groove 17, loading and unloading to apron 4 have the effect that provides the convenience.

The utility model discloses in, the solid mechanism of card is including setting up carousel 12 of lower extreme in equipment storehouse 5, first opening 13 has all been seted up all around to the upper end of carousel 12, all be provided with fixed axle 14 in four first openings 13, the relative one side in upper end of four fixture blocks 15 is fixed respectively to the bottom of four fixed axles 14, rotation through carousel 12, can drive four first opening 13 synchronous motion, and four first opening 13's removal, can promote fixed axle 14 synchronous motion in four first openings 13, four fixed axle 14's synchronous motion, can drive four fixture blocks 15 and remove as the track with four second openings 16, thereby can enter into the draw-in groove 17 with four fixture blocks 15's outer end or break away from in the draw-in groove 17, make apron 4 be connected or dismantle with connecting piece 3.

The utility model discloses in, the top of carousel 12 is provided with diaphragm 6, diaphragm 6 is fixed in equipment storehouse 5, the upper end middle part of diaphragm 6 is provided with gear 10, the lower extreme middle part of gear 10 is fixed with pivot 11, pivot 11 rotates and cup joints on diaphragm 6, be promoted through gear 10, can drive pivot 11 and rotate, the bottom fixed connection of pivot 11 is at the upper end middle part of carousel 12, the rotation of gear 10, can drive pivot 11 and rotate, and the rotation of pivot 11, can drive carousel 12 and rotate, thereby realize driving the effect that four fixture blocks 15 removed.

The utility model discloses in, the outside of gear 10 is equipped with first slide 9, first slide 9 is fixed in the upper end of diaphragm 6, the upper end left side of diaphragm 6 can be dismantled and be connected with first cylinder 7, first cylinder 7 and supporting part are connected, be convenient for stabilize the function, can set for the procedure, automatic operation, fixed the cup jointing has mounting 18 on the first cylinder 7, the upper end four corners of mounting 18 all is equipped with screw 19, the upper end of diaphragm 6 is equipped with four screw thread blind holes 20, four corners and the screw that mounting 18 was run through respectively to screw 19's bottom cup joints in four corresponding screw thread blind holes 20, through the spiral shell of screw 19 and screw thread blind hole 20, can be with the firm installation on diaphragm 6 more of first cylinder 7, have firm effect to first cylinder 7.

The utility model discloses in, the flexible end fixedly connected with spur rack 8 of first cylinder 7, spur rack 8 and gear 10 mesh mutually, spur rack 8 slides and cup joints on first slide 9, and first cylinder 7 can drive spur rack 8 and remove, and first slide 9 can restrict the removal of spur rack 8, more steady removal when making spur rack 8 be driven again, and spur rack 8 can promote gear 10 to rotate when removing, to gear 10's rotation, has the effect that provides power.

The utility model discloses in, be equipped with convenient moving mechanism on base 1, can make things convenient for base 1's removal through convenient moving mechanism, thereby realize driving the effect that jar body 2 removed, be equipped with four second pulleys 28 on the convenient moving mechanism, four second pulleys 28 set up respectively in base 1's below four corners, convenient moving mechanism can remove base 1's below four corners with four second pulleys 28, support base 1, rethread second pulley 28 drives base 1 and removes, then can drive jar body 2 and remove, to jar body 2's transport and use convenience more.

The utility model discloses in, convenient moving mechanism is including four second cylinders 24 of difference fixed mounting in the inside upper end four corners of base 1, and four second cylinders 24's flexible end is fixed with bottom plate 25 jointly, and second cylinder 24 and supporting part are connected, are convenient for stabilize the function, can set for the procedure, and automatic function, four second cylinders 24 promote bottom plate 25 simultaneously and remove, have the effect that keeps the horizontally to the removal of bottom plate 25.

The utility model discloses in, the left and right sides of bottom plate 25 is all rotated and is connected with two first pulleys 26, base 1's inside four corners all is fixed with second slide 27, four first pulleys 26 set up respectively in four second slides 27, when bottom plate 25 is promoted again, can drive four first pulleys 26 and remove, and four first pulleys 26 receive the restriction of four second slides 27, enable bottom plate 25 when removing, more steady, thereby the removal stationarity of bottom plate 25 has been improved, base 1's lower extreme link up the setting, four second pulleys 28 set up the lower extreme four corners at bottom plate 25 respectively, when bottom plate 25 removes, can drive four second pulleys 28 and remove, make four second pulleys 28 shift out from base 1 in, support base 1 again.

The utility model discloses in, during the use: when the integrated circuit cleaning agent is conveyed into the tank body 2, the operation of the first air cylinder 7 is controlled by the matching equipment, the first air cylinder 7 drives the spur rack 8 to move, the spur rack 8 pushes the gear 10 to rotate, the gear 10 drives the rotating shaft 11 to rotate, the rotating shaft 11 drives the rotating disc 12 to rotate, the rotating disc 12 can drive the four first openings 13 to move, the four first openings 13 push the four fixed shafts 14 to move, the four fixed shafts 14 drive the four clamping blocks 15 to move, the four clamping blocks 15 move inwards, so that the integrated circuit cleaning agent can be moved out of the clamping grooves 17 without clamping the clamping grooves 17, the cover plate 4 can be detached from the upper end of the connecting piece 3, then the integrated circuit cleaning agent can be conveyed into the tank body 2 from the upper end of the tank body 2, when the tank body 2 needs to be moved, the operation of the four second air cylinders 24 is controlled by the matching equipment, the four second air cylinders 24 push the bottom plate 25, the four second pulleys 28 support the base 1, so that the tank 2 can be conveniently carried by an operator.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (5)

1. The utility model provides an integrated circuit cleaner storage device, includes base (1), its characterized in that: the upper end of the base (1) is provided with a tank body (2), the upper end of the tank body (2) is fixed with a connecting piece (3), the connecting piece (3) is arranged in a run-through way, the upper end of the connecting piece (3) is provided with a cover plate (4), an equipment bin (5) is arranged in the cover plate (4), a clamping mechanism is arranged in the equipment bin (5), four clamping blocks (15) are arranged on the clamping mechanism, second openings (16) are formed in the periphery of the lower end of the cover plate (4), the four clamping blocks (15) are respectively sleeved in the four second openings (16) in a sliding manner, a clamping groove (17) is arranged on the periphery of the inner part of the connecting piece (3), the outer ends of the four clamping blocks (15) are all arranged in the clamping groove (17), be equipped with convenient moving mechanism on base (1), be equipped with four second pulleys (28) on the convenient moving mechanism, four second pulleys (28) set up respectively in the below four corners of base (1).

2. The integrated circuit cleaning agent storage device as defined in claim 1, wherein: the clamping mechanism comprises a rotary table (12) arranged at the lower end in an equipment bin (5), first openings (13) are formed in the periphery of the upper end of the rotary table (12), fixed shafts (14) are arranged in the four first openings (13), the bottom ends of the four fixed shafts (14) are respectively fixed on one side, opposite to the upper ends of four clamping blocks (15), a transverse plate (6) is arranged above the rotary table (12), the transverse plate (6) is fixed in the equipment bin (5), a gear (10) is arranged in the middle of the upper end of the transverse plate (6), a rotating shaft (11) is fixed in the middle of the lower end of the gear (10), the rotating shaft (11) is rotatably sleeved on the transverse plate (6), the bottom end of the rotating shaft (11) is fixedly connected to the middle of the upper end of the rotary table (12), a first slide way (9) is arranged on the outer side of the gear (10), and the first slide way (9) is fixed at the upper end of the transverse plate (6), the upper end left side of diaphragm (6) can be dismantled and be connected with first cylinder (7), the flexible end fixedly connected with spur rack (8) of first cylinder (7), spur rack (8) and gear (10) mesh mutually, spur rack (8) slide to cup joint on first slide (9).

3. The integrated circuit cleaning agent storage device as defined in claim 1, wherein: convenient moving mechanism includes four second cylinders (24) of fixed mounting in the inside upper end four corners of base (1) respectively, and the flexible end of four second cylinders (24) is fixed with bottom plate (25) jointly, the left and right sides of bottom plate (25) all rotates and is connected with two first pulley (26), the inside four corners of base (1) all is fixed with second slide (27), and four first pulley (26) set up respectively in four second slide (27), the lower extreme of base (1) link up the setting, and four second pulley (28) set up respectively in the lower extreme four corners of bottom plate (25).

4. The integrated circuit cleaning agent storage device as defined in claim 1, wherein: the outside of the tank body (2) is provided with a monitoring window (21), a graduated scale (22) is arranged on the monitoring window (21), and a water outlet pipe (23) is arranged at the lower end of the tank body (2).

5. The integrated circuit cleaning agent storage device as defined in claim 2, wherein: the fixed cover has been connected with mounting (18) on first cylinder (7), the upper end four corners of mounting (18) all is equipped with screw (19), the upper end of diaphragm (6) is equipped with four screw thread blind holes (20), and the bottom of four screw (19) runs through the four corners and the screw thread of mounting (18) respectively and cup joints in four corresponding screw thread blind holes (20).

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