CN213691956U - Coil adjusting structure of etching machine - Google Patents
Coil adjusting structure of etching machine Download PDFInfo
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- CN213691956U CN213691956U CN202022293567.6U CN202022293567U CN213691956U CN 213691956 U CN213691956 U CN 213691956U CN 202022293567 U CN202022293567 U CN 202022293567U CN 213691956 U CN213691956 U CN 213691956U
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Abstract
The utility model discloses an etching machine coil adjusting structure, which comprises an etching machine workbench and a coil arranged on the etching machine workbench; the coil is the opening ring-type and arranges on the etching machine workstation, be provided with the adjusting lever that the round can follow the etching machine workstation radius direction back-and-forth movement along the circumferencial direction on the etching machine workstation, the coil is by pressing on the medial surface of adjusting lever, one side that the etching machine workstation is located every adjusting lever is provided with the regulation seat, be provided with the rotation lead screw on the regulation seat, be provided with the screw-nut with rotation lead screw looks adaptation on the adjusting lever. The utility model discloses can be accurate adjust the position of coil, and the adjustment is convenient, and the degree of accuracy is high, but wide application in etching machine coil adjustment field.
Description
Technical Field
The utility model belongs to the technical field of LED substrate manufacturing and specifically relates to an etching machine coil adjustment structure is related to.
Background
With the increasing price competition of chips in recent two years, cost reduction is imperative, especially important material Patterned Sapphire Substrates (PSS) will play a key role, domestic enterprises begin to think that by means of technical level improvement, product key parameters are gradually improved, measures such as epitaxial equipment are adjusted, efficiency is improved and cost is reduced while product quality is guaranteed.
In the manufacturing process of the graphical sapphire substrate, a dry coupling plasma etcher is generally used in the current etching process, wherein a coil is one of the most important parts in the etcher, on one hand, the coil ionizes suitable gas to generate plasma to react with a material to be etched, and on the other hand, an electric field is utilized to guide and accelerate the plasma to bombard the surface of an etched object, so that the purpose of etching removal is realized. Therefore, the distribution of plasma is influenced by the position of the coil, the uniformity of the etched wafer is directly influenced, the position of the coil is frequently adjusted in the process of using an etching machine or in the process of installing and debugging a new etching machine at present, the requirement of high uniformity of the etched wafer is met, the whole coil needs to be detached when the position of the existing coil of the etching machine is adjusted at each time, the dismounting is inconvenient, the adjusting efficiency is low, and the position adjusting of the coil is not accurate enough.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an etching machine coil adjustment structure solves the inconvenient and inefficiency problem of current etching machine coil adjustment operation.
The utility model provides a technical scheme that its technical problem adopted is: an etching machine coil adjusting structure comprises an etching machine workbench and a coil arranged on the etching machine workbench; the coil is the opening ring-type and arranges on the etching machine workstation, be provided with the adjusting lever that the round can follow the etching machine workstation radius direction back-and-forth movement along the circumferencial direction on the etching machine workstation, the coil is by pressing on the medial surface of adjusting lever, one side that the etching machine workstation is located every adjusting lever is provided with the regulation seat, be provided with the rotation lead screw on the regulation seat, be provided with the screw-nut with rotation lead screw looks adaptation on the adjusting lever.
In order to further improve the accuracy of adjustment, a kidney-shaped hole which enables the adjusting rod to move back and forth along the radius direction of the etching machine workbench is arranged on the etching machine workbench, and a scale mark is arranged on one side of the kidney-shaped hole.
In order to prevent the lead screw from loosening in the long-term use process and enable the position of the coil to deviate, a compression bolt is further arranged on the adjusting seat, and the end portion of the compression bolt acts on the rotary lead screw.
In order to ensure the stability of the coil in a position after adjustment and avoid displacement or deformation, the adjusting rod and the coil are matched to form a planar structure, a supporting table board is arranged at the bottom of the planar structure, the bottom of the coil is supported on the supporting table board, a clamping block for clamping the upper end of the coil is arranged at the upper end of the adjusting rod, and the clamping block is fixedly connected with the adjusting rod through a bolt.
For further locking the coil, a connecting sheet is further arranged at the opening of the coil, one end of the connecting sheet is fixedly connected with one end of the coil, a U-shaped opening is formed in the other end of the connecting sheet, and the U-shaped opening is fixedly connected with the other end of the coil through a bolt.
The utility model has the advantages that: through the utility model discloses a lead screw and screw-nut cooperation drive the adjusting lever and remove to the realization is to the adjustment of coil position, and the quick adjustment location of coil can be realized to this structure, simple structure, convenient operation, the reliability is high. And the scale marks can further improve the consistency of the adjusting position of each adjusting rod, so that the adjusting rod is convenient for operators to observe and adjust, and the adjusting efficiency and accuracy are improved. The planar structure of adjusting lever makes things convenient for the coil to lean on the pressure, simultaneously, provides the support for the coil through supporting the mesa, then presss from both sides tight fixedly through pressing from both sides tight piece, when needs adjustment, loosens the bolt that presss from both sides on the tight piece, can let the coil freely stretch out and draw back the adjustment, and the coil can not topple over when the adjustment. The connection piece realizes the locking of coil after the coil adjustment is accomplished and fixes, prevents that the coil from taking place the pine and taking off in long-term use.
The present invention will be described in more detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic view of a three-dimensional structure of the present invention.
Fig. 2 is a schematic view of a three-dimensional structure of the present invention.
Fig. 3 is a schematic view of the middle adjusting seat and the matching structure thereof.
Detailed Description
In an embodiment, as shown in fig. 1 to 3, an adjusting structure for a coil of an etching machine includes an etching machine worktable 1 and a coil 2 disposed on the etching machine worktable 1, wherein the coil 2 is annularly disposed on the etching machine worktable 1. In order to adjust the position of the coil 2 conveniently, a circle of adjusting rods 3 capable of moving back and forth along the radius direction of the etching machine workbench 1 is arranged on the etching machine workbench 1 along the circumferential direction, and the number of the adjusting rods 3 can be set at equal intervals as required. The coil 2 is pressed against the inner side face of the adjusting rod 3, the portion, matched with the coil 2, of the adjusting rod 3 is of a plane structure, a supporting table board 301 is arranged at the bottom of the plane structure, the bottom of the coil 2 is supported on the supporting table board 301, a clamping block 7 for clamping the upper end of the coil 2 is arranged at the upper end of the adjusting rod 3, and the clamping block 7 is fixedly connected with the adjusting rod 3 through bolts. When the coil needs to be adjusted, the clamping block 7 is loosened, so that the coil 2 can freely move in a gap between the adjusting rod 3 and the clamping block 7, the coil 2 is conveniently adjusted in a telescopic mode, and after the coil is adjusted, the clamping block 7 is rotated by the bolt, so that the coil 2 is fixed on the adjusting rod 3. In order to further ensure that the coil 2 does not move in the long-term use process, a connecting sheet 8 is further arranged at the opening of the coil 2, one end of the connecting sheet is fixedly connected with one end of the coil 2, a U-shaped opening 801 is formed in the other end of the connecting sheet 8, and the U-shaped opening 801 is fixedly connected with the other end of the coil 2 through a bolt. When the coil 2 is adjusted, the bolt at the U-shaped opening 801 is loosened, the coil 2 can move freely, and when the adjustment is completed, the bolt at the U-shaped opening 801 is tightened, so that the connection fixation at the opening position of the coil 2 is realized.
In order to facilitate accurate adjustment of the position of the coil 2, an adjusting seat 4 is arranged on one side of the etching machine workbench 1, which is located on each adjusting rod 3, and only one adjusting seat is drawn in fig. 1 as a schematic diagram. The adjusting seat 4 is provided with a rotating screw rod 5, and the adjusting rod 3 is provided with a screw rod nut 6 matched with the rotating screw rod 5. The screw rod 5 is rotated to drive the screw rod nut 6 to move back and forth along the axial direction of the screw rod 5, so that the position of the coil 2 is adjusted. The other end that rotates lead screw 5 for screw-nut 6 is provided with adjusts end cap 501, preferred hexagon socket head structure, makes things convenient for the instrument to pack into and rotates, can also be the rotation handle, beats under the exogenic action for realizing rotating lead screw 5, causes coil 2 to shift, still be provided with clamp bolt 9 on adjusting seat 4, clamp bolt 9's tip is used in rotating lead screw 5, will rotate lead screw 5 and compress tightly, avoids becoming flexible. The etching machine workbench 1 is provided with a kidney-shaped hole 101 enabling the adjusting rod 3 to move back and forth along the radius direction of the etching machine workbench 1, and one side of the kidney-shaped hole 101 is provided with a scale mark 102, so that an operator can observe the moving distance conveniently and the operation accuracy is improved.
The invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above-described manner. Various insubstantial improvements are made by adopting the method conception and the technical proposal of the utility model; or without improvement, the above conception and technical solution of the present invention can be directly applied to other occasions, all within the protection scope of the present invention.
Claims (5)
1. An etching machine coil adjusting structure comprises an etching machine workbench (1) and a coil (2) arranged on the etching machine workbench (1); the method is characterized in that: coil (2) are the opening ring-type and arrange on etching machine workstation (1), be provided with adjustment rod (3) that the round can follow etching machine workstation (1) radius direction back-and-forth movement along circumferencial direction on etching machine workstation (1), coil (2) are by pressing on the medial surface of adjustment rod (3), one side that etching machine workstation (1) is located every adjustment rod (3) is provided with adjusts seat (4), be provided with on adjusting seat (4) and rotate lead screw (5), be provided with on adjustment rod (3) and rotate lead screw nut (6) of lead screw (5) looks adaptation.
2. The etcher coil adjustment structure as defined in claim 1, wherein: the etching machine workbench (1) is provided with a waist-shaped hole (101) enabling the adjusting rod (3) to move back and forth along the radius direction of the etching machine workbench (1), and one side of the waist-shaped hole (101) is provided with a scale mark (102).
3. The etcher coil adjustment structure as defined in claim 1, wherein: the adjusting seat (4) is also provided with a pressing bolt (9), and the end part of the pressing bolt (9) acts on the rotating screw rod (5).
4. The etcher coil adjustment structure as defined in claim 1, wherein: the adjusting rod (3) and the coil (2) are matched, the bottom of the plane structure is provided with a supporting table board (301), the bottom of the coil (2) is supported on the supporting table board (301), the upper end of the adjusting rod (3) is provided with a clamping block (7) for clamping the upper end of the coil (2), and the clamping block (7) is fixedly connected with the adjusting rod (3) through a bolt.
5. The etcher coil adjustment structure as defined in claim 1, wherein: the opening part of the coil (2) is further provided with a connecting piece (8), one end of the connecting piece is fixedly connected with one end of the coil (2), the other end of the connecting piece (8) is provided with a U-shaped opening (801), and the U-shaped opening (801) is fixedly connected with the other end of the coil (2) through a bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022293567.6U CN213691956U (en) | 2020-10-15 | 2020-10-15 | Coil adjusting structure of etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022293567.6U CN213691956U (en) | 2020-10-15 | 2020-10-15 | Coil adjusting structure of etching machine |
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| Publication Number | Publication Date |
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| CN213691956U true CN213691956U (en) | 2021-07-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022293567.6U Active CN213691956U (en) | 2020-10-15 | 2020-10-15 | Coil adjusting structure of etching machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114599142A (en) * | 2022-03-07 | 2022-06-07 | 盛吉盛(宁波)半导体科技有限公司 | Plasma conditioning device, plasma conditioning method, plasma generating device, and semiconductor processing device |
-
2020
- 2020-10-15 CN CN202022293567.6U patent/CN213691956U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114599142A (en) * | 2022-03-07 | 2022-06-07 | 盛吉盛(宁波)半导体科技有限公司 | Plasma conditioning device, plasma conditioning method, plasma generating device, and semiconductor processing device |
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