CN213803312U

CN213803312U - Reverse osmosis membrane for replacing UF treatment application at ultra-high pure water terminal

Info

Publication number: CN213803312U
Application number: CN202022285636.9U
Authority: CN
Inventors: 顾明亲
Original assignee: Shanghai Sanbang Water Treatment Technology Co ltd
Current assignee: Shanghai Sanbang Water Treatment Technology Co ltd
Priority date: 2020-10-14
Filing date: 2020-10-14
Publication date: 2021-07-27
Anticipated expiration: 2030-10-14

Abstract

The utility model relates to the technical field of ultra-high-purity water terminal treatment equipment in the semiconductor industry, in particular to a reverse osmosis membrane replacing UF treatment application at an ultra-high-purity water terminal, which comprises a raw water tank and a reverse osmosis element, wherein one end of the raw water tank is connected with a booster pump, one end of the booster pump is connected with a water production pipe, one end of the water production pipe is connected with a filter, one end of the filter is connected with a high-pressure pump, one end of the high-pressure pump is connected with a high-pressure pipe, one end of the reverse osmosis element is provided with a water inlet interface, the other end of the reverse osmosis element is provided with a pure water interface and a concentrated water interface, one end of the pure water interface is connected with a separation element, one end of the separation element is connected with a UV disinfection element, one end of the UV disinfection element is connected with a pure water tank, the set reverse osmosis membrane replaces the use of terminal UF in the prior art to dispel impurities in water and effectively intercept microorganisms for water supply, the safety of water supply is guaranteed, and the equipment is more efficient when in use.

Description

Reverse osmosis membrane for replacing UF treatment application at ultra-high pure water terminal

Technical Field

The utility model relates to a semiconductor trade ultra-high purity water terminal treatment facility technical field specifically is a replace UF to handle reverse osmosis membrane of application at ultra-high purity water terminal.

Background

The water is required to be used for processing in the semiconductor processing process, the requirement on the water quality is very high, no ion impurity can be contained, the water quality condition entering a terminal is achieved through pretreatment, the terminal meets the requirements of resistivity and ion concentration through polishing resin, the requirement on dissolved oxygen is met through a degassing membrane, the requirement on TOC is met through a UV lamp, the use requirement on the granularity is met through terminal ultrafiltration, the terminal ultrafiltration is the final guarantee of the terminal, due to the structural characteristics of the terminal, the whole water quality index cannot be controlled under the condition of system abnormity, particularly the ion concentration and the TOC are controlled, the shutdown of the whole production line can be caused as a result, and great loss is caused.

Due to the structural characteristics of the terminal ultrafiltration, only particles with a nominal cutoff molecular weight of more than 6000 can be intercepted, substances with a molecular weight smaller than the nominal cutoff molecular weight cannot be intercepted, the quality of outlet water cannot be guaranteed under the condition of system abnormity, the quality of pure water is low, and the efficiency is low during use, so that the current situation is changed by replacing a reverse osmosis membrane applied to UF treatment at an ultra-high pure water terminal.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a replace UF to handle reverse osmosis membrane of using at super high pure water terminal to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a reverse osmosis membrane applied to ultra-high-purity water terminal instead of UF treatment comprises a raw water tank and a reverse osmosis element, wherein one end of the raw water tank is connected with a booster pump, one end of the booster pump is connected with a water production pipe, one end of the water production pipe is connected with a filter, one end of the filter is connected with a high-pressure pump, one end of the high-pressure pump is connected with a high-pressure pipe, one end of the reverse osmosis element is provided with a water inlet, the other end of the reverse osmosis element is provided with a pure water inlet and a concentrated water inlet, one end of the pure water inlet is connected with a separation element, one end of the separation element is connected with a UV disinfection element, one end of the UV disinfection element is connected with a pure water tank, one end of the concentrated water inlet is connected with a return pipe, and the inner end of the reverse osmosis element is provided with a concentrated solution zone, a reverse osmosis membrane and a dilute solution zone.

Preferably, the water inlet end of the high-pressure pump is respectively connected with the raw water interface and the concentrated water interface, and the water outlet end of the high-pressure pump is connected with the water inlet interface through a high-pressure pipe.

Preferably, the reverse osmosis element specifically adopts an ultra-low pressure large-flux membrane module.

Preferably, the high-pressure pipe is made of SUS316L BA, and the water production pipe is made of PVDF or CLPVC

Preferably, the water outlet of the pure water tank is connected with the water inlet of the terminal through a water production pipe.

Preferably, the inner end of the separation element is provided with a dehydration membrane assembly.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses in, through the reverse osmosis membrane that sets up, because reverse osmosis membrane is a pellicle, its structural feature only allows the hydrone to pass through, can hold back other all materials outside aquatic water molecule almost, so under the system abnormal conditions, can hold back ion, TOC and particulate matter of aquatic, the utility model discloses an utilize reverse osmosis membrane's structural feature, replace the use of terminal UF in the former technology, dispel the impurity of aquatic, effectively intercept the water supply microorganism, guarantee the safety of water supply for higher high efficiency when equipment uses.

2. The utility model discloses in, through the back flow of reverse osmosis component and setting, can fully improve the anti load capacity of operation reverse osmosis and system, avoid frequently opening and stop the phenomenon that leads to processing system to break down and take place, guaranteed that the water is normal, make the safety more that supplies water for safety more when equipment uses.

3. The utility model discloses in, owing to adopted reverse osmosis membrane design to can improve the life at terminal, reduce the frequent change and the maintenance of the membrane body, and then can practice thrift investment cost, make more convenience when equipment uses.

Drawings

FIG. 1 is a general schematic view of the present invention;

FIG. 2 is a schematic diagram A of the internal principle of the reverse osmosis element of the present invention;

FIG. 3 is a schematic diagram B of the internal principle of the reverse osmosis element of the present invention;

FIG. 4 is a schematic diagram C of the internal principle of the reverse osmosis element of the present invention;

in the figure: 1-raw water tank, 2-reverse osmosis element, 3-booster pump, 4-filter, 5-high pressure pump, 6-high pressure pipe, 7-water inlet interface, 8-pure water interface, 9-concentrated water interface, 10-separation element, 11-UV disinfection element, 12-pure water tank, 13-water production pipe, 14-concentrated solution area, 15-reverse osmosis membrane, 16-dilute solution area and 17-return pipe

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.

Please refer to fig. 1-4, the present invention provides a technical solution:

a reverse osmosis membrane used for replacing UF treatment at an ultra-high pure water terminal comprises a raw water tank 1 and a reverse osmosis element 2, wherein one end of the raw water tank 1 is connected with a booster pump 3, one end of the booster pump 3 is connected with a water production pipe 13, one end of the water production pipe 13 is connected with a filter 4, one end of the filter 4 is connected with a high-pressure pump 5, one end of the high-pressure pump 5 is connected with a high-pressure pipe 6, one end of the reverse osmosis element 2 is provided with a water inlet interface 7, the other end of the reverse osmosis element 2 is provided with a pure water interface 8 and a concentrated water interface 9, one end of the pure water interface 8 is connected with a separation element 10, one end of the separation element 10 is connected with a UV disinfection element 11, one end of the UV disinfection element 11 is connected with a pure water tank 12, one end of the concentrated water interface 9 is connected with a return pipe 17, the inner end of the reverse osmosis element 2 is provided with a concentrated solution area 14, a reverse osmosis membrane 15 and a dilute solution area 16, and the reverse osmosis membrane 15 is a semipermeable membrane, the water supply device has the structural characteristics that only water molecules are allowed to pass through, and other substances except water molecules in water can be almost intercepted, so that ions, TOC and particles in water can be intercepted under the abnormal condition of the system, the utility model utilizes the structural characteristics of the reverse osmosis membrane 15 to replace the use of a terminal UF in the prior art to remove impurities in water, effectively intercept water supply microorganisms, ensure the safety of water supply, ensure the high efficiency of equipment during use, can fully improve the anti-load capacity of the running reverse osmosis and the system through the reverse osmosis element 2 and the return pipe 17, avoid the phenomenon that the treatment system breaks down due to frequent start and stop, ensure the normal water outlet, ensure the safety of water supply, ensure the safety of equipment during use, and adopt the design of the reverse osmosis membrane 15, thereby prolonging the service life of the terminal and reducing the frequent replacement and maintenance of the membrane body, and then can practice thrift investment cost for more convenient when equipment uses has certain spreading value.

The utility model discloses work flow: when the reverse osmosis membrane is used, raw water is led into the reverse osmosis element 2 through the high-pressure pump 5, at the moment, the high-pressure pump 5 applies pressure larger than osmotic pressure to one side of the concentrated solution area 14, so that the flowing direction of a solvent is opposite to the original permeating direction, and the solvent starts to flow from the concentrated solution area 14 to one side of the dilute solution area 16 (as shown in figure 4), so that the reverse osmosis effect is achieved, through the arranged reverse osmosis membrane 15, because the reverse osmosis membrane 15 is a semipermeable membrane, the structural characteristic of the reverse osmosis membrane 15 only allows water molecules to pass through, and almost all other substances except water molecules in water can be intercepted, so ions, TOC and particulate matters in water can be intercepted under the abnormal condition of a system, the utility model utilizes the structural characteristic of the reverse osmosis membrane 15 to replace the use of terminal UF in the prior art, so as to dispel impurities in water, effectively intercept water supply microorganisms and ensure the safety of water supply, make more high-efficient when equipment uses, through reverse osmosis component 2 and the back flow 17 of setting, can fully improve the anti load capacity of operation reverse osmosis and system, avoid frequently opening and stop the phenomenon that leads to the processing system to break down and take place, guaranteed that the play water is normal, make the safer of water supply, make more safety when equipment uses, owing to adopted reverse osmosis membrane 15 design, thereby can improve the life at terminal, reduce the frequent change and the maintenance of the membrane body, and then can practice thrift investment cost, have certain spreading value.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A reverse osmosis membrane for ultra high purity water terminal UF replacement applications, comprising a raw water tank (1) and a reverse osmosis element (2), characterized in that: one end of the raw water tank (1) is connected with a booster pump (3), one end of the booster pump (3) is connected with a water production pipe (13), one end of the water production pipe (13) is connected with a filter (4), one end of the filter (4) is connected with a high-pressure pump (5), one end of the high-pressure pump (5) is connected with a high-pressure pipe (6), one end of the reverse osmosis element (2) is provided with a water inlet interface (7), the other end of the reverse osmosis element (2) is provided with a pure water interface (8) and a concentrated water interface (9), one end of the pure water interface (8) is connected with a separation element (10), one end of the separation element (10) is connected with a UV disinfection element (11), one end of the UV disinfection element (11) is connected with a pure water tank (12), one end of the concentrated water interface (9) is connected with a return pipe (17), the inner end of the reverse osmosis element (2) is provided with a concentrated solution area (14), a reverse osmosis membrane (15) and a dilute solution area (16).

2. A reverse osmosis membrane for use in ultra high purity water terminal replacement UF treatment according to claim 1 wherein: the high-pressure pump (5) one end of intaking connects raw water interface and dense water interface (9) respectively, high-pressure pump (5) one end of going out water is connected into water interface (7) through high-pressure pipe (6).

3. A reverse osmosis membrane for use in ultra high purity water terminal replacement UF treatment according to claim 1 wherein: the reverse osmosis element (2) is particularly an ultra-low pressure large-flux membrane component.

4. A reverse osmosis membrane for use in ultra high purity water terminal replacement UF treatment according to claim 1 wherein: the high-pressure pipe (6) is made of SUS316L BA, and the water production pipe (13) is made of PVDF or CLPVC.

5. A reverse osmosis membrane for use in ultra high purity water terminal replacement UF treatment according to claim 1 wherein: the water outlet of the pure water tank (12) is connected with the water inlet of the terminal through a water production pipe (13).

6. A reverse osmosis membrane for use in ultra high purity water terminal replacement UF treatment according to claim 1 wherein: the inner end of the separation element (10) is provided with a dehydration membrane component.