CN213744764U - Plane cathode gear rack driving baffle - Google Patents

Plane cathode gear rack driving baffle Download PDF

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Publication number
CN213744764U
CN213744764U CN202022109240.9U CN202022109240U CN213744764U CN 213744764 U CN213744764 U CN 213744764U CN 202022109240 U CN202022109240 U CN 202022109240U CN 213744764 U CN213744764 U CN 213744764U
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China
Prior art keywords
rack
baffle
planar cathode
roller
transmission
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CN202022109240.9U
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Chinese (zh)
Inventor
熊凯
王慧峰
户家周
张朋坤
褚景豫
钱鹏亮
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Shanghai Fuyi Vacuum Equipment Co ltd
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Shanghai Fuyi Vacuum Equipment Co ltd
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Priority to CN202022109240.9U priority Critical patent/CN213744764U/en
Application granted granted Critical
Publication of CN213744764U publication Critical patent/CN213744764U/en
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Abstract

The utility model relates to a plane cathode rack and pinion drive baffle, include: mounting a plate; the rotating device is arranged above the mounting plate; the guide rail is arranged below the mounting plate and is fixed with the mounting plate through a bracket; the moving device is arranged on the guide rail and is in sliding connection with the guide rail; the baffle is arranged below the moving device and is fixed with the moving device; the technical effect of the utility model mainly adopts the linear transmission form of the gear rack to drive the plane baffle, thereby achieving the purposes of stable structure, stable transmission and accurate transmission and simultaneously satisfying the application of the polygonal film plating machine.

Description

Plane cathode gear rack driving baffle
Technical Field
The embodiment of the utility model relates to a vacuum coating machine baffle, in particular to a plane cathode rack and pinion drive baffle.
Background
In the existing vacuum coating machine, because the vacuum coating machine generally adopts a cylindrical structure, the baffle of the vacuum coating machine is made into a semicircular shape in order to adapt to the shell structure of the vacuum coating machine; however, the semicircular baffle plate of the vacuum coating machine can cause unstable transmission accuracy, low switch closing accuracy, and inaccurate baffle plate transmission caused by unstable structure of the baffle plate, unstable transmission and other factors.
SUMMERY OF THE UTILITY MODEL
An embodiment of the utility model aims at providing a plane cathode rack and pinion drive baffle mainly adopts rack and pinion's sharp transmission form, drives the plane baffle to this reaches stable in structure, and the transmission is steady, and the accurate purpose of transmission simultaneously, can satisfy polygon coating machine's application.
In order to achieve the above object, an embodiment of the present invention provides a planar cathode rack-and-pinion driving baffle, which includes:
mounting a plate;
the rotating device is arranged above the mounting plate;
the guide rail is arranged below the mounting plate and is fixed with the mounting plate through a bracket;
the moving device is arranged on the guide rail and is in sliding connection with the guide rail;
and the baffle is arranged below the moving device and is fixed with the moving device.
Wherein, rotary device still include:
the rotating cylinder is arranged above the rotating device;
one end of the transmission device is fixed with the rotary cylinder, and the other end of the transmission device is fixed on the mounting plate.
Wherein, the transmission device is a water-cooled rotary shaft sealing bearing seat.
Wherein, the mobile device still includes:
the gear is fixed on a transmission shaft of the rotating device; the rotating device is connected with a transmission shaft on the rotating device in a shaft mode;
a rack engaged with the gear to form a rack-and-pinion transmission structure
The roller carrier is fixed on the rack and fixedly connected with the rack;
the roller is arranged on the track; the rollers are arranged on the roller frame in parallel; and a rolling structure of the roller is formed on the track, and a rolling clamping structure is formed by the roller and the roller frame through the up-down arrangement of the roller.
The rolling groove on the roller is in a trapezoid shape, the surface of the track is also in a trapezoid shape, and the surface of the rolling groove is attached to the surface of the track.
The baffle is of a planar structure, and a plurality of parting beads are arranged on one side of the baffle.
Wherein the baffle is made of stainless steel; the division bars are made of aluminum.
Wherein, the rotating device is a motor.
Wherein, the two sides of the transmission device are provided with a water inlet pipe and a water outlet pipe which are respectively connected with an inlet and an outlet of cooling water.
The planar cathode gear rack driving baffle is used for a polygonal film coating machine.
Compared with the prior art, the utility model, can realize utilizing rotary device (revolving cylinder or motor) drive mobile device (rack and pinion) to drive the baffle, the utility model discloses in adopted rack and pinion's sharp transmission form to this drive plane baffle, reach stable in structure with this, the transmission is steady, and the accurate purpose of transmission simultaneously, can satisfy polygon coating machine's application.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic front view of FIG. 1;
FIG. 3 is a schematic view in a left-hand direction;
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following will explain in detail each embodiment of the present invention with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in various embodiments of the invention, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.
The first embodiment of the present invention relates to a planar cathode rack and pinion driving baffle, as shown in fig. 1, 2 and 3, comprising:
the mounting plate 3 is used for supporting a base of the whole planar cathode gear rack driving baffle;
a rotating device 10 arranged above the mounting plate 3; for driving the baffle 8
The guide rail 5 is arranged below the mounting plate 3 and is fixed with the mounting plate 3 through a bracket 9;
the moving device 20 is arranged on the guide rail 5 and is in sliding connection with the guide rail 5;
and a barrier 8 disposed below the moving device 20 and fixed to the moving device 20.
Above-mentioned structure has formed rotary device drive mobile device and has driven the baffle, the utility model discloses in adopted rack and pinion's sharp transmission form to this drive plane baffle, with this reach stable in structure, the transmission is steady, the accurate purpose of transmission, simultaneously, can satisfy polygon coating machine's application.
To further explain the structure in the present embodiment, as shown in fig. 2, the rotating apparatus 10 further includes:
a rotary cylinder 1 provided above the rotary device 11;
one end of the transmission device 2 is fixed with the rotary air 1, the other end of the transmission device 2 is fixed on the mounting plate 3, and the structure forms a rotary device 10 which mainly plays a driving role.
To further explain the structure in the embodiment, as shown in fig. 2, the transmission device 2 is a water-cooled sealing bearing seat for a rotating shaft, and mainly plays a role in sealing the structure while transmitting.
To further explain the structure in the present embodiment, as shown in fig. 2 and 3, the mobile device 20 further includes:
a gear 4 fixed on the transmission shaft 11 of the rotating device 20; form a shaft connection with the transmission shaft 20 on the rotating device 20; the rotating device 20 rotates the transmission shaft 20 on the rotating device 20 through the rotating cylinder 1.
The rack 7 is meshed with the gear 4 to form a gear-rack transmission structure; the whole device in this embodiment can drive the moving device 20 to move on the guide rail 5 through a gear rack transmission structure formed by meshing the gear rack 7 and the gear 4, so as to drive the baffle 8 to move.
In the present embodiment, for further explanation of the mobile device 20, as shown in fig. 2 and 3,
the roller carrier 6 is fixed on the rack 7 and is fixedly connected with the rack 7;
the roller 12, the roller 12 is installed on the orbit 5; the rollers 12 are arranged on the roller frame 6 in parallel; a rolling structure of a roller 12 is formed on the track 5, and a rolling clamping structure is formed by the roller 12 arranged up and down and the roller frame 6; this ensures that the rollers 12 can roll on the track 5, providing assurance as to the accuracy of the moving blind.
Further, as shown in fig. 1, the rolling groove 13 of the roller 12 is trapezoidal, the surface of the rail 5 is also trapezoidal, and the surface of the rolling groove 13 and the surface of the rail 5 are bonded to each other.
In order to realize the advantage of controlling the coating process in the vacuum coating process, as shown in fig. 2 and fig. 3, the baffle 8 in this embodiment is a planar structure, and a plurality of spacers 14 are disposed on one side of the baffle 8. The baffle 8 is made of stainless steel; the material of the division bar 14 is aluminum.
In the rotating device 10 of the present embodiment, a motor may be used as the rotating device of the present invention. Referring to fig. 2, a water inlet pipe 14 and a water outlet pipe 15 are disposed on two sides of the transmission device 2 in this embodiment, and are respectively connected to an inlet and an outlet of cooling water.
The planar cathode gear and rack driving baffle plate in the embodiment is used for a polygonal film coating machine, mainly utilizes the planar structure of the baffle plate 8, and has the technical characteristics of stable structure, stable transmission and more accurate transmission.
It will be understood by those skilled in the art that the foregoing embodiments are specific examples of the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in its practical application.

Claims (10)

1. A planar cathode rack and pinion drive baffle, comprising:
mounting a plate;
the rotating device is arranged above the mounting plate;
the guide rail is arranged below the mounting plate and is fixed with the mounting plate through a bracket;
the moving device is arranged on the guide rail and is in sliding connection with the guide rail;
and the baffle is arranged below the moving device and is fixed with the moving device.
2. The planar cathode rack and pinion drive baffle according to claim 1 wherein said rotating means further comprises:
the rotating cylinder is arranged above the rotating device;
one end of the transmission device is fixed with the rotary cylinder, and the other end of the transmission device is fixed on the mounting plate.
3. The planar cathode gear and rack drive baffle plate as claimed in claim 2, wherein said transmission means is a water-cooled rotary shaft seal bearing seat.
4. The planar cathode rack and pinion drive baffle according to claim 1 wherein said moving means further comprises:
the gear is fixed on a transmission shaft of the rotating device; the rotating device is connected with a transmission shaft on the rotating device in a shaft mode;
the rack is meshed with the gear to form a gear-rack transmission structure;
the roller carrier is fixed on the rack and fixedly connected with the rack;
the roller is arranged on the track; the rollers are arranged on the roller frame in parallel; the rolling structure of the roller is formed on the track, and the rolling clamping structure is formed by the roller arranged up and down and the roller frame.
5. The planar cathode rack and pinion drive baffle as claimed in claim 4 wherein the roller has a trapezoidal shape and the surface of the rail has a trapezoidal shape, the surface of the roller and the surface of the rail being in contact with each other.
6. The planar cathode gear and rack drive baffle plate as claimed in claim 1, wherein the baffle plate is a planar structure, and a plurality of division bars are arranged on one side of the baffle plate.
7. The planar cathode rack and pinion drive baffle as claimed in claim 6 wherein said baffle is made of stainless steel; the division bars are made of aluminum.
8. The planar cathode rack and pinion drive baffle according to claim 1 wherein said rotating means is a motor.
9. The planar cathode gear and rack driven baffle plate as claimed in claim 3, wherein a water inlet pipe and a water outlet pipe are arranged at two sides of the transmission device and are respectively connected with an inlet and an outlet of cooling water.
10. The planar cathode rack and pinion drive baffle according to any one of claims 1-9 wherein the planar cathode rack and pinion drive baffle is used in a polygon coater.
CN202022109240.9U 2020-09-23 2020-09-23 Plane cathode gear rack driving baffle Active CN213744764U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022109240.9U CN213744764U (en) 2020-09-23 2020-09-23 Plane cathode gear rack driving baffle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022109240.9U CN213744764U (en) 2020-09-23 2020-09-23 Plane cathode gear rack driving baffle

Publications (1)

Publication Number Publication Date
CN213744764U true CN213744764U (en) 2021-07-20

Family

ID=76846080

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022109240.9U Active CN213744764U (en) 2020-09-23 2020-09-23 Plane cathode gear rack driving baffle

Country Status (1)

Country Link
CN (1) CN213744764U (en)

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