CN213655705U - Sealing device, vacuum electrode introducing sealing device and ion source - Google Patents
Sealing device, vacuum electrode introducing sealing device and ion source Download PDFInfo
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- CN213655705U CN213655705U CN202022207539.8U CN202022207539U CN213655705U CN 213655705 U CN213655705 U CN 213655705U CN 202022207539 U CN202022207539 U CN 202022207539U CN 213655705 U CN213655705 U CN 213655705U
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Abstract
The utility model discloses a sealing device, which comprises a sealing mechanism I arranged between a through hole and a workpiece sleeved in the through hole, wherein one end of the through hole is provided with a flaring section I, and the inner diameter of the flaring section I is gradually reduced along the direction from the end where the flaring section I is located to the other end; sealing mechanism I is including the suit on the work piece and be located sealing washer I in flaring section I and be used for to sealing washer I apply with the effect of the equidirectional effect of the direction that the internal diameter of flaring section I reduces gradually. The utility model also discloses a sealing device and ion source are introduced to the vacuum electrode. The utility model discloses a sealing device and vacuum electrode introduce sealing device not only can satisfy sealed requirement, and the structure is simpler moreover, and shared installation space is littleer.
Description
Technical Field
The utility model belongs to the technical field of mechanical seal, specific be a sealing device, vacuum electrode introduce sealing device and ion source.
Background
Mass spectrometers, also known as mass spectrometers, are instruments used to separate and detect different isotopes. Mass spectrometers are divided into isotope mass spectrometers, inorganic mass spectrometers and organic mass spectrometers in terms of the range of applications. Mass spectrometers are centered around an ion source, a mass analyzer and an ion detector. The ion source is a device that ionizes sample molecules under high vacuum conditions. The high vacuum electrode needs to be introduced into the ion source, and the introduction hole of the high vacuum electrode is generally sealed by a ceramic sealing component in the prior art. However, since the ceramic sealing assembly occupies a large installation space, the existing ceramic sealing assembly cannot meet the requirements in some ion sources with a compact structural design.
Disclosure of Invention
In view of this, the utility model aims at providing a sealing device and ion source are introduced to sealing device, vacuum electrode, not only can satisfy sealed requirement, and the structure is simpler moreover, and shared installation space is littleer.
In order to achieve the above purpose, the utility model provides a following technical scheme:
the utility model firstly provides a sealing device, which comprises a sealing mechanism I arranged between a through hole and a workpiece sleeved in the through hole, wherein one end of the through hole is provided with a flaring section I, and the inner diameter of the flaring section I is gradually reduced along the direction of the end where the flaring section I is located pointing to the other end; sealing mechanism I is including the suit on the work piece and be located sealing washer I in flaring section I and be used for to sealing washer I apply with the effect of the equidirectional effect of the direction that the internal diameter of flaring section I reduces gradually.
Further, the inner wall of the flaring section I is a conical surface.
Further, the taper angle of the flaring section I is 20-90 degrees.
Furthermore, the through hole comprises an internal thread section I, and the internal thread section I is positioned on one side of the flaring section I in the direction of gradually increasing the inner diameter; the sealing and pressing mechanism I comprises a sealing joint I which is sleeved on the workpiece and is in threaded fit with the internal thread section I, and a sealing pressing block I is arranged between the sealing joint I and the sealing ring I.
The utility model also provides a vacuum electrode introducing sealing device, which comprises a sealing mechanism II arranged between the electrode introducing hole and the high-voltage wire sleeved in the electrode introducing hole, wherein the outer end of the electrode introducing hole is provided with an expanding section II, and the inner diameter of the expanding section II is gradually reduced along the direction from outside to inside; and the sealing mechanism II comprises a sealing ring II which is sleeved on the high-voltage line and is positioned in the flaring section II and a sealing and pressing mechanism II which is used for applying an inward force to the sealing ring II.
Further, the inner wall of the flaring section II is a conical surface.
Furthermore, the taper angle of the flaring section II is 20-90 degrees.
Further, the electrode lead-in hole comprises an internal thread section II, and the internal thread section II is positioned on the outer side of the flaring section II; and the sealing and pressing mechanism II comprises a sealing joint II which is sleeved on the high-pressure line and is in threaded fit with the internal thread section II, and a sealing pressing block II is arranged between the sealing joint II and the sealing ring II.
Furthermore, the sealing joint II is a waterproof joint.
The utility model also provides an ion source, be in including shell and setting high-voltage pulse board in the shell, be equipped with on the shell as above vacuum electrode introduce sealing device, the electrode is introduced the hole and is set up on the shell, the high-tension line passes the electrode introduce the hole and with high-voltage pulse board is connected.
The beneficial effects of the utility model reside in that:
the utility model discloses a sealing device, through set up flaring section I and make the internal diameter of flaring section I gradually change in one end of through-hole, so, when sealing hold-down mechanism I applys to sealing washer I with the direction syntropy that its internal diameter reduces, sealing washer I produces deformation under the effect of power on the one hand, and closely cooperate with between the work piece, on the other hand, the inner wall of flaring section I applys the pressure action rather than perpendicular to sealing washer I, this pressure action has perpendicular component perpendicular to the through-hole axis and the parallel component parallel to the through-hole axis, the force balance is exerted with sealing hold-down mechanism I to the parallel component, and need the effort that the direction is opposite with perpendicular component size between sealing washer I and the work piece as the equilibrium force, also can convert the force exerted by sealing hold-down mechanism I into the sealed combination force between sealing washer I and the work piece, thereby reach better sealed effect, and has the advantages of simple structure and small occupied installation space.
In the same way, the vacuum electrode lead-in sealing device of the utility model, through setting up the flaring section II at the outer end of the electrode lead-in hole, when the sealing hold-down mechanism II applies inward force to the sealing ring II, on one hand, the sealing ring II is deformed under the action of force and is tightly matched with the workpiece, on the other hand, the inner wall of the flaring section II applies pressure action perpendicular to the sealing ring II, the pressure action has perpendicular component force perpendicular to the axis of the electrode lead-in hole and parallel component force parallel to the axis of the electrode lead-in hole, the parallel component force is balanced with the force applied by the sealing hold-down mechanism II, and the acting force which is equal to the perpendicular component force and is opposite in direction is used as balance force between the sealing ring II and the workpiece, namely, the force applied by the sealing hold-down mechanism II can be converted into sealing combination force between the sealing ring, and has the advantages of simple structure and small occupied installation space.
The ion source of the utility model introduces the sealing device by adopting the vacuum electrode, and in the using process, the inside of the shell is vacuumized, namely, the pressure difference is formed between the inside and the outside of the shell, and the pressure difference acts on the sealing ring II to apply inward pressure to the sealing ring II, so that the sealing combination force between the sealing ring II and the high-voltage wire is further enhanced, the sealing combination force can also play a role of tightening the high-voltage wire, the outer skin and the inner core of the high-voltage wire are tightly attached, and the leakage inside the high-voltage wire is further avoided; namely the utility model discloses an ion source through adopting vacuum electrode to introduce sealing device, and vacuum in the shell is high more, and sealing performance is better on the contrary, can satisfy the requirement of introducing the ion source with vacuum electrode.
Drawings
In order to make the purpose, technical scheme and beneficial effect of the utility model clearer, the utility model provides a following figure explains:
fig. 1 is a schematic structural view of an embodiment 1 of the sealing device of the present invention;
fig. 2 is a schematic structural diagram of an embodiment 2 of the ion source of the present invention;
FIG. 3 is a cross-sectional view of an ion source;
fig. 4 is a detail a of fig. 3.
Description of reference numerals:
1-a through hole; 1 a-a flaring section I; 1 b-an internal thread section I; 2-a workpiece; 3-a sealing ring I; 4-sealing the joint I; 5-sealing a pressing block I;
11-electrode introduction holes; 11 a-a flaring segment II; 11 b-internal thread section II; 12-high voltage line; 13-sealing ring II; 14-sealing joint II; 15-sealing briquetting II; 16-outer shell.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Example 1
As shown in fig. 1, is a schematic structural diagram of embodiment 1 of the sealing device of the present invention. The sealing device of the embodiment comprises a sealing mechanism I arranged between the through hole 1 and a workpiece 2 sleeved in the through hole 1. One end of the through hole 1 is provided with a flaring section I1 a, and the inner diameter of the flaring section I1 a is gradually reduced along the direction of the pointed end at the other end. The sealing mechanism I of this embodiment includes that the suit is on work piece 2 and lie in the sealing washer I3 of flaring section I1 a and be used for exerting to sealing washer I3 with the sealing hold-down mechanism I of the effect of the equidirectional effect of the direction that the internal diameter of flaring section I1 a reduces gradually.
Further, the inner wall of the flared section i 1a in this embodiment is a conical surface, and the taper angle of the flared section i 1a is 20 to 90 °, so that the parallel component of the force applied to the seal ring i 3 by the inner wall of the flared section i 1a is smaller than the vertical component, thereby increasing the sealing pressure between the seal ring i 3 and the workpiece 2, and improving the sealing performance. In particular, the parallel component force F1Fsin (θ/2), vertical component F2F is the force exerted by the inner wall of the flared section i 1a on the seal ring i 3, and θ is the taper angle of the flared section i 1 a. Therefore, the force applied to the sealing ring I3 by the sealing and pressing mechanism I is well balanced, and sufficient sealing pressure is provided between the sealing ring I3 and the workpiece 2.
Further, the through hole 1 of the present embodiment includes an internal thread section i 1b, and the internal thread section i 1b is located on a side where the direction of the gradually increasing inner diameter of the flared section i 1a is located; sealing hold-down mechanism I is equipped with sealed briquetting I5 including the suit on work piece 2 and with I1 b thread fit's of internal thread section sealing joint I4 between sealing joint I4 and the sealing washer I3. The force applied by the sealing pressing block I5 to the sealing ring I3 can be adjusted by adjusting the position of the sealing joint I4 in the internal thread section I1 b.
In the sealing device of the embodiment, the flaring section I is arranged at one end of the through hole and the inner diameter of the flaring section I is gradually changed, so that when the sealing and compressing mechanism I applies force to the sealing ring I in the same direction as the inner diameter of the sealing ring I is reduced, the sealing ring I deforms under the action of force and is tightly matched with a workpiece, on the other hand, the inner wall of the flaring section I applies pressure action vertical to the sealing ring I, the pressure action has vertical component force vertical to the axis of the through hole and parallel component force parallel to the axis of the through hole, the parallel component force is balanced with the force applied by the sealing and compressing mechanism I, the acting force between the sealing ring I and the workpiece which is equal to the vertical component force in magnitude and opposite in direction is used as balance force, namely, the force applied by the sealing and compressing mechanism I can be converted into sealing and combining force between the sealing ring I, and has the advantages of simple structure and small occupied installation space.
Example 2
Fig. 2 is a schematic structural diagram of an embodiment 2 of the ion source according to the present invention. The ion source of the embodiment comprises a housing 16 and a high-voltage pulse plate arranged in the housing 16, wherein the housing 16 is provided with a vacuum electrode introducing sealing device. Specifically, the vacuum electrode lead-in sealing device of the present embodiment includes a sealing mechanism ii disposed between the electrode lead-in hole 11 and the high voltage wire 12 sleeved in the electrode lead-in hole 11. In the embodiment, the outer end of the electrode introducing hole 11 is provided with a flaring section II 11a, and the inner diameter of the flaring section II 11a is gradually reduced along the direction from outside to inside; the sealing mechanism II comprises a sealing ring II 13 which is sleeved on the high-voltage wire 12 and is positioned in the flaring section II 11a and a sealing pressing mechanism II which is used for applying an inward force to the sealing ring II 13. An electrode introducing hole 11 is provided on the housing 16, and a high voltage wire 12 passes through the electrode introducing hole 11 and is connected to the high voltage pulse plate.
Further, the inner wall of the flared section II 11a of the present embodiment is a conical surface, and the taper angle of the flared section II 11a is 20-90 °. The parallel component of the force applied to the sealing ring II 13 by the inner wall of the flared section II 11a is smaller than the vertical component, so that the sealing pressure between the sealing ring II 13 and the high-voltage wire 12 is larger, and the sealing performance is improved. The force principle is the same as that of embodiment 1, and the description is not repeated.
Further, the electrode introducing hole 11 of the present embodiment includes an internal thread section ii 11b, the internal thread section ii 11b being located outside the flared section ii 11 a; the sealing and pressing mechanism II comprises a sealing joint II 14 which is sleeved on the high-voltage wire 12 and is in threaded fit with the internal thread section II 11b, and a sealing pressing block II 15 is arranged between the sealing joint II 14 and a sealing ring II 13. The sealing joint II 14 of the embodiment adopts a waterproof joint. The force applied by the sealing pressing block II 15 to the sealing ring II 13 can be conveniently adjusted by adjusting the position of the sealing joint II 14.
In the vacuum electrode introducing and sealing device of the embodiment, the flaring section II is arranged at the outer end of the electrode introducing hole, when the sealing and pressing mechanism II applies inward force to the sealing ring II, the sealing ring II is deformed under the action of force and is tightly matched with a workpiece, on the other hand, the inner wall of the flaring section II applies pressure action vertical to the sealing ring II, the pressure action has vertical component force vertical to the axis of the electrode introducing hole and parallel component force parallel to the axis of the electrode introducing hole, the parallel component force is balanced with the force applied by the sealing and pressing mechanism II, the acting force which is equal to the vertical component force and is opposite to the vertical component force is required between the sealing ring II and the workpiece as balance force, namely, the force applied by the sealing and pressing mechanism II can be converted into sealing and combining force between the sealing ring II and a high-voltage line, so as to achieve better sealing effect, and the vacuum electrode introducing and sealing device, the device has the advantages of simple structure and small occupied installation space.
In the ion source of the embodiment, the vacuum electrode is adopted to introduce the sealing device, in the use process, the inside of the shell is vacuumized, namely, a pressure difference is formed between the inside and the outside of the shell, the pressure difference acts on the sealing ring II, and inward pressure is applied to the sealing ring II, so that the sealing combination force between the sealing ring II and the high-voltage wire is further enhanced, the sealing combination force can also play a role of hooping the high-voltage wire, the outer skin and the inner core of the high-voltage wire are tightly attached, and the leakage inside the high-voltage wire is further avoided; that is, in the ion source of the present embodiment, the vacuum electrode is introduced into the sealing device, so that the sealing performance is better as the vacuum degree in the housing is higher, and the requirement for introducing the vacuum electrode into the ion source can be satisfied.
Note: the outer end of the electrode introduction aperture as described herein refers to the end of the electrode introduction aperture facing away from the interior chamber of the ion source.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (10)
1. The utility model provides a sealing device, establishes including setting up at through-hole (1) and cover sealing mechanism I between work piece (2) in through-hole (1), its characterized in that: one end of the through hole (1) is provided with a flaring section I (1a), and the inner diameter of the flaring section I (1a) is gradually reduced along the direction from the end where the flaring section I is located to the other end; sealing mechanism I is including the suit on work piece (2) and be located sealing washer I (3) in flaring section I (1a) and be used for to sealing washer I (3) apply with the effect of the equidirectional effect of direction that the internal diameter of flaring section I (1a) reduces gradually.
2. The sealing device of claim 1, wherein: the inner wall of the flaring section I (1a) is a conical surface.
3. The sealing device of claim 2, wherein: the taper angle of the flaring section I (1a) is 20-90 degrees.
4. A sealing device according to any one of claims 1 to 3, wherein: the through hole (1) comprises an internal thread section I (1b), and the internal thread section I (1b) is positioned on one side of the flaring section I (1a) in the direction of gradually increasing the inner diameter; sealing hold-down mechanism I including the suit on work piece (2) and with internal thread section I (1b) screw-thread fit's sealing joint I (4), sealing joint I (4) with be equipped with between sealing washer I (3) sealed briquetting I (5).
5. A vacuum electrode lead-in sealing device comprising a sealing mechanism ii provided between an electrode lead-in hole (11) and a high-voltage wire (12) fitted in said electrode lead-in hole (11), characterized in that: the outer end of the electrode introducing hole (11) is provided with a flaring section II (11a), and the inner diameter of the flaring section II (11a) is gradually reduced along the direction from outside to inside; the sealing mechanism II comprises a sealing ring II (13) which is sleeved on the high-voltage wire (12) and is positioned in the flaring section II (11a) and a sealing and pressing mechanism II which is used for applying an inward force to the sealing ring II (13).
6. The vacuum electrode lead-in seal of claim 5, wherein: the inner wall of the flaring section II (11a) is a conical surface.
7. The vacuum electrode lead-in seal of claim 6, wherein: the taper angle of the flaring section II (11a) is 20-90 degrees.
8. The sealing device according to any one of claims 5 to 7, wherein: the electrode introducing hole (11) comprises an internal thread section II (11b), and the internal thread section II (11b) is positioned on the outer side of the flaring section II (11 a); the sealing and pressing mechanism II comprises a sealing joint II (14) which is sleeved on the high-voltage wire (12) and is in threaded fit with the internal thread section II (11b), and a sealing pressing block II (15) is arranged between the sealing joint II (14) and the sealing ring II (13).
9. The sealing device of claim 8, wherein: and the sealing joint II (14) is a waterproof joint.
10. An ion source, characterized by: comprising a housing (16) and a high voltage pulse plate disposed in the housing (16), the housing (16) being provided with a vacuum electrode introducing sealing device according to any one of claims 5 to 9, the electrode introducing hole (11) being provided in the housing (16), and the high voltage wire (12) passing through the electrode introducing hole (11) and being connected to the high voltage pulse plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022207539.8U CN213655705U (en) | 2020-09-30 | 2020-09-30 | Sealing device, vacuum electrode introducing sealing device and ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022207539.8U CN213655705U (en) | 2020-09-30 | 2020-09-30 | Sealing device, vacuum electrode introducing sealing device and ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213655705U true CN213655705U (en) | 2021-07-09 |
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ID=76699145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022207539.8U Active CN213655705U (en) | 2020-09-30 | 2020-09-30 | Sealing device, vacuum electrode introducing sealing device and ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213655705U (en) |
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2020
- 2020-09-30 CN CN202022207539.8U patent/CN213655705U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 400037 1st-4th floor, building 30, No.6 Taikang Road, Zone C, Jianqiao Industrial Park, Dadukou District, Chongqing Patentee after: Zhongyuan Huiji Biotechnology Co.,Ltd. Address before: 400037 1st-4th floor, building 30, No.6 Taikang Road, Zone C, Jianqiao Industrial Park, Dadukou District, Chongqing Patentee before: CHONGQING ZHONGYUAN HUIJI BIOTECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |