CN213680860U

CN213680860U - Vacuum coating machine hanger

Info

Publication number: CN213680860U
Application number: CN202022247127.7U
Authority: CN
Inventors: 胡光远; 许圆吉; 肖忠; 刘成龙
Original assignee: Ningbo Siwei Automobile Intelligent Technology Co ltd
Current assignee: Ningbo Siwei Automobile Intelligent Technology Co ltd
Priority date: 2020-10-10
Filing date: 2020-10-10
Publication date: 2021-07-13
Anticipated expiration: 2030-10-10

Abstract

The application relates to a vacuum coating machine hanger, and belongs to the technical field of coating equipment. The suspension unit comprises a suspension member and a plurality of suspension units, wherein the suspension units are arranged at intervals along the axis direction of the suspension member, the suspension units comprise suspension extension pieces and sliding pieces, the suspension extension pieces are arranged in a plurality of intervals along the circumferential direction of the suspension member, the sliding pieces are arranged in a plurality of intervals, the sliding pieces are arranged on the suspension extension pieces in a sliding mode in a one-to-one correspondence mode, and one ends, far away from the support rod, of the sliding pieces are provided with installation positions for installing workpieces. The hanger has the advantages that workpieces with different widths can be installed, and mutual interference between the workpieces on the hanger is not easy to happen.

Description

Vacuum coating machine hanger

Technical Field

The application relates to the technical field of coating equipment, in particular to a vacuum coating machine hanger.

Background

At present, the coating process is widely applied to various fields such as optics, semiconductors and the like. The existing coating process usually uses Physical Vapor Deposition (PVD) as the main material. The operation method is that the workpiece to be coated is cleaned and put on a hanger, and then the workpiece is sent into a coating machine for heating and vacuum pumping. After the high vacuum state is formed around the workpiece to be coated, the film material is heated to convert the film material from a solid state into a gaseous state or an ionic state, and the film material passes through the space from the evaporation source to reach the surface of the workpiece to be coated, and is deposited on the surface to gradually form a film.

The existing hanging tool generally comprises a hanging rod pipe and a plurality of hanging part discs, wherein the hanging part discs are arranged at intervals along the axis direction of the hanging rod pipe, a plurality of mounting positions are circumferentially arranged on each hanging part disc, and each mounting position can be used for mounting a workpiece.

In view of the above-mentioned related art, the inventor believes that since different workpieces need to be placed on the hanger, the widths of the different workpieces are different, and when the width of the workpieces exceeds the distance between adjacent mounting positions, the workpieces are likely to interfere with each other.

SUMMERY OF THE UTILITY MODEL

In order to install workpieces with different widths on the hanger and prevent the workpieces on the hanger from interfering with each other easily, the application provides a vacuum coating machine hanger.

The application provides a vacuum coating machine hanger adopts following technical scheme:

the utility model provides a vacuum coating machine hanger, is including supporting pole and a plurality of unit that hangs, and is a plurality of hang the unit and follow support pole axis direction interval sets up, hang the unit including overhanging piece and sliding part, overhanging piece has a plurality ofly, and is a plurality of overhanging piece is followed support pole circumference interval sets up, sliding part has a plurality ofly, and is a plurality of sliding part one-to-one slide install in on the overhanging piece, sliding part is kept away from along the direction of sliding the one end of supporting pole is provided with the installation position that supplies the work piece installation.

Through adopting above-mentioned technical scheme, through set up a plurality of suspension unit on supporting the pole, supply the work piece to settle through the suspension unit that sets up, the overhanging part confession sliding part installation of suspension unit, sliding part slidable mounting is on overhanging part, make sliding part can slide towards the direction of keeping away from supporting the pole, make the installation position on the sliding part slide towards the direction of keeping away from supporting the pole, thereby the diameter grow of the same circle at installation position place on a plurality of sliding parts becomes the girth lengthening, finally make the distance grow between the adjacent installation position, thereby can install the work piece that the width is bigger, can adjust sliding part according to the size of work piece and carry out the adaptation, be difficult to mutual interference between the adjacent work piece.

Optionally, a plurality of first perforation have been seted up on the piece that stretches, and is a plurality of first perforation is followed a piece length direction interval sets up stretches, a plurality of second perforation have been seted up on the sliding part, and is a plurality of the second is perforated to be followed a piece length direction interval sets up slides, the sliding part pass through the mounting install in stretch on the piece.

Through adopting above-mentioned technical scheme, through the first perforation of seting up, the second is perforated and the mounting carries out the fixed of sliding and overhanging piece, because first perforation and second are perforated and has all been seted up a plurality ofly, slide on overhanging piece through sliding, pass the first perforation and the second perforation that correspond through the mounting and carry out the fixed of sliding after the completion of sliding, realize the regulation of distance between the adjacent installation position, the fenestrate seting up of a plurality of first perforations and a plurality of second for the overhanging length of slide bar can be adjusted by many grades.

Optionally, the first through hole and the second through hole are both waist-shaped holes, and the fixing member is slidably disposed in the first through hole and the second through hole.

Through adopting above-mentioned technical scheme, first perforation and second set up to waist type hole for every shelves the scope of adjusting is bigger, also can finely tune under the first perforation that the mounting passed and the perforation unchangeable condition of second, makes the adjustment of sliding that can be better.

Optionally, the fixing member includes a bolt, a nut, a washer and a disc spring, the washer and the disc spring are clamped between the screw head of the bolt and the sliding member, and the disc spring is clamped between the screw head of the bolt and the washer.

Through adopting above-mentioned technical scheme, slide and hang the installation reinforcement between the piece through bolt and nut, the gasket and the dish spring that set up make the mounting difficult wearing and tearing with not hard up, the dish spring has certain elastic deformation ability simultaneously, conveniently dismantles the adjustment that the mounting slided.

Optionally, the screw of the bolt has a smaller diameter at one end close to the screw head of the bolt and is set as a sliding part, the screw of the bolt has a larger diameter at one end far away from the screw head and is set as a fastening part, the gasket and the disc spring are sleeved on the sliding part, the sliding part is located in the second through hole, and the fastening part is located in the first through hole.

Through adopting above-mentioned technical scheme, the screw rod of bolt sets up the less portion of sliding of diameter for after the nut of mounting is unscrewed, the fine setting that can slide of sliding, the screw rod of bolt can be in the second perforation more light slide, and the sliding of sliding is lighter.

Optionally, the sliding part is provided with a butt flange at the lower side, the overhanging part is provided with a support flange at the lower part, and the butt flange is abutted to the support flange.

Through adopting above-mentioned technical scheme, through set up the butt turn-ups on the piece that slides, set up the support turn-ups under the piece that stretches overhanging for the piece that slides of support that the piece that stretches by overhanging can be better, the work piece that the support that makes the piece that slides can be better was settled.

Optionally, hang the unit and still include first installation piece and second installation piece, first installation piece with the second installation piece is fixed in support outside the pole and follow support axis direction interval sets up, first installation piece is located second installation piece below, a plurality of first draw-in grooves have been seted up on the first installation piece, a plurality of second draw-in grooves have been seted up on the second installation piece, and is a plurality of the upside one-to-one of piece one end that stretches is fixed in the second draw-in groove, it is a plurality of the downside one-to-one of piece one end that stretches is fixed in the first draw-in groove, support turn-ups butt first installation piece.

Through adopting above-mentioned technical scheme, it is used for the fixed piece that stretches of installation to set up first installation piece and second installation piece, the first draw-in groove and the second draw-in groove that set up supply the installation of piece that stretches of stretching, first draw-in groove and second draw-in groove have been seted up in advance, the piece location installation of stretching is in first draw-in groove and second draw-in groove, it is more convenient to make the installation of the piece that stretches of stretching, support the first installation piece of turn-ups butt, make slide and install the work piece after, the piece that slides can transmit first installation piece through supporting the turn-ups to the force that stretches of stretching, better carries out the fixed stay to the piece that stretches.

Optionally, a mounting part is fixed on the mounting position, two clamping grooves for clamping the workpiece are formed in the mounting part, and the two clamping grooves are arranged at intervals along the length direction of the mounting part.

Through adopting above-mentioned technical scheme, set up the installed part and supply the work piece installation, set up the draw-in groove and supply the work piece to clamp, the work piece is fixed on the installed part through the mode that clamps for the work piece installation is more convenient with the dismantlement, sets up two draw-in grooves and supports two positions of work piece, makes that the work piece is settled more stably.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the plurality of suspension units are arranged on the support rod, the workpieces are arranged through the arranged suspension units, the overhanging parts of the suspension units are used for installing the sliding parts, the sliding parts are installed on the overhanging parts in a sliding mode, so that the sliding parts can slide towards the direction far away from the support rod, the installation positions on the sliding parts slide towards the direction far away from the support rod, the diameter of the same circle where the installation positions on the plurality of sliding parts are located is increased, the perimeter is increased, the distance between the adjacent installation positions is increased, the workpieces with larger width can be installed, the sliding parts can be adjusted to be matched according to the sizes of the workpieces, and the adjacent workpieces are not easy to interfere with each other;

2. the sliding piece and the overhanging piece are fixed through the first through hole, the second through hole and the fixing piece, the first through hole and the second through hole are both provided with a plurality of holes, the sliding piece slides on the overhanging piece, and after the sliding is finished, the fixing piece penetrates through the corresponding first through hole and second through hole to fix the sliding piece, so that the overhanging length of the sliding rod can be adjusted in multiple steps;

3. carry out the installation reinforcement between sliding member and the piece that stretches through bolt and nut, the gasket and the dish spring that set up make the difficult wearing and tearing of mounting and not hard up, the dish spring has certain elastic deformation ability simultaneously, conveniently dismantle the mounting and carry out the regulation of sliding member, through set up the butt turn-ups on sliding member, set up the support turn-ups under the piece that stretches, make the piece that slides that supports that the piece that stretches by overhang can be better, make the work piece that the support that slides that the piece can be better settled.

Drawings

FIG. 1 is a schematic structural diagram of the present invention, which shows a workpiece mounted on only one side;

fig. 2 is a schematic view of a mounting structure of a suspension unit of the present invention, in which only one sliding member is shown;

FIG. 3 is a schematic structural view of a suspension unit of the present invention, showing only one sliding member;

FIG. 4 is a schematic view of the structure of the overhang;

FIG. 5 is a schematic structural view of the glide;

fig. 6 is a schematic view of the structure of the fixing member.

Description of reference numerals: 1. a support rod; 2. a suspension unit; 21. an overhang; 211. supporting the flanging; 212. a first perforation; 213. a first fixing hole; 22. a sliding member; 221. butting and flanging; 222. a second perforation; 223. a second fixing hole; 23. a first mounting piece; 231. a first card slot; 24. a second mounting piece; 241. a second card slot; 25. a mounting member; 251. reinforcing the flanging; 252. a card slot; 31. a bolt; 311. a sliding part; 312. a fastening section; 32. a nut; 33. a gasket; 34. a disc spring; 4. an installation position; 5. a workpiece; 51. the fastener.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

The embodiment of the application discloses a vacuum coating machine hanger. Referring to fig. 1, a vacuum coater rack comprises a support rod 1 vertically arranged and a plurality of suspension units 2 installed at certain intervals along the axial direction of the support rod 1, wherein each suspension unit 2 can circumferentially suspend a circle of workpieces 5.

Referring to fig. 2 and 3, the suspension unit 2 includes an overhanging piece 21, a sliding piece 22, a first mounting piece 23, a second mounting piece 24 and a mounting piece 25, the first mounting piece 23 and the second mounting piece 24 are both circular ring plates, the first mounting piece 23 and the second mounting piece 24 are sleeved outside the support rod 1 and are welded and fixed, the first mounting piece 23 and the second mounting piece 24 are arranged at intervals along the axial direction of the support rod 1, the first mounting piece 23 is positioned below the second mounting piece 24, the first mounting piece 23 is provided with a plurality of first clamping grooves 231, the second mounting piece 24 is provided with a plurality of second clamping grooves 241, the overhanging pieces 21 are provided with a plurality of overhanging pieces 21 arranged at intervals along the circumferential direction of the support rod 1, the upper sides of one ends of the overhanging pieces 21 are inserted into the second clamping grooves 241 and welded and fixed one by one, the lower sides of one end of the overhanging pieces 21 are inserted into the first clamping grooves 231 one by one to one and are welded and fixed, the other ends of the plurality of overhanging pieces 21 are arranged along the radial direction of the support rod 1 in an overhanging way.

Referring to fig. 3 and 4, overhanging part 21 is a sheet metal part, and the sheet metal part on the lower side of overhanging part 21 bends out of a supporting flange 211 horizontally overhanging and setting, supporting flange 211 is located below first mounting plate and abuts against first mounting plate 23, a plurality of first through holes 212 have been further opened on overhanging part 21, in this embodiment, first through holes 212 have been opened three and are waist-shaped holes, three first through holes 212 are provided along the length direction interval of overhanging part 21, and first fixed orifices 213 (compare fig. 2) have been opened at one end of overhanging part 21 far away from supporting rod 1.

Referring to fig. 3 and 5, the sliding part 22 has a plurality of, a plurality of sliding parts 22 and a plurality of overhanging parts 21 one-to-one, the sliding part 22 is also a sheet metal part, and the sheet metal on the lower side of the sliding part 22 is bent to form a horizontally overhanging butt flange 221, a plurality of sliding parts 22 are slidably mounted on the overhanging part 21 one-to-one, the butt flange 221 is located above the support flange 211 and butt against the support flange 211, a plurality of second through holes 222 are formed in the sliding part 22, in this embodiment, the second through holes 222 are three and are waist-shaped holes, the three second through holes 222 are arranged at intervals along the length direction of the sliding part 22, and a second fixing hole 223 (compare fig. 2) is formed in one end of the sliding part 22 close to the support rod 1.

Referring to fig. 3 and 6, the sliding member 22 and the overhanging member 21 are mounted by at least two fixing members, at least two points of limit, the connection between the sliding part 22 and the overhanging part 21 is more stable, the fixing part comprises a bolt 31, a nut 32, a gasket 33 and a disc spring 34, the gasket 33 and the disc spring 34 are clamped between the screw head of the bolt 31 and the sliding part 22, the disc spring 34 is clamped between the screw head of the bolt 31 and the gasket 33, one end of the screw rod of the bolt 31, which is close to the screw head of the bolt 31, is smaller in diameter and is provided with a sliding part 311, one end of the screw rod of the bolt 31, which is far away from the screw head, is larger in diameter and is provided with a fastening part 312, the gasket 33 and the disc spring 34 are sleeved on the sliding part 311, the sliding part 311 is positioned in the second through hole 222, the fastening part 312 is positioned in the first through hole 212, the nut 32 is fastened on the fastening part 312 in a threaded manner, and the overhanging.

The first fixing hole 213 and the second fixing hole 223 that set up simultaneously also can regard as the mounted position of mounting, and bolt 31 can pass the first perforation 212 of second fixing hole 223 and fix, and bolt 31 also can pass first fixing hole 213 and second perforation 222 and fix, and the length that slide 22 overhangs also can be adjusted, simultaneously because bolt 31 can not slide in first fixing hole 213 and the second fixing hole 223 for slide 22 is difficult to become flexible with overhang 21 more.

Referring to fig. 2 and 3, one end of the sliding part 22 far away from the supporting rod 1 along the sliding direction is set to be an installation position 4 for installing a workpiece 5, the installation part 25 is also a sheet metal part, the lower side sheet metal of the installation part 25 is bent to reinforce the flanging 251, the reinforcing flanging 251 is located below the butt flanging 221 and is abutted to the butt flanging 221, the middle of the installation part 25 is welded and fixed on the installation position 4, a clamping groove 252 for clamping the workpiece 5 is formed in the installation part 25, the clamping grooves 252 are two, the two clamping grooves 252 are arranged at intervals along the length direction of the installation part 25, two clamping pieces 51 are arranged on the workpiece 5 and are clamped in the clamping grooves 252, the installation of the workpiece 5 is realized, and the installation and the taking.

The implementation principle of the vacuum coating machine hanger in the embodiment of the application is as follows: when the width of the installed workpiece 5 is too large, the fixing piece is taken down, the sliding piece 22 slides, the installation positions 4 on the sliding piece 22 extend in a hanging mode in the direction away from the support, the diameter of the same circle where the installation positions 4 are located is enlarged, the circumference of the same circle is enlarged, and finally the distance between the adjacent installation positions 4 is enlarged, so that the workpiece 5 with larger width can be installed, and the sliding piece 22 and the hanging piece 21 are fixed through the fixing piece to complete adjustment of the hanging piece.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a vacuum coating machine hanger which characterized in that: including support pole (1) and a plurality of unit (2) that hang, it is a plurality of hang unit (2) and follow support pole (1) axis direction interval sets up, hang unit (2) including overhanging piece (21) and slide (22), overhanging piece (21) have a plurality ofly, a plurality of overhanging piece (21) are followed support pole (1) circumference interval sets up, slide (22) have a plurality ofly, a plurality of slide (22) one-to-one slide install in on overhanging piece (21), slide (22) are kept away from along the direction of sliding the one end of support pole (1) is provided with installation position (4) that supply work piece (5) to install.

2. The vacuum coating machine hanger of claim 1, wherein: a plurality of first perforations (212) are formed in the overhanging piece (21), the first perforations (212) are arranged along the length direction of the overhanging piece (21) at intervals, a plurality of second perforations (222) are formed in the sliding piece (22), the second perforations (222) are arranged along the length direction of the sliding piece (22) at intervals, and the sliding piece (22) is installed on the overhanging piece (21) through a fixing piece.

3. The vacuum coating machine hanger of claim 2, wherein: the first through hole (212) and the second through hole (222) are both waist-shaped holes, and the fixing piece is slidably arranged in the first through hole (212) and the second through hole (222).

4. The vacuum coating machine hanger of claim 2, wherein: the fixing piece comprises a bolt (31), a nut (32), a gasket (33) and a disc spring (34), the gasket (33) and the disc spring (34) are clamped between the screw head of the bolt (31) and the sliding piece (22), and the disc spring (34) is clamped between the screw head of the bolt (31) and the gasket (33).

5. The vacuum coater rack as claimed in claim 4, wherein: the bolt is characterized in that the sliding portion (311) is arranged at one end, close to the screw head of the bolt (31), of the screw rod of the bolt (31) in a smaller diameter mode, the fastening portion (312) is arranged at one end, far away from the screw head, of the screw rod of the bolt (31) in a larger diameter mode, the gasket (33) and the disc spring (34) are sleeved on the sliding portion (311), the sliding portion (311) is located in the second through hole (222), and the fastening portion (312) is located in the first through hole (212).

6. The vacuum coating machine hanger of claim 1, wherein: the sliding piece (22) is provided with an abutting flanging (221) on the lower side, the overhanging piece (21) is provided with a supporting flanging (211) on the lower portion, and the abutting flanging (221) abuts against the supporting flanging (211).

7. The vacuum coater rack as claimed in claim 6, wherein: hang unit (2) and still include first installation piece (23) and second installation piece (24), first installation piece (23) with second installation piece (24) are fixed in support pole (1) is outer and follow support pole (1) axis direction interval sets up, first installation piece (23) are located second installation piece (24) below, a plurality of first draw-in grooves (231) have been seted up on first installation piece (23), a plurality of second draw-in grooves (241) have been seted up on second installation piece (24), it is a plurality of the upside one-to-one of piece (21) one end of overhanging is fixed in second draw-in groove (241), a plurality of the downside one-to-one of piece (21) one end of overhanging is fixed in first draw-in groove (231), support turn-ups (211) butt first installation piece (23).

8. The vacuum coating machine hanger of claim 1, wherein: the mounting part (25) is fixed on the mounting position (4), two clamping grooves (252) for clamping the workpiece (5) are formed in the mounting part (25), and the two clamping grooves (252) are arranged at intervals along the length direction of the mounting part (25).