CN213779366U - Differential pressure sensor - Google Patents

Differential pressure sensor Download PDF

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Publication number
CN213779366U
CN213779366U CN202023206857.9U CN202023206857U CN213779366U CN 213779366 U CN213779366 U CN 213779366U CN 202023206857 U CN202023206857 U CN 202023206857U CN 213779366 U CN213779366 U CN 213779366U
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China
Prior art keywords
cavity
pressure sensor
differential pressure
notch
hole
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CN202023206857.9U
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Chinese (zh)
Inventor
赵金强
田峻瑜
方华斌
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Qingdao Goertek Intelligent Sensor Co Ltd
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Qingdao Goertek Intelligent Sensor Co Ltd
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Abstract

The utility model discloses a differential pressure sensor, differential pressure sensor includes: the shell is internally provided with a cavity and an opening communicated with the cavity; the air faucet is connected to the shell and provided with a through hole communicated with the cavity, a chip is arranged in the cavity, and the chip covers the through hole; the cover plate is connected with the shell and covers the opening; the shell is provided with at least one notch communicated with the opening, and the cover plate encloses the notch to form a vent hole communicated with the outside and the cavity; or, the edge of the cover plate is provided with a notch, and the shell encloses the notch to form a vent hole for communicating the outside and the cavity. The utility model discloses technical scheme aims at simplifying differential pressure sensor's processing mode, reduces the processing cost.

Description

Differential pressure sensor
Technical Field
The utility model relates to a sensor technical field, in particular to differential pressure sensor.
Background
The differential pressure sensor is a sensor for measuring a difference between two different pressures, and the chip can output the difference between the two pressures in the form of an electrical signal by allowing the two different pressures to act on the two surfaces of the chip, respectively. In general, a vent hole for communicating the surface of the chip on the housing of the differential pressure sensor is formed by touch-through molding, and the touch-through molding is complex in operation and high in processing cost.
The above is only for the purpose of assisting understanding of the technical solutions of the present application, and does not represent an admission that the above is prior art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a differential pressure sensor aims at simplifying differential pressure sensor's processing mode, reduces the processing cost.
To achieve the above object, the utility model provides a differential pressure sensor, include:
the shell is internally provided with a cavity and an opening communicated with the cavity;
the air faucet is connected to the shell and provided with a through hole communicated with the cavity, a chip is arranged in the cavity, and the chip covers the through hole; and
a cover plate connected to the housing and covering the opening;
the shell is provided with at least one notch communicated with the opening, and the cover plate encloses the notch to form a vent hole communicated with the outside and the cavity; or, the edge of the cover plate is provided with a notch, and the shell encloses the notch to form a vent hole for communicating the outside and the cavity.
Optionally, the notch is a rectangular notch or an arc notch.
Optionally, the number of the notches is multiple, and the multiple notches are arranged at intervals along the housing at the opening.
Optionally, the housing includes a top wall and a side wall, the side wall is connected to the top wall along a circumferential direction and encloses the top wall to form the cavity, and an edge of the side wall facing away from the top wall encloses the opening.
Optionally, the air tap is disposed on the top wall.
Optionally, the through hole includes at least two air holes opened in the air faucet, and the at least two air holes are sequentially communicated and respectively communicated with the cavity and the outside; and a step surface is formed at the joint of two adjacent air holes, and faces the end part of the through hole deviating from the cavity.
Optionally, the axes of two adjacent air holes are not coincident.
Optionally, the axes of at least two adjacent air holes are parallel.
Optionally, the cross-section of the air hole is circular or square.
Optionally, the shell deviates from the surface of the air tap is convexly provided with a retaining wall, the retaining wall is enclosed in the outer side of the opening, the notch penetrates through the retaining wall and is communicated with the outside, and the cover plate is located in the area enclosed by the retaining wall.
The utility model discloses among the technical scheme, be equipped with the cavity in differential pressure sensor's the shell to be equipped with the opening of this cavity of intercommunication, differential pressure sensor's this opening of apron shroud can seal the cavity at the opening part. In order to avoid communicating the cavity with the outside in a mode of utilizing the opening on the shell, the opening of the shell is provided with the notch in the technical scheme of the application, and the notch can be directly formed by cutting from the opening of the shell, so that the operation is simple and the cost is low compared with the existing opening mode. The shroud can enclose in the apron of opening part and close the breach and form the air vent, and this air vent communicates cavity and external for external gas can act on the chip in the cavity, and the chip can acquire external gas's pressure, detects with the difference to the pressure of the gas that gets into by the air cock and the gas that gets into by the air vent.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of the differential pressure sensor of the present invention;
FIG. 2 is a cross-sectional view at A-A of FIG. 1;
FIG. 3 is an enlarged view of a portion of FIG. 2 at B;
FIG. 4 is an enlarged view of a portion of FIG. 2 at C;
FIG. 5 is a schematic structural diagram of a housing and a gas nozzle of the differential pressure sensor of FIG. 1;
fig. 6 is a cross-sectional view of another embodiment of the differential pressure sensor of the present invention.
The reference numbers illustrate:
reference numerals Name (R) Reference numerals Name (R)
100 Differential pressure sensor 17 Retaining wall
10 Outer casing 30 Air tap
11 Roof wall 31 Through hole
13 Side wall 311 First air hole
131 Cavity body 313 Second air hole
133 Opening of the container 315 Step surface
135 Gap 50 Cover plate
137 Vent hole 60 Chip and method for manufacturing the same
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout is to include three juxtapositions, exemplified by "A and/or B," including either the A or B arrangement, or both A and B satisfied arrangement. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Referring to fig. 1 and 2, the present invention provides a differential pressure sensor 100, wherein the differential pressure sensor 100 includes a housing 10, an air faucet 30 and a cover plate 50. The housing 10 has a cavity 131 and an opening 133 communicating with the cavity 131, and the cover plate 50 is connected to the housing 10 and covers the opening 133. The nozzle 30 is connected to the housing 10 and has a through hole 31 communicating with the cavity 131, the cavity 131 is further provided with a chip 60, and the chip 60 covers the through hole 31 of the nozzle 30 in the cavity 131, so that the chip 60 in the cavity 131 can obtain the pressure of the gas entering from the through hole 31.
Referring to fig. 3, the differential pressure sensor 100 of the present invention further includes at least one notch 135 formed on the housing 10, the notch 135 is communicated with the opening 133 on the housing 10, and the cover plate 50 encloses the notch 135 to form a vent 137 communicating with the outside and the cavity 131; or, the edge of the cover plate is provided with a notch, and the shell surrounds the notch at the edge of the opening to form a vent hole (not shown in the embodiment) for communicating the outside and the cavity.
The two embodiments are equivalent alternative forms of the vent 137. When the notch 135 is provided on the housing 10, the notch 135 can be formed by directly digging or cutting the edge of the opening 133 of the housing 10 toward the inner side of the housing 10; when the notch 135 is provided on the cover plate 50, the notch 135 can be formed by grooving or cutting directly from the edge of the cover plate 50 to the inner side of the cover plate 50. The notch 135 is formed in a simple manner and at a low processing cost, compared to a manner of forming a hole in the housing 10 or a manner of forming a hole in the cover plate 50. After the housing 10 is connected to the cover plate 50, the housing 10 and the cover plate 50 can enclose the notch 135 to form a vent 137, so that the chip 60 in the cavity 131 can obtain the pressure of the gas entering from the vent 137.
It should be noted that the chip 60 is hermetically connected to the housing 10 in the cavity 131 to cover the through hole 31, i.e., the surface of the chip 60 contacting the gas entering from the through hole 31 is isolated from the surface of the chip 60 exposed in the cavity 131. The two surfaces of the chip 60 that are not in communication with each other can respectively acquire the pressure of the gas entering from the through hole 31 and the pressure of the gas entering the cavity 131 from the vent hole 137.
The chip 60 is hermetically connected to the housing 10 in the cavity 131, and the chip 60 may be directly connected to the housing 10, or the chip 60 may be indirectly connected to the housing 10 through another structure.
The embodiment of the present invention provides an embodiment, the shape of the notch 135 can be a rectangular notch 135 or an arc notch 135, and also can be notches 135 of other shapes, for example: the irregular notch 135 or the polygonal notch 135 may be formed by communicating the external space and the cavity 131 through the notch 135 only after the housing 10 is connected to the cover plate 50.
In the embodiment of the present invention, the number of the notches 135 may be one, two, or more than two. As shown in fig. 6, when there are a plurality of notches 135, the notches 135 may be arranged at intervals along the outer shell 10 at the opening 133, and specifically, the notches 135 may be arranged at even intervals along the outer shell 10 at the opening 133, that is, the distance between two adjacent notches 135 is the same, or the linear distance between two adjacent notches 135 along the extending direction of the opening 133 is the same.
The housing 10 of the differential pressure sensor 100 may include a top wall 11 and a side wall 13, the side wall 13 circumferentially connecting the top wall 11 and enclosing the top wall 11 to form a cavity 131, and an edge of the side wall 13 facing away from the top wall 11 enclosing an opening 133. Optionally: the air faucet 30 can be connected to the top wall 11 of the housing 10, and the through hole 31 of the air faucet 30 is communicated with the cavity 131 at the top wall 11; the air nozzle may also be attached to the side wall of the housing, with the through hole 31 of the air nozzle communicating with the cavity at the top wall (not shown in this embodiment).
The top wall 11 and the side wall 13 may be an integral structure or a split structure, when the top wall 11 and the side wall 13 are the integral structure, the top wall 11 and the side wall 13 may be formed by processing in an integral forming manner, and when the top wall 11 and the side wall 13 are the split structure, the top wall 11 and the side wall 13 may be connected by common connection manners such as screws or buckles. The air faucet 30 and the housing 10 may be an integral structure or a separate structure, and the integral structure or the separate structure may be referred to the above description, which is not described herein.
The housing 10 of the differential pressure sensor 100 may be of a plastic structure or a metal structure, and when the housing 10 is of a plastic structure, the plastic structure may be formed integrally, for example: injection molding, mold forming, and the like; when the housing 10 is a metal structure, the metal structure can be formed integrally, for example: metal powder injection molding, and the like.
The side wall 13 of the housing 10 is connected to the edge of the top wall 11 on one side and extends away from the top wall 11 on the other side. This lateral wall 13 can be the arc wall, and promptly, the lateral wall encloses to close along the circumference of roof and forms convex structure, and this lateral wall can be outside convex arc wall, also can be outside convex arc wall and the sunken arc wall of looks inboard combination formation mutually. The side wall 13 can also be formed by sequentially connecting a plurality of flat plates to form a quadrilateral side wall 13 or a polygonal side wall 13, and the plurality of flat plates forming the side wall 13 can be connected into an integral structure or a split structure.
In the embodiment shown in fig. 2, the air nozzle 30 is disposed on the top wall 11 of the housing 10, and in this embodiment, the chip 60 is connected to the top wall 11 of the housing 10 in the cavity 131. The vent hole 137 formed by enclosing the shell 10 and the cover plate 50 is located at the connecting position of the side wall 13 and the cover plate 50, the projection distance of the vent hole 137 on the top wall 11 is far from the projection distance of the chip 60 on the top wall 11, when gas enters the cavity 131 through the vent hole 137, dust entering the cavity 131 along with the vent hole 137 is not prone to falling onto the chip 60, the chip 60 is not prone to dust pollution in the working process, and the detection effect of the chip 60 on the gas pressure in the working process is better. Especially, when the notch 135 is formed on the housing 10, the axis of the vent 137 is parallel to the top wall 11, so that dust entering the cavity 131 from the vent 137 is less likely to fall onto the chip 60, thereby further ensuring the cleanliness of the chip 60 and improving the working performance of the chip 60.
Specifically, the through hole 31 of the air faucet 30 may communicate with the cavity 131 at the center of the top wall 11, that is, the chip 60 may be located at the center of the top wall 11, so that the distance from the chip 60 in the differential pressure sensor 100 to the vent 137 at the connection of the side wall 13 and the cover plate 50 is maximized, and the working performance of the chip 60 is further improved.
Referring to fig. 2 and 4, in the technical solution of the present invention, the through hole 31 on the air faucet 30 may be composed of two segments or multiple segments, that is, the through hole 31 includes at least two air holes opened on the air faucet 30, and the at least two air holes are sequentially connected and respectively connected to the cavity 131 and the outside; as shown in fig. 4, a step surface 315 is formed at a connection portion of two adjacent air holes, the step surface 315 faces an end portion of the through hole 31 away from the cavity 131, that is, an end portion of the step surface 315 facing the outside of the through hole 31, and when outside dust enters the through hole 31, the step surface 315 can play a role of containing dust, so that the dust is not easily dropped onto a surface of the chip 60 communicated with the through hole 31, so as to ensure a degree of cleanliness of the chip 60.
Specifically, when the through hole 31 is formed in two sections, the air faucet 30 is provided with a first air hole 311 and a second air hole 313. The first air hole 311 is communicated with the second air hole 313, one end of the first air hole 311 departing from the second air hole 313 is communicated with the cavity 131, one end of the second air hole 313 departing from the first air hole 311 is communicated with the outside, and one end of the first air hole 311 far away from the cavity 131 is communicated with the second air hole 313; the junction of the first air hole 311 and the second air hole 313 forms a step surface 315, and the step surface 315 faces the end of the through hole 31 facing away from the cavity 131.
When the through hole 31 has two or more stages, a third air hole (not shown), a fourth air hole (not shown), and the like may be provided between the first air hole 311 and the second air hole 313, and so on.
The step surface 315 formed at the connection between two adjacent air holes may have various structures. The hole wall of the air hole close to the cavity 131 extends at least partially towards the direction far away from the axis of the air hole at the end far away from the cavity 131 to form a step surface 315, and the hole wall of the air hole far away from the cavity 131 is at least partially formed by the step surface 315 extending towards the direction far away from the cavity 131.
Specifically, the inner contour size of the air hole close to one side of the cavity 131 can be set to be smaller, and the inner contour size of the air hole far away from one side of the cavity 131 can be set to be larger, so that a step surface 315 is formed in the process of transition from the air hole with the larger inner contour size to the air hole with the smaller inner contour size, the step surface 315 faces the air hole far away from one side of the cavity 131, namely, the step surface 315 faces the end part of the through hole 31 deviating from the cavity 131, the dust entering the through hole 31 from the outside can be contained, the possibility that the dust drops on the surface of the chip 60 is reduced, the axes of the two adjacent air holes can be arranged in a superposition manner, and the arrangement can also be arranged in a non-superposition manner.
As shown in fig. 2, the axes of at least two adjacent air holes may be arranged in a parallel structure, so that the air flowing through the through hole 31 to the surface of the chip 60 is smoother.
The cross section of gas pocket can be circular or square, promptly, the gas pocket can also be square gas pocket for circular gas pocket, also can be polygon gas pocket or the gas pocket of special-shaped structure, all is in the utility model discloses a protection scope.
As shown in fig. 5, a retaining wall 17 is formed by protruding the surface of the housing 10 away from the air faucet 30, the retaining wall 17 is surrounded outside the opening 133, the notch 135 penetrates the retaining wall 17 to communicate with the outside, and the cover plate 50 is located in the region surrounded by the retaining wall 17. The arrangement of the sub-wall can limit the cover plate 50, so that the cover plate 50 is more accurately arranged at the connecting position of the shell 10.
The retaining wall 17 may be a continuous whole outside the opening 133, or may be formed by multiple segments at intervals. The inner side of the area surrounded by the retaining wall 17 is formed by the housing 10 as a connecting wall, the opening 133 is formed in the center of the connecting wall, the notch 135 penetrates through the connecting wall, the cover plate 50 can be received by the connecting wall during the installation process, and the cover plate 50 can be directly adhered to the connecting wall, so that the installation operation of the cover plate 50 is simple.
The above is only the optional embodiment of the present invention, and not the scope of the present invention is limited thereby, all the equivalent structure changes made by the contents of the specification and the drawings are utilized under the inventive concept of the present invention, or the direct/indirect application in other related technical fields is included in the patent protection scope of the present invention.

Claims (10)

1. A differential pressure sensor, characterized in that the differential pressure sensor comprises:
the shell is internally provided with a cavity and an opening communicated with the cavity;
the air faucet is connected to the shell and provided with a through hole communicated with the cavity, a chip is arranged in the cavity, and the chip covers the through hole; and
a cover plate connected to the housing and covering the opening;
the shell is provided with at least one notch communicated with the opening, and the cover plate encloses the notch to form a vent hole communicated with the outside and the cavity; or, the edge of the cover plate is provided with a notch, and the shell encloses the notch to form a vent hole for communicating the outside and the cavity.
2. The differential pressure sensor of claim 1, wherein the notch is a rectangular notch or an arcuate notch.
3. The differential pressure sensor of claim 1, wherein the plurality of notches are provided in a plurality, the plurality of notches being spaced along the housing at the opening.
4. The differential pressure sensor of claim 1, wherein the housing comprises a top wall and a side wall circumferentially connecting the top wall and enclosing the top wall to form the cavity, an edge of the side wall facing away from the top wall enclosing the opening.
5. The differential pressure sensor of claim 4, wherein the air tap is disposed in the top wall.
6. The differential pressure sensor according to any one of claims 1 to 5, wherein the through hole comprises at least two air holes opened in the air tap, at least two air holes are sequentially communicated and respectively communicated with the cavity and the outside; and a step surface is formed at the joint of two adjacent air holes, and faces the end part of the through hole deviating from the cavity.
7. The differential pressure sensor as recited in claim 6 wherein the axes of adjacent gas holes are not coincident.
8. The differential pressure sensor as recited in claim 7 wherein the axes of at least two adjacent air holes are parallel.
9. The differential pressure sensor of claim 6, wherein the gas holes are circular or square in cross-section.
10. The differential pressure sensor according to claim 1, wherein the surface of the housing facing away from the air tap is convexly provided with a retaining wall, the retaining wall is enclosed outside the opening, the notch penetrates through the retaining wall and is communicated with the outside, and the cover plate is located in the area enclosed by the retaining wall.
CN202023206857.9U 2020-12-25 2020-12-25 Differential pressure sensor Active CN213779366U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023206857.9U CN213779366U (en) 2020-12-25 2020-12-25 Differential pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023206857.9U CN213779366U (en) 2020-12-25 2020-12-25 Differential pressure sensor

Publications (1)

Publication Number Publication Date
CN213779366U true CN213779366U (en) 2021-07-23

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ID=76900349

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023206857.9U Active CN213779366U (en) 2020-12-25 2020-12-25 Differential pressure sensor

Country Status (1)

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CN (1) CN213779366U (en)

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