CN213674891U

CN213674891U - Double-station squaring equipment for silicon single crystal rods

Info

Publication number: CN213674891U
Application number: CN202020787956.1U
Authority: CN
Inventors: 朱亮; 卢嘉彬; 周锋; 杨铁明; 高红刚; 罗叶枫; 徐开涛; 曹建伟; 傅林坚
Original assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Current assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Priority date: 2020-05-13
Filing date: 2020-05-13
Publication date: 2021-07-13
Anticipated expiration: 2030-05-13

Abstract

The utility model relates to a hard and brittle material cutting field especially relates to a be used for single crystal silicon rod duplex position evolution equipment. The automatic feeding device comprises a bottom frame, wherein two stations are symmetrically arranged on the left and right of the bottom frame, and a workbench assembly, a feeding unit assembly and a manipulator assembly are arranged on each station; each station on the bottom frame is provided with a group of parallel main and auxiliary guide rails, and the working table components are respectively arranged on the guide rails and driven by a cylinder arranged on the bottom frame to move along the guide rails; two extending platforms are respectively arranged at two ends of the underframe, a group of main and auxiliary guide rails is arranged on each extending platform, and the wire take-up and pay-off units are arranged on each group of main and auxiliary guide rails and driven by a driving motor arranged on the extending platforms through a screw rod to move along the guide rails; the utility model discloses every equipment of feed unit subassembly has two sets ofly, is the cutting in duplex position, and cutting assembly adopts "well" word line network structure, and the processing of evolution is accomplished to the one cut, and machining efficiency improves at double, and effectively reduces manual operation.

Description

Double-station squaring equipment for silicon single crystal rods

Technical Field

The utility model relates to a hard and brittle material cutting field especially relates to a be used for single crystal silicon rod duplex position evolution equipment.

Background

Silicon single crystal as an important semiconductor material has good electrical properties and thermal stability, and is found and utilized by people in the sixties of the last century to quickly replace germanium single crystal as a main material of a semiconductor. The silicon single crystal is also a main material for preparing the solar cell, and the single crystal silicon cell has the advantages of high conversion efficiency, good stability and the like, and is the most ideal photoelectric conversion material in the world at present. Under the large background of full development and utilization of green clean energy for constructing low-carbon economy in all countries in the world, the world photovoltaic industry is developed vigorously, and the quantity of monocrystalline silicon consumed in the global solar market is rapidly increased year by year.

After being pulled out from a single crystal furnace, the silicon rod of the straight-pull single crystal needs to be continuously subjected to a series of working procedures, wherein the working procedures comprise mechanical processing such as cutting, squaring, fillet grinding and plane grinding at the early stage. At present, two groups of wire saws are adopted for front and back squaring of the crystal bar squaring equipment on the market; before cutting, the diameter of the silicon rod needs to be manually measured, a crystal line of the silicon rod is found and marked, then the silicon rod is accurately clamped according to the marking line through manual feeding and then cut, and the efficiency, the cutting quality and the cutting size precision are difficult to guarantee.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a main aim at overcomes not enough among the prior art, provides one kind and is used for single crystal silicon rod duplex position evolution equipment to it is low to solve machining efficiency, artifical inaccurate problem to the crystal line.

In order to solve the technical problem, the utility model provides a double-station squaring device for a silicon single crystal rod, which comprises a bottom frame, wherein two stations are symmetrically arranged on the bottom frame in the left-right direction, and each station is provided with a workbench component, a feed unit component and a manipulator component;

each station on the bottom frame is provided with a group of parallel main and auxiliary guide rails, and the working table components are respectively arranged on the guide rails and driven by a cylinder arranged on the bottom frame to move along the guide rails; the workbench assembly comprises a headstock and a tailstock, the headstock used for clamping the crystal bar is arranged on the underframe, and the tailstock is arranged on the workbench mounting base plate; the tail seat is driven by the cylinder to move away from or approach to the head seat along the bottom plate, so that the crystal bar can be loosened and tightened; the rotary centers of the headstock and the tailstock are positioned at the same height, the dividing motor is arranged on the headstock, and when the crystal bar is clamped, the dividing motor controls the crystal bar to rotate and stop at a required angle position;

two extending platforms are respectively arranged at two ends of the underframe, a group of main and auxiliary guide rails is arranged on each extending platform, and the wire take-up and pay-off units are arranged on each group of main and auxiliary guide rails and driven by a driving motor arranged on the extending platforms through a screw rod to move along the guide rails;

the feed unit component comprises a feed unit portal frame, the feed unit portal frame is arranged on the underframe, and the top of the portal frame is provided with a main guide rail and an auxiliary guide rail which are parallel to each other and a rack; the top of the feed cutting assembly is provided with a gear and a driving motor, the gear is meshed with a rack and drives the feed cutting assembly to move along a guide rail by the driving motor, the feed cutting assembly comprises a cutting assembly mounting seat, a plurality of cutting guide wheels are arranged on the cutting assembly mounting seat, and a diamond wire is wound around the plurality of cutting guide wheels to form a wire net shaped like a Chinese character 'jing'; the tension components are arranged on two sides of the portal frame, a torque motor is used as an execution component for adjusting tension of the cutting wire, the diamond wire on each station is led out from the wire take-up and pay-off unit component on the station, bypasses the cutting guide wheel and the tension components, and finally is taken up to the wire take-up and pay-off unit component;

one side of the underframe is provided with two vertical main and auxiliary guide rails and a rack, the manipulator assembly is arranged on the main and auxiliary guide rails and is engaged by a driving motor arranged on the manipulator through the gear and the rack, so that the manipulator assembly moves along the guide rails.

As an improvement, the manipulator assembly comprises a support table and a manipulator claw; the supporting table is fixed on the bottom frame through a guide rail and a sliding block and is driven by a motor to move along the guide rail on the side part of the bottom frame through gear and rack meshing; the supporting table is provided with a main guide rail and an auxiliary guide rail which are parallel to each other and a screw rod, the motor base is arranged on the supporting table through a sliding block and a screw rod nut and is driven by a driving motor, the overturning driving motor is arranged in the motor base, and the blocking arm is connected with the overturning driving motor through a harmonic reducer; the stop arm is provided with a screw rod guide rail, the mechanical hand is arranged on the screw rod guide rail on the stop arm, and the opening and closing of the mechanical hand are realized through the driving of the motor.

As an improvement, a crystal orientation and radius detection device is also arranged on the manipulator assembly; the crystal orientation and radius detection device comprises a mounting plate and a sliding table type cylinder; the sliding table type cylinder is fixed on a mounting plate of the manipulator assembly, the measuring head assembly is fixed on a transition plate through a guide rail sliding block, and the transition plate is fixed on the sliding table type cylinder; the sensor support is arranged on the measuring head assembly, the magnetic sensor is fixed on the sensor support, the magnetic scale is fixed on the transition plate and is arranged under the magnetic sensor, and the position and the radius size of the edge line of the crystal bar are detected and determined by feeding back the highest point coordinate through the magnetic scale.

As an improvement, the flaw-piece recovery assemblies are divided into two groups, are arranged on the front side of the underframe below the feed portal frame and comprise a conveying motor, a flaw-piece rolling shaft, a conveying belt and a supporting frame; the supporting frame is arranged on the front side of the bottom frame, the two horizontal flaw-piece rolling shafts are arranged on the supporting frame in parallel, the conveying belt is wrapped on the two flaw-piece rolling shafts, and the conveying motor is arranged on one side of the supporting frame and used for driving the flaw-piece rolling shafts to rotate; the running direction of the conveyor belt is perpendicular to the running direction of the feed cutting assembly.

As an improvement, an outer cover unit is arranged outside the underframe, and the outer cover unit is a metal piece and used for protecting equipment; and a water channel is also arranged at the bottom of the bottom frame and used for discharging cooling water for mixing silicon powder in the crystal bar processing process.

Compared with the prior art, the beneficial effects of the utility model are that:

each device of the feed unit components is divided into two groups, which are double-station cutting, and the cutting components adopt a 'well' line network structure, so that the cutting processing is completed once, and the processing efficiency is improved by times; the feeding and discharging of the crystal bars are automatically completed by the manipulator, and the manipulator can move along the axial direction of the crystal bars, so that the middle parts of the crystal bars are clamped, and the feeding precision is improved; meanwhile, the manipulator is provided with a crystal orientation and radius detection device, so that the crystal orientation and the diameter of the single crystal silicon rod can be automatically detected, and manual operation is effectively reduced.

Drawings

Fig. 1 is a front view of the present invention.

Fig. 2 is the utility model discloses get rid of the plan view behind the housing panel beating subassembly.

Fig. 3 is a top view of the bottom frame of the present invention.

Fig. 4 is a front view of the feed unit of the present invention.

Fig. 5 is a plan view of the feed unit of the present invention.

FIG. 6 is a schematic view of the line network of the "well" in cutting of the present invention;

fig. 7 is a front view of the robot assembly of the present invention;

FIG. 8 is a front view of the crystal orientation and radius detecting device of the present invention;

FIG. 9 is a front view of a table assembly of the present invention;

fig. 10 is a schematic view of the flaw-piece recycling assembly of the present invention.

The reference numbers in the figures are: 100-a chassis; 200-a feed unit assembly; 300-a robot assembly; 400-a table assembly; 500-a flaw-piece recovery assembly; 600-a housing unit; 101-a chassis body; 102-main and auxiliary guide rails in the middle of the underframe; 103-extending the main and auxiliary guide rails of the platform at two ends of the underframe; 104-tailstock bottom plate; 105-a drive cylinder; 106-chassis side primary and secondary guide rails; 107-undercarriage side rack; 201-a feed unit gantry; 202-main and auxiliary guide rails on the top of the gantry; 203-cutting assembly drive motor; 204-a cutting assembly; 205-a tension assembly; 206-gantry top rack; 2041-cutting assembly mount; 2402-a vertically oriented central spindle assembly; 2403-a horizontally oriented central spindle assembly; 301-mechanical hand grasping; 302-a screw rod; 303-a guide rail; 304-a catch arm; 305-harmonic reducer; 306-a tumble drive motor; 307-driving the motor; 308-a support table; 309-a drive motor; 310-a gear; 311-crystal orientation and radius detection means; 312-a guide rail; 313-an electric machine; 3111-mounting a plate; 3112-a sliding table cylinder; 3113-transition plate; 3114-magnetic ruler; 3115-a guide rail; 3116-slide block; 3117-a measuring head assembly; 3118-sensor holder; 3119-a magnetic sensor; 3120-a housing; 401-indexing motor; 402-a header; 404-tailstock; 501-a transmission motor; 502-a support frame; 503-a conveyor belt; 504-a roller.

Detailed Description

The following examples are presented to enable those skilled in the art to more fully understand the present invention, but are not intended to limit the invention in any way.

The utility model relates to a single crystal silicon rod duplex position evolution equipment, as shown in fig. 1-3, the utility model discloses a chassis 100, the symmetry is equipped with two stations on the chassis 100, all is equipped with feed unit subassembly 200, manipulator subassembly 300, workstation subassembly 400, flaw-piece recovery subassembly 500 and dustcoat unit 600 on every station. The cover unit 600 covers the outside of the chassis 100, and is a metal member for protecting equipment. The bottom frame body of the bottom frame 100 is further provided with a water channel for discharging cooling water for mixing silicon powder in the crystal bar processing process.

The chassis 100 is provided at the middle thereof with two sets of parallel primary and secondary guide rails 102, and the table assembly 400 at each station is mounted on the primary and secondary guide rails 102 and driven by the air cylinders 105 provided on the chassis to move along the guide rails 102. As shown in fig. 9, two sets of worktable assemblies are mounted on the base frame 101, and each set of worktable assembly includes a headstock 402, a tailstock 404, a mounting base plate 104, and an index motor 401; a headstock 402 for clamping a crystal bar is arranged on the underframe 101, a tailstock 404 is arranged on the workbench mounting base plate 104, an air cylinder 105 is arranged below the base plate, and the tailstock 404 is driven by the air cylinder 105 to move away from or close to the headstock 402 along the base plate, so that the crystal bar can be tightened; the turning centers of the headstock 402 and the tailstock 404 are at the same height; the index motor 401 is mounted on the headstock 402, and controls the crystal bar to rotate and stop at a desired angular position when the crystal bar is clamped.

Two extending platforms are respectively arranged at two ends of the underframe 100, a group of main and auxiliary guide rails 103 are arranged on each extending platform, and the wire take-up and pay-off unit is arranged on each group of main and auxiliary guide rails and is driven by a driving motor arranged on the extending platform through a screw rod to move along the guide rails.

Two vertical main and sub rails 106 and a rack 107 are provided at one side of the base frame, and the robot assembly 300 is mounted on the main and sub rails 106 and engaged by a driving motor 309 provided at the robot through the rack 107 via a gear 310, so that the robot assembly 300 moves along the rails.

As shown in fig. 1, 4 and 5, the knife feed unit assembly 200 has two sets of devices for double-station cutting. The feed unit assembly 200 comprises a feed unit gantry 201, a feed cutting assembly 204 and a tension assembly 205; the feed unit gantry 201 is mounted on the underframe 101, a main guide rail 202 and a rack 206 which are parallel to each other are arranged at the top of the gantry 201, a driving motor 203 and a gear are arranged at the top of the feed cutting assembly 204, and the gear is meshed with the rack to enable the feed cutting assembly 204 to move along the guide rail. The tension components 205 are arranged on two sides of the portal frame 201, and a torque motor is used as an execution component for tension adjustment of the cutting wire, so that tension digital control is realized, and constant tension is ensured in the operation process of the multi-wire cutting machine.

As shown in fig. 6, the feeding and cutting assembly 204 includes a cutting assembly mounting seat 2041, two sets of middle main shaft assemblies 2402 in the vertical direction and two sets of middle main shaft assemblies 2403 in the horizontal direction are disposed on the cutting assembly mounting seat 2041, a plurality of cutting guide wheels are mounted on the middle main shaft assemblies 2402 and the middle main shaft assemblies 2403 and connected to a motor, and a diamond wire is wound around the plurality of cutting guide wheels to form a wire mesh in a shape like a Chinese character 'jing'; the diamond wire on each station is led out by a take-up and pay-off unit, sequentially wound through a feed cutting assembly 204 and a tension assembly 205, and finally wound through a take-up and pay-off unit.

As shown in fig. 7, the robot assembly includes a tumble drive motor 306, a harmonic reducer 305, a support table 308, a stop arm 304, and a robot gripper 301. The support table 308 is fixed to the base frame 101 by means of a rail slide 106, and the support table 308 is driven 309 by a motor to move along the rail by means of a gear 310 in engagement with a rack 107. The support table 308 is provided with parallel main and auxiliary guide rails 312, and the motor base is provided on the main and auxiliary guide rails 312 via a slider and is driven by a driving motor 307 provided on the support table via a screw rod to move along the guide rails 312. A driving overturning motor 306 is arranged in the motor base, and the current ratio 304 is connected with the driving overturning motor 306 through a harmonic reducer 305. The stop arm 304 is provided with a lead screw 302 guide rail 303; the mechanical gripper 301 is driven by a motor 313 through a screw rod guide rail on the blocking arm to realize the opening and closing of the gripper; the turnover driving motor 306 realizes 180-degree turnover of the manipulator through the harmonic reducer 305, the crystal bars arranged on the storage table are grabbed, turned over and loaded into the cutting workbench, and the crystal bars are taken down from the cutting workbench and turned over and placed on the storage table after being cut;

as shown in fig. 8, the crystal orientation and radius detection apparatus 311 includes a mounting plate 3111, a sliding table cylinder 3112, a transition plate 3113, a guide rail 3115, a slider 3116, a sensor holder 3118, a measuring head assembly 3117, a magnetic sensor 3119, a magnetic scale 3114, and a housing 3120; the crystal sliding table type cylinder 3112 is fixed on a mounting plate 3111 of the manipulator assembly, the measuring head assembly 3117 is fixed on a transition plate 3113 through a slide block 3115, the transition plate 3113 is fixed on the sliding table type cylinder 3112, a sensor support 3118 is installed on the measuring head assembly 3117, a magnetic sensor 3119 is fixed on the sensor support 3118, a magnetic scale 3114 is fixed on the transition plate 3113 and is arranged under the magnetic sensor 3119, highest point coordinates are fed back through the magnetic scale 3114, and the position and radius size of a crystal bar edge line are detected and determined.

As shown in fig. 2 and 10, the flaw-piece recovery assembly 500 includes a conveyor motor 501, two sets of flaw-piece rollers 504, a conveyor belt 503, and two support frames 502. The supporting frame 502 is installed on the lateral part of the whole machine underframe 101, the two sets of the flaw-piece rollers 504 are respectively installed on the corresponding supporting frame 502, the conveying belt 503 is wrapped on the two flaw-piece rollers, the conveying motor 501 is installed on one side of the supporting frame 502 and used for driving the flaw-piece rollers to rotate, and the running direction of the conveying belt 503 is perpendicular to that of the feed cutting assembly 304. The conveyor belt 503 conveys the flaw-piece into the external interface of the equipment to realize flaw-piece recovery.

Finally, it should be noted that the above-mentioned embodiments illustrate only specific embodiments of the invention. Obviously, the present invention is not limited to the above embodiments, and many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.

Claims

1. The double-station squaring equipment for the silicon single crystal rod is characterized by comprising a bottom frame, wherein two stations are symmetrically arranged on the left and right of the bottom frame, and each station is provided with a workbench assembly, a feed unit assembly, a flaw-piece recovery assembly and a manipulator assembly;

the feed unit component comprises a feed unit portal frame, the feed unit portal frame is arranged on the underframe, and the top of the portal frame is provided with a main guide rail and an auxiliary guide rail which are parallel to each other and a rack; the top of the feed cutting assembly is provided with a gear and a driving motor, the gear is meshed with the rack and drives the feed cutting assembly to move along a guide rail by the driving motor, the feed cutting assembly comprises a cutting assembly mounting seat, a plurality of cutting guide wheels are arranged on the cutting assembly mounting seat, and a diamond wire is wound around the plurality of cutting guide wheels to form a 'well' -shaped wire mesh; the tension components are arranged on two sides of the portal frame, a torque motor is used as an execution component for adjusting tension of the cutting wire, the diamond wire on each station is led out from the wire take-up and pay-off unit component on the station, bypasses a cutting guide wheel and the tension components, and finally is taken up to the wire take-up and pay-off unit component;

and one side of the underframe is provided with two vertical main and auxiliary guide rails and a rack, and the manipulator assembly is arranged on the main and auxiliary guide rails and is engaged by a driving motor arranged on the manipulator through the gear and the rack so that the manipulator assembly moves along the guide rails.

2. The double-station squaring equipment for single crystal silicon rods according to claim 1, characterized in that the manipulator assembly comprises a support table and a manipulator gripper; the supporting platform is fixed on the bottom frame through a guide rail and a sliding block and is driven by a motor to move along the guide rail on the side part of the bottom frame through gear and rack meshing; the supporting table is provided with a main guide rail and an auxiliary guide rail which are parallel to each other and a screw rod, the motor base is arranged on the supporting table through a sliding block and a screw rod nut and is driven by a driving motor, the overturning driving motor is arranged in the motor base, and the blocking arm is connected with the overturning driving motor through a harmonic reducer; the stop arm is provided with a screw rod guide rail, the mechanical hand is arranged on the screw rod guide rail on the stop arm, and the opening and closing of the mechanical hand are realized through the driving of the motor.

3. The double-station squaring equipment for the silicon single crystal rod according to claim 1, wherein the manipulator assembly is further provided with a crystal orientation and radius detection device; the crystal orientation and radius detection device comprises an installation plate and a sliding table type cylinder; the sliding table type cylinder is fixed on a mounting plate of the manipulator assembly, the measuring head assembly is fixed on a transition plate through a guide rail sliding block, and the transition plate is fixed on the sliding table type cylinder; the sensor support is arranged on the measuring head assembly, the magnetic sensor is fixed on the sensor support, the magnetic scale is fixed on the transition plate and is arranged under the magnetic sensor, and the position and the radius size of the edge line of the crystal bar are detected and determined by feeding back the highest point coordinate through the magnetic scale.

4. The double-station squaring device for the silicon single crystal rod according to claim 1, wherein the flaw-piece recovery components are divided into two groups, are arranged on the front side of the underframe below the feed portal frame and comprise a conveying motor, a flaw-piece rolling shaft, a conveying belt and a supporting frame; the conveying motor is arranged on one side of the supporting frame and used for driving the flaw-piece rolling shafts to rotate; the running direction of the conveyor belt is perpendicular to the running direction of the feed cutting assembly.

5. The double-station squaring device for the silicon single crystal rod according to claim 1, wherein an outer cover unit is arranged outside the bottom frame, and the outer cover unit is a sheet metal part and used for protecting equipment; and a water channel is also arranged at the bottom of the bottom frame and used for discharging cooling water for mixing silicon powder in the crystal bar processing process.