CN213624366U - Air exhaust device of vacuum coating machine - Google Patents
Air exhaust device of vacuum coating machine Download PDFInfo
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- CN213624366U CN213624366U CN202022670173.8U CN202022670173U CN213624366U CN 213624366 U CN213624366 U CN 213624366U CN 202022670173 U CN202022670173 U CN 202022670173U CN 213624366 U CN213624366 U CN 213624366U
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- bottom plate
- spring
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- coating machine
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Abstract
The utility model belongs to the technical field of the coating film technique and specifically relates to an air exhaust device of vacuum coating machine, comprising a base plate, the bottom of bottom plate is connected with the bottom of every support column of a plurality of support column all is connected with the nut, all pegs graft on every support column and has installed the piece, all set up threaded hole on every installation piece, the upper end of every installation piece all is connected with first spring, first spring is located the outside of support column, the upper end of every first spring all connects the bottom plate, the upper end of bottom plate is connected with handles the case, the both sides of handling the case all are connected with first fixed plate, every first fixed plate all connects the bottom plate. The utility model discloses a produce vibrations after the aspiration pump work, the vibrations of production drive the bottom plate and rock, and the bottom plate is rocked the first spring of back extrusion, and first spring is produced elasticity after being extruded, and the elasticity of production slows down the motion trend of bottom plate, has reduced the intensity that the bottom plate rocked, and the junction fracture of having avoided intake pipe and vacuum coating machine leads to leaking gas.
Description
Technical Field
The utility model relates to a coating film technical field especially relates to a vacuum coating machine's air exhaust device.
Background
A vacuum coating machine is a device for coating materials under higher vacuum degree, and the specific coating method comprises vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and other various methods, and the main idea is to divide the vacuum ion evaporation into evaporation and sputtering. When the existing air extractor extracts air in a vacuum coating machine, the air extractor can generate certain vibration after working, so that the connection part of the air inlet pipe of the air extractor and the vacuum coating machine is always in a vibration state, and the connection part of the air inlet pipe and the vacuum coating machine is easy to crack to cause air leakage.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem that the joint of the air pipe and the vacuum coating machine in the prior art is cracked to cause air leakage, and providing an air extractor of the vacuum coating machine.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an air extracting device of a vacuum coating machine is designed, and comprises a bottom plate, wherein the upper end of the bottom plate is connected with an air extracting pump, the inlet of the air extracting pump is communicated with an air inlet pipe, the outlet of the air extracting pump is communicated with an air outlet pipe, the bottom end of the bottom plate is connected with a plurality of supporting columns, the bottom end of each supporting column is connected with a nut, each supporting column is inserted with a mounting block, each mounting block is provided with a threaded hole, the upper end of each mounting block is connected with a first spring, the first spring is positioned on the outer side of the supporting column, the upper end of each first spring is connected with the bottom plate, the upper end of the bottom plate is connected with a processing box, one end of the air outlet pipe is communicated with the processing box, the two sides of the processing box are connected with first fixing plates, each first fixing plate is connected with the bottom plate, the sealing plate is communicated with a dust screen.
Preferably, the bottom plate and the supporting column are of an integral structure.
Preferably, the mounting block is sprayed with an anticorrosive coating.
Preferably, the inside both sides of handling the case all are connected with the second fixed block, two be connected with the filter screen between the second fixed block, the screen panel has been placed in the processing case, the screen panel with the processing case cooperatees, the screen panel intussuseption is filled with filler, the screen panel is close to one side of closing plate is connected with the second spring, the one end of second spring is connected the closing plate.
Preferably, the filler is activated carbon particles.
The utility model provides a pair of vacuum coating machine's air exhaust device, beneficial effect lies in:
the suction pump generates vibration after working, the generated vibration drives the bottom plate to shake, the bottom plate extrudes the first spring after shaking, the first spring generates elasticity after being extruded, the generated elasticity slows down the movement trend of the bottom plate, the intensity of shaking of the bottom plate is reduced, and the air leakage caused by the cracking of the connection part of the air inlet pipe and the vacuum coating machine is avoided.
Drawings
FIG. 1 is a schematic structural view of an air extractor of a vacuum coater according to the present invention;
FIG. 2 is a schematic cross-sectional view of an air extractor of a vacuum coater according to the present invention;
fig. 3 is a schematic view of a connection structure between a first spring and an installation block in an air extractor of a vacuum coater.
In the figure: the device comprises a base plate 1, a support column 2, a nut 3, a first spring 4, a mounting block 5, a threaded hole 6, an air suction pump 7, an air inlet pipe 8, an air outlet pipe 9, a treatment box 10, a first fixing block 11, a sealing plate 12, a dust screen 13, a second fixing block 14, a filter screen 15, a mesh enclosure 16, a filler 17 and a second spring 18.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Example 1
Referring to fig. 1-3, an air extractor of vacuum coating machine comprises a bottom plate 1, wherein the upper end of the bottom plate 1 is connected with an air extracting pump 7, an inlet of the air extracting pump 7 is communicated with an air inlet pipe 8, an outlet of the air extracting pump 7 is communicated with an air outlet pipe 9, the bottom end of the bottom plate 1 is connected with a plurality of support columns 2, the bottom plate 1 and the support columns 2 are of an integrated structure, air in the vacuum coating machine is extracted through the air inlet pipe 8 after the air extracting pump 7 is started, and the extracted air is discharged through the air outlet pipe 9.
The bottom end of each supporting column 2 is connected with a nut 3, each supporting column 2 is inserted with a mounting block 5, an anticorrosive layer is sprayed on the mounting block 5, each mounting block 5 is provided with a threaded hole 6, the upper end of each mounting block 5 is connected with a first spring 4, the first spring 4 is positioned on the outer side of the supporting column 2, the upper end of each first spring 4 is connected with a bottom plate 1, the upper end of the bottom plate 1 is connected with a processing box 10, one end of an air outlet pipe 9 is communicated with the processing box 10, two sides of the processing box 10 are connected with first fixing plates 11, each first fixing plate 11 is connected with the bottom plate 1, one end of the processing box 10 far away from the air outlet pipe 9 is connected with a sealing plate 12, a dustproof net 13 is communicated on the sealing plate 12, the air pump 7 generates vibration after working, the generated vibration drives the bottom plate 1 to rock, the bottom plate 1 extrudes the first spring 4 after rocking, the generated elasticity slows down the movement trend of the bottom plate 1, reduces the shaking strength of the bottom plate 1 and avoids the air leakage caused by the cracking of the joint of the air inlet pipe 8 and the vacuum coating machine.
Example 2
Referring to fig. 1-3, as another preferred embodiment of the present invention, the inside both sides of handling case 10 all are connected with second fixed block 14 on embodiment 1's basis, be connected with filter screen 15 between two second fixed blocks 14, filter screen 15 is the activated carbon net, screen panel 16 has been placed in the processing case 10, screen panel 16 cooperatees with handling case 10, the intussuseption of screen panel 16 is filled with filler 17, filler 17 is the activated carbon granule, one side that screen panel 16 is close to closing plate 12 is connected with second spring 18, closing plate 12 is connected to the one end of second spring 18, the gas that gets into processing case 10 passes through filter screen 15, filter screen 15 disinfects gas, the gaseous rethread filler 17 through filter screen 15, filler 17 carries out secondary sterilization to gas, make the gas of emission not have the peculiar smell.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (5)
1. An air extracting device of a vacuum coating machine comprises a bottom plate (1), wherein the upper end of the bottom plate (1) is connected with an air extracting pump (7), an inlet of the air extracting pump (7) is communicated with an air inlet pipe (8), an outlet of the air extracting pump (7) is communicated with an air outlet pipe (9), the air extracting device is characterized in that the bottom end of the bottom plate (1) is connected with a plurality of supporting columns (2), the bottom end of each supporting column (2) is connected with a nut (3), each supporting column (2) is inserted with a mounting block (5), each mounting block (5) is provided with a threaded hole (6), the upper end of each mounting block (5) is connected with a first spring (4), the first spring (4) is positioned outside the supporting columns (2), the upper end of each first spring (4) is connected with the bottom plate (1), the upper end of the bottom plate (1) is connected with a processing box (10), one end of the air outlet pipe (9) is communicated with the treatment box (10), the two sides of the treatment box (10) are connected with first fixing plates (11), each first fixing plate (11) is connected with the bottom plate (1), one end of the treatment box (10) far away from the air outlet pipe (9) is connected with a sealing plate (12), and the sealing plate (12) is communicated with a dust screen (13).
2. The air extractor of vacuum coater according to claim 1, wherein said base plate (1) and said supporting column (2) are of an integral structure.
3. The air extractor of vacuum coater according to claim 1, wherein the mounting block (5) is coated with an anti-corrosion layer.
4. The air extractor of the vacuum coating machine according to claim 1, wherein two sides of the inside of the processing box (10) are connected with second fixing blocks (14), a filter screen (15) is connected between the two second fixing blocks (14), a mesh enclosure (16) is placed in the processing box (10), the mesh enclosure (16) is matched with the processing box (10), a filler (17) is filled in the mesh enclosure (16), one side of the mesh enclosure (16) close to the sealing plate (12) is connected with a second spring (18), and one end of the second spring (18) is connected with the sealing plate (12).
5. The air extractor of vacuum coater according to claim 4, wherein said filler (17) is activated carbon particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022670173.8U CN213624366U (en) | 2020-11-18 | 2020-11-18 | Air exhaust device of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022670173.8U CN213624366U (en) | 2020-11-18 | 2020-11-18 | Air exhaust device of vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213624366U true CN213624366U (en) | 2021-07-06 |
Family
ID=76634266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022670173.8U Active CN213624366U (en) | 2020-11-18 | 2020-11-18 | Air exhaust device of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213624366U (en) |
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2020
- 2020-11-18 CN CN202022670173.8U patent/CN213624366U/en active Active
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