CN213688581U - Gas flow standard device adopting balance pipeline - Google Patents

Gas flow standard device adopting balance pipeline Download PDF

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CN213688581U
CN213688581U CN202023087023.0U CN202023087023U CN213688581U CN 213688581 U CN213688581 U CN 213688581U CN 202023087023 U CN202023087023 U CN 202023087023U CN 213688581 U CN213688581 U CN 213688581U
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balance
flow
branch
measuring
measurement
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王晴晴
彭衡芾
髙童
李国占
张洪军
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China Jiliang University
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Abstract

The utility model discloses a gas flow standard device adopting a balance pipeline, which comprises a collecting cavity, a flow regulating valve, a fan, a flow measuring pipeline, a flow balance pipeline, an atmospheric pressure and temperature and humidity sensor; a pressure sensor; a micro differential pressure sensor; a measurement and control unit; a computer; the collection cavity is connected with the fan. The flow measurement pipeline comprises a measurement branch communicating pipe and a measurement branch (a measurement laminar flow element and a measurement ball valve); the flow balance pipeline comprises a balance branch communicating pipe and a balance branch (a balance laminar flow element and a balance ball valve); each measuring branch corresponds to a balance branch with the same structure. The flow measurement pipeline and the flow balance pipeline are positioned on two sides of the collecting cavity; a first pressure tapping pipe led out from the measuring branch communicating pipe is respectively connected to a high-pressure interface and a low-pressure interface of the micro differential pressure sensor; and a second pressure taking pipe is led out from the measuring branch communicating pipe and connected with the pressure sensor. The problems of accurate measurement of micro gas flow and automatic flow regulation and control are solved; the method is suitable for gas micro-flow verification and calibration.

Description

Gas flow standard device adopting balance pipeline
Technical Field
The utility model relates to a flowmeter examination calibration technical field specifically is an adopt balance pipeline's standard meter method gas flow standard device.
Background
The standard meter method flow standard device is widely applied to the field of verification and calibration of the gas flowmeter. In the design and development of a standard gas flow standard device by a standard meter method, flow regulation and control are a technical problem which must be solved, and flow regulation is generally realized by adopting a flow regulation valve, changing the rotating speed of a fan or combining the two. Because flow control valve, fan and pipeline characteristic are all non-linear, the long, the not good accuracy of regulation time can appear in flow automatically regulated and control, the difficult stable condition even. In addition, when the flow test range is very large, a single fan often works unstably under a small-flow working condition, two fans and pipelines with different sizes are generally required to be matched, and the complexity of the equipment is increased.
For the selection of standard flowmeters, turbine flowmeters, roots (roots) flowmeters and high-precision ultrasonic flowmeters are commonly used, and the flowmeters are suitable for conventional flow ranges. For micro gas flow measurement, the sound velocity nozzle gas flow standard device obtains a required flow point by using the characteristic of constant flow of a sound velocity nozzle and adopting a mode of combining a plurality of nozzles, realizes flow regulation, and is convenient and reliable to measure, so that the device is more generally applied. However, this method is limited in the aspect of minute flow measurement due to the difficulty in processing the minute nozzles, and further, the energy consumption of the apparatus is large due to the need of a vacuum pump or an air compressor.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an adopt gas flow standard device of balanced pipeline can solve one or more among the above-mentioned technical problem.
In order to achieve the above object, the present invention provides the following technical solutions:
a gas flow standard device adopting a balance pipeline comprises a collecting cavity, a flow regulating valve, a fan, a flow measuring pipeline, a flow balance pipeline and atmospheric pressure and temperature and humidity sensors; a pressure sensor; a micro differential pressure sensor; a measurement and control unit; a computer; the collection cavity is communicated with an air inlet of the fan, and a flow regulating valve is arranged between the fan and the collection cavity.
The flow measurement pipeline comprises a measurement branch communicating pipe and a measurement branch; the measuring branch comprises a measuring laminar flow element and a measuring ball valve; the number of the measuring branches is n, wherein n is more than or equal to 1.
The flow balance pipeline comprises a balance branch communicating pipe and a balance branch; the balance branch comprises a balance laminar flow element and a balance ball valve; the number of the balancing branches is n, wherein n is more than or equal to 1.
The flow measurement pipeline and the flow balance pipeline are positioned on two sides of the collecting cavity.
One side of the measuring branch communicating pipe is used for connecting a measured flowmeter, and the other side of the measuring branch communicating pipe is communicated with the collecting cavity through the measuring branch.
One side of the balance branch communicating pipe is communicated with the atmosphere, and the other side of the balance branch communicating pipe is communicated with the collecting cavity through the balance branch.
Each measuring branch corresponds to one balancing branch with the same structure.
The measuring branch communicating pipe leads out a first pressure taking pipe to be connected with a high-pressure interface of the micro differential pressure sensor, and the collecting cavity leads out a pressure taking pipe to be connected with a low-pressure interface of the micro differential pressure sensor; and a second pressure taking pipe is led out from the measuring branch communicating pipe and connected with the pressure sensor.
The atmospheric pressure and temperature and humidity sensor, the pressure sensor and the micro differential pressure sensor are all connected to the measurement and control unit; the measurement and control unit is connected with the computer.
Preferably: the measuring ball valves in the measuring branch circuits which have the same structure and correspond to each other and the balance ball valves in the balance branch circuits are in a complementary relationship.
Preferably: at least 99% of the flow resistance in the conduit comes from the laminar flow element in each measuring branch or balancing branch.
Preferably: the measurement laminar flow elements positioned in different measurement branches contain a plurality of capillaries, wherein the lengths and the inner diameters of the capillaries are completely the same, and the number of the capillaries is different; the balance laminar flow elements in different balance branches contain a plurality of capillaries, wherein the lengths and the inner diameters of the capillaries are completely the same, and the number of the capillaries is different.
Preferably: the number of the measuring branches is five, and the measuring branches are connected in parallel; the balance branches are five and are connected in parallel.
Preferably: the number of the measuring branches is seven, and the measuring branches are connected in parallel; the number of the balance branches is seven, and the balance branches are connected in parallel.
The technical effects of the utility model are that:
1. the utility model discloses the combination that well each measurement branch road of accessible put through or closed realizes measuring flow control, and flow control is simple, quick, can improve the efficiency of software testing of device.
2. The flow is balanced by adopting a flow pipeline, the working condition of the fan is unchanged, the flow of a certain working flow channel is only determined by the initial opening of the flow regulating valve, or the flow calibrating and calibrating requirements in a wider range can be met by changing the opening of the flow regulating valve, the flow application range of the device is widened, and the flexibility of the device is improved.
3. Adopt the flow to adopt balanced pipeline, be equivalent to there being the bypass effect, the fan is in preferred operating mode scope all the time in the measurement process, and the operation is stable, can guarantee the stability of flowing in the test pipeline. The device has wide flow range, but does not need two or more fans.
4. The capillary tube specifications in each laminar flow element are consistent, and under the condition that the differential pressure is the same, the flow of each laminar flow element is in direct proportion to the number of capillary tubes, so that the design and the model selection of the laminar flow elements with a certain flow proportional relation are facilitated. By combining a flow balance method, the total flow passing through the whole pipeline system is constant, the differential pressure on two sides of the laminar flow element in the working flow channel is constant, namely, the flow passing through each laminar flow element only has two values, namely '0' (channel closing) or '1' (flow value determined by the constant differential pressure), the combined flow is the sum of the flows of the laminar flow elements in each measuring branch, and more accurate flow points can be obtained by adding different measuring branches.
5. The laminar flow meter has the characteristics of accurate measurement, good repeatability, wide range ratio, stability, reliability, low requirement on a straight pipe section and the like, and is very suitable for accurately measuring the micro gas flow. The invention solves the problems of accurate measurement of the micro gas flow and automatic flow regulation and control, and is very suitable for the verification and calibration of the micro gas flow.
Drawings
The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
FIG. 1 is a schematic diagram of a gas flow calibration apparatus using a flow balance pipeline.
Fig. 2 is a schematic diagram of a flow balance method pipeline system modeling.
Wherein the figures include the following reference numerals:
1 connecting a pipeline; 2 flow measurement pipeline; 3 a collection cavity; 4 flow regulating valve; 5, a fan; 6 flow balance pipeline; 7, a sensing, measuring and controlling system; 8-measured flow meter.
20 measuring branch communicating pipes; 21 measuring branch one; 22 a measurement branch II; 23, a third measuring branch; 24 measuring branch four; 25 a measurement branch five; 211 measuring laminar flow element a; 221 a measurement laminar flow element B; 231 measuring the laminar flow element C; 241 measuring a laminar flow element D; 251 a measurement laminar flow element E; 212 measure ball valve A; 222 measuring the ball valve B; 232 measuring ball valve C; 242 measure ball valve D; 252 measure ball valve E;
60 balance branch communicating pipes; 61 balance branch one; 62 balance branch two; 63 balancing branch three; 64 balance branch four; 65 balance branch five; 611 balancing laminar flow element a'; 621 a balanced laminar flow element B'; 631 balance laminar flow element C'; 641 a balanced laminar flow element D'; 651 balanced laminar flow element E'; 612 balanced ball valve a'; 622 balance ball valve B'; 632 a balanced ball valve C'; 642 balance ball valve D'; 652 balance ball valve E'
71 atmospheric pressure and temperature and humidity sensors; 72 a pressure sensor; 73 micro differential pressure sensor; 74 a measurement and control unit; 75 computer.
Detailed Description
The invention will be described in detail with reference to the drawings and specific embodiments, wherein the exemplary embodiments and the description are only intended to explain the invention, but not to limit the invention in a proper manner.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
As shown in fig. 1. A gas flow standard device adopting a balance pipeline comprises a collecting cavity 3, a flow regulating valve 4, a fan 5, a flow measuring pipeline, a flow balance pipeline and an atmospheric pressure and temperature and humidity sensor; a pressure sensor; a micro differential pressure sensor; a measurement and control unit; a computer; the collection cavity is communicated with an air inlet of the fan, and a flow regulating valve is arranged between the fan and the collection cavity.
A measurement branch communicating pipe 20, a balance branch communicating pipe 60, a measurement branch, a balance branch, an atmospheric pressure and temperature and humidity sensor 71; a pressure sensor 72; a micro differential pressure sensor 73; a measurement and control unit 74; and a computer 75. Wherein, the atmospheric pressure and temperature and humidity sensor 71, the pressure sensor 72, the micro differential pressure sensor 73, the Measurement and Control Unit (MCU)74 and the computer 75 jointly form a sensing and measurement and control system 7.
In some embodiments, the flow measurement line 2 comprises a measurement branch communication pipe 20 and a measurement branch; the measuring branch comprises a measuring laminar flow element and a measuring ball valve; the number of the measuring branches is n, wherein n is more than or equal to 1.
Preferably: the number of the measuring branches is five, and the measuring branches are connected in parallel; namely: the measurement branch circuit I21, the measurement laminar flow element A211 and the measurement ball valve A212; a second measuring branch 22, a laminar flow measuring element B221 and a measuring ball valve B222; a measuring branch III 23, a measuring laminar flow element C231 and a measuring ball valve C232; a measuring branch line four 24, a measuring laminar flow element D241 and a measuring ball valve D242; a measurement branch circuit five 25, a measurement laminar flow element E251 and a measurement ball valve E252.
The lengths and the inner diameters of the capillaries of the laminar flow measuring elements of the first to the fifth measuring branches are completely the same, and the number of the capillaries is different.
In certain embodiments, the flow balance circuit 6 comprises a balance branch communication pipe 60 and a balance branch; the balance branch comprises a balance laminar flow element and a balance ball valve; the number of the balancing branches is n, wherein n is more than or equal to 1.
Preferably: the number of the balance branches is five, and the five balance branches are connected in parallel; namely: a first balance branch 61, a balance laminar flow element A '611 and a balance ball valve A' 612; a second balance branch 62, a balance laminar flow element B '621 and a balance ball valve B' 622; a balance branch III 63, a balance laminar flow element C '631 and a balance ball valve C' 632; a balance branch four 64, a balance laminar flow element D '641 and a balance ball valve D' 642; a balance branch five 65, a balance laminar flow element E '651 and a balance ball valve E' 652.
The lengths and the inner diameters of the capillaries of the balance laminar flow elements of the first to the fifth balance branches are completely the same, and the number of the capillaries is different.
The flow measurement pipeline 2 and the flow balance pipeline 6 are positioned at two sides of the collecting cavity 3. One side of the measuring branch communicating pipe is used for connecting a measured flowmeter, and the other side of the measuring branch communicating pipe is communicated with the collecting cavity through the measuring branch. One side of the balance branch communicating pipe is communicated with the atmosphere, and the other side of the balance branch communicating pipe is communicated with the collecting cavity through the balance branch.
The measuring branch communicating pipe leads out a first pressure taking pipe to be connected with a high-pressure interface of the micro differential pressure sensor, and the collecting cavity leads out a pressure taking pipe to be connected with a low-pressure interface of the micro differential pressure sensor; and a second pressure taking pipe is led out from the measuring branch communicating pipe and connected with the pressure sensor.
The atmospheric pressure and temperature and humidity sensor, the pressure sensor and the micro differential pressure sensor are all connected to the measurement and control unit; the measurement and control unit is connected with the computer.
Each measuring branch corresponds to one balancing branch with the same structure. Namely, the measurement branches one to five correspond to the balance branches one to five one by one according to numbers. (for example: the first measuring branch 21 corresponds to the first balancing branch 61, and the corresponding laminar flow measuring element A211 and the laminar flow balancing element A' 611 have the same capillary length, the same inner diameter and the same number)
The branch measuring communicating pipe leads out a first pressure taking pipe to be connected with a high-pressure interface of the micro differential pressure sensor, and the collecting cavity leads out a low-pressure interface of the pressure taking pipe to be connected with the micro differential pressure sensor. And a second pressure taking pipe is led out from the measuring branch communicating pipe and connected with the pressure sensor. The first and second pressure tapping pipes may be one pipe (as shown in fig. 1).
The atmospheric pressure and temperature and humidity sensor, the pressure sensor and the micro differential pressure sensor are all connected to the measurement and control unit; the measurement and control unit is connected with the computer.
Pressure taking pipes are respectively led out from the measuring branch communicating pipe 20 and the collecting cavity 3, and are connected to high-low pressure interfaces of a micro differential pressure sensor for measuring the differential pressure at two ends of a laminar flow element; meanwhile, a pressure sampling pipe led out from the measuring branch communicating pipe is connected to a pressure sensor and used for measuring the absolute pressure of the pressure sampling pipe; the atmospheric pressure and temperature and humidity sensor is used for measuring the atmospheric pressure and temperature and humidity of the environment; the measurement and control unit 74 and the computer 75 are used for data acquisition of each sensor and control of each valve, data processing and display output, and the like.
Preferably: the measuring ball valves in the measuring branch circuits which have the same structure and correspond to each other and the balance ball valves in the balance branch circuits are in a complementary relationship. If the ball valve A (231) is opened, the ball valve A '(631) is closed, the ball valve A (231) is closed, the ball valve A' (631) is opened, the flow rates of the two corresponding pipelines are complementary, so that the total impedance of the pipeline system is kept unchanged, the total flow rate is kept constant, the working condition of the fan is unchanged, and the flow rate balance pipeline plays a role in balancing the total flow rate. In this case, as for the flow measurement pipeline, the flow of one pipeline is switched on or off, the flow of other pipelines is not affected, and the flow regulation and control can be conveniently realized through the switching combination of the valves of the measurement branch circuits.
Preferably: at least 99% of the flow resistance in the conduit comes from the laminar flow element in each measuring branch or balancing branch. (i.e., the flow resistance of the other parts of the pipeline is less than 1%)
The working process of the device is as follows:
after the measured flowmeter 8 is installed in place, all valves (all measuring ball valves) in the flow measuring pipeline 2 are opened, all valves (all balancing ball valves) in the flow balancing pipeline 6 are closed, then the fan 5 is started, the preset maximum measuring flow is adjusted through the flow adjusting valve 4, then the on and off of all measuring branches (consisting of the measuring branches and the balancing branches) are controlled through the ball valves to change the measuring flow, and the sensing and measuring and controlling system 7 reads signals such as differential pressure, environment temperature and humidity, atmospheric pressure and the like, so that the flow value is obtained, and the test is completed.
To further illustrate the flow resistance and flow characteristics of the piping system, a simplified flow balance piping system modeling diagram is shown in FIG. 2.
The flow of fluid through each measurement branch is denoted as QiThe flow rate of the corresponding balance branch is Qi', i-1-5. The flow resistance loss of a certain pipe can be divided into two parts, one part is the pressure drop delta P generated by the laminar flow element1,iThe other part is the pressure drop deltaP generated by the flow through the pipeline and the valve2,i
ΔP1,iAnd Δ P2,iLinear and non-linear pressure drops, RiAnd riReferred to as flow resistance, RiDefined as the ratio of linear pressure drop to flow, riDefined as the ratio of the nonlinear voltage drop to the square of the flow, similar to the resistance in a circuit, is labeled in fig. 2.
The valve switches of the measuring branch and the balancing branch are in a complementary relationship, the impedance of the connected side is marked as solid, and the impedance of the unconnected side is marked as hollow (note: which connected side is arbitrarily given in fig. 2, and the position relationship of the branches in the corresponding relationship is also arbitrary).
The flow regulating valve is modeled as an adjustable impedance Rv
The inlet pressure of the flow measurement pipeline (2) is the pressure P in the downstream pipe of the measured flowmeter (8)FThe inlet pressure of the flow balance pipeline (6) is atmospheric pressure (relative pressure)Pressure is 0), the pressure before the flow regulating valve (4) is PbPressure after valve is P0(i.e., the draft of the blower).
The flow rate of the flow measurement pipeline is Q, the flow rate of the flow balance pipeline is Q', and the total flow rate passing through the auxiliary fan is Q0=Q+Q’。
Let Delta Pm=PF-Pb,ΔPc=0-Pb=-PbThe driving pressure difference of the measuring pipeline and the compensating pipeline is respectively. Obviously, when the pressure loss of the measured flowmeter is not 0, the driving pressure difference is different, and thus, the complete flow complementation relationship is not obtained.
Therefore, to satisfy the approximate complementary relationship, P should be guaranteed in the designFIs much smaller than P in valuebI.e. | PF|<<|PbI, typically taken as | PF|<0.1|Pb|。
Satisfy | PF|<<|PbUnder the condition of I, the measuring pipeline and the compensating pipeline are approximately complementary, the overall working condition of a pipeline system can be ensured to be basically unchanged, and theoretically, the combined flow regulation can be realized by connecting different measuring branches, but the design process is relatively complex due to the nonlinear influence of the impedance r in a single pipeline.
If r is small and negligible, only the linear pressure loss of the laminar flow element exists in each pipeline, and the system can really realize accurate adjustment based on a flow superposition method, which can be realized in practical design by adopting pipelines and valves with large enough diameters and low enough flow velocity in the pipelines, so that the delta P is enabled2,iSmall and negligible.
Therefore, the present invention preferably has a flow resistance in each of the pipes other than the laminar flow element within 1% of the total flow resistance of the pipe.
The lengths and the inner diameters of the capillaries in the laminar flow elements are completely the same, and the difference is the number of the capillaries. When the flow resistance outside the laminar flow element is neglected, the flow of each flow channel is in direct proportion to the number of capillary tubes in the laminar flow element, and the flow combination model of each measuring branch is linear and very simple in combination. For example, assume 5 measurement branchesThe ratio of the number of the capillary tubes of the laminar flow element is 1:3:6:10:20, and the flow rate of the minimum measuring branch is q, so 32 combinations of 29 flow rates between 0 and 40q can be obtained through the combination. The flow combinations are given in table 1. If the flow rate of the minimum measuring branch is 1 unit flow rate, the flow rates of other measuring branches are respectively 3,4,6 and 10 flow rate units, and the combined flow rate is maximum 40 flow rate units. The relative flow rate Q, Q/Q corresponding to the maximum flow rate is also given in table 1max×100%。
TABLE 1 Combined flow List
Figure BDA0002847415780000061
Figure BDA0002847415780000071
If a wider flow range needs to be combined, parallel measuring branches can be added, for example, 7 parallel measuring branches can be conveniently combined to form a 160-fold range ratio.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. The utility model provides an adopt gas flow standard device of balanced pipeline which characterized in that: the device comprises a collecting cavity, a flow regulating valve, a fan, a flow measuring pipeline, a flow balancing pipeline and atmospheric pressure and temperature and humidity sensors; a pressure sensor; a micro differential pressure sensor; a measurement and control unit; a computer;
the collection cavity is communicated with an air inlet of the fan, and a flow regulating valve is arranged between the fan and the collection cavity;
the flow measurement pipeline comprises a measurement branch communicating pipe and a measurement branch; the measuring branch comprises a measuring laminar flow element and a measuring ball valve;
the flow balance pipeline comprises a balance branch communicating pipe and a balance branch; the balance branch comprises a balance laminar flow element and a balance ball valve;
the flow measurement pipeline and the flow balance pipeline are positioned on two sides of the collecting cavity;
one side of the measuring branch communicating pipe is used for connecting a measured flowmeter, and the other side of the measuring branch communicating pipe is communicated with the collecting cavity through a measuring branch;
one side of the balance branch communicating pipe is communicated with the atmosphere, and the other side of the balance branch communicating pipe is communicated with the collecting cavity through a balance branch;
each measuring branch corresponds to one balancing branch with the same structure;
the measuring branch communicating pipe leads out a first pressure taking pipe to be connected with a high-pressure interface of the micro differential pressure sensor, and the collecting cavity leads out a pressure taking pipe to be connected with a low-pressure interface of the micro differential pressure sensor;
a second pressure taking pipe is led out of the measuring branch communicating pipe and connected with a pressure sensor;
the atmospheric pressure and temperature and humidity sensor, the pressure sensor and the micro differential pressure sensor are all connected to the measurement and control unit; the measurement and control unit is connected with the computer.
2. The gas flow calibration device with equalization piping according to claim 1, wherein: the measuring ball valves in the measuring branch circuits which have the same structure and correspond to each other and the balance ball valves in the balance branch circuits are in a complementary relationship.
3. The gas flow calibration device with equalization piping according to claim 1, wherein: at least 99% of the flow resistance in the conduit comes from the laminar flow element in each measuring branch or balancing branch.
4. The gas flow calibration device with equalization piping according to claim 1, wherein: the measurement laminar flow elements positioned in different measurement branches contain a plurality of capillaries, wherein the lengths and the inner diameters of the capillaries are completely the same, and the number of the capillaries is different; the balance laminar flow elements in different balance branches contain a plurality of capillaries, wherein the lengths and the inner diameters of the capillaries are completely the same, and the number of the capillaries is different.
5. The gas flow rate standard device using a balance pipe according to any one of claims 1 to 4, wherein: the number of the measuring branches is five, and the measuring branches are connected in parallel; the balance branches are five and are connected in parallel.
6. The gas flow rate standard device using a balance pipe according to any one of claims 1 to 4, wherein: the number of the measuring branches is seven, and the measuring branches are connected in parallel; the number of the balance branches is seven, and the balance branches are connected in parallel.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115284075A (en) * 2022-09-28 2022-11-04 山东豪迈机械科技股份有限公司 Machine tool static pressure cavity pressure detection compensation device and numerical control machine tool

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115284075A (en) * 2022-09-28 2022-11-04 山东豪迈机械科技股份有限公司 Machine tool static pressure cavity pressure detection compensation device and numerical control machine tool
CN115284075B (en) * 2022-09-28 2023-01-31 山东豪迈机械科技股份有限公司 Machine tool static pressure cavity pressure detection compensation device and numerical control machine tool

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