CN213764513U

CN213764513U - Bessel laser beam cutting device with long working distance

Info

Publication number: CN213764513U
Application number: CN202022601726.4U
Authority: CN
Inventors: 曾帅; 李琼霞; 张洁
Original assignee: Wuhan Maojiu Photo Electronic Technology Co ltd
Current assignee: Wuhan Maojiu Photo Electronic Technology Co ltd
Priority date: 2020-11-11
Filing date: 2020-11-11
Publication date: 2021-07-23
Anticipated expiration: 2030-11-11

Abstract

The utility model provides a long working distance Bessel laser beam cutting device, include the conical prism, first focusing lens and the long working distance focusing mirror group that set gradually from the object space to the image space, long working distance focusing mirror group includes second focusing lens, third focusing lens, fourth focusing lens, fifth focusing lens, sixth focusing lens and the protective glass that set gradually from the object space to the image space, and wherein the second focusing lens is biconcave negative focusing lens, and the third focusing lens is planoconvex positive focusing lens, and the fourth focusing lens is meniscus negative focusing lens, and the fifth focusing lens is biconvex positive focusing lens, and the sixth focusing lens is meniscus negative focusing lens; the conical prism is used for shaping a Gaussian laser beam into a Bessel laser beam, the Bessel laser beam forms a 4F laser beam after passing through the first focusing mirror, and the 4F laser beam forms a focusing spot on the surface of the glass to be processed after passing through the long working distance focusing mirror group.

Description

Bessel laser beam cutting device with long working distance

Technical Field

The utility model relates to a laser beam machining technical field especially relates to a long working distance Bessel laser beam cutting device.

Background

For the processing of brittle materials such as glass, picosecond/femtosecond laser is generally required to be matched with a Bessel cutting head for cutting, the roughness of a cutting section can reach 0.5-1 mu m, and the cutting strength is high. The bessel cutting head can compress the laser beam to diffraction limits, form a small focused spot, and have a long depth of focus. However, the working distance of the existing Bessel cutting head is short, the 3-dimensional glass and some special-shaped glass cannot approach to a cutting surface, and the cutting is difficult or even impossible.

Disclosure of Invention

In view of this, the utility model provides a long working distance Bessel laser beam cutting device.

Further, the tapered prism includes an incident end surface, a first exit end surface and a second exit end surface, the incident end surface faces the object space and is a plane, and the first exit end surface and the second exit end surface face the image space and form a tapered surface.

Further, the second focusing mirror includes first curved surface and second curved surface, the third focusing mirror includes third curved surface and fourth curved surface, the fourth focusing mirror includes fifth curved surface and sixth curved surface, the fifth focusing mirror includes seventh curved surface and eighth curved surface, the sixth focusing mirror includes ninth curved surface and tenth curved surface, the radius of curvature of first curved surface to tenth curved surface is-12.23 mm, infinity, 39.67mm, 52.39mm, -31.83mm, 54.98mm, 429mm, 27.68mm, -67.80mm in proper order.

Furthermore, the first curved surface faces the object space and is concave towards the image space, and the second curved surface faces the image space and is concave towards the object space; the third curved surface faces the object space and is a plane, and the fourth curved surface faces the image space and is convex to the image space; the fifth curved surface faces the object space and is convex to the object space, and the sixth curved surface faces the image space and is concave to the object space; the seventh curved surface faces the object space and protrudes towards the object space, and the eighth curved surface faces the image space and protrudes towards the image space; the ninth curved surface faces the object space and is convex to the object space, and the tenth curved surface faces the image space and is concave to the object space.

Further, the distance between the second curved surface and the third curved surface is greater than the distance between the fourth curved surface and the fifth curved surface, the distance between the fourth curved surface and the fifth curved surface is less than the distance between the sixth curved surface and the seventh curved surface, and the distance between the sixth curved surface and the seventh curved surface is greater than the distance between the eighth curved surface and the ninth curved surface.

The utility model provides a beneficial effect that technical scheme brought is: the utility model provides a Bessel cutting device simple structure, cost of manufacture are low, the laser transmissivity is high, can be waiting to process glass's surface and form tiny laser facula, can increase working distance through setting up a plurality of focusing mirrors, can be used for processing to have bellied article and reduce the smog that produces man-hour to the pollution of lens after the working distance increases, set up gas blowing device under the focusing mirror simultaneously, further reduce the pollution that smog formed.

Drawings

Fig. 1 is a schematic structural diagram of a bessel laser beam cutting device with a long working distance according to the present invention.

Fig. 2 is a schematic light path diagram of the bessel laser beam cutting device with a long working distance according to the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, embodiments of the present invention will be further described below with reference to the accompanying drawings.

Please refer to fig. 1, an embodiment of the present invention provides a long working distance bessel laser beam cutting device, which includes a conical prism 1, a first focusing mirror 2 and a long working distance focusing mirror group 3, which are sequentially arranged from an object space to an image space, wherein the conical prism 1 is used to reshape a gaussian laser beam into a bessel laser beam, the bessel laser beam forms a 4F laser beam after passing through the first focusing mirror 2, and the 4F laser beam forms a focusing spot on the surface of glass to be processed after passing through the long working distance focusing mirror group 3. In this embodiment, the laser beam propagates from top to bottom, and the object side is located above the tapered prism 1, and the image side is located below the tapered prism 1.

The tapered prism 1 includes an incident end face 11, a first emergent end face 12 and a second emergent end face 13, the incident end face 11 faces the object space and is a plane, a certain included angle is formed between the first emergent end face 12 and the second emergent end face 13, and the first emergent end face 12 and the second emergent end face 13 face the image space and form a tapered surface.

The long working distance focusing lens group 3 comprises a second focusing lens 31, a third focusing lens 32, a fourth focusing lens 33, a fifth focusing lens 34, a sixth focusing lens 35 and a protective lens 36 which are sequentially arranged from an object side to an image side, wherein the second focusing lens 31 is a biconcave negative focusing lens, the third focusing lens 32 is a plano-convex positive focusing lens, the fourth focusing lens 33 is a meniscus negative focusing lens, the fifth focusing lens 34 is a biconvex positive focusing lens, the sixth focusing lens 35 is a meniscus negative focusing lens, and the protective lens 36 is a plane mirror.

The second focusing mirror 31 includes a first curved surface 311 and a second curved surface 312, the third focusing mirror 32 includes a third curved surface 321 and a fourth curved surface 322, the fourth focusing mirror 33 includes a fifth curved surface 331 and a sixth curved surface 332, the fifth focusing mirror 34 includes a seventh curved surface 341 and an eighth curved surface 342, and the sixth focusing mirror 35 includes a ninth curved surface 351 and a tenth curved surface 352. The first curved surface 311 and the second curved surface 312 are oppositely arranged, the first curved surface 311 faces the object space and is concave towards the image space, and the second curved surface 312 faces the image space and is concave towards the object space; the third curved surface 321 and the fourth curved surface 322 are oppositely arranged, the third curved surface 321 faces the object space and is a plane, and the fourth curved surface 322 faces the image space and is convex to the image space; the fifth curved surface 331 and the sixth curved surface 332 are oppositely arranged, the fifth curved surface 331 faces the object space and is convex towards the object space, and the sixth curved surface 332 faces the image space and is concave towards the object space; the seventh curved surface 341 and the eighth curved surface 342 are oppositely arranged, the seventh curved surface 341 faces the object space and protrudes towards the object space, and the eighth curved surface 342 faces the image space and protrudes towards the image space; the ninth curved surface 351 and the tenth curved surface 352 are disposed opposite to each other, the ninth curved surface 351 is convex toward the object, and the tenth curved surface 352 is concave toward the image and toward the object.

The distance between the second curved surface 312 and the third curved surface 321 is greater than the distance between the fourth curved surface 322 and the fifth curved surface 331, the distance between the fourth curved surface 322 and the fifth curved surface 331 is less than the distance between the sixth curved surface 332 and the seventh curved surface 341, and the distance between the sixth curved surface 332 and the seventh curved surface 341 is greater than the distance between the eighth curved surface 342 and the ninth curved surface 351.

In this embodiment, the gaussian laser beam propagates from top to bottom to the nodical of each curved surface and principal optical axis is the standard, when the centre of a circle of curved surface is located the nodical left side of principal optical axis and curved surface, then radius of curvature is the negative value, when the centre of a circle of curved surface is located the nodical right side of principal optical axis and curved surface, then radius of curvature is the positive value. That is, the positive and negative of the radius of curvature indicate the direction of curvature of the curved surface, and the magnitude of the radius of curvature indicates the degree of curvature of the curved surface. The curvature radiuses of the first curved surface 311 to the tenth curved surface 352 are-12.23 mm, infinity, 39.67mm, 52.39mm, -31.83mm, 54.98mm, 429mm, 27.68mm and-67.80 mm in sequence.

Because fused silica has the advantages of durability, high temperature resistance, radiation protection and the like, the conical prism 1, the first focusing lens 2, the second focusing lens 31, the third focusing lens 32, the fourth focusing lens 33, the fifth focusing lens 34, the sixth focusing lens 35 and the protective lens 36 are made of fused silica.

As shown in fig. 2, the optical path principle of the long-working-distance bessel laser beam cutting device of the present embodiment is as follows: the Gaussian laser beam emitted by the laser reaches the incident end face 11 of the conical prism 1, the laser beam reaches the first emergent end face 12 and the second emergent end face 13 after being transmitted by the incident end face 11, one part of the Gaussian laser beam is refracted by the first emergent end face 12, the other part of the Gaussian laser beam is refracted by the second emergent end face 13, the two parts of the Gaussian laser beam interfere with each other to generate a Bessel laser beam, the Bessel laser beam is diverged by the first focusing lens 2 to form a 4F laser beam, the 4F laser beam is incident from the first curved face 311 of the second focusing lens 31, the incident light reaching the first curved face 311 is emitted from the second curved face 312 to the third curved face 321 after being expanded in the second focusing lens 31, the light reaching the third curved face 321 is converged in the third focusing lens 32 and then emitted from the fourth curved face 322, the light converged by the third focusing lens 32 is incident from the fifth curved face 331 of the fourth focusing lens 33, and is emitted from the sixth curved face 332 after being expanded in the fourth focusing lens 33, the expanded light of the fourth focusing lens 33 is incident from the seventh curved surface 341 of the fifth focusing lens 34, is emitted from the eighth curved surface 342 after being converged in the fifth focusing lens 34, the converged light of the fifth focusing lens 34 is incident from the ninth curved surface 351 of the sixth focusing lens 35, is emitted from the tenth curved surface 352 after being converged in the sixth focusing lens 35, and the converged light of the sixth focusing lens 35 is focused on the surface of the glass to be processed after passing through the protective lens 36, so as to perform corresponding cutting treatment.

The focal length of the long-working-distance Bessel laser beam cutting device is 10mm, and the working distance reaches 30 mm.

In this document, the terms front, back, upper and lower are used to define the components in the drawings and the positions of the components relative to each other, and are used for clarity and convenience of the technical solution. It is to be understood that the use of the directional terms should not be taken to limit the scope of the claims.

The features of the embodiments and embodiments described herein above may be combined with each other without conflict.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A Bessel laser beam cutting device with a long working distance is characterized by comprising a conical prism, a first focusing lens and a long working distance focusing lens group which are sequentially arranged from an object space to an image space, wherein the long working distance focusing lens group comprises a second focusing lens, a third focusing lens, a fourth focusing lens, a fifth focusing lens, a sixth focusing lens and a protective lens which are sequentially arranged from the object space to the image space, the second focusing lens is a biconcave negative focusing lens, the third focusing lens is a plano-convex positive focusing lens, the fourth focusing lens is a meniscus negative focusing lens, the fifth focusing lens is a biconvex positive focusing lens, and the sixth focusing lens is a meniscus negative focusing lens; the conical prism is used for shaping a Gaussian laser beam into a Bessel laser beam, the Bessel laser beam forms a 4F laser beam after passing through the first focusing mirror, and the 4F laser beam forms a focusing spot on the surface of the glass to be processed after passing through the long working distance focusing mirror group.

2. The long working distance bessel laser beam cutting apparatus according to claim 1, wherein the tapered prism includes an incident end surface, a first exit end surface, and a second exit end surface, the incident end surface being directed to an object side and being a plane, the first exit end surface and the second exit end surface being directed to an image side and constituting a tapered surface.

3. The long working distance bessel laser beam cutting device according to claim 1, characterized in that the second focusing mirror includes a first curved surface and a second curved surface, the third focusing mirror includes a third curved surface and a fourth curved surface, the fourth focusing mirror includes a fifth curved surface and a sixth curved surface, the fifth focusing mirror includes a seventh curved surface and an eighth curved surface, the sixth focusing mirror includes a ninth curved surface and a tenth curved surface, the radii of curvature of the first curved surface to the tenth curved surface are-12.23 mm, infinity, 39.67mm, 52.39mm, -31.83mm, 54.98mm, 429mm, 27.68mm, -67.80mm in this order.

4. The long working distance bessel laser beam cutting apparatus according to claim 3, wherein the first curved surface is recessed toward an object side and toward an image side, and the second curved surface is recessed toward the image side and toward the object side; the third curved surface faces the object space and is a plane, and the fourth curved surface faces the image space and is convex to the image space; the fifth curved surface faces the object space and is convex to the object space, and the sixth curved surface faces the image space and is concave to the object space; the seventh curved surface faces the object space and protrudes towards the object space, and the eighth curved surface faces the image space and protrudes towards the image space; the ninth curved surface faces the object space and is convex to the object space, and the tenth curved surface faces the image space and is concave to the object space.

5. The long working distance bessel laser beam cutting apparatus according to claim 3, wherein the distance between the second curved surface and the third curved surface is larger than the distance between the fourth curved surface and the fifth curved surface, the distance between the fourth curved surface and the fifth curved surface is smaller than the distance between the sixth curved surface and the seventh curved surface, and the distance between the sixth curved surface and the seventh curved surface is larger than the distance between the eighth curved surface and the ninth curved surface.