CN213803965U

CN213803965U - Target heating device

Info

Publication number: CN213803965U
Application number: CN202022759642.3U
Authority: CN
Inventors: 唐智勇
Original assignee: Zhuzhou Torch Antai New Materials Co ltd
Current assignee: Zhuzhou Torch Antai New Materials Co ltd
Priority date: 2020-11-25
Filing date: 2020-11-25
Publication date: 2021-07-27
Anticipated expiration: 2030-11-25

Abstract

The utility model discloses a target heating device, including heating mechanism and with heating mechanism connects and is used for the heat conduction banks of heat conduction, the heat conduction banks includes with the first pipe and one end opening that heating mechanism's output is connected and at least part cover locate the second pipe outside the first pipe, the open end of second pipe with heating mechanism's input is connected, the pipe wall of first pipe forms first intensification space, the pipe wall of second pipe with the pipe wall interval of first pipe sets up and forms second intensification space jointly; when the device works, the target material is sleeved on the outer wall of the second conduit, and the heat transferred by the first conduit and the second conduit is utilized to heat the target material. Compared with the prior art, the utility model provides a target heating device, simple structure can make the homogeneity of hot-blast backward flow repetitive heating, lifting pipeline heating.

Description

Target heating device

Technical Field

The utility model relates to a magnetron sputtering field especially relates to a target heating device.

Background

The target material is an important raw material for vacuum coating, and the purity and the density of the target material directly influence the components and the comprehensive performance of the membrane washing. In recent two thirty years, with the rapid development of the construction of the coating technology, new target preparation technology is continuously appeared, and the quality and the performance of the target are also obviously improved.

The spraying target-making technology is to prepare a metal target by adopting a spraying mode, and mainly comprises the steps of heating a target material to a molten or semi-molten state by utilizing electric arcs, atomizing the target material by virtue of high-speed gas to form droplets, accelerating the process of spraying the droplets onto the surface of a liner tube or a lining plate, and rapidly cooling and solidifying the droplets into a metal coating target. And non-metallic and ceramic targets are typically spray coated by plasma heating of powdered materials.

However, such a target making method has limited heating efficiency and generally cannot achieve uniform heating, so that the finished target material is easy to have loose and porous tissue and high oxygen content, and further presents a gray surface, lacks of metallic luster, and at the same time, is easy to adsorb impurities, and further causes discharge in the sputtering process, and the instant high temperature on the sputtering surface of the target material is easy to cause loose particle patterns to fall in a lump shape, so as to pollute the surface of a plated piece, and influence the film plating quality and the qualification rate of the film plating product.

Therefore, it is necessary to provide a target heating apparatus having a simple structure and capable of repeatedly heating the hot air by the back flow and improving the uniformity of the heating of the duct, so as to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a target heating device that is simple in structure and can make hot-blast backward flow repetitive heating, promote the homogeneity of pipeline heating not enough to prior art exists.

In order to achieve the above purpose, the utility model provides a following technical scheme:

a target heating device comprises a heating mechanism and a heat conduction pipe set which is connected with the heating mechanism and used for conducting heat, wherein the heat conduction pipe set comprises a first pipe and a second pipe, the first pipe is connected with the output end of the heating mechanism, one end of the second pipe is opened, at least part of the second pipe is sleeved outside the first pipe, the open end of the second pipe is connected with the input end of the heating mechanism, a first heating space is formed on the pipe wall of the first pipe, and a second heating space is formed by the pipe wall of the second pipe and the pipe wall of the first pipe at intervals;

when the device works, the target material is sleeved on the outer wall of the second conduit, and the heat transferred by the first conduit and the second conduit is utilized to heat the target material.

Preferably, the second conduit includes a heating section having a sealing end and sleeved on the first conduit and a backflow section formed by bending one end of the heating section away from the sealing end, the sealing end is arranged at an interval relative to the output end of the first conduit, and the backflow section is connected with the input end of the warming mechanism.

Preferably, the heat conduction pipe set further comprises a plurality of supporting pieces arranged between the first conduit and the heating section, and the plurality of supporting pieces are uniformly distributed along the circumferential direction of the cross section of the first conduit.

Preferably, the number of the supporting members is three.

Preferably, the target heating device further comprises a temperature sensor installed on one side of the sealing end, which is far away from the second temperature-raising space, the temperature-raising mechanism comprises a controller and a fan electrically connected with the controller, and the temperature sensor is electrically connected with the controller.

Preferably, the target heating device further includes a limiting member sleeved at an end of the heating section far away from the sealing end, and a thickness of the limiting member is not less than a thickness of the target.

Preferably, the material of the limiting member is carbon fiber or titanium alloy.

In summary, compared with the prior art, the utility model provides a target heating device, through setting up heat conduction tube set include with first pipe and one end opening that the output of heating mechanism is connected and at least partial cover are located second pipe outside first pipe, the open end of second pipe with the input of heating mechanism is connected, makes the pipe wall of first pipe forms first intensification space, the pipe wall of second pipe with the pipe wall interval of first pipe sets up and forms second intensification space jointly target heating device's use, the hot-blast process that heating mechanism produced lets in the second intensification space through first intensification space, through second intensification space is to after the second pipe heats for the target, finally flow back to the input of heating mechanism, realized hot-blast backward flow repeated heating and heated, The heating uniformity of the pipeline is improved; through keep away from sealed end second intensification space one side sets up temperature sensor utilizes temperature sensor responds in real time the temperature of sealed end, and through temperature sensor with the feedback control is realized in the connection between the controller, has avoided appearing the incident because of the high temperature.

Drawings

Fig. 1 is a schematic perspective view of a target heating device according to the present invention;

fig. 2 is a cross-sectional view of the target heating apparatus shown in fig. 1 taken along line a-a.

In the figure, 100, a target heating apparatus; 10. a temperature raising mechanism; 12. a fan; 20. a heat transfer tube set; 21. a first conduit; 22. a second conduit; 221. a heating section; 2211. sealing the end; 222. a reflux section; 23. a support member; 30. a temperature sensor; 40. a limiting member; 101. a first warming space; 102. and a second warming space.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings and examples. The following experimental examples and examples are intended to further illustrate but not limit the invention.

Referring to fig. 1 and fig. 2, the present invention provides a target heating apparatus 100, wherein the target heating apparatus 100 includes a heating mechanism 10, a heat pipe set 20 connected to the heating mechanism 10 for conducting heat, a temperature sensor 30, and a limiting member 40.

The heating mechanism 10 includes a controller (not shown) and a fan 12 electrically connected to the controller.

The heat conducting tube set 20 includes a first tube 21 connected to the output end of the warming mechanism 10, a second tube 22 with an open end and at least partially sleeved outside the first tube 21, and a plurality of supporting members 23 disposed between the first tube 21 and the second tube 22. The open end of the second conduit 22 is connected to the input end of the temperature raising mechanism 10, the tube wall of the first conduit 21 forms a first temperature raising space 101, and the tube wall of the second conduit 22 and the tube wall of the first conduit 21 are arranged at intervals and jointly form a second temperature raising space 102.

During operation, the target material is sleeved on the outer wall of the second conduit 22, and the heat transferred by the first conduit 21 and the second conduit 22 is utilized to heat the target material.

Specifically, the second conduit 22 includes a heating section 221 having a sealing end 2211 and sleeved on the first conduit 21, and a backflow section 222 bent from an end of the heating section 221 away from the sealing end 2211. The sealing end 2211 is arranged opposite to the output end of the first conduit 21 at an interval, and the return section 222 is connected with the input end of the warming mechanism 10.

It should be noted that the backflow segment 222 is used for connecting the heating segment 221 and the temperature raising mechanism 10, and guiding the hot air in the second temperature raising space 102 back to the temperature raising mechanism 10 again, so that the air entering the temperature raising mechanism 10 has a certain initial temperature, thereby realizing repeated hot air backflow heating and improving uniformity of pipeline heating, and effectively improving heating temperature of pipeline heating.

Meanwhile, because the positions of the input ends of the different temperature raising mechanisms 10 are not necessarily required, in the present embodiment, the backflow section 222 is provided as a multi-stage bending structure, and is connected to the input ends of the different temperature raising mechanisms 10 through multi-stage bending, so that the adaptability is stronger.

The supporting members 23 are disposed between the first guide duct 21 and the heating section 221, and a plurality of the supporting members 23 are uniformly distributed along a circumferential direction of a cross section of the first guide duct 21. With such an arrangement, on one hand, the structural stability of the second temperature rising space 102 is improved, and on the other hand, the second temperature rising space 102 is uniformly distributed in the circumferential direction of the first conduit 21, so that the uniformity of heating the target is further improved.

Preferably, in the present embodiment, the number of the supporting members 23 is three.

The temperature sensor 30 is installed at a side of the sealing end 2211 away from the second warming space 102. The temperature sensor 30 is electrically connected to the controller. Through keep away from sealed end second intensification space one side sets up temperature sensor utilizes temperature sensor responds in real time the temperature of sealed end, and through temperature sensor with the feedback control is realized in the connection between the controller, has avoided appearing the incident because of the high temperature.

The limiting member 40 is sleeved on an end portion of the heating section 221 far from the sealing end 2211, and the thickness of the limiting member 40 is not less than that of the target. The limiting piece 40 is arranged to ensure that the target is located at the optimal heating position in the heating process.

Preferably, the limiting member 40 is integrally formed with the heating section 221; the limiting member 40 is made of carbon fiber or titanium alloy. Specifically, in the present embodiment, the limiting member 40 is made of carbon fiber, which is light, stable and high temperature resistant.

The utility model provides a target heating device 100's working process as follows:

the heating mechanism 10 works to input hot air into the first conduit 21 from an output end, the hot air is transported in the first heating space 101 and output from the output end of the first conduit 21 and flows into the second heating space 102, the hot air in the second heating space 102 heats the heating section 221 to heat the target material sleeved on the heating section 221, and then the hot air flows back to the input end of the heating mechanism 10 through the return pipe 222, so that hot air circulation heating is realized, and the uniformity of pipeline heating is improved. Meanwhile, in the whole heating process, the temperature sensor 30 monitors the temperature in the second warming space 102 in real time, when the temperature in the second warming space 102 is too high, the temperature sensor 30 sends a signal of too high temperature to the controller, the controller controls the warming mechanism 10 to stop heating, when the temperature in the second warming space 102 does not reach the preset temperature, the temperature sensor 30 sends a signal that the temperature does not reach the standard to the controller, and the controller controls the warming mechanism 10 to continue working and heating, so that feedback control is realized, and safety accidents caused by too high temperature are avoided. .

Compared with the prior art, the utility model provides a target heating device, through setting up heat conduction pipe group include with first pipe and one end opening and at least partial cover that the output of intensification mechanism is connected are located second pipe outside first pipe, the open end of second pipe with the input of intensification mechanism is connected, makes the pipe wall of first pipe forms first intensification space, the pipe wall of second pipe with the pipe wall interval of first pipe sets up and forms second intensification space jointly in target heating device's the use, the hot-blast process that intensification mechanism produced first intensification space lets in the second intensification space, through second intensification space is right for the target heating behind the second pipe heating, at last flow back to the input of intensification mechanism has realized hot-blast backward flow repeated heating, The heating uniformity of the pipeline is improved; through keep away from sealed end second intensification space one side sets up temperature sensor utilizes temperature sensor responds in real time the temperature of sealed end, and through temperature sensor with the feedback control is realized in the connection between the controller, has avoided appearing the incident because of the high temperature.

It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should be construed as the scope of the present invention.

Claims

1. A target heating device is characterized by comprising a heating mechanism and a heat conduction pipe set which is connected with the heating mechanism and used for conducting heat, wherein the heat conduction pipe set comprises a first pipe and a second pipe, the first pipe is connected with the output end of the heating mechanism, one end of the second pipe is opened, at least part of the second pipe is sleeved outside the first pipe, the open end of the second pipe is connected with the input end of the heating mechanism, a first heating space is formed by the pipe wall of the first pipe, and a second heating space is formed by the pipe wall of the second pipe and the pipe wall of the first pipe at intervals;

2. The target heating apparatus according to claim 1, wherein the second conduit includes a heating section having a sealing end and sleeved on the first conduit, and a backflow section formed by bending an end of the heating section away from the sealing end, the sealing end is spaced from an output end of the first conduit, and the backflow section is connected to an input end of the temperature raising mechanism.

3. The target heating apparatus of claim 2, wherein the heat conduction tube set further comprises a plurality of supports disposed between the first conduit and the heating section, the plurality of supports being evenly distributed along a circumference of the first conduit cross-section.

4. The target heating apparatus of claim 3, wherein the number of the supports is three.

5. The target heating apparatus according to claim 2, further comprising a temperature sensor mounted on a side of the sealed end away from the second temperature-elevating space, wherein the temperature-elevating mechanism comprises a controller and a fan electrically connected to the controller, and the temperature sensor is electrically connected to the controller.

6. The target heating apparatus according to claim 5, further comprising a limiting member sleeved on an end of the heating section away from the sealing end, wherein a thickness of the limiting member is not less than a thickness of the target.

7. The target heating apparatus of claim 6, wherein the material of the position limiter is carbon fiber or titanium alloy.