CN213616102U - Efficient dust and waste gas collecting and treating device - Google Patents

Abstract

The application relates to the technical field of waste gas treatment, in particular to waste gas treatment equipment for efficiently collecting and treating polishing dust, which comprises a filtering chamber, wherein the filtering chamber is arranged on one side of a workshop and comprises a filtering inlet communicated with the workshop and a filtering outlet for outputting filtered waste gas; one end of the upper air channel is communicated with a filtering outlet of the filtering chamber, and the other end of the upper air channel is communicated with a workshop; the first air draft device is arranged at the air inlet end of the upper ventilating duct so as to drive waste gas in a workshop to pass through the filtering chamber; and the second air draft device is arranged at the middle part of the upper ventilating duct, and the air draft of the second air draft device is less than that of the first air draft device and is used for shunting the waste gas filtered by the filter chamber. The application provides a high-efficient collection and processing dust exhaust-gas treatment equipment of polishing can realize the gaseous inner loop in workshop and extrinsic cycle simultaneously, has purified the waste gas in workshop effectively, greatly reduced the pollutant concentration in workshop.

Description

Efficient dust and waste gas collecting and treating device

[ technical field ] A method for producing a semiconductor device

The utility model relates to an exhaust-gas treatment technical field especially relates to a dust exhaust-gas treatment equipment of polishing is collected and is handled to high efficiency.

[ background of the invention ]

Because the grinding can produce a large amount of floating dust particles, pollute the air on every side, consequently, in the workshop of polishing, although the staff wears dustproof protective equipment and has done personal protection, the air can cause wider pollution if the workshop of effusion outward, moreover, the too high life that also can consume the protective equipment too fast of dust concentration in the workshop, need take the pollution degree that the measure reduced the workshop.

[ summary of the invention ]

An object of the application is to provide a high-efficient collection and processing dust exhaust-gas treatment equipment of polishing, the dust exhaust-gas that produces in the workshop of polishing gets back to in the workshop after last ventiduct after the filter chamber filters, wherein, first updraft ventilator's induced draft is greater than the updraft ventilator of second updraft ventilator, consequently, second updraft ventilator can shunt the outside with the partly gas after filtering in the last ventiduct, all the other gas after filtering just flow back to in the workshop, can realize gaseous inner loop and extrinsic cycle in workshop simultaneously, the waste gas in workshop has been purified effectively, greatly reduced the pollutant concentration in workshop.

The application is realized by the following technical scheme:

the utility model provides a high-efficient collection and processing dust exhaust-gas treatment equipment of polishing, is applied to the workshop of polishing, includes:

the filtering chamber is arranged on one side of the workshop and comprises a filtering inlet communicated with the workshop and a filtering outlet for outputting filtered waste gas;

one end of the upper air channel is communicated with a filtering outlet of the filtering chamber, and the other end of the upper air channel is communicated with a workshop;

the first air draft device is arranged at the air inlet end of the upper ventilating duct so as to drive waste gas in a workshop to pass through the filtering chamber;

and the second air draft device is arranged at the middle part of the upper ventilating duct, and the air draft of the second air draft device is less than that of the first air draft device and is used for shunting the waste gas filtered by the filter chamber.

The above-described apparatus for efficiently collecting and treating exhaust gas from polishing dust, the filter chamber comprising:

a filter chamber;

a filter element located within the filter cavity;

the air storage tank is communicated with the filter element through an air pipe;

and the pulse valve is arranged on the air pipe.

The grinding dust waste gas treatment equipment is characterized in that the end, communicated with a workshop, of the upper air duct is far away from the filter chamber.

The efficient dust and waste gas collecting and treating device further comprises an air inlet curtain, wherein the air inlet curtain is arranged on one side of a workshop and is opposite to the filtering chamber.

The efficient grinding dust collecting and processing waste gas treatment equipment further comprises a workshop clapboard, wherein the workshop clapboard is arranged at the top of the workshop at intervals so as to form the upper air duct with the top surface of the workshop.

According to the high-efficiency dust collecting and polishing waste gas treatment equipment, a plurality of explosion-proof lamps are arranged below the workshop partition plate.

Compared with the prior art, the method has the following advantages:

1. the dust waste gas that the workshop produced of polishing gets back to in the workshop behind last ventiduct after the filter chamber filters, wherein, first updraft ventilator's induced draft volume is greater than the induced draft of second updraft ventilator, consequently, second updraft ventilator can be with the gas after partly filtration in the last ventiduct reposition of redundant personnel to the outside, all the other gases after filtering just flow back to in the workshop, can realize gaseous inner loop and the extrinsic cycle in workshop simultaneously, the waste gas in workshop has been purified effectively, greatly reduced the pollutant concentration in workshop.

2. The filter chamber can provide pulse type power, so that dust and waste gas in a workshop intermittently and rapidly pass through the filter element, and the problem of poor filter effect caused by the fact that the dust and waste gas are always attached to the surface of the filter element is prevented.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic structural diagram of an exhaust gas treatment device for efficiently collecting and treating grinding dust according to an embodiment of the present application.

[ detailed description ] embodiments

In order to make the technical problems, technical solutions and advantageous effects solved by the present application more clear and obvious, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

As shown in fig. 1, the embodiment of the present application provides a high-efficient collection and processing grinding dust exhaust-gas treatment device, is applied to the workshop of polishing, includes: the filtering chamber 1 is arranged on one side of a workshop, and the filtering chamber 1 comprises a filtering inlet 11 communicated with the workshop and a filtering outlet 12 for outputting filtered waste gas; an upper air duct 3, one end of which is communicated with the filtering outlet 12 of the filtering chamber 1, and the other end of which is communicated with a workshop; the first air draft device 4 is arranged at the air inlet end of the upper ventilating duct 3 so as to drive waste gas in a workshop to pass through the filtering chamber 1; and the second air draft device 5 is arranged in the middle of the upper ventilation flue 3, and the air draft of the second air draft device 5 is smaller than that of the first air draft device 4 and is used for shunting the waste gas filtered by the filter chamber 1. Specifically, a workshop partition 31 is provided at a space on the top of the workshop to form the upper air duct 3 with the top surface of the workshop. In order to ensure the ambient brightness of workshop operation, a plurality of explosion-proof lamps 32 are arranged below the workshop partition plate 31. In addition, the first air draft device 4 and the second air draft device 5 can respectively select exhaust fans with different powers.

During operation, the dust waste gas that the workshop produced of polishing is got back to in the workshop behind last ventiduct 3 after 1 filtration of filter chamber, wherein, the induced draft volume of first updraft ventilator 4 is greater than the amount of air draft of state second updraft ventilator 5, consequently, second updraft ventilator 5 can be with the gas after partly filtration in last ventiduct 3 reposition of redundant personnel to the outside, all the other gas after the filtration just flow back to in the workshop, can realize gaseous internal circulation and the extrinsic cycle in workshop simultaneously, the waste gas in workshop has been purified effectively, greatly reduced the pollutant concentration in workshop.

Accordingly, the filtering chamber 1 comprises: a filter chamber 13; a filter element 14 located within the filter chamber 13; an air tank 15 communicated with the filter element 14 through an air pipe 17; and the pulse valve 16 is arranged on the air pipe 17. Wherein, the gas storage tank 15 provides the storage gas source for the pulse valve, and the pulse valve 16 provides pulsed power, makes the dust waste gas in the workshop pass through the filter core 14 intermittently and rapidly, prevents to hug closely because of dust waste gas and causes the filter effect not good at the filter core 14 surface all the time.

More preferably, the end of the upper air duct 3 communicating with the workshop is far away from the filtering chamber 1. To drive a greater range of air flow within the plant.

High-efficient collection and handle dust exhaust-gas treatment equipment of polishing still include the curtain 2 that hangs down of air inlet, the curtain 2 that hangs down of air inlet locate one side in workshop and with filter chamber 1 sets up relatively. Set up the staff business turn over and ventilate of being convenient for on the one hand of the curtain 2 that hangs down of air inlet, on the other hand, first updraft ventilator 4 during operation, the inside negative pressure that produces in workshop, outside air realizes the extrinsic cycle from the curtain 2 entering workshop that hangs down of air inlet.

In summary, the present application has, but is not limited to, the following beneficial effects:

1. dust waste gas that the workshop produced of polishing gets back to in the workshop through last ventiduct 3 after 1 filtration of filter chamber, wherein, the induced draft volume of first updraft ventilator 4 is greater than the induced draft volume of saying second updraft ventilator 5, consequently, second updraft ventilator 5 can be with the gas after partly filtration in last ventiduct 3 reposition of redundant personnel outside, all the other gases after filtering just flow back to in the workshop, can realize gaseous inner loop and the extrinsic cycle in workshop simultaneously, the waste gas in workshop has been purified effectively, greatly reduced the pollutant concentration in workshop.

2. The filter chamber 1 can provide pulse type power, so that dust and waste gas in a workshop intermittently and rapidly pass through the filter element 14, and the problem of poor filtering effect caused by the fact that the dust and waste gas are always attached to the surface of the filter element 14 is prevented.

It should be understood that the terms "first", "second", etc. are used herein to describe various information, but the information should not be limited to these terms, and these terms are only used to distinguish one type of information from another. For example, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information, without departing from the scope of the present application. Furthermore, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not intended to limit the disclosure to the particular forms disclosed. Similar or identical methods, structures, etc. as used herein, or several technical inferences or substitutions made on the concept of the present application should be considered as the scope of the present application.

Claims (6)

1. The utility model provides a high-efficient collection and processing dust exhaust-gas treatment equipment of polishing is applied to the workshop of polishing, its characterized in that includes:

the filtering chamber (1) is arranged on one side of the workshop, and the filtering chamber (1) comprises a filtering inlet (11) communicated with the workshop and a filtering outlet (12) for outputting filtered waste gas;

one end of the upper air duct (3) is communicated with a filtering outlet (12) of the filtering chamber (1), and the other end of the upper air duct is communicated with a workshop;

the first air draft device (4) is arranged at the air inlet end of the upper ventilating duct (3) to drive waste gas in a workshop to pass through the filtering chamber (1);

and the second air draft device (5) is arranged in the middle of the upper ventilation flue (3), and the air draft quantity of the second air draft device (5) is smaller than that of the first air draft device (4) and is used for shunting the waste gas filtered by the filter chamber (1).

2. An efficient dust collecting and treating exhaust gas treatment apparatus according to claim 1, characterized in that said filtering chamber (1) comprises:

a filter chamber (13);

a filter element (14) located within the filter chamber (13);

an air tank (15) communicated with the filter element (14) through an air pipe (17);

and the pulse valve (16) is arranged on the air pipe (17).

3. An efficient dust collecting and treating exhaust gas treatment apparatus according to claim 1, characterized in that the end of said upper air duct (3) communicating with the workshop is remote from said filter chamber (1).

4. The waste gas treatment equipment for collecting and processing grinding dust with high efficiency as claimed in any one of claims 1-3, characterized by further comprising an air inlet curtain (2), wherein the air inlet curtain (2) is arranged on one side of the workshop and is opposite to the filter chamber (1).

5. The exhaust gas treatment equipment for collecting and treating grinding dust with high efficiency according to any one of claims 1 to 3, further comprising a workshop partition (31), wherein the workshop partition (31) is provided at the top of the workshop at intervals to form the upper air duct (3) with the top surface of the workshop.

6. The exhaust gas treatment equipment for collecting and treating grinding dust with high efficiency as claimed in claim 5, wherein a plurality of explosion-proof lamps (32) are arranged below the workshop clapboard (31).

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